JP2008235678A - Ultraviolet irradiator, ultraviolet irradiation device and film reforming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultraviolet irradiator, an ultraviolet irradiation device and a film reforming method, with which a wider irradiation basin can be irradiated with uniform illuminance, by forming a plurality of cylindrical members toward an inner part of a water cooling jacket in one water cooling jacket while a feature of a lamp with water cooling jacket, which is to reduce effect of heat to an object to be processed from the lamp, is made the most of, arranging a plurality of inner tubes on substantially one outer tube and inserting the lamp into the inner tube. <P>SOLUTION: The ultraviolet irradiator a container 2 having a cooling medium inside, a plurality of cylinder members 24 which are integrally constituted with the container 2 or are separately constituted in an inner direction from a side 22 of the container 2 and the rod-like lamps 1 which are inserted into the cylindrical members 24 and radiate light comprising ultraviolet rays. At least part 23 of the container 24 and the cylindrical members 24 are constituted of materials which transmit the ultraviolet rays. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an ultraviolet irradiator, an ultraviolet irradiator, and a film quality modification method, and in particular, an ultraviolet irradiator capable of irradiating ultraviolet rays over a wide area with a uniform illuminance distribution, and ultraviolet irradiation using the ultraviolet irradiator. The present invention relates to an apparatus and a film quality modification method.

  Conventionally, a protective film, adhesive, ink, resist, resin, or alignment film is cured, dried, melted, softened, or modified by using a lamp that emits light including ultraviolet rays. Has been done widely. For example, as described in Patent Documents 1 to 3, when performing the above-described processing, in order to reduce the influence of heat on the object to be processed, the lamp is a double tube type water cooling jacket. Covering is done.

FIG. 11A is a perspective view showing a schematic configuration of an ultraviolet irradiator equipped with a double-tube water-cooling jacket according to the prior art, and FIG. 11B is an A of the ultraviolet irradiator shown in FIG. It is -A sectional drawing.
As shown in these drawings, a double tube type water cooling jacket 101 is attached to a rod-shaped lamp 100. The water cooling jacket 101 includes a cylindrical inner tube 102 and an outer tube 103, and a cooling medium, for example, cooling water flows between the inner tube 102 and the outer tube 103 from the cooling water inlet 108, and the cooling water outlet 109. It is configured to be discharged from. The lamp 100 radiates ultraviolet rays efficiently, for example, a rod-shaped high-pressure mercury lamp or metal halide lamp is used. The lamp 100 includes a pair of discharge electrodes 105 and 106 at both ends inside the lamp, and a power supply line 107 at both ends of the electrodes 105 and 106. Power is supplied via The lamp 100 is inserted into the inner tube 102, and a preset air layer 108 of, for example, about 1 mm is provided between the lamp 100 and the inner tube 102. When the lamp is lit, the cooling water flows through the water-cooled layer 104 of the inner tube 102 and the outer tube 103, and the light from the lamp 100 is irradiated to a workpiece (not shown) through the water-cooled layer 104.

  In such an ultraviolet irradiator, the water cooling jacket 101 has two functions. One is to cool the lit lamp 100 and keep it at an appropriate temperature. It is said that the temperature of the arc tube of the lamp 100 at the time of lighting is suitably 500 ° C. to 900 ° C. in order to evaporate mercury and metal. When the temperature is 500 ° C. or lower, a metal such as mercury enclosed in the lamp 100 does not evaporate, resulting in non-lighting. When the temperature is 900 ° C. or higher, quartz constituting the arc tube is devitrified. The heat of the lamp 100 is transmitted to the water cooling jacket 101 via the air layer 108 between the lamp 100 and the inner tube 102 and is cooled by the cooling water flowing between the inner tube 102 and the outer tube 103 of the water cooling jacket 101. . In this way, the cooling water flowing in the water cooling jacket 101 prevents overheating of the lamp 100, but is indirectly cooled through the air layer 108, so that the temperature of the arc tube does not evaporate the metal inside the lamp. The cooling water flowing through the water cooling jacket 101 works to keep the arc tube of the lamp 100 at an appropriate temperature.

  Another function is to reduce the influence of heat from the lamp 100 on the workpiece. First, the water-cooled layer 104 absorbs radiant heat from the arc tube at 500 ° C. to 900 ° C. described above. Further, it absorbs light components from visible to infrared, which are unnecessary for the ultraviolet treatment, contained in the light emitted from the lamp 100. By this function, heating to the object to be processed can be suppressed to be small. As the distance between the inner tube 102 and the outer tube 103, that is, the thickness of the water cooling layer 104, the influence of heating on the object to be processed can be reduced as it is thicker. Therefore, it is set appropriately considering these factors.

2. Description of the Related Art Conventionally, ultraviolet treatment of an object to be processed has been performed in a wide range of fields, and at that time, there is a demand for processing the irradiation object to be less affected and to treat a wide irradiation region with uniform illuminance. For example, in Patent Document 4, in a manufacturing process of a semiconductor manufacturing apparatus, a process of irradiating a dielectric film applied to a wafer with ultraviolet rays to improve its characteristics is performed.
Japanese Utility Model Publication No. 56-155765 JP-A-61-158453 JP-A-8-148121 JP 2006-203191 A

However, since the object to be processed such as a dielectric film is vulnerable to heat and requires delicate temperature control, the influence of heat from the ultraviolet light source is reduced as much as possible and, for example, a φ300 mm wafer on which the dielectric film is formed It is desired that the whole is irradiated with uniform ultraviolet illuminance. In order to further reduce the influence of heat from the ultraviolet light source, it is conceivable to use a lamp with a water-cooling jacket as described above. As shown in FIG. Can be considered.
FIG. 12 is a cross-sectional view perpendicular to the optical axis of an ultraviolet irradiator in which a plurality of double-tube type lamps with a water cooling jacket are arranged side by side. The configuration of the reference numerals shown in FIG. 12 corresponds to the configuration of the same reference numerals shown in FIG. Moreover, the numerical value shown in the figure is an example of the dimension of each part which comprises this ultraviolet irradiator.

However, when an ultraviolet irradiator is configured by arranging lamps 100 with a double-tube type water cooling jacket as shown in FIG. 12, there are the following problems.
When irradiating a wide range uniformly, it is conceivable that the lamps 100 are arranged with the interval as narrow as possible. That is, by narrowing the interval between the lamps 100, the light emitted from the plurality of lamps 100 is sufficiently overlapped with the ultraviolet rays irradiated on the workpiece (not shown) disposed below the ultraviolet irradiator. This is because the high region and the low region can be compensated. At that time, in order to reduce the influence of heat on the object to be processed, the water cooling layer 104 of the water cooling jacket 101 needs to be thickened. Increasing the thickness of the water cooling layer 104 widens the distance between the inner tube 102 and the outer tube 103 of the water cooling jacket 101. When the interval between the inner tube 102 and the outer tube 103 of the water cooling jacket 101 is increased, the interval between the lamp 100 and the lamp 100 (the arrangement pitch of the lamps 100) is increased accordingly. That is, the arrangement pitch of the lamps 100 cannot be made smaller than the diameter of the outer tube 103 of the water cooling jacket 101.

  For example, as shown in FIG. 12, the tube diameter of the lamp 100 is 32 mm, the gap of the inner tube 102 of the lamp 100 is 1 mm, the thickness of the inner tube 100 is 1.5 mm, the thickness of the water cooling layer 104 is 10 mm, the outer tube If the thickness of 103 is 2 mm, even if the outer tubes 103 are brought into contact with each other, the arrangement pitch of the lamps 100 is 61 mm, and cannot be approached any further. Therefore, in an ultraviolet irradiator in which a plurality of lamps 100 with a double tube type water cooling jacket 101 are arranged, the arrangement pitch of the lamps 100 becomes too wide, for example, with a desired uniformity on a φ300 mm wafer, For example, it is difficult to irradiate ultraviolet rays with an in-plane illuminance distribution of ± 10% or less.

  As described above, setting the thickness of the water-cooled layer to 10 mm is a thickness necessary to reduce the influence of heat on the object to be processed, and the necessary water-cooling layer in the direction from the lamp toward the object to be processed. Is the thickness. On the other hand, in other directions, for example, the directions in which the lamps face each other, even if the lamps are heated, the arc tube does not have to be 900 ° C. or higher. The tube temperature can be maintained in an appropriate range. The same applies to the direction opposite to the object to be processed with respect to the lamp. That is, the thickness of the water-cooled layer may be thinner in the direction other than the direction from the lamp toward the object to be processed as compared with the direction from the lamp toward the object to be processed.

  However, in the double-tube type water cooling jacket 101 in which the cylindrical inner tube 102 and the outer tube 103 are combined as shown in FIG. 12, the water cooling layer 104 is thick in the direction from the lamp 100 toward the object to be processed. It is difficult to reduce the thickness in the direction in which 100 faces each other. For example, a water cooling jacket having an elliptical appearance is required. Even if a water-cooling jacket having such a structure is manufactured, the thickness of the outer tube is present, so that the lamp cannot be approached accordingly.

  An object of the present invention is to make use of the characteristics of a lamp with a water-cooling jacket that reduces the influence of heat from the lamp to the object to be processed, with respect to one conventional lamp (one inner tube and one outer tube). Not including a single water-cooling jacket), but a single water-cooling jacket is formed with a plurality of cylindrical members facing the inside of the water-cooling jacket, and a plurality of inner tubes are provided substantially as one outer pipe. The present invention provides an ultraviolet irradiator, an ultraviolet irradiator, and a film quality modification method that can irradiate a wider irradiation flow area with a uniform illuminance by inserting a lamp into the inner tube. It is in.

The present invention employs the following means in order to solve the above problems.
The first means includes a container having a cooling medium inside, a plurality of cylindrical members formed integrally or separately from the side surface of the container toward the inside, and inserted into each cylindrical member. An ultraviolet irradiator comprising: a rod-shaped lamp that emits light including ultraviolet light, wherein at least a part of the container and the cylindrical member are made of a material that transmits ultraviolet light.
According to a second means, in the first means, the container includes an upper surface plate, a lower surface plate, and a side surface plate, the side surface is the side surface plate, and at least a part of the container is the lower surface plate. It is an ultraviolet irradiator.
A third means is an ultraviolet irradiator characterized in that, in the first means or the second means, a reflection mirror for reflecting light from the lamp is provided in the container.
According to a fourth means, the ultraviolet irradiator according to any one of the first means to the third means, and a workpiece to be processed by being irradiated with ultraviolet rays from the ultraviolet irradiator are placed. And a shutter that is disposed between the ultraviolet irradiator and the work stage and that controls and blocks the ultraviolet rays emitted from the ultraviolet irradiator.
The fifth means irradiates the dielectric film formed on the wafer with light including ultraviolet rays emitted from a plurality of rod-shaped lamps arranged in a plane via a cooling medium for cooling the lamp, A film quality modification method comprising modifying the film quality of the dielectric film.

ADVANTAGE OF THE INVENTION According to this invention, it becomes easy to design so that the thickness of the water cooling layer in the direction which goes to a to-be-processed object from a lamp | ramp differs from the thickness of the water cooling layer of the other direction. That is, it is possible to reduce the thickness of the water cooling layer in the direction in which the lamps face each other and arrange the lamps close to each other. Furthermore, since it is not necessary to provide an outer tube like a water-cooled jacket of the prior art in the direction in which the lamps face each other, the lamps can be arranged close to each other by the thickness. As a result, it is possible to improve the uniformity of illuminance on the object to be processed.
In addition, the portion of the water-cooled jacket that is not related to light irradiation can be made of metal, which facilitates processing and reduces the cost. In addition, since the reflection mirror can be provided inside the water cooling jacket, the size of the ultraviolet irradiator can be reduced as compared with the case where the reflection mirror is provided outside the water cooling jacket.
By using such an ultraviolet irradiator, it is possible to irradiate the dielectric film which is weak against heat applied to the wafer and which requires delicate temperature control, and to improve its characteristics.

A first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a perspective view of an ultraviolet irradiator according to the invention of this embodiment, and FIG. 2 is a cross-sectional view of the ultraviolet irradiator shown in FIG.
In these drawings, reference numeral 1 denotes an ultraviolet ray that efficiently radiates, for example, a rod-shaped lamp such as a high-pressure mercury lamp or a metal halide lamp, 2 denotes a water-cooled jacket made of quartz glass that transmits ultraviolet rays as a whole, and 21 denotes an upper surface of the water-cooled jacket 2. , 22 is a side surface of the water cooling jacket 2, 23 is a lower surface of the water cooling jacket 2, 24 is a tubular member into which the lamp 1 formed inward from the side surface 22 of the water cooling jacket 2 is inserted, and 25 is an outer wall of the water cooling jacket 2. , 26 is a cooling water inlet through which a cooling medium such as cooling water is introduced into the water cooling jacket 2, 27 is a cooling water outlet through which the cooling medium such as cooling water is discharged from the water cooling jacket 2, and 28 is an outer wall 25 of the water cooling jacket 2. A water cooling layer 29 formed between the tubular member 24 and an air layer 29 formed between the tubular member 24 and the lamp 1. In addition, the cylindrical member 24 is comprised integrally with the water cooling jacket 2 continuously from the side surface 22, and permeate | transmits an ultraviolet-ray.

  As shown in these drawings, the water cooling jacket 2 is configured as a single container having an upper surface 21, a lower surface 23, and four side surfaces 22, and a cooling water inlet 26 and a cooling water outlet 27 are formed on the side surface 22. The cooling water is provided from the cooling water inlet 26 into the cavity, and the cooling water flowing through the cavity is discharged from the cooling water outlet 27. Further, a plurality of cylindrical members 24 that open from the side surface 22 of the water cooling jacket 2 toward the inside are formed integrally with the side surface 22, and the cylindrical member 24 is another side surface 22 that faces one side surface 22. It is provided to penetrate to. The lamp 1 is inserted into each cylindrical member 24. A workpiece (not shown) irradiated with ultraviolet rays is disposed below the lower surface 23 of the water cooling jacket 2, and the light from the lamp 1 is irradiated to the workpiece through the water cooling layer 28 of the water cooling jacket 2.

  As shown in FIG. 2, the thickness of the water cooling layer 28 of the water cooling jacket 2 is thick in the direction from the lamp 1 to the object to be processed (from the lamp 1 toward the lower surface 23 of the water cooling jacket 2), and the object to be processed is not heated. For example, the thickness is 10 mm. On the other hand, the thickness in the direction in which the lamps 1 face each other is thinner than the above thickness, for example, 4 mm. Even at this thickness, the temperature of the arc tube of the lamp 1 can be kept at 900 ° C. or lower. If the other conditions are the same as the conventional one (lamp tube diameter 32 mm, gap between lamp and inner tube 1 mm, inner tube thickness 1.5 mm), the arrangement pitch of lamps 1 is 41 mm.

FIG. 3 is a graph showing the relationship between the lamp arrangement pitch and the illuminance distribution in the lamp arrangement direction.
The illuminance distribution shown in the figure is an illuminance distribution when light is irradiated from a plurality of rod-shaped lamps to an irradiation area of φ300 mm as shown in the upper right figure, and the arrangement pitch of lamps (distance between centers of adjacent lamps). ) Simulation data when P is 40 mm, 47 mm, 55 mm, 65 mm. In addition, the distance from the lamp center to the light irradiation surface is 380 mm, and the light emission length of the lamp is 125 mm.

  As shown in FIG. 3, when the arrangement pitch P of the lamps is 47 mm, 55 mm, and 65 mm, even if a reflection mirror that increases the light use efficiency and improves the uniformity is arranged between the lamp and the irradiation area, the irradiation is performed. The illuminance at the center of the region is low, and the illuminance uniformity is poor. On the other hand, when the arrangement pitch P is 40 mm, the illuminance at the central portion is also increased, and the uniformity of the illuminance is improved. The illuminance uniformity is ± 6.4% for P = 40 mm, ± 9.2% for P = 47 mm, ± 10.2% for P = 55 mm, and ± 10.9% for P = 65 mm. is there. The reason why the illuminance distribution is improved by narrowing the lamp arrangement pitch P is considered to be that the light emitted from the lamps sufficiently overlap each other in the light irradiation region because the lamp arrangement pitch P becomes narrow.

  When the double-pipe water cooling jacket 101 is attached to the individual lamps 100 of the prior art shown in FIG. 11 and the water cooling layer 104 is 10 mm, the arrangement pitch P of the lamps 100 is 61 mm at the smallest. It was. This substantially corresponds to the illuminance distribution when the arrangement pitch P is 65 mm in FIG. 3, and the illuminance uniformity is poor. On the other hand, in the invention of this embodiment, as shown in FIG. 2, the arrangement pitch P of the lamps 1 is 41 mm, and the illuminance distribution in this case is almost the same as the illuminance distribution when the arrangement pitch P is 40 mm in FIG. Correspondingly, it can be seen that the illuminance uniformity is better than the conventional one.

Next, the reason why the thickness of the water-cooled layer in the direction from the lamp toward the workpiece is 10 mm will be described below.
FIG. 4 is a graph showing the thickness of the water-cooled layer and the light transmittance from the visible to the near infrared. In the figure, the horizontal axis represents wavelength and the vertical axis represents transmittance. The thickness of the water-cooled layer was 1 mm, 5 mm, 10 mm, and 100 mm, and the transmittance in each case was measured.
As shown in the figure, the thicker the water-cooled layer has a lower light transmittance from the visible to the near infrared, and the influence of heat on the object to be processed can be reduced. Incidentally, the energy of light having a wavelength of 800 nm to 1500 nm is transmitted through 28% when the thickness of the water-cooled layer is 1 mm, 23% when 5 mm, 19% when 10 mm, and 5.4% when 100 mm.

FIG. 5 is a graph showing the thickness of the water-cooled layer and the light transmittance in the ultraviolet region. In the figure, the horizontal axis represents wavelength and the vertical axis represents transmittance.
As shown in the figure, when the thickness of the water-cooled layer is 1 mm, 5 mm, and 10 mm, the transmittance of ultraviolet rays hardly changes. However, when the thickness is 100 mm, the transmittance of light having a wavelength of 200 nm or less is particularly large. Becomes lower. In the case where the dielectric film coated on the wafer is irradiated with ultraviolet rays for processing, the wavelength of ultraviolet rays necessary for improving the characteristics of the dielectric film is considered to be 220 nm or less. Therefore, if the thickness of the water-cooled layer is too thick, ultraviolet rays having a wavelength effective for processing the dielectric film are reduced.

  Considering the measurement result of FIG. 4 and the measurement result of FIG. 5, 80% or more of light energy having a wavelength of 800 nm to 1500 nm can be removed, and in order to reduce the decrease in ultraviolet light having a wavelength of 200 nm or less, It can be seen that the thickness of the water-cooled layer in the direction toward the workpiece is preferably 10 mm.

A second embodiment of the present invention will be described with reference to FIGS.
FIG. 6 is an exploded perspective view of the ultraviolet irradiator according to the invention of the present embodiment.
In the figure, 3 is a water-cooling jacket, 31 is a metal top plate having a substantially U-shaped cross section, and 32 is a metal having an opening provided so as to face the opening of the cylindrical member 34. The side plate 33 is a bottom plate made of quartz glass or the like that transmits ultraviolet light, 34 is a cylindrical member made of quartz glass or the like that transmits ultraviolet light, and 35 is a cooling medium such as cooling water in the water cooling jacket 3. An introduced cooling water inlet 36 is a cooling water outlet through which a cooling medium such as cooling water is discharged from the water cooling jacket 2.
As shown in the figure, the water cooling jacket 3 is configured as a single container by combining the components indicated by reference numerals 31 to 36. However, in order to make the structure of the water cooling jacket 3 easier to understand, the respective components are disassembled. In addition, detailed structures such as a seal structure for preventing cooling water from leaking are omitted. Although not shown, the lamp is inserted into each cylindrical member 34, and the same lamp as the lamp 1 used in the invention of the first embodiment is used.

  In the invention of the first embodiment, the entire water cooling jacket 2 is made of quartz glass. However, unlike the water cooling jacket 3 according to the invention of the present embodiment, the entire water cooling jacket need not be made of quartz glass. That is, the upper surface and two side surfaces of the water-cooling jacket 3 are respectively constituted by a metal upper surface plate 31 such as aluminum and a metal side surface plate 32 such as aluminum, and the lower surface and the cylindrical member of the water-cooling jacket 3 are formed as upper surface plates. 31 and a side plate 32 are formed separately from a lower plate 33 and a cylindrical member 34 made of a member such as quartz glass that transmits ultraviolet rays, and further, light from the lamp 1 is processed into the water-cooled jacket 3. A reflection mirror 37 is provided that reflects toward the surface. The reflection mirror 37 is supported by the top plate 31 and the side plate 32. The lower surface plate 33 serves as an exit for irradiating the workpiece with ultraviolet rays.

  If the entire water-cooled jacket 2 is made of a member such as quartz glass as in the invention of the first embodiment, processing is difficult and expensive. However, as in the invention of this embodiment, light (ultraviolet) irradiation is performed. By configuring the portion not related to the metal member, the processing of the water-cooled jacket 3 becomes easy and inexpensive. Further, since the reflection mirror 37 can be provided inside the water-cooling jacket 3, the size of the ultraviolet irradiator can be reduced as compared with the case where the reflection mirror is provided outside the water-cooling jacket 3.

Next, in the water-cooling jacket 3 shown in FIG. 6, the sealing structure between the cylindrical member 34 into which the lamp 1 is inserted and the side plate 32 and the sealing structure between the bottom plate 33 and the side plate 32 will be described with reference to FIGS. explain.
7 and 8 are a partial cross-sectional view and a perspective view for explaining the sealing structure of the cylindrical member 34 and the side plate 32 into which the lamp 1 is inserted and the sealing structure of the bottom plate 33 and the side plate 32, respectively. .
In these drawings, 40 is cooling water, 41 is a ring member for sealing, 42 is a washer, 43 is a base of the lamp 1, 44 is a lamp holder, 45 is a bottom portion of the lamp holder 44, and 46 is provided in the lamp holder 44. The through hole 47 is a convex portion of the lamp holder 44, 48 is an opening provided in the side plate 32, 49 is a lower surface plate pressing member for pressing the lower surface plate 33, and 50 is formed in the convex portion 47 of the lamp holder 44. A hole 51 is an O-ring provided between the tubular member 34 and the sealing ring member 41, 52 is an O-ring provided between the sealing ring member 41 and the side plate 32, and 53 is below the side plate 32. It is an O-ring provided between the face plate 33.

  First, the sealing structure of the cylindrical member 34 into which the lamp 1 is inserted and the side plate 32 will be described. The rod-shaped lamp 1 is inserted into the cylindrical member 34. The lamp 1 inserted into the cylindrical member 34 is held by the lamp holder 44 from both sides. The lamp holder 44 is formed in a convex shape having a convex portion 47 having an outer shape smaller than the inner diameter of the cylindrical member 34, and a hole 50 into which the base 43 of the lamp 1 is inserted is formed in the convex portion 47. The lamp 1 is held by inserting the base 43 of the lamp 1 into the hole 50 of the convex portion 47. A through hole 46 is formed in the lamp holder 44, and a lead wire (not shown) connected to the lamp 1 is taken out from the through hole 46.

  The cylindrical member 34 covers the convex portion 47 of the lamp holder 44, and the end surface of the cylindrical member 34 is sandwiched between the bottom portions 45 of the lamp holder 44 from both sides. If the bottom part 45 of the metal lamp holder 44 directly touches the cylindrical member 34, the cylindrical member 34 made of a quartz tube may be damaged. Therefore, a resin washer 42 is provided between them. Further, a sealing ring member 41 is put on the cylindrical member 34 on both sides of the cylindrical member 34. An O-ring 51 is provided on the inner wall of the sealing ring member 41, and an O-ring 52 is provided on the outer wall. The outer diameter of the sealing ring member 41 is equal to the outer diameter of the bottom 45 of the lamp holder 44. When the cylindrical member 34 is inserted into the sealing ring member 41, the O-ring 51 is sandwiched between the cylindrical member 24 and the inner wall of the sealing ring member 41. Thereby, the inner side of the water-cooling jacket 3 and the inner side of the cylindrical member 34 (side on which the lamp 1 is inserted) are sealed. In the above configuration, the lamp 1, the cylindrical member 34, the lamp holder 44, and the sealing ring member 41 constitute a lamp unit. A concave opening 48 into which the lamp holder 44 and the sealing ring member 41 are inserted is formed in the side plate 32 constituting the water cooling jacket 3, and the lamp unit is inserted into the opening 48. When the lamp unit is inserted into the concave opening 48 of the side plate 32, the O-ring 52 is sandwiched between the inner wall of the opening 48 of the side plate 32 and the outer wall of the sealing ring member 41. The inner side and the outer side of the jacket 3 are sealed.

  Next, the sealing structure of the bottom plate 33 and the side plate 32 made of a quartz plate at the light exit port will be described. An O-ring 53 is provided over the entire circumference of the lower surface side of the water cooling jacket 3, that is, the lower surface of the side plate 32 of the water cooling jacket 3 and the lower surface of the upper surface plate 31. An O-ring 52 is placed on the side plate 32 and the upper plate 31, a lower plate 33 is placed on the O-ring 52, and the entire circumference of the lower plate 33 is pressed by a lower plate pressing member 49 from above. Thereby, the inner side and the outer side of the water cooling jacket 3 are sealed.

FIG. 9 is a diagram showing a configuration of an ultraviolet irradiation apparatus using the ultraviolet irradiator according to the invention of the second embodiment.
In the figure, 60 is an ultraviolet irradiator as an ultraviolet irradiating unit, 61 is a cooling water circulator, 62 is a lamp power supply, 63 is a shutter drive mechanism, 64 is a control unit, 65 is a shutter, and 66 is emitted from the ultraviolet irradiator 60. A reflecting mirror for limiting the spread of light, 67 is a work stage, and 68 is an object to be processed with ultraviolet rays such as a wafer on which a dielectric film is formed. Other configurations correspond to the configurations of the same reference numerals shown in FIG.

  As shown in the figure, in the ultraviolet irradiation device, the control unit 64 controls the cooling water circulator 61, the lamp power source 62, and the shutter drive mechanism 63. In response to a signal from the control unit 64, the lamp power supply 62 supplies power to each lamp 1 of the ultraviolet irradiator 60 and lights it. Further, according to a signal from the control unit 64, the cooling water circulator 61 supplies the cooling water into the water cooling jacket 3 of the ultraviolet irradiator 60, and again cools the cooling water that has flowed through the water cooling jacket 3 and has risen in temperature. 3 is supplied. Since the temperature of the lamp 1 is controlled by cooling water, an air cooling mechanism for the lamp is not necessary. The workpiece 68 is transported by a transport mechanism (not shown) and placed on the work stage 67.

  When the shutter driving mechanism 63 is controlled by a signal from the control unit 64 and the shutter 65 is opened, light irradiation from the ultraviolet irradiator 60 to the workpiece 68 is performed. The light from the lamp 1 is placed on the work stage 67 after the water-cooled layer of the water-cooling jacket 3 removes light having a wavelength in the visible to infrared region unnecessary for processing and the radiant heat radiated from the lamp 1. Further, the temperature rise of the workpiece 68 is prevented. Further, since the arrangement pitch of the lamps 1 in the ultraviolet irradiator 60 is narrow, the entire workpiece 68 is irradiated with good uniformity. When preset ultraviolet irradiation is performed on the workpiece 68, the shutter drive mechanism 63 is controlled by a signal from the control unit 64, the shutter 65 is closed, and the process ends. After the processing is completed, the workpiece 68 is unloaded from the work stage 67 by a transport mechanism (not shown), and the workpiece 68 to be processed next is loaded.

Next, a third embodiment of the present invention will be described with reference to FIG.
FIG. 10 is a perspective view of an ultraviolet irradiator according to the invention of this embodiment.
In the figure, 7 is a water-cooled jacket, 71 is a metal top plate having a curved cross section, and 72 is a metal side having an opening provided so as to face the opening of the cylindrical member 34. It is a face plate. Other configurations correspond to the configurations of the same reference numerals shown in FIG.
As shown in the figure, the bottom plate 33 of the water-cooling jacket 4 is a flat plate, but the top plate 71 can have various shapes such as a curved cross section.

The ultraviolet irradiator shown in each of the above embodiments is provided with a cylindrical member having both ends opened so as to penetrate from one side surface of the water cooling jacket to the other side surface facing this side surface. A cylindrical member that is open only on one side and closed on the other side may be provided from one side surface. At that time, the two lead wires connected to the lamp inserted into the tubular member are drawn out from the opening.
In the ultraviolet irradiator shown in each of the above embodiments, the case where the lamp is cooled using cooling water as the cooling medium has been described. However, the cooling medium transmits light of a target wavelength, and the lamp is overheated. Any liquid or gas other than water may be used as long as it prevents water.

It is a perspective view of the ultraviolet irradiator which concerns on invention of 1st Embodiment. 2 is a BB cross-sectional view of the ultraviolet irradiator shown in FIG. It is a graph which shows the relationship between the arrangement pitch of a lamp | ramp, and the illumination distribution of a lamp arrangement direction. It is a graph which shows the transmittance | permeability of the light from the thickness of a water cooling layer, and visible to near infrared. It is a graph which shows the thickness of a water cooling layer, and the transmittance | permeability of the light of an ultraviolet region. It is a disassembled perspective view of the ultraviolet irradiator which concerns on invention of 2nd Embodiment. FIG. 5 is a partial cross-sectional view for explaining a sealing structure between a cylindrical member 34 and a side plate 32 into which each lamp 1 is inserted and a sealing structure between a bottom plate 33 and a side plate 32. FIG. 4 is a perspective view for explaining a sealing structure between a cylindrical member 34 and a side plate 32 into which each lamp 1 is inserted and a sealing structure between a bottom plate 33 and a side plate 32. It is a figure which shows the structure of the ultraviolet irradiation device using the ultraviolet irradiation device which concerns on invention of 2nd Embodiment. It is a perspective view of the ultraviolet irradiator which concerns on invention of 3rd Embodiment. It is the perspective view which shows schematic structure of the ultraviolet irradiation device provided with the double tube | pipe type water cooling jacket which concerns on a prior art, and sectional drawing of an ultraviolet irradiation device. It is sectional drawing perpendicular | vertical to the optical axis of the ultraviolet irradiation device which arranged the lamp | ramp with a double tube | pipe type water cooling jacket side by side.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Bar-shaped lamp 2 Water cooling jacket 21 Upper surface 22 Side surface 23 Lower surface 24 Cylindrical member 25 Outer wall 26 Cooling water inlet 27 Cooling water outlet 28 Water cooling layer 29 Air layer 3 Water cooling jacket 31 Upper surface plate 32 Side surface plate 33 Lower surface plate 34 Cylindrical member 35 Cooling Water inlet 36 Cooling water outlet 40 Cooling water 41 Sealing ring member 42 Washer 43 Base 44 Lamp holder 45 Bottom portion 46 Through hole 47 Protruding portion 48 Opening portion 49 Lower surface plate pressing portion 50 Hole 51 O-ring 52 O-ring 53 O-ring 60 Ultraviolet light Irradiator 61 Cooling water circulator 62 Lamp power supply 63 Shutter drive mechanism 64 Control unit 65 Shutter 66 Reflection mirror 67 Work stage 68 Object to be processed 7 Water cooling jacket 71 Top plate 72 Side plate

Claims (5)

  A container having a cooling medium therein, a plurality of cylindrical members formed integrally or separately with the container from the side of the container toward the inside, and light including ultraviolet rays inserted into each cylindrical member An ultraviolet irradiator comprising: a rod-shaped lamp that radiates light, wherein at least a part of the container and the tubular member are made of a material that transmits ultraviolet light.   The ultraviolet irradiator according to claim 1, wherein the container includes an upper surface plate, a lower surface plate, and a side surface plate, the side surface is the side surface plate, and at least a part of the container is the lower surface plate.   The ultraviolet irradiator according to claim 1, wherein a reflection mirror that reflects light from the lamp is provided in the container.   The ultraviolet irradiator according to any one of claims 1 to 3, a work stage on which a workpiece to be processed by being irradiated with ultraviolet rays from the ultraviolet irradiator is placed, and the ultraviolet rays An ultraviolet irradiation apparatus comprising: a shutter disposed between an irradiator and the work stage and configured to control and block the ultraviolet rays irradiated from the ultraviolet irradiator. Irradiating light including ultraviolet rays emitted from a plurality of rod-shaped lamps arranged in a plane onto a dielectric film formed on a wafer through a cooling medium for cooling the lamp, and film quality of the dielectric film A film quality modification method characterized by reforming the film.

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