JP2011528501A - Batch heat treatment apparatus and heater applied to the apparatus - Google Patents

Abstract

In a batch type heat treatment apparatus, a plurality of substrates are simultaneously heat-treated so that the in-plane temperature is uniform.
A batch-type heat treatment apparatus according to the present invention includes a chamber for providing a heat treatment space for a plurality of substrates, a boat for mounting and supporting the plurality of substrates, and a stacking direction of the substrates. A plurality of main heater units 120 arranged at regular intervals and each of which is composed of a plurality of main heaters 200, and the substrate 10 is arranged between the plurality of main heater units 120. Features.
[Selection] Figure 1

Description

  The present invention relates to a batch-type heat treatment apparatus and a heater applied to the apparatus, and more specifically, a plurality of substrates can be simultaneously heat treated so that the in-plane temperature is uniform, and the heat treatment is performed after the heat treatment process is completed. The present invention relates to a batch heat treatment apparatus in which a cooling gas flows so that the inside of the chamber of the apparatus can be rapidly cooled, and a heater applied to the apparatus.

  Annealing equipment used in the manufacture of semiconductors, flat panel displays and solar cells is an essential heat treatment for the steps of crystallization, phase change, etc., on a predetermined thin film deposited on a substrate such as a silicon wafer or glass. The device responsible for the process.

  As an example of a typical annealing apparatus, there is a silicon crystallization apparatus that crystallizes amorphous silicon deposited on a glass substrate into polycrystalline silicon in the manufacture of a liquid crystal display or a thin film crystalline silicon solar cell. it can.

  In order to perform such a crystallization process (heat treatment process), a heat treatment apparatus capable of heating a substrate on which a predetermined thin film is formed must be provided. For example, a temperature of at least 550 to 600 ° C. is required for crystallization of amorphous silicon.

  Usually, the heat treatment apparatus includes a single wafer type in which substrates are heat treated one by one and a batch type in which a plurality of substrates are heat treated simultaneously. The single-wafer type has the advantage that the configuration of the apparatus is simple, but has the disadvantage that the productivity is lowered. Therefore, the batch type is currently in the spotlight for mass production.

  In particular, recently, as the flat display and the glass substrate for a solar cell are increased in area, the above-described problems are further highlighted. Accordingly, there is a need to develop a batch type heat treatment apparatus capable of simultaneously heat treating a plurality of substrates so that the in-plane temperature is uniform.

  Further, the conventional heat treatment apparatus has a problem that it takes a long time to unload the substrate from the heat treatment apparatus after completion of the heat treatment process, thereby reducing the productivity of the heat treatment process. In order to prevent damage to the substrate due to thermal shock, the interior of the chamber must be cooled to a certain temperature or lower before unloading the substrate after the heat treatment process, but the time required to lower the temperature inside the chamber is required. Because of its long length, the productivity of the heat treatment process decreases.

  The present invention has been made to solve the above-mentioned problems of the prior art, and its object is to simultaneously heat-treat a plurality of substrates so that the in-plane temperature is uniform in a batch-type heat treatment apparatus. That is.

  Another object of the present invention is to dramatically improve the productivity of a heat treatment process required for manufacturing a flat panel display or a solar cell in a batch heat treatment apparatus by rapidly cooling the inside of the chamber after the heat treatment process is completed. It is to let you.

  In order to achieve the above-described object, the present invention provides a batch-type heat treatment apparatus in which each substrate is heated by a plurality of corresponding heaters during heat treatment in order to simultaneously heat treat a plurality of substrates. provide.

  In order to achieve the above-mentioned object, in one aspect, the present invention is a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, a chamber for providing a heat treatment space for the plurality of substrates, Including a boat for mounting and supporting a plurality of substrates, and a plurality of main heater units arranged at regular intervals along the substrate stacking direction, each of which is composed of a plurality of main heaters. Provided is a heat treatment apparatus arranged between main heater units.

  The substrate can be mounted on the boat while being placed on the substrate holder.

  The plurality of main heaters can be arranged at regular intervals in parallel with the short side of the substrate.

  The main heater of any main heater unit can be arranged in alignment with the main heater of the main heater unit closest to the arbitrary main heater unit.

  The main heater of an arbitrary main heater unit can be arranged so as to deviate from the main heater of the main heater unit closest to the arbitrary main heater unit.

  The batch heat treatment apparatus of the present invention may further include a plurality of auxiliary heater units for preventing heat loss inside the chamber.

  The plurality of auxiliary heater units may include a first auxiliary heater unit disposed in parallel with the short side of the substrate and a second auxiliary heater unit disposed in parallel with the long side of the substrate.

  The first auxiliary heater unit is composed of a plurality of first auxiliary heaters arranged on both sides of the main heater unit in parallel with the main heater, and the second auxiliary heater unit is arranged on both sides of the main heater unit perpendicular to the main heater. A plurality of second auxiliary heaters.

  The batch heat treatment apparatus of the present invention may further include a plurality of cooling pipes for cooling the inside of the chamber.

  The cooling pipe may be disposed between the plurality of main heaters along the short side direction of the substrate.

  The cooling gas flows in the cooling pipe, and the cooling pipe can be made of a material having high thermal conductivity.

  The batch heat treatment apparatus of the present invention may further include a gas supply unit that supplies a process gas into the chamber and a gas discharge unit that discharges the exhaust gas from the chamber.

  The gas supply unit includes a gas supply pipe formed with a plurality of first gas holes through which the process gas flows out, and the gas discharge unit includes a gas discharge pipe formed with a plurality of second gas holes through which the exhaust gas flows. be able to.

  In order to achieve the above-mentioned object, in another aspect, the present invention is a heater applicable to a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, and a space in which a cooling gas flows inside the heater. The heater characterized by including.

  In order to achieve the above-mentioned object, in another aspect, the present invention is a heater applicable to a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the first tube, the first tube, A cooling pipe flows through the space between the first pipe and the second pipe, and includes a second pipe that surrounds the first pipe at a predetermined interval and a heating element inserted into the first pipe. Provided is a heater characterized by the above.

  The heating element has a cross-sectional area at both ends larger than that at the center.

  The heating element can be separated from the first tube or the second tube.

  In order to achieve the above-mentioned object, in another aspect, the present invention is a heater applicable to a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the first tube and the first tube A cooling gas flows through the central space of the first tube, including a coiled hot wire wound on the outer peripheral surface and a second tube surrounding the first tube at a certain distance from the first tube. Provided is a heater that can be used.

  Furthermore, in order to achieve the above-described object, in another aspect, the present invention is a heater applicable to a batch-type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the first tube and the first tube A coil-type heat wire wound on the outer peripheral surface, a second tube surrounding the first tube at a fixed interval from the first tube, and a second tube surrounding the second tube at a fixed interval from the second tube. There is provided a heater characterized in that the cooling gas flows through at least one of a central space of the first tube or a space between the second tube and the third tube.

  The pitch of the hot wires is the same regardless of the position on the first tube, or can be changed by the position on the first tube.

  The first tube around which the coiled hot wire is wound can be separated from the second tube or the third tube.

  The 1st cooling part through which the cooling water which cools this 3rd pipe | tube can be provided in the both ends of a 3rd pipe | tube.

  A second cooling part for allowing a cooling gas to flow through the space between the second pipe and the third pipe can be further provided at both ends of the third pipe.

  The first cooling unit includes a first main body that forms a space therein, a cooling water inflow pipe that allows cooling water to flow into the internal space of the first main body, and a cooling water that flows out from the internal space of the first main body. A cooling water outlet pipe.

  The second cooling unit includes a second main body that forms a space therein, and a gas pipe that communicates with the internal space of the second main body. The internal space of the second main body includes the second pipe and the third pipe. Can communicate with the space between.

  The heater of the present invention may further include a terminal portion that supplies power to the heat wire and an insulating portion that insulates the terminal portion.

  The heater of the present invention may further include a fixing cap that is provided at the end of the second tube and connected to the heat ray.

  The terminal portion may include a conductive tube provided on the first tube and connected to an external power source, and a fixing nut for closely attaching the conductive tube to a fixing cap of the heater.

  The insulating portion includes an insulating cap that forms a space inside and surrounds the terminal portion, and a groove is formed on one side surface of the insulating cap.

  According to the present invention, the substrate loaded in the chamber is heated by the plurality of heaters corresponding to each substrate, whereby the substrate is simultaneously heat-treated so that the in-plane temperature becomes uniform.

  In addition, according to the present invention, heat treatment can be performed on a plurality of substrates at the same time, so that there is an effect of improving productivity of a flat panel display and a solar cell.

  Further, according to the present invention, the space through which the cooling gas flows is provided inside the heater, and the inside of the chamber of the heat treatment apparatus is rapidly cooled after the heat treatment step, so that the time required for the substrate unloading process is shortened, and the flat plate There is an effect that the productivity of the heat treatment process necessary for manufacturing a display or a solar cell is dramatically improved.

It is a perspective view which shows the structure of the batch type heat processing apparatus which concerns on one Embodiment of this invention. It is a perspective view which shows the state which open | released the cover with the batch type heat processing apparatus shown in FIG. It is a perspective view which shows the arrangement | positioning state of the board | substrate of the batch type heat processing apparatus which concerns on one Embodiment of this invention, a main heater unit, and an auxiliary heater unit. It is a perspective view which shows the structure of the boat of the batch type heat processing apparatus which concerns on one Embodiment of this invention. It is a perspective view showing composition of a gas supply pipe and a gas exhaust pipe of a batch type heat treatment apparatus concerning one embodiment of the present invention. It is a perspective view which shows the structure of the gas supply pipe | tube of FIG. It is drawing which shows an example of the arrangement | sequence form of the main heater in the batch type heat processing apparatus which concerns on one Embodiment of this invention. It is drawing which shows another example of the arrangement | sequence form of the main heater in the batch type heat processing apparatus which concerns on one Embodiment of this invention. It is a perspective view which shows the structure of the heater which concerns on one Embodiment of this invention. It is a cross-sectional perspective view which shows the structure of the heater which concerns on other embodiment of this invention. It is sectional drawing which shows the structure of the heater which concerns on other embodiment of this invention. It is sectional drawing which shows the state by which the 1st and 2nd cooling part, the terminal part, and the insulation part were provided in the edge part of the heater which concerns on one Embodiment of this invention. It is a disassembled perspective view which shows the structure of the 1st and 2nd cooling part provided in the edge part of the heater which concerns on one Embodiment of this invention. It is a disassembled perspective view which shows the structure of the terminal part and insulation part which are provided in the edge part of the heater which concerns on one Embodiment of this invention. It is a perspective view which shows the structure of the electrically conductive tube which concerns on one Embodiment of this invention. It is a side view which shows the structure of the electrically conductive tube which concerns on one Embodiment of this invention. It is a top view which shows the structure of the electrically conductive tube which concerns on one Embodiment of this invention. It is a perspective view showing the composition of the 1st protection nut concerning one embodiment of the present invention. It is a side view showing the composition of the 1st protection nut concerning one embodiment of the present invention. It is a perspective view which shows the structure of the 2nd protection nut which concerns on one Embodiment of this invention. It is a top view which shows the structure of the 2nd protection nut which concerns on one Embodiment of this invention. It is a side view showing the composition of the 2nd protection nut concerning one embodiment of the present invention. It is a perspective view showing the composition of the insulating cap concerning one embodiment of the present invention. It is a top view which shows the structure of the insulation cap which concerns on one Embodiment of this invention. It is a side view showing the composition of the insulating cap concerning one embodiment of the present invention. It is a cross-sectional perspective view which shows the structure of the heater which concerns on another embodiment of this invention. It is sectional drawing which shows the structure of the heater which concerns on another embodiment of this invention.

  Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

  FIG.1 and FIG.2 is a perspective view which shows the structure of the batch type heat processing apparatus 1 which concerns on one Embodiment of this invention. For reference, in FIG. 1 and FIG. 2, the outer shape of the main heater 200 is schematically shown for convenience, and shows the arrangement of the main heaters 200 in the batch heat treatment apparatus 1.

  FIG. 3 is a perspective view showing the arrangement of the substrate 10, the main heater unit 120, and the auxiliary heater unit 140 in the batch heat treatment apparatus 1 according to an embodiment of the present invention.

  First, the substrate 10 loaded in the batch heat treatment apparatus 1 is not particularly limited, and materials such as glass, plastic, polymer, silicon wafer, and stainless steel can be used. The following description will be made assuming a rectangular glass substrate that is most commonly used in the field of flat panel displays such as LCDs and OLEDs and thin film silicon solar cells.

  As shown in FIG. 1, the batch heat treatment apparatus 1 includes a rectangular parallelepiped chamber 100 that provides a heat treatment space, and a frame 102 that supports the chamber 100. The material of the chamber 100 and the frame 102 is preferably stainless steel, but is not necessarily limited thereto.

  One side surface of the chamber 100 is provided with a door 104 that is opened and closed in the vertical direction in order to load the substrate 10 (FIG. 4) in the chamber 100. With the door 104 open, the substrate 10 can be loaded into the chamber 100 using a substrate transfer device (not shown) such as a transfer arm. On the other hand, the substrate 10 can be unloaded from the chamber 100 through the door 104 after the heat treatment. The material of the door 104 is preferably stainless steel, but is not necessarily limited thereto.

  A cover 106 is provided on the upper surface of the chamber 100 so as to be able to be opened and closed. Used for maintenance and replacement. The cover 106 is preferably made of quartz, but is not necessarily limited thereto.

  Inside the chamber 100 are a main heater unit 120 for directly heating the substrate 10, an auxiliary heater unit 140 for preventing heat loss inside the chamber 100, and for rapidly cooling the inside of the chamber 100 after the heat treatment is completed. A cooling pipe 180 is installed.

  As shown in FIG. 2, the main heater unit 120 includes a plurality of main heaters 200 arranged at regular intervals in parallel with the short sides of the substrate 10. The main heater 200 is a heater having a standard long rod shape, in which a heating element is inserted in the quartz tube, and heat is generated by supplying electric power from the outside through terminals provided at both ends thereof. The individual components constituting the main heater unit 120 as described above. In this embodiment, the main heater unit 120 includes 14 main heaters 200, but the number of main heaters 200 constituting the main heater unit 120 varies depending on the size of the substrate 10 loaded in the chamber 100. Can be changed.

  A plurality of main heater units 120 are arranged at regular intervals along the stacking direction of the substrates 10. The substrate 10 is disposed between the plurality of main heater units 120. In the present embodiment, a configuration is shown in which three substrates 10 are arranged between four main heater units 120, but the number of main heater units 120 is the number of substrates 10 loaded in the chamber 100. Various changes can be made depending on the number of sheets.

  The substrate 10 is preferably located at the center between the main heater units 120. In addition, it is preferable that the substrate 10 and the main heater unit 120 be separated to the extent that they do not interfere with the behavior of the transfer arm of the substrate transfer apparatus when the substrate 10 is loaded into the chamber 100.

  As described above, in the batch type heat treatment apparatus 10, the main heater units 120 including the 14 main heaters 200 that can cover the entire area of the substrate 10 are respectively provided above and below the substrate 10. Therefore, the substrate 10 can be heated by the 28 main heaters 200 so that the temperature in the substrate surface becomes uniform, and can be uniformly heat-treated.

  Further, as shown in FIG. 2, the auxiliary heater unit 140 includes a first auxiliary heater unit 140 a that is arranged in parallel along the short side direction of the substrate 10 and a first auxiliary heater unit 140 a that is arranged along the long side direction of the substrate 10. 2 auxiliary heater units 140b.

  The first auxiliary heater unit 140a includes a plurality of first auxiliary heaters 150a disposed on both sides of the main heater unit 120 in parallel with the main heater. In the present embodiment, the first auxiliary heater units 140a are arranged in the same row as the main heater units 120, one on each side of the four main heater units 120, for a total of eight first auxiliary heater units. Although configured with the heater 150a, the number of first auxiliary heaters 150a constituting the first auxiliary heater unit 140a can be variously changed according to the number of main heater units 120 provided in the chamber 100. On the other hand, in the present invention, in order to further enhance the effect of the installation of the auxiliary heater units, the first auxiliary heater units 140a are arranged on the both sides of the four main heater units 120, respectively, for a total of 16 first auxiliary heater units. The heater 150a can also be used.

  The second auxiliary heater unit 140b includes a plurality of second auxiliary heaters 150b arranged on both sides of the main heater unit 120 perpendicular to the main heater 200. In the present embodiment, the second auxiliary heater unit 140b includes four main heater units so that the main heater unit 120 is disposed between the plurality of second auxiliary heaters 150b constituting the second auxiliary heater unit 140b. The number of second auxiliary heaters 150b constituting the second auxiliary heater unit 140b is the number of the second auxiliary heaters 150b arranged in total in the chamber 100. Various changes can be made according to the number of heater units 120. The main heater unit 120 is preferably located at the center between the plurality of second auxiliary heater units 140b.

  As the first auxiliary heater 150a and the second auxiliary heater 150b, it is preferable to use a heater having a standard long bar shape like the main heater 200 described above.

  As described above, the batch type heat treatment apparatus 1 includes the first auxiliary heater unit 140a including the eight first auxiliary heaters 150a and the ten second auxiliary heaters on the four sides of the main heater unit 120. Since the second auxiliary heater unit 140b composed of 150b is provided, the four sides of the main heater unit 120 receive heat from the 18 auxiliary heaters 150a and 150b. It is possible to prevent heat loss inside the chamber 100 inevitably occurring when the side is in contact with the external environment.

  In the batch heat treatment apparatus 1 as described above, the arrangement of the substrate 10, the main heater unit 120, and the auxiliary heater unit 140 is shown in FIG. Note that FIG. 3 shows an embodiment in which two first auxiliary heaters 150 a are arranged on both sides of the four main heater units 120.

  In addition, as shown in FIG. 2, the cooling pipe 180 is disposed between the main heaters 200 constituting the main heater unit 120. In the present embodiment, the cooling pipes 180 exemplify a configuration in which a total of 52 cooling pipes 180 are provided between the 56 main heaters 200 constituting the four main heater units 120. The number of main heater units 120 and main heaters 200 provided in the chamber 100 can be variously changed. In addition, the cooling pipes 180 are not necessarily arranged between the main heaters 200. If the inside of the chamber 100 can be appropriately cooled, the cooling pipes 180 are omitted between some main heaters 200. You can also

  As described above, since the cooling pipe 180 is provided in the batch type heat treatment apparatus 1, the heat inside the chamber 100 is transmitted to the outside of the chamber 100 through the cooling pipe 180 after the heat treatment is completed, and the inside of the chamber 100 is rapidly cooled. be able to. If the interior of the chamber 100 is not cooled to a predetermined temperature or lower after the heat treatment is completed, the substrate 10 is not unloaded. Therefore, if the interior of the chamber 100 can be rapidly cooled by the operation of the cooling pipe 180, a flat display And the productivity of solar cells will be greatly improved.

  The cooling pipe 180 is preferably made of a material having high thermal conductivity, such as copper or stainless steel. A cooling gas or a cooling liquid is supplied into the cooling pipe 180. Air, helium, nitrogen, and argon are used as the cooling gas. Water can be used as the cooling liquid. Although it is preferable that the temperature of the cooling gas or the cooling liquid is generally room temperature, a gas or liquid cooled to room temperature or lower can be used if necessary.

  FIG. 4 is a perspective view showing the configuration of the boat 108 of the batch heat treatment apparatus 1 according to one embodiment of the present invention.

  As shown in FIG. 4, a plurality of boats 108 for supporting the substrate 10 loaded in the chamber 100 are provided inside the chamber 100. The boat 108 is preferably provided so as to support the long side of the substrate 10. In the present embodiment, three boats 108 are provided in total, three on each of the two long sides of the substrate 10, but more boats are provided in order to stably support the substrate 10. It can also be changed according to the size of the substrate 10. The material of the boat 108 is preferably quartz.

  Also, as shown in FIG. 4, the substrate 10 is preferably mounted on the boat 108 while being placed on the holder 12. When the heat treatment temperature reaches the softening temperature of the glass substrate during the heat treatment process, a phenomenon occurs in which the substrate is bent downward due to its own weight. Such a bending phenomenon becomes a more serious problem especially due to the increase in the area of the substrate. In order to solve such a problem, heat treatment is performed with the substrate 10 mounted on the holder 12.

  FIG. 5 is a perspective view showing the configuration of the gas supply pipe 160 and the gas discharge pipe 170 of the batch heat treatment apparatus 1 according to one embodiment of the present invention. FIG. 6 is a diagram showing a configuration of the gas supply pipe 160 shown in FIG.

  As shown in these drawings, in the chamber 100, a rod-like shape in which a plurality of first gas holes 162 through which atmospheric gas flows out is formed in order to supply atmospheric gas for generating a heat treatment atmosphere into the chamber 100. Gas supply pipe 160 and a rod-like gas discharge pipe 170 in which a plurality of second gas holes (not shown) through which atmospheric exhaust gas flows are formed. The gas supply pipe 160 and the gas discharge pipe 170 are preferably arranged to face the long side of the substrate 10. Nitrogen, argon, etc. are used as atmospheric gas.

  In the present embodiment, a configuration in which four gas supply pipes 160 and four gas discharge pipes 170 are provided is illustrated, but the number of the gas supply pipes 160 and the gas discharge pipes 170 may be variously changed depending on the size of the substrate 10. be able to.

  The position of the first gas hole 162 formed in the gas supply pipe 160 is preferably as close to the substrate 10 as possible so that the ejected atmospheric gas can immediately contact the substrate 10. Therefore, the number of first gas holes 162 is preferably the same as the number of substrates 10 loaded in the chamber 100. The same applies to the second gas hole (not shown) formed in the gas exhaust pipe 170.

  7 and 8 are views showing the arrangement of the main heaters 200 of the batch heat treatment apparatus 1 according to one embodiment of the present invention. In the present invention, the arrangement of the main heaters 200 of the main heater unit 120 can be variously changed as necessary.

  FIG. 7 is a view showing an arrangement of the main heaters 200 between the main heater units 120 adopted in the present embodiment described with reference to FIGS. 1 and 2. As shown in the figure, the main heater 200 constituting any one of the main heater units 120 can be arranged in alignment with the main heater 200 constituting the main heater unit 120b adjacent to the main heater unit 120. .

  On the other hand, as shown in FIG. 8, the main heater 200 constituting any one of the main heater units 120 is shifted from the main heater 200 constituting the main heater unit 120 b adjacent to the main heater unit 120. Can do. For example, in FIG. 8, the main heater 200 constituting the main heater unit 120a is aligned at an intermediate position between the main heaters 200 constituting the main heater unit 120b. As shown in FIG. 8, by changing the arrangement of the main heaters 200 between the main heater units 120, the substrate 10 loaded in the chamber 100 is heat-treated so that the temperature in the substrate surface becomes more uniform. be able to.

  Hereinafter, the operation of the batch heat treatment apparatus 1 according to the present invention will be described with reference to the drawings.

  First, as shown in FIG. 1, an operator moves the door 104 provided on one side surface of the chamber 100 downward to open it.

  Next, the substrate 10 is mounted on the holder 12 and placed on the upper surface of a transfer arm (not shown) of the substrate transfer device, and the transfer arm is moved to load the substrate into the chamber 100.

  As shown in FIG. 4, the substrates 10 loaded in the chamber 100 are sequentially loaded on a boat 108 installed in the chamber 100. In the present embodiment, three substrates 10 are mounted on the boat 108.

  Next, when the substrate 10 is mounted on the boat 108, the door 104 is moved upward to isolate the interior of the chamber 100 from the external environment, and then the substrate 10 is heat-treated by applying power to the main heater unit 120.

  The four main heater units 120 provided in the chamber 100 are provided at positions spaced apart from each other by a predetermined distance above and below the substrate 10, and the main heater units 120 are arranged at regular intervals. Further, since the main heater 200 is composed of 14 main heaters 200, the substrate 10 is heated so that the in-plane temperature is uniform and is uniformly heat-treated.

  Meanwhile, the first auxiliary heater unit 140a and the second auxiliary heater unit 140b provided on the four sides of the main heater unit 120 are operated to prevent heat loss inside the chamber 100 that occurs during the heat treatment process. . Thereby, the substrate 10 can be heat-treated so that the in-plane temperature becomes more uniform.

  A heat treatment atmosphere is generated in the chamber 100 before the actual heat treatment. For this purpose, an atmospheric gas such as nitrogen or argon is supplied into the chamber 100 through the gas supply pipe 160. The atmospheric exhaust gas is discharged out of the chamber 100 through a gas discharge pipe 170 disposed opposite to the gas supply pipe 160.

  When the heat treatment process is completed, the inside of the chamber 100 is quickly cooled. For cooling, a cooling gas such as helium, nitrogen, or argon is introduced into the chamber 100 from the cooling pipe 180. The cooling gas absorbs heat in the chamber 100 while passing through the inside of the chamber 100, and rapidly reduces the temperature in the chamber 100. As a result, the substrate 10 can be unloaded in a short time after completion of the heat treatment process, so that the productivity of the heat treatment process is improved.

  Finally, when the temperature in the chamber 100 decreases to an appropriate level, the door 104 is opened, and then the substrate 10 is unloaded from the chamber 100 using the transfer arm, and the heat treatment process is completed.

  In the batch type heat treatment apparatus configured as described above, the main heater (hereinafter referred to as “heater”) 200 constituting the main heater unit 120 can be configured as follows.

  FIG. 9 is a perspective view showing a configuration of a heater 200 according to an embodiment of the present invention. As shown in the figure, the heater 200 has a rod shape having a predetermined length. As shown in FIG. 9, the heater 200 includes a heating element 202 and a covering material 204. The heating element 202 receives heat supplied from the outside and generates heat necessary for heat treatment of the substrate 10. The material of the heating element 202 is preferably kanthal. The covering material 204 protects the heating element 202. The material of the covering material 204 is preferably quartz.

  Also, the first and second auxiliary heaters 150a and 150b may have the same shape and structure as the heater 200 shown in FIG.

  10 and 11 are a cross-sectional perspective view and a cross-sectional view showing a configuration of a heater 200a according to another embodiment of the present invention. For reference, in FIGS. 10 and 11, the shape and structure of both ends of the heater 200 a are the same, and therefore only one end of the heater 200 a is shown for convenience.

  As shown in these figures, the heater 200a has a long rod shape as a whole. However, the heater 200a is not necessarily limited to this, and can be variously changed depending on the specifications of the batch heat treatment apparatus to which the heater is applied. Can.

  As shown in FIGS. 10 and 11, the heater 200 a includes a first pipe 220 having a predetermined length, a second pipe 240 having a predetermined length and surrounding the outer peripheral surface of the first pipe 220, and a predetermined length. And a coil-type hot wire 270 wound around the outer peripheral surface of the first tube 220 at regular intervals.

  Since all of the first tube 220, the second tube 240, and the third tube 260 are applied to a heat treatment apparatus, the material of these tubes is preferably a high melting point material (for example, quartz).

  The first tube 220, the second tube 240, and the third tube 260 are preferably substantially the same in length. As shown in the drawing, the length of the first tube 220 is longer than the length of the second tube 240 and the third tube 260 in order to connect the terminal tube 500 to the conductive tube 510 described later. You can make it bigger. The first pipe 220, the second pipe 240, and the third pipe 260 are preferably all coaxial, but if necessary, the first pipe 220 and the second pipe 240 are coaxial, The three tubes 260 may be configured as a heater so that they are not coaxial with the first tube 220 and the second tube 240.

  In other words, the heater 200a can be configured such that the central axes of the first, second, and third tubes 220, 240, and 260 coincide with each other, but the first and second tubes 220 and 240 are not operated during the operation of the heater 200a. In some cases, the first tube 220 or the second tube 240 may be damaged depending on the degree of the looseness. To prevent this, the second tube 240 is placed below the center of the third tube 260. It is preferable that the second tube 260 is supported in contact with the third tube 260 even if loosening occurs during operation.

  The first tube 220 preferably has an outer diameter of about 10 mm, an inner diameter of about 6 mm, and a thickness of about 2 mm. The first tube 220 has a hollow space 224 inside.

  On the outer peripheral surface of the first tube 220, a heat wire 270 corresponding to a heating element is wound in a coil shape. The material of the heat wire 270 is preferably either nichrome or Kanthal.

  Kanthal is an alloy with high electrical resistance that uses iron as the main material. It is processed into a wire and used as a heating element. It belongs to the iron-chromium-aluminum system, and the standard components are 23% chromium and 6% aluminum. In addition, it contains 2% cobalt.

  The hot wire 270 preferably has a diameter of 0.6 mm to 0.8 mm.

  When the hot wire 270 is wound around the first tube 220, the pitch of the hot wire 270 is related to the amount of heat generated. That is, the heat ray 270 in the small pitch region generates a larger amount of heat than the large pitch region. Therefore, in order to uniformly heat the substrate, the heat generation amount must be kept constant over the entire area of the heater 200a. For this purpose, it is preferable to maintain the same pitch of the heat rays 270 regardless of the position on the first tube 220. If necessary, the pitch of the hot wires 270 can be changed according to the position on the first tube 220. For example, the pitch of the heat wires 270 disposed on the end portion side of the first tube 220 is made smaller than the pitch of the heat wires 270 disposed on the center portion side of the first tube 220 (that is, the amount of heat generated on the end portion side is increased). Thus, it is possible to supplement the heat loss that occurs when the end portion of the heater 200a comes into contact with the external environment.

  In order to prevent the hot wire 270 from falling off, a fixing cap 280 (FIG. 12) can be provided. The configuration of the fixed cap 280 will be described later.

  The second tube 240 is provided in a form surrounding the first tube 220 with a certain distance from the first tube 220. The second tube 240 preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm.

  The third tube 260 is provided in a form surrounding the second tube 240 with a certain distance from the second tube 240. The third tube 260 preferably has an outer diameter of about 30 mm, an inner diameter of about 22 mm, and a thickness of about 4 mm. An empty space 264 having an interval of about 2 mm is formed between the second tube 240 and the third tube 260.

  A conductive tube 510 described later is provided at the end of the first tube 220 so that electric power can be applied to the heat wire 270 wound on the outer peripheral surface of the first tube 220. There is no particular limitation on the connection method between the heat wire 270 and the external power source (not shown) through the conductive tube 510. Since this connection method is known to those skilled in the art, a detailed description thereof will be omitted.

  On the other hand, the heater 200a is preferably configured so that the first tube 220 around which the hot wire 270 is wound can be easily detached from the second tube 240 or the third tube 260. This is because when a problem such as a short circuit of the heat wire 270 occurs during use of the heater 200a, only the first tube 220 around which the heat wire 270 is wound is separated from the heater 200a attached to the heat treatment apparatus. By maintaining or exchanging the heater 200a, it is possible to easily maintain or replace the heater 200a in which a failure has occurred.

  Meanwhile, the heater 200a includes the first tube 220, the second tube 240, and the third tube 260 as basic components, but is not necessarily limited thereto. For example, the third pipe 260 may be omitted to simplify the overall configuration. A heater composed of only the first tube and the second tube will be described later.

  As described above, the heater 200a includes the spaces 224 and 264 through which the cooling gas flows. Therefore, when the cooling gas is flowed through the spaces 224 and 264 in the heater 200a after the heat treatment process is completed in the heat treatment apparatus 1, the temperature of the heater 200a itself can be quickly lowered and the temperature in the chamber can be rapidly lowered. . As a result, it is possible to shorten the time required for the process of lowering the temperature inside the chamber to a predetermined temperature or lower for unloading the substrate 10 after the heat treatment process is completed. Therefore, the productivity of the heat treatment process necessary for manufacturing the flat display and the solar cell can be greatly improved.

  Meanwhile, the first and second cooling units 300 and 400 may be provided for cooling the heater 200a. Further, the terminal portion 500 and the insulating portion 600 can be provided for the operation of the heater 200a.

  FIG. 12 is a view illustrating a state where the first and second cooling units 300 and 400, the terminal unit 500, and the insulating unit 600 are provided at the end of the heater 200a according to an embodiment of the present invention.

  FIG. 13 is an exploded perspective view showing the configuration of the first and second cooling units 300 and 400 provided at the end of the heater according to the embodiment of the present invention.

  First, the fixing cap 280 can be provided at both ends of the second tube 240. The fixing cap 280 prevents the hot wire 270 wound on the outer peripheral surface of the first tube 220 from falling off.

  The fixed cap 280 is formed in a cylindrical shape having a predetermined length. One end of the fixing cap 280 is formed so that the second tube 240 can be inserted inside and then brought into close contact, and the other end is a space formed between the first tube 220 and the second tube 240. A ring-shaped end surface having a size that can close 244 is formed. By providing the fixed cap 280 at the end of the second tube 240, the heat wire 270 wound on the outer peripheral surface of the first tube 220 is prevented from moving because its one end contacts the fixed cap 280. Falling out from between the tube 220 and the second tube 240 is prevented.

  The fixing cap 280 is preferably made of SUS material, and can apply electric power from the outside to the heat wire 270 that contacts the fixing cap 280.

  The first tube 220 passes through the center of the fixed cap 280 and extends to the outside, and a thread is formed on the outer peripheral surface of the extended portion, facilitating connection with the terminal unit 500 described later.

  The first cooling unit 300 cools the end of the heater 200a. The first cooling unit 300 uses the cooling water to cool the end of the heater 200a, specifically, the end of the third pipe 260 constituting the heater 200a, thereby reducing the heat loss of the third pipe 260. Can be prevented.

  The second cooling unit 400 allows the cooling gas to flow into a space formed between the second pipe 240 and the third pipe 260. Air, helium, nitrogen, or argon can be used as the cooling gas. Although it is preferable that the temperature of the cooling gas is generally room temperature, a gas cooled to room temperature or lower can be used if necessary.

  The 1st and 2nd cooling parts 300 and 400 can be similarly provided in the both ends of the 3rd pipe 260 which constitutes heater 200a.

  First, the configuration of the first cooling unit 300 will be described.

  The first cooling unit 300 cools the end of the third pipe 260 using cooling water supplied from the outside. The 1st cooling part 300 is provided in the both ends of the 3rd pipe 260 which constitutes heater 200a.

  The first cooling unit 300 may include a first main body 310, a cooling water inflow pipe 320 and a cooling water outflow pipe 330 provided on one side of the first main body 310.

  Cooling water is supplied to the first main body 310 from the outside. The first main body 310 forms a predetermined space inside. The first body 310 is formed in a ring shape, and the outer diameter of the first body 310 is formed in a size corresponding to the inner diameter of the flange 340 so that the first body 310 can be fixed to the chamber 100 by a flange 340 described later. The inner diameter may be formed in a size corresponding to the outer diameter of the third tube 260.

  Since one end of the first main body 310 is in close contact with the outer wall of the chamber 100, it is preferable to provide an O-ring 312 at the end close to the chamber 100 to prevent gas leakage and the like.

  The cooling water inflow pipe 320 and the cooling water outflow pipe 330 allow cooling water to flow into and out of a space formed inside the first body 310, thereby cooling the end of the third pipe 260. The cooling water inflow pipe 320 and the cooling water outflow pipe 330 may be provided apart from each other with a predetermined distance from the center line of the first body 310.

  At both ends of the heater 200a provided with the first cooling unit 300, a second cooling unit 400 for flowing a cooling gas into the space 264 between the second tube 240 and the third tube 260 of the heater 200a is provided. Can do.

  Next, the configuration of the second cooling unit 400 will be described.

  The second cooling unit 400 communicates with a ring-shaped second main body 410 that forms a space therein, and a space that is provided on one side of the second main body 410 and formed inside the second main body 410. And a gas pipe 420.

  One end of the second body 410 is open so that it can communicate with a space 264 formed between the second tube 240 and the third tube 260. Therefore, the cooling gas flowing in from the gas pipe 420 can flow into the space 264 through the second body 410 and can be discharged outside through the second body 410 again after cooling.

  Since the second cooling unit 400 is provided at both ends of the third pipe 260, the cooling gas is supplied from the gas pipe 420 of the second cooling unit 400 provided at one end of the third pipe 260, and then the space. H.264 can be discharged from the gas pipe 420 of the second cooling unit 400 provided at the other end of the third pipe 260.

  Subsequently, an installation process of the first and second cooling units 300 and 400 will be described.

  The first cooling unit 300 can be fixed in close contact with the outer surface of the chamber 100 by a flange 340. At this time, it is preferable that the first cooling unit 300 can be easily fixed to the outer wall of the chamber 100. Accordingly, in order to easily fix the first cooling unit 300 with the flange 340, it is preferable that one end of the flange 340 and one end of the first main body 310 are engageable with each other.

  The flange 340 can be bolted while being in close contact with the outer wall of the chamber 100. If the first cooling unit 300 can be firmly fixed to the outside of the chamber 100, the fixing method between the flange 340 and the chamber 100 is not particularly limited, and can be fixed by various methods other than the fixing method using bolts.

  In order for the first cooling unit 300 and the third tube 260 to be firmly fixed in a state where the first cooling unit 300 is fixed to the chamber 100 by the flange 340, the first cooling unit 300 is interposed between the first body 310 and the third tube 260. A collar 350 may be provided in the formed space, and O-rings 352 may be disposed at both ends of the collar 350. In addition, a heater cover 360 can be disposed at one end of the collar 350.

  The collar 350 and the O-ring 352 seal the gap between the first body 310 and the third tube 260, thereby preventing gas from flowing into the chamber 100, so that the interior of the chamber 100 is easily maintained in a vacuum. be able to.

  The heater cover 360 can firmly fix the third tube 260 and the first main body 310. The heater cover 360 may be fixed to one end of the first main body 310 with a bolt. In order to firmly maintain the fixed state of the heater cover 360, the outer diameters of the collar 350 and the heater cover 360 are preferably formed to be in close contact with the inner peripheral surface of the first main body 310.

  After the installation of the first cooling unit 300 is completed, the second main body 410 is provided at the end of the first tube 220 extending through the fixing cap 280, and the terminal unit 500 described later is screwed to the end. The second cooling unit 400 is fixed by bringing the terminal unit 500 into close contact with one end of the second body 410. In order to fix the second cooling unit 400, it is preferable that the heater cover 360 and the second main body 410 are also coupled with bolts.

  Next, an installation process of the terminal unit 500 and the insulating unit 600 will be described.

  FIG. 14 is an exploded perspective view showing configurations of the terminal portion 500 and the insulating portion 600 provided at the end of the heater 200a according to the embodiment of the present invention.

  First, the configuration of the terminal unit 500 will be described.

  The terminal unit 500 can be composed of a conductive tube 510 and a first fixing nut 520.

  15, FIG. 16 and FIG. 17 are diagrams showing a configuration of a conductive tube 510 according to an embodiment of the present invention.

  As shown in FIGS. 15, 16, and 17, one end of the conductive tube 510 is in contact with the end of the fixed cap 280, and an external power line is connected. The conductive tube 510 can be screwed onto the end of the first tube 220. The conductive tube 510 may be formed of a SUS material like the fixed cap 280 so that power can be easily applied to the fixed cap 280. The power line connected to the conductive tube 510 can be connected to one side surface of the conductive tube 510 by welding. However, an end of the power line is disposed between the first fixed nut 520 and the conductive tube 510, which will be described later, and connected. You can also

  The first fixing nut 520 presses one end of the conductive tube 510 so that the connection state between the conductive tube 510 and the fixed cap 280 can be maintained. The first fixing nut 520 is screwed to the end of the first tube 220. The first fixing nut 520 may be formed of a quartz material. Since the first fixing nut 520 has the same configuration as a general nut, detailed illustration and description thereof will be omitted.

  18 and 19 are views showing the configuration of the first protective nut 530 according to an embodiment of the present invention. FIGS. 20, 21 and 22 are views showing the configuration of the second protective nut 540 according to the embodiment of the present invention.

  The first and second protective nuts 530 and 540 prevent the conductive tube 510 or the first tube 220 from being damaged by an impact transmitted from the outside in a state where the conductive tube 510 is coupled to the end of the first tube 220. To do. The first and second protective nuts 530 and 540 may be provided between the fixed cap 280 and the insulating cap 610 so as to surround the outer peripheral surface of the conductive tube 510.

  Insulating part 600 is preferably provided for terminal part 500 provided for applying electric power to heat wire 270 in order to prevent leakage and contact with other conductors.

  Next, the configuration of the insulating unit 600 will be described.

  The insulating part 600 may include an insulating cap 610 and a second fixing nut 630.

  23, 24 and 25 are views showing a configuration of an insulating cap 610 according to an embodiment of the present invention.

  As shown in FIGS. 23, 24, and 25, the insulating cap 610 serves to electrically insulate the conductive tube 510. The conductive tube 510 and the first fixing nut 520 can be coupled to the end of the first tube 220, and then the insulating cap 610 can be screwed together. At this time, the conductive tube 510 and the first fixing nut 520 are disposed in a space formed inside the insulating cap 610, and the inner peripheral surface thereof is separated from the conductive tube 510 and the first fixed nut 520. Preferably it is.

  A groove 620 is formed on one side surface of the insulating cap 610, and a power line for applying power to the conductive tube 510 in the insulating cap 610 can be provided through the groove 620. The insulating cap 610 is preferably manufactured using quartz.

  The second fixing nut 630 serves to maintain the connection state of the insulating cap 610 after the insulating cap 610 is provided on the first pipe 220. The second fixing nut 630 may be provided at the end portion of the first tube 220.

  The first and second cooling units 300 and 400, the terminal unit 500, and the insulating unit 600 configured as described above can operate as follows.

  The substrate loaded in the chamber 100 is heated using a plurality of heaters 200a and heat-treated. Since the electric power supplied for the heat generation of the heater 200a is supplied to the heat wire 270 of the heater 200a via the terminal unit 500, the operation of the heater 200a can be continuously maintained, and the electric power is supplied by the insulating unit 600. It is possible to prevent leakage inside.

  During the heat treatment by operating the heater 200a, the cooling water is caused to flow into both ends of the heater 200a using the first cooling units 300 provided at both ends of the heater 200a to cool the ends of the heater 200a. can do.

  After the heat treatment step, the cooling gas is caused to flow through the space 264 in the heater 200a using the second cooling unit 400 provided at both ends of the heater 200a, so that the temperature of the heater 200a itself is rapidly reduced. The temperature inside the chamber 100 can be rapidly reduced. Therefore, the heat treatment apparatus 1 and the heater 200a according to the present invention can shorten the time required for lowering the temperature inside the chamber 100 to a predetermined temperature or less for unloading the substrate 10 after the heat treatment process is completed. Therefore, the productivity of the heat treatment process necessary for manufacturing the flat display and the solar cell can be greatly improved.

  On the other hand, continuous use of the heater 200a may cause damage to any one of the first tube 220, the second tube 240, and the third tube 260. In order to perform the heat treatment continuously, it is necessary to replace the damaged tube, and the replacement operation is performed through the following steps.

  The procedure for exchanging the first tube 220 and the second tube 240 is as follows.

  First, the insulating part 600 is removed. Then, by removing the conductive tube 510 screwed with the first tube 220 at the terminal portion 500 provided at the end of the first tube 220 and releasing the fixation of the first tube 220, the first tube 220 is removed. Can be exchanged. Thereafter, the second pipe 240 can be separated by removing the fixing cap 280 and the second cooling part 400. In this way, the first tube 220 or the second tube 240 that needs to be replaced is replaced with a new tube, and then assembled by following the reverse procedure of disassembly.

  The procedure for exchanging the third tube 260 is as follows.

  First, since the removal of the terminal part 500 and the second cooling part 400 for exchanging the first pipe 220 and the second pipe 240 is the same as described above, detailed description thereof is omitted.

  In a state where the terminal unit 500 and the second cooling unit 400 are removed, the fixing to the end portion of the third pipe 260 is also released, and in this state, by removing the collar 350, the O-ring 352 and the heater cover 360, The third tube 260 can be replaced with a new tube. The flange 340 for fixing the first main body 310 to the chamber 100 can be removed when the third pipe 260 is replaced. However, when the flange 340 is re-installed at both ends of the chamber 100, both flanges 340 are aligned. Since it takes a long time to align, it is preferable not to remove the flange 340.

  After replacing the third pipe 260 with a new pipe, assembly is performed following the reverse procedure of disassembly, and the heater 200a is completed.

  As described above, the heater 200a of the present invention can easily replace and maintain one damaged tube when one of the tubes constituting the heater 200a is damaged. is there.

  26 and 27 are a cross-sectional perspective view and a cross-sectional view, respectively, showing the configuration of a heater 200b according to another embodiment of the present invention. For reference, in FIGS. 26 and 27, the shape and structure of both ends of the heater 200b are the same, and therefore, only one end of the heater 200b is shown for convenience.

  As shown in these drawings, the heater 200b has a long rod shape as a whole, but is not necessarily limited to this, and can be variously changed depending on the specifications of the batch heat treatment apparatus to which the heater is applied. be able to.

  As shown in FIGS. 26 and 27, the heater 200b includes a first tube 220b having a predetermined length, a second tube 240b having a predetermined length and surrounding the first tube 220b, and a first tube. 220b and a heating element 270b inserted inside.

  Since the first tube 220b and the second tube 240b are applied to a heat treatment apparatus, the material of these tubes is preferably a high melting point material (for example, quartz).

  It is preferable that the first tube 220b and the second tube 240b have substantially the same length and are coaxial. The first tube 220b preferably has an outer diameter of about 10 mm, an inner diameter of about 6 mm, and a thickness of about 2 mm. The second tube 240b is provided so as to surround the first tube with a certain distance from the first tube 220b. The second tube 240b preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm. An empty space 246b having an interval of about 2 mm is formed between the first tube 220b and the second tube 240b.

  A heating element 270b is inserted into the first tube 220b. The heating element 270b preferably has a rod shape, but is not necessarily limited thereto. The material of the heating element 270b is preferably Kanthal.

  When inserting the heating element 270b into the first tube 220b, it is preferable that the inner peripheral surface of the first tube 220b and the outer peripheral surface of the heating element 270b are slightly separated from each other. The reason for this is that if the inner peripheral surface of the first tube 220b and the outer peripheral surface of the heating element 270b come into contact with each other, the difference in thermal expansion coefficient between the first tube 220b and the heating element 270b occurs during the heat treatment process. This is because the one tube 220b may be damaged. Therefore, the distance between the inner peripheral surface of the first tube 220b and the outer peripheral surface of the heating element 270b is preferably determined in consideration of the thermal expansion coefficient of the heating element 270b.

  A conductive tube 510b is provided at the end of the heating element 270b so that electric power can be applied to the heating element 270b. There is no particular limitation on the method of connecting the heating element 270b and the external power source (not shown) via the conductive tube 510b, and detailed description thereof will be omitted.

  On the other hand, as described above, since the end of the heating element 270b is connected to the external power source, the connecting means for connecting the heating element 270b and the external power source, for example, a conductive wire (copper wire) or the like is removed from the heat generated from the heating element 270b. It needs to be protected. For this reason, the diameter of the heating element 270b can be made different in the central portion and the end portion of the heating element 270b.

  That is, as shown in FIG. 27, it is preferable that the heating element 270b is configured such that the cross-sectional area of the heating element 270b is larger at both ends than the center. Since the amount of heat generated by the heating element 270b is inversely proportional to the cross-sectional area of the heating element 270b, increasing the sectional area of the end of the heating element 270b decreases the amount of heat generated at the end of the heating element 270b. Damage to the connecting means due to heat can be prevented.

  The heater 200b according to the present invention is characterized by a structure having a space 244b between the first pipe 220b and the second pipe 240b so that the cooling gas flows through the inside of the heater 200b. That is, the cooling gas flows through the space 244b inside the heater 200b. There is no particular limitation on the method for allowing the cooling gas to flow through the space 244b, and a detailed description thereof will be omitted. Air, helium, nitrogen, or argon can be used as the cooling gas. Although it is preferable that the temperature of the cooling gas is generally room temperature, a gas cooled to room temperature or lower can be used if necessary.

  On the other hand, the heater 200b is preferably configured such that the heating element 270b can be easily detached from the first tube 220b or the second tube 240b. As a result, when a problem such as short-circuiting of the heating element 270b occurs during use of the heater 200b, a problem is caused by maintaining or replacing only the heating element 270b from the heater 200b mounted on the heat treatment apparatus. There is an advantage that the heater 200b in which the above has occurred can be easily maintained or replaced.

  The heater 200b shown in FIGS. 26 and 27 can be used in the same manner as the heaters 200 and 200a described above. In addition, the first and second cooling units 300 and 400, the terminal unit 500, and the insulating unit 600 can be provided at both ends of the heater 200b, and the configuration and operation thereof are the same as described above. Description is omitted.

  According to the present invention, the substrate loaded in the chamber is heated by the plurality of heaters corresponding to each substrate, whereby the substrate can be heat-treated so that the in-plane temperature becomes uniform. In addition, since a plurality of substrates can be heat-treated at the same time, productivity of a flat panel display and a solar cell can be improved. Furthermore, by providing a space for the flow of the cooling gas inside the heater, the inside of the chamber of the heat treatment apparatus can be quickly cooled after the heat treatment step, so that the time required for the substrate unloading process is shortened, and a flat panel display or Productivity of the heat treatment process necessary for manufacturing solar cells and the like can be dramatically improved. Therefore, it can be said that the industrial applicability of the present invention is extremely high.

  As mentioned above, although specific embodiment was described in detailed description of this invention, it can change variously within the range which does not deviate from the summary of this invention. Therefore, the scope of rights of the present invention should not be limited to the above-described embodiments, but should be defined based on the description of the claims and equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Heat processing apparatus 10 Substrate 12 Holder 100 Chamber 102 Frame 104 Door 106 Cover 108 Boat 120 Main heater unit 140a First auxiliary heater unit 140b Second auxiliary heater unit 150a First auxiliary heater 150b Second auxiliary heater 160 Gas supply pipe 170 Gas exhaust Pipe 180 Cooling pipe 200 Main heater 200a, 200b Heater 220a, 220b First pipe 240a, 240b Second pipe 260 Third pipe 280 Fixing cap 300 First cooling section 310 First main body 320 Cooling water inflow pipe 330 Cooling water outflow pipe 340 Flange 400 Cooling part 410 Second body 420 Gas pipe 500 Terminal part 510, 510b Conductive pipe 520 First fixing nut 530 First protective nut 540 Second protective nut 600 Insulating part 610 Insulating cap 620 Groove 630 Second fixing nut

Claims (30)

  A batch type heat treatment apparatus, wherein each substrate is heated by a plurality of corresponding heaters during the heat treatment in order to heat treat a plurality of substrates simultaneously. A batch type heat treatment apparatus for simultaneously heat treating a plurality of substrates,
A chamber for providing a heat treatment space for the plurality of substrates;
A boat for mounting and supporting the plurality of substrates;
A plurality of main heater units that are arranged at regular intervals along the stacking direction of the substrates, each of which is composed of a plurality of main heaters,
The batch type heat treatment apparatus, wherein the substrate is disposed between the plurality of main heater units.   The batch type heat treatment apparatus according to claim 2, wherein the substrate is mounted on the boat while being placed on a substrate holder.   The batch-type heat treatment apparatus according to claim 2, wherein the plurality of main heaters are arranged at regular intervals in parallel with the short side of the substrate.   The batch type heat treatment apparatus according to claim 2, wherein a main heater of an arbitrary main heater unit is arranged in alignment with a main heater of a main heater unit closest to the arbitrary main heater unit.   The batch type heat treatment apparatus according to claim 2, wherein a main heater of an arbitrary main heater unit is arranged to be shifted from a main heater of a main heater unit closest to the arbitrary main heater unit.   The batch-type heat treatment apparatus according to claim 2, further comprising a plurality of auxiliary heater units for preventing heat loss inside the chamber.   The plurality of auxiliary heater units include a first auxiliary heater unit disposed in parallel with a short side of the substrate and a second auxiliary heater unit disposed in parallel with a long side of the substrate. The batch type heat treatment apparatus according to claim 7. The first auxiliary heater unit is composed of a plurality of first auxiliary heaters arranged on both sides of the main heater unit in parallel with the main heater,
The batch type heat treatment apparatus according to claim 8, wherein the second auxiliary heater unit includes a plurality of second auxiliary heaters disposed on both sides of the main heater unit perpendicular to the main heater.   The batch type heat treatment apparatus according to claim 2, further comprising a plurality of cooling pipes for cooling the inside of the chamber.   The batch type heat treatment apparatus according to claim 10, wherein the cooling pipe is disposed between the plurality of main heaters along a short side direction of the substrate.   The batch type heat treatment apparatus according to claim 10, wherein a cooling gas flows inside the cooling pipe, and the cooling pipe is made of a material having high thermal conductivity.   The batch heat treatment apparatus according to claim 2, further comprising a gas supply unit that supplies a process gas into the chamber and a gas discharge unit that discharges exhaust gas from the chamber. The gas supply unit includes a gas supply pipe formed with a plurality of first gas holes through which a process gas flows;
The batch type heat treatment apparatus according to claim 13, wherein the gas discharge unit includes a gas discharge pipe in which a plurality of second gas holes into which exhaust gas flows are formed.   A heater applicable to a batch-type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the heater includes a space in which a cooling gas flows. A heater applicable to a batch-type heat treatment apparatus for simultaneously heat-treating a plurality of substrates,
The first tube;
A second tube surrounding the first tube at a certain distance from the first tube;
A heating element inserted into the first pipe,
A heater characterized in that a cooling gas flows through a space between the first pipe and the second pipe.   The heater according to claim 16, wherein the heating element has a cross-sectional area at both ends larger than a cross-sectional area at the center.   The heater according to claim 16, wherein the heating element is separable from the first tube or the second tube. A heater applicable to a batch-type heat treatment apparatus for simultaneously heat-treating a plurality of substrates,
The first tube;
A coiled hot wire wound on the outer peripheral surface of the first tube;
A second pipe that surrounds the first pipe at a certain distance from the first pipe;
A heater characterized in that a cooling gas flows through the central space of the first pipe. A heater applicable to a batch-type heat treatment apparatus for simultaneously heat-treating a plurality of substrates,
The first tube;
A coiled hot wire wound on the outer peripheral surface of the first tube;
A second tube surrounding the first tube at a certain distance from the first tube;
A third tube surrounding the second tube with a certain distance from the second tube;
A heater characterized in that a cooling gas flows through at least one of a central space of the first pipe or a space between the second pipe and the third pipe.   The pitch of the coil-type hot wire is the same regardless of the position on the first tube, or is changed according to the position on the first tube. The heater according to item 1.   The heater according to claim 20, wherein the first tube around which the coiled hot wire is wound is separable from the second tube or the third tube.   21. The heater according to claim 20, wherein a first cooling part through which cooling water for cooling the third pipe flows is provided at both ends of the third pipe.   24. The second cooling part for flowing a cooling gas through the space between the second pipe and the third pipe is further provided at both ends of the third pipe. The heater described. The first cooling part is
A first body forming a space therein;
A cooling water inflow pipe for allowing cooling water to flow into the internal space of the first body;
The heater according to claim 23, further comprising a cooling water outflow pipe for allowing the cooling water to flow out from the internal space of the first main body. The second cooling unit is
A second body forming a space therein;
A gas pipe communicating with the internal space of the second body,
The heater according to claim 24, wherein the internal space of the second main body communicates with the space between the second pipe and the third pipe. A terminal portion for supplying power to the heat wire;
The heater according to claim 20, further comprising an insulating portion that insulates the terminal portion.   28. The heater according to claim 27, further comprising a fixed cap provided at an end of the second pipe and connected to the heat ray. The terminal portion is
A conductive tube provided on the first tube and connected to an external power source;
28. The heater according to claim 27, further comprising a fixing nut for bringing the conductive tube into close contact with a fixing cap of the heater. The insulating part includes an insulating cap that forms a space therein and surrounds the terminal part;
The heater according to claim 27, wherein a groove is formed on one side surface of the insulating cap.

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