JP2014236220A - バッチ反応器中での環状窒化アルミニウム蒸着 - Google Patents
バッチ反応器中での環状窒化アルミニウム蒸着 Download PDFInfo
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- JP2014236220A JP2014236220A JP2014104529A JP2014104529A JP2014236220A JP 2014236220 A JP2014236220 A JP 2014236220A JP 2014104529 A JP2014104529 A JP 2014104529A JP 2014104529 A JP2014104529 A JP 2014104529A JP 2014236220 A JP2014236220 A JP 2014236220A
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- 230000008021 deposition Effects 0.000 title claims abstract description 116
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 52
- 238000000151 deposition Methods 0.000 claims abstract description 128
- 239000002243 precursor Substances 0.000 claims abstract description 108
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 86
- 238000000034 method Methods 0.000 claims abstract description 80
- 230000008569 process Effects 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 63
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 51
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 43
- 238000010923 batch production Methods 0.000 claims abstract description 27
- 239000004065 semiconductor Substances 0.000 claims abstract description 20
- 238000010926 purge Methods 0.000 claims description 27
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 5
- 229910002601 GaN Inorganic materials 0.000 claims description 4
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical class Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 claims description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine group Chemical group NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 125000005234 alkyl aluminium group Chemical group 0.000 claims description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 3
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 238000011065 in-situ storage Methods 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 238000005137 deposition process Methods 0.000 abstract description 5
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 15
- 239000010410 layer Substances 0.000 description 11
- 230000005764 inhibitory process Effects 0.000 description 10
- 238000002161 passivation Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 238000002207 thermal evaporation Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013110 organic ligand Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- JGHYBJVUQGTEEB-UHFFFAOYSA-M dimethylalumanylium;chloride Chemical compound C[Al](C)Cl JGHYBJVUQGTEEB-UHFFFAOYSA-M 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 150000002429 hydrazines Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
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- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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Abstract
Description
・基板をアルミニウム前駆体パルスに曝す工程、
・プロセスチャンバーからアルミニウム前駆体を除去する工程、
・基板を窒素前駆体パルスに曝す工程、および
・プロセスチャンバーから窒素前駆体を除去する工程。
Claims (27)
- 高温壁プロセスチャンバーを有するバッチ加熱炉を提供する工程、
前記プロセスチャンバー内に複数の基板を充填する工程、
前記プロセスチャンバー内で複数の蒸着サイクルを実行する工程、
を含む窒化アルミニウムフィルムを蒸着するプロセスであって、各蒸着サイクルが、
アルキルアルミニウム化合物、アルキル置換塩化アルミニウム化合物、およびアルキル置換水素化アルミニウム化合物からなる群から選択されるアルミニウム前駆体パルスに前記基板を曝す工程、
前記基板から離れて前記アルミニウム前駆体をパージする工程、
窒素前駆体パルスに前記基板を曝す工程、および
前記複数の基板から離れて、前記窒素前駆体をパージする工程、を含み、
ここで、前記サイクルの少なくともいくつかは、約300℃〜約375℃の蒸着温度で実行される、窒化アルミニウムフィルムを蒸着するプロセス。 - 前記蒸着温度が時間とともに減少する、請求項1に記載のプロセス。
- 前記蒸着温度が、蒸着サイクルの第一セットの間約350℃±約25℃の第一の値であり、および蒸着サイクルの後続セットの間約300℃±約25℃の第二の値である、請求項2に記載のプロセス。
- 前記プロセスチャンバーにおける蒸着圧力が1Torr未満である、請求項1に記載のプロセス。
- 前記アルミニウム前駆体パルスの継続期間が約3秒以上である、請求項1に記載のプロセス。
- 前記アルミニウム前駆体パルスの継続期間が約5秒〜約10秒である、請求項6に記載のプロセス。
- 前記窒素前駆体パルスの継続期間が約3秒以上である、請求項5に記載のプロセス。
- 前記窒素前駆体パルスの継続期間が約10秒以上である、請求項7に記載のプロセス。
- 前記窒素前駆体パルスの継続期間が第一期間の間の第一の値であり、第二期間の間に第二の値に減少する、請求項7に記載のプロセス。
- 前記基板から離れて前記アルミニウム前駆体をパージする工程が約1秒以上の間実行される、請求項1に記載のプロセス。
- 前記基板から離れて前記窒素駆体をパージする工程が約7秒以上の間実行される、請求項1に記載のプロセス。
- 前記窒素前駆体がNH3である、請求項1に記載のプロセス。
- 前記窒素前駆体がヒドラジンである、請求項1に記載のプロセス。
- バッチプロセスチャンバー内に複数の半導体基板を提供する工程、
複数の蒸着サイクルを実行することにより、前記バッチプロセスチャンバーにおける前記半導体基板上に窒化アルミニウム層を蒸着する工程、
を含む窒化アルミニウムを蒸着するプロセスであって、
各蒸着サイクルが、
前記バッチプロセスチャンバー内にアルミニウム前駆体パルスをフローする工程、
前記バッチプロセスチャンバーからアルミニウム前駆体を除去する工程、
その後、前記バッチプロセスチャンバー内に窒素前駆体パルスをフローする工程、ならびに
前記窒素前駆体をフローする工程後かつ前記アルミニウム前駆体の別パルスをフローする工程前に前記バッチプロセスチャンバーから窒素前駆体を除去する工程、を含み、
ここで、前記半導体基板は、前記蒸着サイクルの間、プラズマに曝されない、窒化アルミニウムを蒸着するプロセス。 - 前記プロセスチャンバーが高温壁プロセスチャンバーである、請求項14に記載のプロセス。
- 前記窒化アルミニウム層を蒸着するための蒸着圧力が、約100〜約700mTorrである、請求項15に記載のプロセス。
- 前記窒化アルミニウム層が、前記半導体基板にわたって、1σ=0.25%以下の不均一を有する、請求項14に記載のプロセス。
- 前記複数の蒸着サイクルを実行する初期期間の間の蒸着温度が、前記複数の蒸着サイクルを実行する後続期間の間の蒸着温度より少なくとも約25℃高い、請求項14に記載のプロセス。
- 前記初期期間の間の蒸着温度が、前記後続期間の間の蒸着温度より少なくとも約50℃高い、請求項18に記載のプロセス。
- 前記初期期間の間の蒸着温度が約350℃±約25℃であり、前記後続期間の間の蒸着温度が約300℃±約25℃である、請求項18に記載のプロセス。
- 前記窒素前駆体をパージする継続期間が、前記アルミニウム前駆体をパージする継続期間の少なくとも約1.5倍である、請求項14に記載のプロセス。
- 前記アルミニウム前駆体を除去する工程と前記窒素前駆体を除去する工程が、前記バッチプロセスチャンバーをパージする工程を含む、請求項14に記載のプロセス。
- 前記半導体基板が窒化ガリウムを含み、前記窒化アルミニウム層が、前記窒化ガリウムに蒸着される、請求項14に記載のプロセス。
- 前記窒化アルミニウム層上にゲート誘電体を形成する工程をさらに含む、請求項23に記載のプロセス。
- 前記ゲート誘電体が、酸化ケイ素(SiO2)、酸化ジルコニウム(ZrO2)、酸化ハフニウム(HfO2)、酸化アルミニウム(Al2O3)、またはこれらの組み合わせを含む、請求項24に記載のプロセス。
- 前記組み合わせが2層もしくは3層またはナノラミネートであり、前記2層もしくは3層またはナノラミネートの各層が、酸化ケイ素(SiO2)、酸化ジルコニウム(ZrO2)、酸化ハフニウム(HfO2)、または酸化アルミニウム(Al2O3)の1つを含む、請求項25に記載のプロセス。
- 前記ゲート誘電体を形成する工程が、前記プロセスチャンバーの中でインシチュで実行される、請求項24に記載のプロセス。
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JP6370103B2 (ja) | 2018-08-08 |
US20140357090A1 (en) | 2014-12-04 |
TWI605147B (zh) | 2017-11-11 |
US9552979B2 (en) | 2017-01-24 |
KR20140141521A (ko) | 2014-12-10 |
KR102026826B1 (ko) | 2019-11-04 |
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