TW200420480A - Wafer transmission system with sensor - Google Patents

Wafer transmission system with sensor

Info

Publication number
TW200420480A
TW200420480A TW92107833A TW92107833A TW200420480A TW 200420480 A TW200420480 A TW 200420480A TW 92107833 A TW92107833 A TW 92107833A TW 92107833 A TW92107833 A TW 92107833A TW 200420480 A TW200420480 A TW 200420480A
Authority
TW
Taiwan
Prior art keywords
connecting link
flexible connecting
sensor
roller
wafer
Prior art date
Application number
TW92107833A
Other languages
Chinese (zh)
Inventor
Chung-Hsin Lu
Shao-Chieh Chang
Original Assignee
Mosel Vitelic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mosel Vitelic Inc filed Critical Mosel Vitelic Inc
Priority to TW92107833A priority Critical patent/TW200420480A/en
Publication of TW200420480A publication Critical patent/TW200420480A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A wafer transmission system with a sensor is used to deliver a wafer in and out of a process region, and at least includes: an active wheel, a passive wheel, a roll, a flexible connecting link, a transmission belt, a pinch roller, and a sensor. The flexible connecting link connects the active wheel with the passive wheel. The active wheel uses the flexible connecting link to drive the passive wheel and the roller to turn. The pinch roller tightly presses a conveyor on the roller. The conveyor is driven by the roller and the passive pinch roller in order to deliver a wafer in and out of a process region. The sensor is installed on a fixed location capable of detecting the flexible connecting link for detecting the status of the flexible connecting link, in which the sensor outputs an alarm signal when the flexible connecting link is at a broken status.
TW92107833A 2003-04-04 2003-04-04 Wafer transmission system with sensor TW200420480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92107833A TW200420480A (en) 2003-04-04 2003-04-04 Wafer transmission system with sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92107833A TW200420480A (en) 2003-04-04 2003-04-04 Wafer transmission system with sensor

Publications (1)

Publication Number Publication Date
TW200420480A true TW200420480A (en) 2004-10-16

Family

ID=52340982

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92107833A TW200420480A (en) 2003-04-04 2003-04-04 Wafer transmission system with sensor

Country Status (1)

Country Link
TW (1) TW200420480A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103633000A (en) * 2012-08-22 2014-03-12 芝浦机械电子株式会社 Substrate processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103633000A (en) * 2012-08-22 2014-03-12 芝浦机械电子株式会社 Substrate processing device
CN103633000B (en) * 2012-08-22 2016-05-04 芝浦机械电子株式会社 Substrate board treatment

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