JP2014041897A5 - - Google Patents

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Publication number
JP2014041897A5
JP2014041897A5 JP2012182964A JP2012182964A JP2014041897A5 JP 2014041897 A5 JP2014041897 A5 JP 2014041897A5 JP 2012182964 A JP2012182964 A JP 2012182964A JP 2012182964 A JP2012182964 A JP 2012182964A JP 2014041897 A5 JP2014041897 A5 JP 2014041897A5
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JP
Japan
Prior art keywords
substrate
swing
detection roller
magnet
fulcrum
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Application number
JP2012182964A
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English (en)
Japanese (ja)
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JP2014041897A (ja
JP6000019B2 (ja
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Priority to JP2012182964A priority Critical patent/JP6000019B2/ja
Priority claimed from JP2012182964A external-priority patent/JP6000019B2/ja
Priority to KR1020130093094A priority patent/KR101473107B1/ko
Priority to TW102129802A priority patent/TWI494260B/zh
Priority to CN201310364328.7A priority patent/CN103633000B/zh
Publication of JP2014041897A publication Critical patent/JP2014041897A/ja
Publication of JP2014041897A5 publication Critical patent/JP2014041897A5/ja
Application granted granted Critical
Publication of JP6000019B2 publication Critical patent/JP6000019B2/ja
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JP2012182964A 2012-08-22 2012-08-22 基板処理装置 Active JP6000019B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012182964A JP6000019B2 (ja) 2012-08-22 2012-08-22 基板処理装置
KR1020130093094A KR101473107B1 (ko) 2012-08-22 2013-08-06 기판 처리 장치
TW102129802A TWI494260B (zh) 2012-08-22 2013-08-20 Substrate processing device
CN201310364328.7A CN103633000B (zh) 2012-08-22 2013-08-20 基板处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012182964A JP6000019B2 (ja) 2012-08-22 2012-08-22 基板処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014184103A Division JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

Publications (3)

Publication Number Publication Date
JP2014041897A JP2014041897A (ja) 2014-03-06
JP2014041897A5 true JP2014041897A5 (zh) 2015-10-01
JP6000019B2 JP6000019B2 (ja) 2016-09-28

Family

ID=50213886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012182964A Active JP6000019B2 (ja) 2012-08-22 2012-08-22 基板処理装置

Country Status (4)

Country Link
JP (1) JP6000019B2 (zh)
KR (1) KR101473107B1 (zh)
CN (1) CN103633000B (zh)
TW (1) TWI494260B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD800083S1 (en) 2015-02-23 2017-10-17 Samsung Electronics Co., Ltd. Electronic device
CN105107776B (zh) * 2015-08-24 2017-06-27 京东方科技集团股份有限公司 检测装置及工件清洗设备
CN105865495B (zh) * 2016-06-20 2017-12-01 武汉华星光电技术有限公司 位置检知装置
JP7148289B2 (ja) * 2018-06-20 2022-10-05 芝浦メカトロニクス株式会社 基板検出装置及び基板処理装置
CN109142388B (zh) * 2018-08-01 2021-04-13 京东方科技集团股份有限公司 基板检测器、驱动装置以及基板清洁设备
JP6857682B2 (ja) * 2019-03-29 2021-04-14 芝浦メカトロニクス株式会社 基板処理装置
USD959424S1 (en) 2020-02-26 2022-08-02 Samsung Electronics Co., Ltd. Mobile telephone

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0737285B2 (ja) * 1993-02-22 1995-04-26 吉田車輌機器株式会社 荷検出装置
JPH10265026A (ja) * 1997-03-25 1998-10-06 Hitachi Electron Eng Co Ltd ワーク通過検出装置
JPH1111640A (ja) * 1997-06-30 1999-01-19 Okamura Corp ローラコンベヤにおける搬送物検出装置
JP2001057355A (ja) * 1999-08-19 2001-02-27 Dainippon Screen Mfg Co Ltd 基板検出装置および基板処理装置
JP2002110004A (ja) * 2000-09-29 2002-04-12 Nippon Kentetsu Co Ltd 通過検出スイッチ
JP2003128244A (ja) * 2001-10-30 2003-05-08 Sumitomo Precision Prod Co Ltd 基板検出装置及び基板処理設備
TW200420480A (en) * 2003-04-04 2004-10-16 Mosel Vitelic Inc Wafer transmission system with sensor
TWM259245U (en) * 2004-05-28 2005-03-11 Jing Bo Technology Co Ltd Magnetically swinging counting controller and resetting structure
JP2007066985A (ja) * 2005-08-29 2007-03-15 Shibaura Mechatronics Corp 基板の検出装置及び処理装置
KR20070048483A (ko) * 2005-11-04 2007-05-09 세메스 주식회사 기판을 처리하는 장치 및 기판을 처리하는 방법
KR101071174B1 (ko) * 2008-11-26 2011-10-10 에프엔에스테크 주식회사 기판 감지장치
JP2010133884A (ja) * 2008-12-08 2010-06-17 Sharp Corp 振り子センサ
CN102253505B (zh) * 2010-05-20 2013-04-03 北京京东方光电科技有限公司 基板位置检测方法及装置

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