TW200420480A - Wafer transmission system with sensor - Google Patents
Wafer transmission system with sensorInfo
- Publication number
- TW200420480A TW200420480A TW92107833A TW92107833A TW200420480A TW 200420480 A TW200420480 A TW 200420480A TW 92107833 A TW92107833 A TW 92107833A TW 92107833 A TW92107833 A TW 92107833A TW 200420480 A TW200420480 A TW 200420480A
- Authority
- TW
- Taiwan
- Prior art keywords
- connecting link
- flexible connecting
- sensor
- roller
- wafer
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A wafer transmission system with a sensor is used to deliver a wafer in and out of a process region, and at least includes: an active wheel, a passive wheel, a roll, a flexible connecting link, a transmission belt, a pinch roller, and a sensor. The flexible connecting link connects the active wheel with the passive wheel. The active wheel uses the flexible connecting link to drive the passive wheel and the roller to turn. The pinch roller tightly presses a conveyor on the roller. The conveyor is driven by the roller and the passive pinch roller in order to deliver a wafer in and out of a process region. The sensor is installed on a fixed location capable of detecting the flexible connecting link for detecting the status of the flexible connecting link, in which the sensor outputs an alarm signal when the flexible connecting link is at a broken status.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107833A TW200420480A (en) | 2003-04-04 | 2003-04-04 | Wafer transmission system with sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107833A TW200420480A (en) | 2003-04-04 | 2003-04-04 | Wafer transmission system with sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200420480A true TW200420480A (en) | 2004-10-16 |
Family
ID=52340982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92107833A TW200420480A (en) | 2003-04-04 | 2003-04-04 | Wafer transmission system with sensor |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200420480A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103633000A (en) * | 2012-08-22 | 2014-03-12 | 芝浦机械电子株式会社 | Substrate processing device |
-
2003
- 2003-04-04 TW TW92107833A patent/TW200420480A/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103633000A (en) * | 2012-08-22 | 2014-03-12 | 芝浦机械电子株式会社 | Substrate processing device |
CN103633000B (en) * | 2012-08-22 | 2016-05-04 | 芝浦机械电子株式会社 | Substrate board treatment |
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