JP2012529178A - 制御可能なサージ電流耐性を有するパワースイッチング素子 - Google Patents
制御可能なサージ電流耐性を有するパワースイッチング素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 claims abstract description 90
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 128
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 123
- 238000002654 craniosacral therapy Methods 0.000 description 97
- 108091006146 Channels Proteins 0.000 description 30
- 239000000758 substrate Substances 0.000 description 20
- 239000008186 active pharmaceutical agent Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000969 carrier Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000003321 amplification Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Abstract
【選択図】図1
Description
本出願は、2009年6月2日に出願された米国仮特許出願第61/183,214号に基づいて、米国特許法第119条(e)による優先権を主張するものであり、その全体が引用により本明細書に組み入れられる。
Claims (21)
- ワイドバンドギャップパワートランジスタと、
前記ワイドバンドギャップパワートランジスタと並列に接続されるワイドバンドギャップサージ電流トランジスタと、
前記ワイドバンドギャップサージ電流トランジスタを駆動するように構成されるワイドバンドギャップ駆動トランジスタと
を含む半導体スイッチング素子であって、
前記半導体スイッチング素子は、オン状態で、ワイドバンドギャップパワートランジスタのドレイン−ソース電圧が第一の電圧範囲内にあるときに、当該半導体スイッチング素子の実質的にすべての出力電流が、前記ワイドバンドギャップパワートランジスタのチャネルを通って流れるように構成され、
さらに、前記半導体スイッチング素子は、オン状態で、前記ワイドバンドギャップパワートランジスタの前記ドレイン−ソース電圧が、前記第一の電圧範囲における電圧よりも高い電圧を有する第二の電圧範囲内にあるときに、前記出力電流は、前記ワイドバンドギャップサージ電流トランジスタ、および、前記ワイドバンドギャップパワートランジスタのチャネルの両方を流れるように構成されること
を特徴とする半導体スイッチング素子。 - 前記ワイドバンドギャップパワートランジスタは、ワイドバンドギャップパワーMOSFETと含み、
前記ワイドバンドギャップサージ電流トランジスタは、ワイドバンドギャップバイポーラ接合トランジスタ(BJT)を含み、
前記ワイドバンド駆動トランジスタは、前記ワイドバンドギャップBJTにベース電流を供給するように構成されるワイドバンドギャップトランジスタ駆動MOSFETを含むこと
を特徴とする請求項1に記載の半導体スイッチング素子。 - 前記半導体スイッチング素子は、当該半導体スイッチング素子を通って流れるサージ電流を飽和させるように構成されること
を特徴とする請求項2に記載の半導体スイッチング素子。 - 飽和レベルは、前記ワイドバンドギャップパワーMOSFETのドレイン−ソース電圧と、前記ワイドバンドギャップパワーMOSFETのゲートとワイドバンドギャップ駆動MOSFETのゲートに印加されるバイアス電圧との関数であること
を特徴とする請求項3に記載の半導体スイッチング素子。 - 前記ワイドバンドギャップサージ電流トランジスタ、前記ワイドバンドギャップパワートランジスタおよび前記ワイドバンドギャップ駆動トランジスタのそれぞれは、炭化ケイ素に基づいた素子であること
を特徴とする請求項1に記載の半導体スイッチング素子。 - 前記ワイドバンドギャップBJT、前記ワイドバンドギャップパワーMOSFETおよび前記ワイドバンドギャップ駆動MOSFETのそれぞれは、炭化ケイ素に基づいた素子を含み、
前記パワーMOSFETのゲートは、前記駆動MOSFETのゲートに電気的に接続され、
前記パワーMOSFETの第一のソース/ドレイン領域は、前記BJTのコレクタに電気的に接続され、
前記パワーMOSFETの第二のソース/ドレイン領域は、前記BJTのエミッタに電気的に接続されること
を特徴とする請求項2に記載の半導体スイッチング素子。 - 前記駆動MOSFETの第一のソース/ドレイン領域は、前記BJTのコレクタに電気的に接続され、前記駆動MOSFETの第二のソース/ドレイン領域は、前記BJTのベースに電気的に接続されること
を特徴とする請求項6に記載の半導体スイッチング素子。 - n型炭化ケイ素ドリフト層と、
p型炭化ケイ素ベース層と、
前記n型炭化ケイ素ドリフト層上のp型炭化ケイ素p−ウェルと、
前記p型炭化ケイ素ベース層上のn型炭化ケイ素エミッタ領域と、
前記炭化ケイ素p−ウェルの上部における前記駆動MOSFETの第一のn型ソース/ドレイン領域と、
前記炭化ケイ素p−ウェルの上部における前記パワーMOSFETの第一のn型ソース/ドレイン領域と
を含むことを特徴とする請求項2に記載の半導体スイッチング素子。 - 前記n型炭化ケイ素エミッタ領域に隣接する前記p型炭化ケイ素ベース層上に、高濃度にドープされたp型炭化ケイ素領域と、
前記高濃度にドープされたp型炭化ケイ素領域と前記駆動MOSFETの前記第一のn型ソース/ドレイン領域との間に電気的な接続と
をさらに含むことを特徴とする請求項8に記載の半導体スイッチング素子。 - 前記n型炭化ケイ素ドリフト層は、前記BJTのコレクタ、前記パワーMOSFETの第二のソース/ドレイン領域、および、前記駆動MOSFETの第二のソース/ドレイン領域を含むこと
を特徴とする請求項9に記載の半導体スイッチング素子。 - 第一のスイッチング速度を有する第一のワイドバンドギャップ半導体素子と、
前記第一のスイッチング速度よりも遅い第二のスイッチング速度を有する第二のワイドバンドギャップ半導体素子と、
を含むパワー半導体スイッチであって、
前記パワー半導体スイッチは、出力電流レベルの第一の範囲で、出力電流が前記第一のワイドバンドギャップ半導体素子を通って流れるように構成され、
前記パワー半導体スイッチは、さらに、出力電流レベルの前記第一の範囲における出力電流レベルよりも高い出力電流レベルの第二の範囲で、前記第一のワイドバンドキャップ半導体素子および前記第二のワイドバンドキャップ半導体素子の両方を通って流れるように構成されること
を特徴する、オン状態のときに出力電流を伝導するパワー半導体スイッチ。 - 前記第一のワイドバンドギャップ半導体素子はユニポーラ素子であり、
前記第二のワイドバンドギャップ半導体素子はバイポーラ素子であり、
出力電流レベルの前記第二の範囲は、サージ電流レベルを含むこと
を特徴する請求項11に記載のパワー半導体スイッチ。 - 前記第一のワイドバンドギャップ半導体素子はパワーMOSFETを含み、
前記第二のワイドバンドキャップ半導体素子はバイポーラ接合トランジスタ(BJT)を含むこと
を特徴する請求項12に記載のパワー半導体スイッチ。 - 前記BJTのコレクタおよび前記パワーMOSFETの第一のソース/ドレイン領域が、第一の共通ノードを形成し、
前記BJTのエミッタおよび前記パワーMOSFETの第二のソース/ドレイン領域が、第二の共通ノードを形成するように、
前記BJTおよび前記パワーMOSFETは、並列に実装されること
を特徴する請求項13に記載のパワー半導体スイッチ。 - 前記BJTのベースにベース電流を供給するように構成される駆動MOSFETをさらに含むこと
を特徴する請求項14に記載のパワー半導体スイッチ。 - 前記BJT、前記パワーMOSFET、前記駆動MOSFETのそれぞれは、炭化ケイ素半導体素子を含むこと
を特徴とする請求項15に記載のパワー半導体スイッチ。 - ゲート、第一のソース/ドレイン領域および第二のソース/ドレイン領域を有する第一のワイドバンドギャップMISFETと、
ゲート、第一のソース/ドレイン領域および第二のソース/ドレイン領域を有する第二のワイドバンドギャップMISFETと、
ベース、コレクタおよびエミッタを有するワイドバンドギャップバイポーラ接合トランジスタ(“BJT”)と
を含み、
前記第一のワイドバンドギャップMISFETのゲートは、前記第二のワイドバンドキャップMISFETのゲートに電気的に接続され、
前記第一のワイドバンドキャップMISFETの第一のソース/ドレイン領域は、前記第二のワイドバンドギャップMISFETの第一のソース/ドレイン領域と前記コレクタに電気的に接続され、
前記第一のワイドバンドギャップMISFETの第二のソース/ドレイン領域は、前記エミッタに電気的に接続され、
前記第二のワイドバンドギャップMISFETの第二のソース/ドレイン領域は、前記ベースに電気的に接続されること
を特徴するパワースイッチング素子。 - 前記BJTは、前記パワースイッチング素子を通って流れるサージ電流の少なくとも一部に対して、電流通過の経路を提供するように構成されること
を特徴する請求項17に記載のハイパワースイッチング素子。 - 前記BJTは、前記第一のワイドバンドギャップMISFETおよび前記第二のワイドバンドギャップMISFETは、炭化ケイ素に基づく素子を含むこと
を特徴する請求項17に記載のハイパワースイッチング素子。 - 前記コレクタ、前記パワーMISFETの第一のn型ソース/ドレイン領域および前記駆動MISFETの第一のn型ソース/ドレイン領域を含むn型炭化ケイ素ドリフト層と、
前記n型炭化ケイ素ドリフト層上に、前記ベースを含むp型炭化ケイ素ベース層と、
前記n型炭化ケイ素ドリフト層上に、p型炭化ケイ素p−ウェルと、
前記p型炭化ケイ素ベース層上に、前記エミッタを含むn型炭化ケイ素エミッタ層と、
前記pウェル上にあり、かつ、第一のゲート絶縁層によって、前記駆動MISFETの第二のn型ソース/ドレイン領域と前記n型炭化ケイ素ドリフト層から分離された第一のゲート電極と、
前記pウェル上にあり、かつ、第二のゲート絶縁層によって、前記パワーMISFETの第二のn型ソース/ドレイン領域と前記n型炭化ケイ素ドリフト層から分離された第二のゲート電極と、
を含み、
前記駆動MISFETの第一のソース/ドレイン領域は、前記炭化ケイ素p−ウェルの上部にn型炭化ケイ素領域を含み、
前記パワーMISFETの第一のソース/ドレイン領域は、前記炭化ケイ素p−ウェルの上部にn型炭化ケイ素領域を含むこと
を特徴する請求項17に記載のハイパワースイッチング素子。 - 前記n型炭化ケイ素エミッタ領域に隣接する前記p型炭化ケイ素ベース層上に、高濃度にドープされたp型炭化ケイ素領域と、
前記高濃度にドープされたp型炭化ケイ素領域と前記駆動MISFETの第一のn型ソース/ドレイン領域との間に電気的な接続とを含むこと
を特徴する請求項20に記載のハイパワースイッチング素子。
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US20100301929A1 (en) | 2010-12-02 |
JP5551240B2 (ja) | 2014-07-16 |
US8193848B2 (en) | 2012-06-05 |
EP2438618B1 (en) | 2020-07-29 |
EP2438618A1 (en) | 2012-04-11 |
WO2010141238A1 (en) | 2010-12-09 |
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