JP2013110380A - 酸化物半導体膜の作製方法、半導体装置の作製方法及び半導体装置 - Google Patents
酸化物半導体膜の作製方法、半導体装置の作製方法及び半導体装置 Download PDFInfo
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- JP2013110380A JP2013110380A JP2012149428A JP2012149428A JP2013110380A JP 2013110380 A JP2013110380 A JP 2013110380A JP 2012149428 A JP2012149428 A JP 2012149428A JP 2012149428 A JP2012149428 A JP 2012149428A JP 2013110380 A JP2013110380 A JP 2013110380A
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- film
- oxide
- oxide semiconductor
- semiconductor film
- metal oxide
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- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 83
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 83
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- 238000002844 melting Methods 0.000 claims abstract description 53
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000013078 crystal Substances 0.000 claims description 55
- 239000011701 zinc Substances 0.000 claims description 47
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 33
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- 229910052725 zinc Inorganic materials 0.000 claims description 20
- 239000011787 zinc oxide Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 16
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- 229910003437 indium oxide Inorganic materials 0.000 claims description 15
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- 239000000463 material Substances 0.000 abstract description 49
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- 229910001195 gallium oxide Inorganic materials 0.000 abstract description 5
- 238000009413 insulation Methods 0.000 abstract 1
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- 229910052779 Neodymium Inorganic materials 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
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- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
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- 238000001312 dry etching Methods 0.000 description 1
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
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- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02488—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
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Abstract
【解決手段】酸化物半導体膜に接する下地面又は酸化物半導体膜に接する膜を形成する材料の融点を、酸化物半導体を構成する材料の融点よりも高くする。これにより、酸化物半導体膜に接する下地面又は酸化物半導体膜に接する膜との界面近傍まで結晶領域が存在することを可能とする。当該材料として絶縁性の金属酸化物を用いる。金属酸化物として、酸化物半導体膜を構成する材料と同族の材料である酸化アルミニウム、酸化ガリウムなどを用いる。
【選択図】図1
Description
102 金属酸化物膜
104 酸化物半導体膜
105 酸化物半導体膜
106 ゲート絶縁膜
108 ゲート電極
110 側壁絶縁膜
112 低抵抗化領域
114 パッシベーション膜
116 層間絶縁膜
118 配線
120 絶縁層
Claims (19)
- 絶縁性の金属酸化膜に接してインジウム又は亜鉛の少なくとも一方の酸化物を含む酸化物半導体膜を形成し、
前記酸化物半導体膜にエネルギービームを照射して、該酸化物半導体膜に結晶領域が含まれるように加熱すること
を特徴とする酸化物半導体膜の作製方法。 - インジウム又は亜鉛の酸化物の融点よりも高い融点を有する絶縁性の金属酸化膜に接してインジウム又は亜鉛の少なくとも一方の酸化物を含む酸化物半導体膜を形成し、
前記酸化物半導体膜にエネルギービームを照射して、該酸化物半導体膜に結晶領域が含まれるように加熱すること
を特徴とする酸化物半導体膜の作製方法。 - 請求項1又は2において、前記絶縁性の金属酸化膜として、酸化アルミニウム膜を形成すること
を特徴とする酸化物半導体膜の作製方法。 - 請求項1又は2において、前記絶縁性の金属酸化膜として、イットリア安定化ジルコニア膜を形成すること
を特徴とする酸化物半導体膜の作製方法。 - 請求項1乃至4のいずれか一項において、前記エネルギービームは、前記酸化物半導体膜のバンドギャップ以上のエネルギーを有するレーザ光であること
を特徴とする酸化物半導体膜の作製方法。 - 請求項1乃至5のいずれか一項において、前記エネルギービームの照射により、前記酸化物半導体膜にc軸配向した結晶領域を含ませること
を特徴とする酸化物半導体膜の作製方法。 - 絶縁性の金属酸化膜を形成し、
前記絶縁性の金属酸化膜に接して、インジウム又は亜鉛の少なくとも一方の酸化物を含む酸化物半導体膜を形成し、
前記酸化物半導体膜にエネルギービームを照射して結晶領域を含む酸化物半導体膜を形成し、
前記結晶領域を含む酸化物半導体膜をチャネル形成領域とするトランジスタを形成すること
を特徴とする半導体装置の作製方法。 - インジウム又は亜鉛の酸化物の融点よりも高い融点を有する絶縁性の金属酸化膜を形成し、
前記絶縁性の金属酸化膜に接して、インジウム又は亜鉛の少なくとも一方の酸化物を含む酸化物半導体膜を形成し、
前記酸化物半導体膜にエネルギービームを照射して結晶領域を含む酸化物半導体膜を形成し、
前記結晶領域を含む酸化物半導体膜をチャネル形成領域とするトランジスタを形成すること
を特徴とする半導体装置の作製方法。 - 請求項7又は8において、前記絶縁性の金属酸化膜として、酸化アルミニウム膜を形成すること
を特徴とする半導体装置の作製方法。 - 請求項7又は8において、前記絶縁性の金属酸化膜として、イットリア安定化ジルコニア膜を形成すること
を特徴とする半導体装置の作製方法。 - 請求項7乃至10のいずれか一項において、前記エネルギービームは、前記酸化物半導体膜のバンドギャップ以上のエネルギーを有するレーザ光であること
を特徴とする半導体装置の作製方法。 - 請求項7乃至11のいずれか一項において、前記エネルギービームの照射により、前記酸化物半導体膜にc軸配向した結晶領域を含ませること半導体装置の作製方法。
- 請求項7乃至12のいずれか一項において、前記絶縁性の金属酸化膜を形成する前に、ゲート電極を形成すること
を特徴とする半導体装置の作製方法。 - 請求項7乃至12のいずれか一項において、前記結晶領域を含む酸化物半導体膜上にゲート絶縁膜を形成し、該ゲート絶縁膜上にゲート電極を形成すること
を特徴とする半導体装置の作製方法。 - 絶縁性の金属酸化膜と、前記絶縁性の金属酸化膜に接するインジウム又は亜鉛の少なくとも一方の酸化物を含みc軸配向した結晶領域を含む酸化物半導体膜を有し、
前記酸化物半導体膜のc軸配向した結晶領域は、前記絶縁性の金属酸化膜のとの界面近傍においても存在すること
を特徴とする半導体装置。 - インジウム又は亜鉛の酸化物の融点よりも高い融点を有する絶縁性の金属酸化膜と、前記絶縁性の金属酸化膜に接するインジウム又は亜鉛の少なくとも一方の酸化物を含みc軸配向した結晶領域を含む酸化物半導体膜を有し、
前記酸化物半導体膜のc軸配向した結晶領域は、前記絶縁性の金属酸化膜のとの界面近傍においても存在すること
を特徴とする半導体装置。 - 請求項15又は16において、前記絶縁性の金属酸化膜は酸化アルミニウム膜であること
を特徴とする半導体装置。 - 請求項15又は16において、前記絶縁性の金属酸化膜はイットリア安定化ジルコニア膜であること
を特徴とする半導体装置。 - 請求項15乃至18のいずれか一項において、前記酸化物半導体膜は、インジウム及び亜鉛に加えて、ガリウム、ジルコニウム、スズ、ガドリニウム、セリウムから選ばれた一種を含むこと
を特徴とする半導体装置。
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TW201318035A (zh) | 2013-05-01 |
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JP6059895B2 (ja) | 2017-01-11 |
US20130009147A1 (en) | 2013-01-10 |
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