JP2014041897A5

JP2014041897A5 -

Info

Publication number: JP2014041897A5
Application number: JP2012182964A
Authority: JP
Filing date: 2012-08-22
Publication date: 2015-10-01
Anticipated expiration: 2032-08-22

Description

本発明の実施形態に係る基板処理装置は、搬送される基板の有無を検出する基板検出装置を有する基板処理装置であって、前記基板検出装置は、基部と、前記基部に対して揺動自在に取り付けられている揺動部材と、前記揺動部材の一端部に設けられ、搬送される前記基板に当てる検出ローラと、前記揺動部材の他端部に設けられているウエイトとマグネットと、搬送される前記基板が前記検出ローラを押し下げて、前記基板が前記検出ローラに当たる前の前記揺動部材の初期位置から前記揺動部材が回転方向へ回転すると、前記マグネットが発生している磁界の変化を検出して前記基板を検出したことを示す検出信号を出す検出センサと、前記揺動部材の前記初期位置では、前記揺動部材を前記基板の搬送方向と交差する垂直線に対して傾斜して保持する揺動ストッパと、を備え、前記揺動部材の揺動支点から上の部分であって、前記検出ローラまでの重量をＷ１、前記揺動部材の揺動支点から下の部分であって、前記マグネットと前記ウエイトまでの重量をＷ２、前記検出ローラが前記基板を検出する際に、前記検出ローラが基板から受ける突き上げ反力をＷ０、前記揺動支点から前記検出ローラの回転中心までの距離をＬ１、前記揺動支点から前記マグネットまでの距離をＬ２としたときに、（ＷＯ＋Ｗ１）×Ｌ１＞Ｗ２×Ｌ２、かつ、Ｗ１×Ｌ１＜Ｗ２×Ｌ２であることを特徴とする。 The substrate processing apparatus which concerns on embodiment of this invention is a substrate processing apparatus which has a substrate detection apparatus which detects the presence or absence of the board | substrate conveyed, Comprising: The said substrate detection apparatus is rockable with respect to the said base and the said base. A swing member attached to the swing member, a detection roller that is provided at one end of the swing member and is applied to the substrate to be conveyed, a weight and a magnet that are provided at the other end of the swing member, When the substrate being conveyed pushes down the detection roller and the swinging member rotates in the rotation direction from the initial position of the swinging member before the substrate hits the detection roller, the magnetic field generated by the magnet is reduced. A detection sensor that detects a change and detects a detection of the substrate; and at the initial position of the swing member, the swing member is tilted with respect to a vertical line that intersects the transport direction of the substrate. And a swing stopper for holding and, a portion above the fulcrum of the swinging member, the weight of up to the detection roller W1, in the lower part of the swing fulcrum of the swing member W2 represents the weight between the magnet and the weight, W0 represents the thrust reaction force received by the detection roller from the substrate when the detection roller detects the substrate, and the rotation center of the detection roller from the swing fulcrum the distance to the L1, the distance from the rocking fulcrum to said magnet is taken as L2, and (WO + W1) × L1> W2 × L2 and,, W1 × L1 <W2 × L2 der wherein Rukoto .

Claims

A substrate processing apparatus having a substrate detection device for detecting the presence or absence of a substrate to be transported,
The substrate detection device includes:
The base,
A swinging member that is swingably attached to the base,
A detection roller provided at one end of the swinging member and applied to the substrate to be conveyed;
A weight and a magnet provided at the other end of the swing member;
When the substrate being conveyed pushes down the detection roller and the swinging member rotates in the rotation direction from the initial position of the swinging member before the substrate hits the detection roller, the magnetic field generated by the magnet is reduced. A detection sensor that detects a change and outputs a detection signal indicating that the substrate has been detected;
A rocking stopper that holds the rocking member at an inclination with respect to a vertical line that intersects the transport direction of the substrate at the initial position of the rocking member;
Equipped with a,
The portion above the swing fulcrum of the swing member, the weight to the detection roller is W1,
A portion below the swing fulcrum of the swing member, and the weight between the magnet and the weight is W2,
When the detection roller detects the substrate, the thrust reaction force received by the detection roller from the substrate is W0,
The distance from the swing fulcrum to the rotation center of the detection roller is L1,
When the distance from the swing fulcrum to the magnet is L2,
(WO + W1) × L1> W2 × L2 and,, W1 × L1 <substrate processing apparatus according to claim W2 × L2 der Rukoto.

The swing member has a first portion formed along the vertical line, and a second portion formed so as to be inclined from the first portion to the rotation direction side with respect to the vertical line. And
The substrate processing apparatus according to claim 1, wherein the detection roller is provided at an end of the second portion, and the weight and the magnet are provided at an end of the first portion.

The swing stopper substrate processing apparatus according to claim 2, characterized in that said first portion is held by inclined with respect to the vertical line.

The way TMG, substrate according to the oscillating member in an initial position before KiYurado member to claim 2 or 3, characterized in that it has an additional weight for pressing the rocking stopper side Processing equipment.

  The swinging member is provided so as to be swingable around a swinging fulcrum member that is the swinging fulcrum,
  The detection roller is provided at one end of the swing member by an attachment shaft portion;
  2. The substrate processing according to claim 1, wherein a distance between the attachment shaft portion and the swing fulcrum member is set shorter than a distance between the swing fulcrum member and the magnet. apparatus.

2. The substrate processing apparatus according to claim 1, wherein the swing stopper holds the swing member in an inclined range with respect to the vertical line within a range of 30 degrees to 50 degrees.