JP4734885B2 - Heating unit - Google Patents

Heating unit Download PDF

Info

Publication number
JP4734885B2
JP4734885B2 JP2004295668A JP2004295668A JP4734885B2 JP 4734885 B2 JP4734885 B2 JP 4734885B2 JP 2004295668 A JP2004295668 A JP 2004295668A JP 2004295668 A JP2004295668 A JP 2004295668A JP 4734885 B2 JP4734885 B2 JP 4734885B2
Authority
JP
Japan
Prior art keywords
cooling gas
pipe
heater lamp
heating unit
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004295668A
Other languages
Japanese (ja)
Other versions
JP2006108526A (en
Inventor
徹 小田垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2004295668A priority Critical patent/JP4734885B2/en
Publication of JP2006108526A publication Critical patent/JP2006108526A/en
Application granted granted Critical
Publication of JP4734885B2 publication Critical patent/JP4734885B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Control Of Resistance Heating (AREA)
  • Resistance Heating (AREA)

Description

この発明は、半導体ウエハの加熱に利用される熱源としてヒータランプを用いた加熱ユニットに関するものである。   The present invention relates to a heating unit using a heater lamp as a heat source used for heating a semiconductor wafer.

従来の半導体ウエハの加熱には、セラミックヒータや内部にフィラメントを有するヒータランプが利用されていた。
ヒータランプは、セラミックヒータに比べ、昇温速度が速く、温度制御が行い易いメリットがあり、近年、半導体ウエハを加熱するための熱源として定着している。 Conventional heating of a semiconductor wafer has utilized a ceramic heater or a heater lamp having a filament inside.
The heater lamp has a merit that the temperature rise rate is higher than that of the ceramic heater and the temperature can be easily controlled. In recent years, the heater lamp has been fixed as a heat source for heating the semiconductor wafer.

図４は、従来のヒータランプを用いた加熱ユニットの説明図であり、
ヒータランプ１は、石英ガラス製のバルブ１０の内部にフィラメント１１が配置されており、両端に形成された封止部１２から外部リード１３が突出しており、この外部リード１３には、給電線９が接続されている。
また、バルブ１０内には、不活性ガスとハロゲン化物が封入されており、このヒータランプ１は定格６００Ｗ、１２．５Ａで点灯されるものである。 FIG. 4 is an explanatory diagram of a heating unit using a conventional heater lamp,
In the heater lamp 1, a filament 11 is arranged inside a quartz glass bulb 10, and external leads 13 protrude from sealing portions 12 formed at both ends. Is connected.
An inert gas and a halide are enclosed in the bulb 10, and the heater lamp 1 is lit at a rating of 600W and 12.5A.

そして、図４に示すように、ヒータランプ１は、耐熱性の保持部材Ｈによって基台３に保持され、加熱ユニットを構成するものであり、この加熱ユニットが複数組み合わされて、所定の形状の加熱装置を構成する。
この加熱ユニットは、図４に示すように、ヒータランプ１が被処理物を加熱するためのチャンバー内部側に向いており、基台１の背面側が大気雰囲気側になっている。 And as shown in FIG. 4, the heater lamp 1 is hold | maintained at the base 3 by the heat resistant holding member H, and comprises a heating unit, A plurality of this heating unit is combined, and a predetermined shape is formed. Configure the heating device.
As shown in FIG. 4, the heating unit is directed to the inside of the chamber for the heater lamp 1 to heat the object to be processed, and the back side of the base 1 is on the atmosphere side.

このようなヒータランプ１は、昇温速度を非常に速くするために、具体的には１００℃／秒の昇温速度を得るために、ランプ設計の限界近くまでの電力を入力するものであり、ヒータランプ１のバルブ１０の温度が８５０℃まで到達して、管壁温度の限界で使用している。   Such a heater lamp 1 inputs electric power up to the limit of the lamp design in order to make the temperature rising rate very fast, specifically, to obtain a temperature rising rate of 100 ° C./second. The temperature of the bulb 10 of the heater lamp 1 reaches 850 ° C. and is used at the limit of the tube wall temperature.

しかも、点灯消灯の繰り返しサイクルが短時間化すると、使用状態によっては管壁温度の限界を超える場合があり、バルブ１０が早期に黒化し、ヒータランプが使用不能となる問題があった。   In addition, if the repeated cycle of turning on and off is shortened, there is a case where the limit of the tube wall temperature may be exceeded depending on the use state, and there is a problem that the bulb 10 is blackened early and the heater lamp becomes unusable.

さらには、バルブ１０の高温化に伴い、バルブ１０に含まれている水分などの不純物がチャンバー内に放出する現象が顕著に現れ、加熱物を汚染するという問題があった。   Furthermore, as the temperature of the bulb 10 is increased, a phenomenon that impurities such as moisture contained in the bulb 10 are released into the chamber appears remarkably, and there is a problem that the heated object is contaminated.

このような問題は、ヒータランプの高出力化が進む中で、極めて大きな問題であり、ヒータランプの高出力化を阻害する大きな要因となっていた。
特開２００１−２１０６０４号 Such a problem is an extremely large problem as the output of the heater lamp is increased, and has been a major factor that hinders the increase in the output of the heater lamp.
JP 2001-210604 A

本発明は、このような問題を解決するためになされたものであって、ヒータランプへの入力電力を大きくし高出力化しても、ヒータランプのバルブが黒化せず、しかも、被処理物を加熱するチャンバー内にバルブからの不純物が放出されない加熱ユニットを提供するものである。   The present invention has been made to solve such a problem, and even when the input power to the heater lamp is increased to increase the output, the bulb of the heater lamp does not become black and the workpiece is processed. A heating unit is provided in which impurities from the valve are not released into a chamber for heating the chamber.

この発明の加熱ユニットは、チャンバー内にヒータランプを備えた加熱ユニットにおいて、前記ヒータランプを内臓し、両端に封止部が形成された外管が前記チャンバー内に配置され、当該外管には、冷却ガス流入管と冷却ガス流出管が設けられるとともに、これら冷却ガス流入管と冷却ガス流出管は前記チャンバー外に伸び出しており、前記ヒータランプのフィラメントと電気的に繋がる外部リード棒が当該ヒータランプの両端の封止部から突出し、前記外部リード棒には給電部材が接続されていて、当該給電部材がそれぞれ前記冷却ガス流入管と冷却ガス流出管に挿通されて、チャンバー外に伸び出していることを特徴とする。
The heating unit according to the present invention is a heating unit having a heater lamp in a chamber, and an outer tube having a built-in heater lamp and having sealing portions formed at both ends is disposed in the chamber. A cooling gas inflow pipe and a cooling gas outflow pipe are provided, and the cooling gas inflow pipe and the cooling gas outflow pipe extend out of the chamber, and an external lead bar electrically connected to the filament of the heater lamp Projecting from the sealing portions at both ends of the heater lamp, a power supply member is connected to the external lead rod, and the power supply members are respectively inserted into the cooling gas inflow pipe and the cooling gas outflow pipe and extend out of the chamber. It is characterized by.

本発明の加熱ユニットによれば、ヒータランプの昇温速度を速めるために入力電力を大きくして、バルブの管壁温度が高くなっても、外管内には冷却ガスが流れているために、効果的にヒータランプを冷却することができ、バルブの管壁温度を十分に下げることができ、バルブの黒化を防止することができる。   According to the heating unit of the present invention, the input power is increased in order to increase the heating rate of the heater lamp, and the cooling gas flows in the outer tube even when the tube wall temperature of the bulb is increased. The heater lamp can be effectively cooled, the bulb wall temperature of the bulb can be sufficiently lowered, and the blackening of the bulb can be prevented.

さらには、ヒータランプのバルブが高温化し、バルブ内に含まれている不純物がバルブ外に放出されても、ヒータランプが外管で完全に覆われており、チャンバー内に露出していない構造であるので、放出された不純物は、チャンバー内を汚染せず、冷却ガスと共に冷却ガス流出管から外部に排出され、加熱物を汚染することがない。   Furthermore, even when the heater lamp bulb is heated and impurities contained in the bulb are released outside the bulb, the heater lamp is completely covered with the outer tube and is not exposed to the chamber. Therefore, the released impurities do not contaminate the inside of the chamber and are discharged to the outside together with the cooling gas from the cooling gas outflow pipe, so that the heated object is not contaminated.

本発明の加熱ユニットを、図１を用いて説明する。
ヒータランプ１は、外径１０ｍｍの石英ガラス製のバルブ１０の内部にフィラメント１１が配置されており、両端に形成された封止部１２からフィラメントに電気的に繋がる外部リード１３が突出している。
バルブ１０内には、不活性ガスとハロゲン化物が封入されており、このヒータランプ１は定格６００Ｗ、１２．５Ａで点灯されるものである。 The heating unit of the present invention will be described with reference to FIG.
In the heater lamp 1, a filament 11 is arranged inside a bulb 10 made of quartz glass having an outer diameter of 10 mm, and external leads 13 that are electrically connected to the filament protrude from sealing portions 12 formed at both ends.
An inert gas and a halide are enclosed in the bulb 10, and the heater lamp 1 is lit at a rating of 600W and 12.5A.

ヒータランプ１は、内径１５ｍｍ、外径１８ｍｍの石英ガラス製の外管２内に配置されており、この外管２の両端には封止部２１が形成されている。
外管２は、その両端近傍の側面に同一方向、後述する基台３方向に向けて冷却ガス流入管２２と冷却ガス流出管２３が設けられており、この冷却ガス流入管２２と冷却ガス流出管２３は、外管２の内部に連通している。 The heater lamp 1 is disposed in an outer tube 2 made of quartz glass having an inner diameter of 15 mm and an outer diameter of 18 mm, and sealing portions 21 are formed at both ends of the outer tube 2.
The outer pipe 2 is provided with a cooling gas inflow pipe 22 and a cooling gas outflow pipe 23 in the same direction on the side surfaces in the vicinity of both ends, and in the direction of the base 3 to be described later. The tube 23 communicates with the inside of the outer tube 2.

ＳＵＳ製の耐熱製の基台３は、冷却ガス流入管２２と冷却ガス流出管２３が貫通する貫通孔３１が形成され、この貫通孔３１に冷却ガス流入管２２と冷却ガス流出管２３が挿入貫通されて、基台３の大気雰囲気側に伸び出している。   The heat-resistant base 3 made of SUS has a through hole 31 through which the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 pass, and the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 are inserted into the through hole 31. It penetrates and extends to the atmosphere side of the base 3.

基台３の大気雰囲気側には、外管保持機構４が設けられており、基台３の大気雰囲気側の面３ａに不図示のネジによって固定されたＳＵＳ製の枠部材４１と同じくＳＵＳ製の底部材４２を有しており、枠部材４１と底部材４２によって形成された内部空間に冷却ガス流入管２２と冷却ガス流出管２３が延在している。   An outer tube holding mechanism 4 is provided on the air atmosphere side of the base 3 and is made of SUS, similar to the SUS frame member 41 fixed to the air atmosphere side surface 3a of the base 3 by screws (not shown). The cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 extend in an internal space formed by the frame member 41 and the bottom member 42.

基台３の貫通孔３１を挿通した冷却ガス流入管２２と冷却ガス流出管２３には、リング部材４３が嵌め込まれており、このリング部材４３はネジ等によって基台３の大気雰囲気側の面３ａに固定されている。
そして、リング部材４３の内部には、冷却ガス流入管２２と冷却ガス流出管２３の外周面に接触してリング部材４３の内部で潰されるＯリング４４が配置されており、このＯリング４４によって、基台３の貫通孔３１と冷却ガス流入管２２と冷却ガス流出管２３の外周面との隙間を埋め、ヒータランプ１が配置されたチャンバー内部側と冷却ガス流入管２２と冷却ガス流出管２３が伸びだす大気雰囲気側を完全に隔離するものである。 A ring member 43 is fitted into the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 inserted through the through hole 31 of the base 3, and the ring member 43 is a surface on the atmosphere side of the base 3 by screws or the like. It is fixed to 3a.
In the ring member 43, an O-ring 44 that contacts the outer peripheral surfaces of the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 and is crushed inside the ring member 43 is disposed. The gap between the through hole 31 of the base 3, the cooling gas inflow pipe 22 and the outer peripheral surface of the cooling gas outflow pipe 23 is filled, and the inside of the chamber where the heater lamp 1 is disposed, the cooling gas inflow pipe 22 and the cooling gas outflow pipe. 23 completely isolates the atmosphere side where 23 starts.

枠部材４１と底部材４２によって形成された内部空間には、底部材４２の内面４２ａにネジ等によって固定された冷却ガス流入管２２と冷却ガス流出管２３を固定する固定部材４５が配置されている。
この固定部材４５は、筒状の貫通孔４５ａを有しており、この貫通孔４５ａに冷却ガス流入管２２と冷却ガス流出管２３の端部が挿入されている。 In the internal space formed by the frame member 41 and the bottom member 42, a cooling gas inflow pipe 22 and a fixing member 45 for fixing the cooling gas outflow pipe 23 fixed to the inner surface 42a of the bottom member 42 by screws or the like are disposed. Yes.
The fixing member 45 has a cylindrical through hole 45a, and ends of the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 are inserted into the through hole 45a.

冷却ガス流入管２２と冷却ガス流出管２３の端部の一部は、外管２方向に向けて切り取られた段形状になっており、切り取られた部分２２ａから後述する給電部材６が折り曲げられて冷却ガス流入管２２と冷却ガス流出管２３の外部に導き出される構造になっている。   Part of the ends of the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 has a step shape cut out in the direction of the outer pipe 2, and a power supply member 6 described later is bent from the cut out portion 22 a. Thus, the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 are led to the outside.

そして、固定部材４５の貫通孔４５ａの内面と、冷却ガス流入管２２と冷却ガス流出管２３の外周面との間にＯリング４６が設けられており、冷却ガス流入管２２と冷却ガス流出管２３の外周面と貫通孔４５ａの隙間を埋め、更には、冷却ガス流入管２２と冷却ガス流出管２３を固定部材４５に固定するものである。   An O-ring 46 is provided between the inner surface of the through hole 45a of the fixing member 45 and the outer peripheral surfaces of the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23, and the cooling gas inflow pipe 22 and the cooling gas outflow pipe are provided. 23, and the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 are fixed to the fixing member 45.

底部材４２は、貫通孔が設けられており、この貫通孔にガス管５に繋がるガスジャケット５１が嵌め込まれ、ガスジャケット５１の先端が固定部材４５の貫通孔４５ａ内に伸び出している。   The bottom member 42 is provided with a through hole. A gas jacket 51 connected to the gas pipe 5 is fitted into the through hole, and the tip of the gas jacket 51 extends into the through hole 45 a of the fixing member 45.

つまり、外管２に設けられた冷却ガス流入管２２と冷却ガス流出管２３は、外管保持機構４のリング部材４３と固定部材４５によって基台３に固定される。この結果、冷却ガス流入管２２と冷却ガス流出管２３によって、外管２が基台３に固定された構造となる。   That is, the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23 provided in the outer pipe 2 are fixed to the base 3 by the ring member 43 and the fixing member 45 of the outer pipe holding mechanism 4. As a result, the outer pipe 2 is fixed to the base 3 by the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23.

ヒータランプ１の両端に設けられた外部リード棒１３にはニッケル製の直径０．８ｍｍの線状体よりなる給電部材６が接続されており、この給電部材６は、冷却ガス流入管２２と冷却ガス流出管２３の内部を通り、基台３の大気雰囲気側に伸び出し、冷却ガス流入管２２と冷却ガス流出管２３の端部の切り取られた部分２２ａで折り曲げられ、固定部材４５の貫通孔４５ａの側面に形成された開口を通り、底部材４２に設けられた給電機構７に繋がっている。
この給電部材６は、硬性を有するものであり、ヒータランプ１は給電部材６によって外管２内に一定の間隙を保った状態で配置されている。 The external lead rods 13 provided at both ends of the heater lamp 1 are connected to a power supply member 6 made of nickel and having a diameter of 0.8 mm. The power supply member 6 is connected to the cooling gas inflow pipe 22 and the cooling member. It passes through the inside of the gas outflow pipe 23, extends to the atmosphere side of the base 3, is bent at the cooling gas inflow pipe 22 and the portion 22 a cut off at the end of the cooling gas outflow pipe 23, and is passed through the fixing member 45. It passes through the opening formed on the side surface of 45a and is connected to the power feeding mechanism 7 provided on the bottom member.
The power supply member 6 is rigid, and the heater lamp 1 is disposed in a state where a constant gap is maintained in the outer tube 2 by the power supply member 6.

給電機構７は、底部材４２を貫通する導電性の中継部７１があり、この中継部７１の一端側にヒータランプの外部リード棒１３に繋がる給電部材６が接続され、他端側に電源に繋がる給電線９が接続されている。   The power feeding mechanism 7 has a conductive relay portion 71 that penetrates the bottom member 42, the power feeding member 6 connected to the external lead rod 13 of the heater lamp is connected to one end side of the relay portion 71, and the power source is connected to the other end side. A connecting power supply line 9 is connected.

このような加熱ユニットによれば、図１に示す右側のガス管５から窒素ガスよりなる冷却ガスが固定部材４５の貫通孔４５ａに流れ込み、貫通孔４５ａ内に位置する冷却ガス流入管２２の切り取られた部分２２ａから冷却ガス流入管２２内に冷却ガスが流れ込み、さらに、冷却ガス流入管２２内に流れ込んだ冷却ガスが、外管２内に流れ込み、外管２の反端側に設けられた冷却ガス流出管２３から固定部材４５の貫通孔を通り、左側のガス管５から排気される構造になっている。   According to such a heating unit, the cooling gas made of nitrogen gas flows from the right gas pipe 5 shown in FIG. 1 into the through hole 45a of the fixing member 45, and the cooling gas inflow pipe 22 located in the through hole 45a is cut off. The cooling gas flows into the cooling gas inflow pipe 22 from the formed portion 22a, and the cooling gas that has flowed into the cooling gas inflow pipe 22 flows into the outer pipe 2 and is provided on the opposite end side of the outer pipe 2. The cooling gas outlet pipe 23 passes through the through hole of the fixing member 45 and is exhausted from the left gas pipe 5.

また、図１中にＡ−Ａ断面図である図３に示すように、必要に応じて、バルブ１０の反加熱物方向の外周に白色セラミック製の反射膜８を設けてもよい。
これは、フィラメント１１から放射された光を効率よく加熱物に照射するものである。 Moreover, as shown in FIG. 3 which is AA sectional drawing in FIG. 1, you may provide the reflective film 8 made from a white ceramic in the outer periphery of the non-heating object direction of the valve | bulb 10 as needed.
This efficiently irradiates the heated object with the light emitted from the filament 11.

この結果、ヒータランプ１の昇温速度を速めるために入力電力を大きくして、管壁温度が高くなっても、外管２内には冷却ガスが流れているために、効果的にヒータランプ１を冷却することができ、管壁温度を十分に下げることができ、バルブ１０の黒化を防止することができる。   As a result, even if the input power is increased in order to increase the heating rate of the heater lamp 1 and the tube wall temperature increases, the cooling gas flows in the outer tube 2, so that the heater lamp can be effectively used. 1 can be cooled, the tube wall temperature can be lowered sufficiently, and blackening of the valve 10 can be prevented.

さらには、バルブ１０が高温化し、バルブ１０内に含まれている水分などの不純物がバルブ１０外に放出されても、ヒータランプ１が外管２で完全に覆われており、チャンバー内に露出していない構造であるので、放出された水分などの不純物が、チャンバー内を汚染せず、冷却ガスと共に冷却ガス流出管２３から外部に排出され、加熱物を汚染することがないものである。   Furthermore, even if the bulb 10 is heated to a high temperature and impurities such as moisture contained in the bulb 10 are released to the outside of the bulb 10, the heater lamp 1 is completely covered with the outer tube 2 and exposed to the chamber. Since the structure is not formed, impurities such as released moisture do not contaminate the inside of the chamber and are discharged to the outside together with the cooling gas from the cooling gas outflow pipe 23, so that the heated object is not contaminated.

そして、反射膜８が高温になり、反射膜８から不純物が放出されても、或いは、反射膜８が何らかの理由で剥離しても、それらの物質は、外管２が存在するためにチャンバー内部に浮遊することなく、冷却ガスと共に冷却ガス流出管２３から外部に排出され、加熱物を汚染することがないものである。   Even if the reflection film 8 becomes high temperature and impurities are released from the reflection film 8 or the reflection film 8 is peeled off for some reason, those substances are contained in the chamber because the outer tube 2 exists. Without being floated on, it is discharged from the cooling gas outflow pipe 23 together with the cooling gas, and does not contaminate the heated object.

図２は、本発明の加熱ユニットの他の実施例の説明図である。
図２に示す加熱ユニットは、ヒータランプの外部リード棒に繋がる給電部材の構造が、図１に示す加熱ユニットとは異なるものであり、この異なる構造を中心に説明をする。 FIG. 2 is an explanatory view of another embodiment of the heating unit of the present invention.
The heating unit shown in FIG. 2 is different from the heating unit shown in FIG. 1 in the structure of the power feeding member connected to the external lead rod of the heater lamp, and this different structure will be mainly described.

図２に示すヒータランプ１は、図１と同様であって、バルブ１０の両端に形成された封止部１２からフィラメントと電気的に繋がる外部リード棒１３が突出している。   The heater lamp 1 shown in FIG. 2 is the same as that in FIG. 1, and external lead rods 13 that are electrically connected to the filaments protrude from sealing portions 12 formed at both ends of the bulb 10.

外管２の両端には金属箔が埋設された封止部２１が形成されており、外部リード棒１３の先端は、この封止部２１に埋設された金属箔に接続された状態で封止部２１に埋設されている。
そして、金属箔の他端側には給電部材６が接続されており、給電部材６は外管２の封止部２１より突出し、給電線９に接続されている。
なお、図２中Ａ−Ａ断面図を図３に示し、バルブ１０の反加熱物方向の外周に白色セラミック製の反射膜８が設けられている。 Sealing portions 21 in which metal foil is embedded are formed at both ends of the outer tube 2, and the tip of the external lead bar 13 is sealed in a state of being connected to the metal foil embedded in the sealing portion 21. It is embedded in the part 21.
The power supply member 6 is connected to the other end side of the metal foil. The power supply member 6 protrudes from the sealing portion 21 of the outer tube 2 and is connected to the power supply line 9.
2 is a cross-sectional view taken along the line AA in FIG. 3, and a reflective film 8 made of white ceramic is provided on the outer periphery of the bulb 10 in the direction of the non-heated object.

このような構造は、加熱物が配置されたチャンバー内で給電構造を取っている装置に適用されるものであり、給電部材６を冷却ガス流入管２２と冷却ガス流出管２３の内部に通さず、直接、外管２の封止部２１から突出されることにより、ヒータランプ１への給電部材６の接続構造を簡素化できるものである。   Such a structure is applied to an apparatus having a power feeding structure in a chamber in which a heated object is arranged, and the power feeding member 6 is not passed through the cooling gas inflow pipe 22 and the cooling gas outflow pipe 23. By directly projecting from the sealing portion 21 of the outer tube 2, the connection structure of the power supply member 6 to the heater lamp 1 can be simplified.

図２における加熱ユニットにおいて、図１と同一符号は同一部分を示すものであり、ヒータランプ１の冷却方法は、右側のガス管５から窒素ガスよりなす冷却ガスが固定部材４５の貫通孔４５ａに流れ込み、貫通孔４５ａ内に位置する冷却ガス流入管２２の切り取られた部分２２ａから冷却ガス流入管２２内に冷却ガスが流れ込み、さらに、冷却ガス流入管２２内に流れ込んだ冷却ガスが外管２内に流れ込み、冷却ガスが外管２の反端側に設けられた冷却ガス流出管２３から固定部材４５の貫通孔を通り、左側のガス管５から排気される構造になっている。   In the heating unit in FIG. 2, the same reference numerals as those in FIG. 1 denote the same parts, and the cooling method of the heater lamp 1 is that cooling gas made of nitrogen gas from the right gas pipe 5 enters the through hole 45 a of the fixing member 45. The cooling gas flows into the cooling gas inflow pipe 22 from the cut portion 22a of the cooling gas inflow pipe 22 located in the through hole 45a, and the cooling gas that has flowed into the cooling gas inflow pipe 22 further flows into the outer pipe 2. The cooling gas flows into the cooling pipe, and the cooling gas is exhausted from the gas pipe 5 on the left side through the through hole of the fixing member 45 from the cooling gas outflow pipe 23 provided on the opposite end side of the outer pipe 2.

つまり、図２に示す加熱ユニットにおいても、図１に示す加熱ユニット同様に、効果的にヒータランプ１を冷却することができ、バルブ１０の管壁温度を十分に下げてバルブ１０の黒化を防止することができ、バルブ１０内に含まれている水分などの不純物がバルブ１０外に放出されても、チャンバー内に放出されず、加熱物を汚染することがないものである。   That is, in the heating unit shown in FIG. 2, the heater lamp 1 can be effectively cooled as in the heating unit shown in FIG. 1, and the tube wall temperature of the bulb 10 is sufficiently lowered to blacken the bulb 10. Even if impurities such as moisture contained in the bulb 10 are released to the outside of the bulb 10, they are not released into the chamber and do not contaminate the heated object.

本発明の加熱ユニットの一部断面説明図である。It is a partial cross section explanatory view of the heating unit of the present invention. 本発明の加熱ユニットの一部断面説明図である。It is a partial cross section explanatory view of the heating unit of the present invention. 図１及び図２中のＡ−Ａ断面図である。It is AA sectional drawing in FIG.1 and FIG.2. 従来の加熱ユニットの一部断面説明図である。It is a partial cross section explanatory drawing of the conventional heating unit.

符号の説明Explanation of symbols

１ ヒータランプ
２ 外管
２２ 冷却ガス流入管
２３ 冷却ガス流出管
３ 基台
４ 外管保持機構
５ ガス管
６ 給電部材
７ 給電機構
８ 反射膜
９ 給電線
DESCRIPTION OF SYMBOLS 1 Heater lamp 2 Outer pipe 22 Cooling gas inflow pipe 23 Cooling gas outflow pipe 3 Base 4 Outer pipe holding mechanism 5 Gas pipe 6 Feeding member 7 Feeding mechanism 8 Reflecting film 9 Feeding line

Claims (1)

チャンバー内にヒータランプを備えた加熱ユニットにおいて、  In a heating unit equipped with a heater lamp in the chamber,
前記ヒータランプを内臓し、両端に封止部が形成された外管が前記チャンバー内に配置され、  An outer tube having a built-in heater lamp and having sealing portions formed at both ends is disposed in the chamber,
当該外管には、冷却ガス流入管と冷却ガス流出管が設けられるとともに、これら冷却ガス流入管と冷却ガス流出管は前記チャンバー外に伸び出しており、  The outer pipe is provided with a cooling gas inflow pipe and a cooling gas outflow pipe, and the cooling gas inflow pipe and the cooling gas outflow pipe extend out of the chamber,
前記ヒータランプのフィラメントと電気的に繋がる外部リード棒が当該ヒータランプの両端の封止部から突出し、  External lead rods electrically connected to the filament of the heater lamp protrude from the sealing portions at both ends of the heater lamp,
前記外部リード棒には給電部材が接続されていて、当該給電部材がそれぞれ前記冷却ガス流入管と冷却ガス流出管に挿通されて、チャンバー外に伸び出していることを特徴とする加熱ユニット。  A heating unit, wherein a power supply member is connected to the external lead rod, and the power supply members are inserted through the cooling gas inflow pipe and the cooling gas outflow pipe, respectively, and extend outside the chamber.
JP2004295668A 2004-10-08 2004-10-08 Heating unit Expired - Fee Related JP4734885B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004295668A JP4734885B2 (en) 2004-10-08 2004-10-08 Heating unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004295668A JP4734885B2 (en) 2004-10-08 2004-10-08 Heating unit

Publications (2)

Publication Number Publication Date
JP2006108526A JP2006108526A (en) 2006-04-20
JP4734885B2 true JP4734885B2 (en) 2011-07-27

Family

ID=36377863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004295668A Expired - Fee Related JP4734885B2 (en) 2004-10-08 2004-10-08 Heating unit

Country Status (1)

Country Link
JP (1) JP4734885B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014073289A1 (en) 2012-11-07 2014-05-15 日本碍子株式会社 Infrared heating device and drying furnace

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7747147B2 (en) 2005-11-02 2010-06-29 Panasonic Corporation Heating unit and heating apparatus
TWI508178B (en) * 2008-07-16 2015-11-11 Tera Semicon Corp Batch type heat treatment apparatus
DE102008063677B4 (en) 2008-12-19 2012-10-04 Heraeus Noblelight Gmbh Infrared radiator and use of the infrared radiator in a process chamber
CN201599867U (en) * 2010-01-27 2010-10-06 任建华 Waterproof electric heater
JP2020061296A (en) * 2018-10-11 2020-04-16 ウシオ電機株式会社 Heat lamp
CN114885450B (en) * 2022-07-11 2022-09-20 中国飞机强度研究所 Extremely high temperature extremely low warm heat intensity cycle test system that aerospace plane test was used
JP7377501B1 (en) 2022-10-28 2023-11-10 株式会社日本高熱工業社 Metal melting and holding furnace

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158090U (en) * 1980-04-25 1981-11-25
JPH10339504A (en) * 1997-06-06 1998-12-22 Daiko Seisakusho:Kk In-line heater
JP2001210604A (en) * 2000-01-24 2001-08-03 Ushio Inc Optically heating device
JP2001332507A (en) * 2000-03-24 2001-11-30 Hitachi Kokusai Electric Inc Substrate processing device, method of heating substrate, and method of manufacturing semiconductor device
JP2002134253A (en) * 2000-08-24 2002-05-10 Heraeus Noblelight Gmbh Infrared light radiating element which can be cooled
JP2002289549A (en) * 2001-03-28 2002-10-04 Hitachi Kokusai Electric Inc Wafer treatment device
JP2003090613A (en) * 2001-09-18 2003-03-28 Komatsu Electronics Inc Fluid heating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5953825B2 (en) * 1980-05-12 1984-12-27 次郎 小林 How to make vinegar

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158090U (en) * 1980-04-25 1981-11-25
JPH10339504A (en) * 1997-06-06 1998-12-22 Daiko Seisakusho:Kk In-line heater
JP2001210604A (en) * 2000-01-24 2001-08-03 Ushio Inc Optically heating device
JP2001332507A (en) * 2000-03-24 2001-11-30 Hitachi Kokusai Electric Inc Substrate processing device, method of heating substrate, and method of manufacturing semiconductor device
JP2002134253A (en) * 2000-08-24 2002-05-10 Heraeus Noblelight Gmbh Infrared light radiating element which can be cooled
JP2002289549A (en) * 2001-03-28 2002-10-04 Hitachi Kokusai Electric Inc Wafer treatment device
JP2003090613A (en) * 2001-09-18 2003-03-28 Komatsu Electronics Inc Fluid heating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014073289A1 (en) 2012-11-07 2014-05-15 日本碍子株式会社 Infrared heating device and drying furnace
KR20150063528A (en) 2012-11-07 2015-06-09 엔지케이 인슐레이터 엘티디 Infrared heating device and drying furnace

Also Published As

Publication number Publication date
JP2006108526A (en) 2006-04-20

Similar Documents

Publication Publication Date Title
US8058784B2 (en) Integrated reflector lamp
JP3606149B2 (en) Light source device
JP4734885B2 (en) Heating unit
JP4947370B2 (en) UV light source device
ES2365268T3 (en) CERAMIC BURNER FOR CERAMIC METAL HALOGENURE LAMP.
US7082261B2 (en) Heating stage
EP1684332A2 (en) Lamp arrangement with a lamp and a base
US20080284936A1 (en) Lcd-Backlighting Unit with Improved Cooling Facilities
KR20010006639A (en) Heating processing apparatus of light irradiation type
JP2008235678A (en) Ultraviolet irradiator, ultraviolet irradiation device and film reforming method
TWI459432B (en) Metal halide lamp
JP6398839B2 (en) Light source device
KR20090094746A (en) Light source for ultraviolet irradiation
JP2009283226A (en) Metal halide lamp
CN102422383B (en) High-pressure discharge lamp having cooling element
JP2006236756A (en) Short-arc type discharge lamp
JP2009151991A (en) High-pressure discharge lamp, and light source device
JP2002170528A (en) Tubular bulb and tubular bulb lighter
JPH10284454A (en) Method for detecting non-content heating of fluid heating device
JPS6111401B2 (en)
TWI703612B (en) Low-pressure mercury lamp
JP2023085681A (en) Filament lamp and light heating device
JP2006054064A (en) Short arc lamp
JP2008147058A (en) Excimer discharge lamp light source device
JP2008262846A (en) Light irradiation device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070918

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101221

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110125

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110329

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110411

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4734885

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140513

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees