JP4329629B2 - Excimer lamp - Google Patents

Description

  The present invention relates to an excimer lamp that can be suitably used as a light source lamp, for example, in an ultraviolet light cleaning process for semiconductor wafers and liquid crystal substrates.

  In recent years, by using vacuum ultraviolet light having a wavelength of 200 nm or less, a cleaning treatment technique for removing organic contaminants attached to the surface of the object to be processed made of metal, glass, or the like, or an oxide film on the surface of the object to be processed Surface treatment technology for an object to be processed such as an oxide film formation treatment technology to be formed has been developed and put into practical use.

  In the surface treatment of the object to be processed using such vacuum ultraviolet light, an excimer lamp in which an appropriate discharge gas is filled in a discharge space formed by a discharge vessel made of, for example, synthetic quartz glass is used. It is known that by using xenon gas as the discharge gas, vacuum ultraviolet light having a peak at a wavelength of 172 nm and a half width of about 20 nm can be obtained (see, for example, Patent Document 1). .

  When vacuum ultraviolet light is absorbed by oxygen molecules in the atmosphere, 1S orbital oxygen radical O (1S) is generated by vacuum ultraviolet light having a wavelength of 133.2 nm or less, and 1D orbit is generated by vacuum ultraviolet light having a wavelength of 175.0 nm or less. Oxygen radical O (1D) is generated, and 3P orbital oxygen radical O (3P) is generated by vacuum ultraviolet light having a wavelength of 242.4 nm or less. The 1D orbital oxygen radical O (1D) has extremely high chemical reactivity compared to the 1S orbital oxygen radical O (1S) and the 3P orbital oxygen radical O (3P). In the surface treatment of the object to be treated as described above, it is practically very effective to use an excimer lamp that emits vacuum ultraviolet light in a wavelength range that mainly generates the oxygen radical O (1D) of the 1D orbit. .

  However, in the conventional excimer lamp, a lot of vacuum ultraviolet light having a wavelength longer than 175.0 nm is also emitted, and thus there is a problem that oxygen radical O (1D) in 1D orbit cannot be generated with high efficiency. .

  In addition, when the discharge vessel is formed of synthetic quartz glass, the transmittance of vacuum ultraviolet light having a wavelength of 175 nm or less is greatly reduced when the discharge vessel is in a high temperature state of, for example, 350 ° C. or higher. Therefore, there is a problem that vacuum ultraviolet light having a wavelength of 175 nm or less from the discharge space cannot be used with high efficiency.

JP-A-7-78591

  The present invention has been made based on the above circumstances, and an object thereof is to provide an excimer lamp that can obtain vacuum ultraviolet light having a wavelength of 175.0 nm or less with high efficiency in radiated light radiated to the outside. There is to do.

The excimer lamp of the present invention is provided along a discharge vessel including a substantially cylindrical outer tube, a substantially cylindrical inner tube arranged coaxially with the outer tube, and an outer peripheral wall surface of the outer tube. An excimer lamp comprising a first electrode and a second electrode provided along the inner peripheral wall surface of the inner tube, wherein the cylindrical inner space of the discharge vessel is filled with xenon gas. ,
The discharge vessel is made of synthetic quartz glass,
A heating mechanism for heating the inner peripheral wall surface of the inner tube in the discharge vessel from the outside of the discharge vessel is provided ,
The cooling means for cooling the light transmission part in the outer tube | pipe in a discharge vessel is provided, It is characterized by the above-mentioned.

  Here, it is preferable that the heating mechanism is configured by a cylindrical body that is disposed so as to extend along the tube axis of the inner pipe and in which the heat exchange medium for heating is circulated. A second electrode is preferably formed.

According to the excimer lamp of the present invention, because it is the inner peripheral wall surface of the inner tube in the discharge vessel of the double pipe structure and the heating mechanism provided structure for heating from the outside, it is filled in discharge space Since the discharge gas can be effectively heated, it has been found that the peak wavelength of the emitted light from the excimer lamp can be shifted to the short wavelength side as compared with the configuration without the heating mechanism. Accordingly, vacuum ultraviolet light having a wavelength of 175 nm or less (hereinafter also simply referred to as “vacuum ultraviolet light having a specific wavelength”) in the emitted light can be obtained with high efficiency, and oxygen radical O (1D) in 1D orbit can be obtained by excimer. It can be generated with high efficiency by the emitted light from the lamp.
As a result, various target processes can be executed with high energy efficiency.
Further, according to the excimer lamp having the above configuration, the temperature control of the discharge gas by the heating mechanism can be achieved with high accuracy.

  Further, by using a heating heat exchange medium as the heating mechanism, the lamp temperature can be controlled with high accuracy.

Further, even when the light transmitting portion in the outer tube of the discharge vessel is cooled by the cooling means, the heating mechanism as described above is provided, and the discharge vessel is made of quartz glass. In the light transmission part, the transmittance of vacuum ultraviolet light having a high specific wavelength can be obtained.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a cross-sectional view for explaining the structure of an example of an excimer lamp according to the present invention in a section along the tube axis, and FIG. 2 is a diagram showing the excimer lamp shown in FIG. 1 in a section perpendicular to the tube axis. FIG.
The excimer lamp 10 includes a substantially cylindrical outer tube 11 made of a dielectric material such as synthetic quartz glass, and an outer diameter smaller than the inner diameter of the outer tube 11 disposed so as to be coaxial with the outer tube 11. A substantially cylindrical inner tube 12 made of a dielectric material such as synthetic quartz glass having a diameter, and a sealing member that hermetically closes both ends of the cylindrical space formed by the outer tube 11 and the inner tube 12. A closed discharge vessel 14 having a double tube structure composed of 131 and 132 is formed, and a cylindrical discharge space S is formed by the internal space of the discharge vessel 14, and this discharge space S has xenon. Filled with gas.

  The outer tube 11 forming the discharge vessel 14 is provided with a first electrode 15 having light transmissivity, which is made of, for example, a net-like conductive material in close contact with the outer peripheral wall surface thereof. The tube 12 has a configuration in which a cylindrical second electrode 16 made of, for example, a conductive material is provided in close contact with the inner peripheral wall surface thereof. The electrode 16 is connected to a lighting power supply device (not shown) of, for example, 30 to 7000 W that supplies high frequency power to the excimer lamp 10.

  A heater 17 that is a heating mechanism for heating the inner peripheral wall surface of the inner tube 12 via the second electrode 16 is provided in the second electrode 16. The heater 17 is a heating power supply device. (Not shown).

  In addition, the excimer lamp 10 is opposed to a part of the outer peripheral wall surface of the outer tube 11 over the entire length in the tube axis direction to prevent the excimer lamp 10 from becoming excessively hot. A cooling block 18 made of a conductive metal is provided.

  The cooling air passage 181 communicates with a plurality of (for example, 14) openings 181a provided at appropriate intervals so as to be aligned in the tube axis direction in the adjacent regions on both sides of the excimer lamp 10. The cooling nozzles 182 transmit radiated light from the discharge space S on the outer peripheral wall surface of the outer tube 11 protruding from the cooling block 18 to each of the openings 181a. It is provided so as to face the light transmission part, and thereby, a cooling means for cooling the light transmission part is configured as will be described later.

In the excimer lamp 10 described above, the dielectric that forms the outer tube 11 is limited to synthetic quartz glass as long as it can form a light transmission portion for transmitting the light emitted from the discharge vessel S. For example, a material having translucency such as magnesium fluoride (MgF ₂ ) can be used, but synthetic quartz glass is usually used.

The heater 17 may be any heater as long as it can control the lamp temperature related to the excimer lamp 10 to, for example, 100 to 200 ° C. Since it is provided closely, it is preferable that it is excellent in insulation from the outside. As such a heater, for example, a ceramic heater having an input power of 300 to 2000 W, or a heat conversion substance by an ultraviolet absorber such as a Mycuspine-like amino acid derivative can be used.
Here, the lamp temperature related to the excimer lamp should indicate the gas temperature in the excimer lamp in consideration of the effect of the present application, but since the measurement is difficult, the highest temperature on the outer peripheral wall surface of the discharge vessel is here. Say.

  As a cooling means, the temperature of the light transmission part in the discharge vessel 14 can be controlled to, for example, 0 to 200 ° C. by bringing an appropriate cooling medium into contact with the light transmission part. The cooling medium is not particularly limited as long as it does not have absorption characteristics for vacuum ultraviolet light having a specific wavelength, and for example, an inert gas such as nitrogen gas is preferably used. it can. The type, temperature, supply amount, and other conditions of the cooling medium are appropriately selected so that the temperature control according to the above-described aspect is achieved.

  When the dimension example in the excimer lamp 10 having the above configuration is given, for example, the outer diameter of the discharge vessel 14 is 10 to 50 mm, the inner diameter is 2 to 40 mm, and the length along the tube axis is 120 to 3100 mm. The outer diameter is 1.5 to 39.5 mm, the total length along the tube axis is 100 to 3000 mm, and xenon gas is sealed at 10 to 133 kPa.

  In the excimer lamp 10 described above, when the heater 17 is in an operating state at the time of lighting, the xenon gas as the discharge gas effectively contacts the inner peripheral wall surface of the discharge vessel exposed to the discharge space in a relatively wide area. Therefore, when the inner peripheral wall surface of the inner tube 12 is heated, the xenon gas in contact with the outer peripheral wall surface of the inner tube 12 is heated with high efficiency, and the lamp temperature related to the excimer lamp 10 is increased. As a result, as is clear from the results of the experimental examples described later, the excimer lamp 10 can obtain the emitted light having the wavelength peak shifted to the short wavelength side. Therefore, the vacuum ultraviolet light of a specific wavelength can be obtained with high efficiency. Can be obtained at

  Further, the cooling means is brought into an operating state together with the heater 17, and the cooling air from the cooling nozzle 182 is blown to the light transmitting portion related to the outer tube 11. Thereby, even if the lamp temperature of the excimer lamp 10 is considerably increased by the heating mechanism, the temperature of the synthetic quartz glass forming the light transmission portion is controlled within a predetermined temperature range. As a result, the transmittance of vacuum ultraviolet light having a high specific wavelength related to the light transmission portion is reliably maintained.

  Therefore, according to the excimer lamp of the present invention, it is possible to reliably radiate the vacuum ultraviolet light having a specific wavelength obtained in the discharge space at a high lamp temperature to the outside of the discharge vessel. Then, by using such an excimer lamp as a light source lamp for the surface treatment process of various objects to be processed, it becomes possible to execute the process with high efficiency.

As mentioned above, although one embodiment of the excimer lamp of the present invention has been described, the present invention is not limited to the above embodiment, and various modifications can be made.
For example, the heating mechanism may heat the outer peripheral wall surface of the outer tube, or may heat both the inner peripheral wall surface of the inner tube and the outer peripheral wall surface of the outer tube.

  Here, an excimer lamp provided with a heating mechanism for heating the outer peripheral wall surface of the outer tube is close to and opposed to a part of the outer peripheral wall surface of the outer tube over the entire length in the tube axis direction, for example, high thermal conductivity such as aluminum. The thing of the structure provided with the heating block 18 which consists of these metals can be mentioned. In such a configuration, the cooling means may be constituted by, for example, an independent cooling air passage duct.

  Further, the excimer lamp may have a configuration in which a light transmission portion is formed by a sealing member.

FIG. 3 is an explanatory drawing showing another configuration of the excimer lamp according to the present invention and including a heating mechanism-integrated electrode in a cross section along the tube axis.
In the excimer lamp 10 shown in the figure, the heating mechanism integrated electrode extends along the tube axis of the inner tube 12, and one end (left side in FIG. 3) is hermetically sealed. A cylindrical body 171 made of metal and an inflow passage 173 that is disposed inside the cylindrical body 171 and through which the heating heat exchange medium F flows are formed between the cylindrical body 171 and the cylindrical body 171. At the same time, a discharge passage 174 is formed in the inside, and a flow passage forming tube 172 made of a conductive metal such as stainless steel is formed therein. The cylindrical body 171 functions as the second electrode 16. It is supposed to be configured.

  In FIG. 3, an excimer lamp 10 has basically the same configuration as the excimer lamp shown in FIG. 1 except for the above configuration.

  In the heating mechanism of this example, the supplied heating heat exchange medium F flows through the inflow passage 173 formed between the tubular body 171 and the flow passage forming pipe 172, thereby forming the tubular body. 171 is heated and then discharged to the outside through a discharge flow passage 174 formed in the flow passage forming pipe 172.

  Here, as the heat exchange medium F for heating, since the cylindrical body 171 forms the second electrode 16, it is necessary to have a high insulating property, for example, a fluorine-based inert liquid. (Fluorinert) can be preferably used. When Fluorinert is used as the heat exchange medium F for heating, the temperature is, for example, 100 to 200 ° C., and the flow rate is, for example, 500 to 2000 ml / min.

  In the above configuration, the cylindrical body 171 has an outer diameter of, for example, 1.5 to 39.5 mm, and the flow path forming tube has an outer diameter of, for example, 1.0 to 30 mm.

  According to the excimer lamp having the above configuration, for example, the temperature of the excimer lamp can be reliably controlled at a high temperature by changing the temperature of the heat exchange medium for heating fed into the cylindrical body. It is. Therefore, as is clear from the results of the experimental examples described later, the excimer lamp 10 can obtain the emitted light having the wavelength peak shifted to the short wavelength side in the desired manner, and therefore, vacuum ultraviolet light having a specific wavelength can be obtained. Light can be obtained with high efficiency.

  FIG. 4 is a cross-sectional view for explaining the structure of another example of the excimer lamp according to the present invention in a cross section along the tube axis, and FIG. 5 is a cross section perpendicular to the tube axis of the excimer lamp shown in FIG. FIG.

  Specifically, the excimer lamp 30 includes a substantially cylindrical tube 31 made of a dielectric material such as synthetic quartz glass, and a sealing member that hermetically closes both ends of the cylindrical space formed by the tube 31. The discharge vessel 33 has a sealed discharge vessel 33 composed of 321 and 322. A discharge space S is formed by the internal space of the discharge vessel 33, and the discharge space S is filled with xenon gas.

  The discharge vessel 33 is provided with a light-transmitting external electrode 34 made of, for example, a net-like conductive material in close contact with the outer peripheral wall surface, and along the tube axis of the discharge vessel 33. A cylindrical internal electrode 35 composed of a heating mechanism-integrated electrode having a configuration to be described later is provided. The external electrode 34 and the internal electrode 35 are connected to the excimer lamp 30 with a high frequency. It is connected to a lighting power supply device (not shown) for supplying power.

  Here, the heating mechanism integrated electrode forming the internal electrode 35 extends along the tube axis of the discharge vessel 33, and one end (left side in FIG. 3) is hermetically sealed. A cylindrical body 361 made of a conductive metal, and an inflow passage 363 that is disposed inside the cylindrical body 361 and through which the heat exchange medium F for heating flows between the cylindrical body 361. In addition, a discharge flow passage 364 is formed therein, and a flow passage formation tube 362 made of a conductive metal such as stainless steel is formed. The cylindrical body 361 causes the internal electrode 35 to Is formed.

  The excimer lamp 30 is opposed to a part of the discharge vessel 33 over the entire length in the tube axis direction, and prevents the excimer lamp 30 from becoming excessively high in temperature. For example, a cooling made of a highly heat conductive metal such as aluminum. A block 37 is provided.

  The cooling air passage 371 communicates with a plurality of (for example, 14) openings 371a provided at appropriate intervals so as to be aligned in the tube axis direction in regions adjacent to both sides of the excimer lamp 30. The cooling nozzles 372 transmit the radiated light from the discharge space S on the outer peripheral wall surface of the discharge vessel 33 protruding from the cooling block 37 to each of the openings 371a. It is provided so as to face the light transmission part, and thereby, a cooling means for cooling the light transmission part is configured.

  As described above, the excimer lamp 30 includes the discharge vessel 33 having a single tube structure, and is arranged so as to be coaxial with the discharge vessel 33 in such a manner that the internal electrode 35 formed of the heating mechanism integrated electrode is exposed to the xenon gas. Other than the arrangement, the configuration is the same as that of the excimer lamp shown in FIG. 1, and it is lit under the same operating conditions as the excimer lamp.

  In the excimer lamp having the internal electrode exposed to the discharge space as described above, since the internal electrode is formed by the heating mechanism integrated electrode, the internal electrode that directly contacts the discharge gas is used. The discharge gas can be heated with high efficiency via the outer peripheral wall surface, and the temperature can be reliably controlled. Therefore, as will be apparent from the results of the experimental examples described later, the excimer lamp 30 can obtain the emitted light whose wavelength peak is shifted to the short wavelength side in the desired manner, and therefore vacuum ultraviolet light having a specific wavelength can be obtained. Light can be obtained with high efficiency.

FIG. 6 is an explanatory cross-sectional view showing a configuration of another example of the excimer lamp according to the present invention in a cross section along the tube axis.
Excimer lamp 30 having the illustrated configuration has basically the same configuration as the excimer lamp shown in FIGS. 4 and 5 except for the following points, and is lit under the same operating conditions.
That is, in the excimer lamp 30 shown in FIG. 6, a coil-shaped internal electrode 35 made of a conductive material such as tungsten is disposed along the tube axis of the discharge vessel 33. A heating block 38 that functions as an external heating mechanism is provided, which is made of a highly heat conductive metal such as aluminum and is close to and opposed to a part of the outer peripheral wall surface in the entire length in the tube axis direction. No cooling means is provided.
Here, the heating block 38 is formed with, for example, a ceramic heater (not shown) or a flow passage for circulating a heat exchange medium for heating.

  According to the excimer lamp described above, when the heating block is in an operating state at the time of lighting, the xenon gas as the discharge gas effectively contacts the inner peripheral wall surface of the discharge vessel exposed to the discharge space in a relatively large area. Therefore, when the outer peripheral wall surface of the discharge vessel is heated, the xenon gas in contact with the inner peripheral wall surface of the discharge vessel 332 is heated with high efficiency, and the lamp temperature related to the excimer lamp 10 is increased. As a result, as is clear from the results of the experimental examples described later, the excimer lamp 10 can obtain radiated light whose wavelength peak is shifted to the short wavelength side. Therefore, vacuum ultraviolet light having a specific wavelength can be obtained with high efficiency. Obtainable.

  Hereinafter, although the experiment example performed in order to confirm the effect of this invention is demonstrated, this invention is not limited to this.

[Example 1 of making an experimental excimer lamp]
An experimental excimer lamp was fabricated according to the configuration shown in FIG. In this experimental excimer lamp 40, the discharge vessel 41 basically has a region 411 having a double tube structure.
Specifically, the discharge vessel 41 includes an outer tube 42 made of a substantially cylindrical dielectric, and an outer diameter smaller than the inner diameter of the outer tube 42 disposed so as to be coaxial with the outer tube 42. The outer tube 42 and the inner tube 43 are arranged in a deviated manner so that their one ends are aligned, as shown in FIG. As described above, one end side (left side in FIG. 7) has a single tube structure, and the other end side (right side in FIG. 7) has a double tube structure.

  Then, one end of the outer tube 42 is hermetically closed by a disk-shaped light transmission window member 441, and a cylindrical space defined by the outer tube 42 and the inner tube 43 is formed at the other end side of the outer tube 42. The sealing member 442 is hermetically sealed, and one end of the inner tube 43 is hermetically closed by the sealing member 443 in the space inside the outer tube 42 to form a sealed discharge space S. Yes. Here, the inner space of the inner tube 43 is configured to communicate with the outer space of the discharge vessel 41.

  In the double tube structure region 411 of the outer tube 42, a net-like first electrode 44 is provided in close contact with the outer peripheral wall surface, and the inner tube 43 has an inner peripheral wall surface on the inner peripheral wall surface. In close contact with each other, a heating mechanism integrated electrode for forming the second electrode having the configuration shown in FIG. 3 is provided. Here, Fluorinert was used as a heat exchange medium for heating.

  In the region of the single tube structure of the outer tube 42, a cooling block 46 made of, for example, aluminum that prevents the experimental excimer lamp 40 from becoming excessively hot in a part of its outer peripheral wall surface in close contact with the entire circumferential direction. Is provided.

  In FIG. 7, 451 is a cylindrical body that also functions as an internal electrode, 452 is a flow path forming tube that forms a flow path of a heat exchange medium for heating, and 47 is a thermocouple for measuring lamp temperature. .

Specific specifications of the experimental excimer lamp 40 are shown below.
Discharge vessel (41)
Outer tube (42): outer diameter: 26 mm, full length: 300 mm
Inner tube (43): outer diameter: 16 mm, full length: 100 mm
Light transmission window member (441): Material: Magnesium fluoride Heating mechanism Tubular body (451): Outer diameter: 14mm, material: Stainless steel Flow path forming tube (452): Outer diameter: 6mm, material: Stainless steel First electrode (44): Length (tube axis direction): 100 mm, material: stainless steel Second electrode: Length (tube axis direction): 100 mm, material: stainless steel Input power: Power: 30 W
Discharge gas: Xenon gas, filled gas pressure; 70 kPa

  Using the experimental excimer lamp 40, the lamp temperature is changed by changing the temperature and flow rate of the heat exchange medium for heating in the heating mechanism in a state where the lighting conditions are kept constant, and thus obtained in different temperature states. The emission spectrum of the transmitted light from the light transmission window member (441) was observed. The results are shown in FIG. The light transmission window member (441) is made of magnesium fluoride, and this does not change the transmission wavelength characteristics of vacuum ultraviolet light depending on its temperature state.

  As shown in FIG. 8, it is apparent that vacuum ultraviolet light having a short peak wavelength can be obtained in a state where the lamp temperature is high.

[Example 2 of making an excimer lamp for experiment]
Excimer lamps according to the present invention were produced according to the configuration shown in FIGS.
The specific configuration and use of this excimer lamp are as follows.
Discharge vessel (14)
Outer tube (11): outer diameter: 26 mm, full length: 300 mm, material: synthetic quartz glass Inner tube (12): outer diameter: 16 mm, full length: 300 mm, material: synthetic quartz glass Heater (17): outer diameter: 13 mm, Total length 220mm, input power: 50W
Discharge gas: Xenon gas, filled gas pressure; 70 kPa
Cooling block (18): Material: Aluminum Openings (181a): Number; 7 each on the left and right sides of the excimer lamp at intervals of 50 mm in the tube axis direction Cooling means Cooling air: Medium; Nitrogen gas, temperature; Room temperature (25 ° C. ), Flow rate: 10 L / min Input power: Power: 30 W

<Experimental example>
Radiation light obtained by lighting the above excimer lamp under two different conditions: condition (a) the heating mechanism is activated and the cooling means is inoperative, and condition (b) the heating mechanism and the cooling means are activated. The intensity of vacuum ultraviolet light having a wavelength of 165 nm was measured. The value of the intensity of the vacuum ultraviolet light having the wavelength of 165 nm obtained under each condition was compared with the value obtained when the condition (c) the heating mechanism and the cooling means were inoperative.
As a result, when the intensity of vacuum ultraviolet light having a wavelength of 165 nm obtained when the light is turned on under the condition (c) is 1, the emission intensity obtained when the light is turned on under the condition (a) is 1. 3 and the emission intensity obtained when turned on in (b) was 1.5.

  As described above, in the excimer lamp according to the present invention, by controlling the lamp temperature using the heating mechanism, vacuum ultraviolet light having a specific wavelength can be obtained with high efficiency, and the light transmission window is cooled. Thus, it was confirmed that the vacuum ultraviolet light of the specific wavelength can be transmitted to the outside of the discharge vessel with high efficiency.

It is sectional drawing for description which shows the structure in an example of the excimer lamp which concerns on this invention in the cross section along a pipe axis. It is sectional drawing for description which shows the excimer lamp shown in FIG. 1 in a cross section perpendicular | vertical to a tube axis. It is explanatory drawing which shows the structure which is another structure of the excimer lamp which concerns on this invention, Comprising: A heating mechanism integrated electrode is shown in the cross section along a tube axis. It is sectional drawing for description which shows the structure in the other example of the excimer lamp which concerns on this invention in the cross section along a pipe axis. FIG. 5 is an explanatory cross-sectional view showing the excimer lamp shown in FIG. 4 in a cross section perpendicular to the tube axis. It is sectional drawing for description which shows the structure in the other example of the excimer lamp which concerns on this invention in the cross section along a pipe axis. It is sectional drawing for description which shows the structure of the experiment excimer lamp in order to confirm the effect of this invention in the cross section along a tube axis. In the excimer lamp which concerns on an experiment example, it is a spectrum figure which shows the emission spectrum of the transmitted light from the light transmissive window member obtained in a different temperature state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Excimer lamp 11 Outer pipe | tube 12 Inner pipe | tube 131,132 Sealing member 14 Discharge vessel 15 1st electrode 16 2nd electrode 17 Heater 171 Cylindrical body 172 Flow path formation pipe 173 Inflow flow path 174 Discharge flow path 18 Cooling Block 181 Cooling Air Passage 181a Opening 182 Cooling Nozzle 30 Excimer Lamp 31 Tube 321, 322 Sealing Member 33 Discharge Container 34 External Electrode 35 Internal Electrode 361 Tubular Body 362 Flow Passage Forming Pipe 363 Feeding Passage Flow 364 Discharge flow passage 37 Cooling block 371 Cooling air passage 371a Opening 372 Cooling nozzle 38 Heating block 40 Experimental excimer lamp 41 Discharge vessel 411 region 42 Outer tube 43 Inner tube 44 First electrode 441 Light transmission window member 442 Sealing Member 443 Sealing member 451 Tubular body 45 2 Flow path forming pipe 46 Cooling block 47 Thermocouple

Claims (3)

A discharge vessel comprising a substantially cylindrical outer tube and a substantially cylindrical inner tube disposed coaxially with the outer tube; a first electrode provided along the outer peripheral wall surface of the outer tube; An excimer lamp comprising a second electrode provided along the inner peripheral wall surface of the tube, wherein the cylindrical inner space of the discharge vessel is filled with xenon gas,
The discharge vessel is made of synthetic quartz glass,
A heating mechanism for heating the inner peripheral wall surface of the inner tube in the discharge vessel from the outside of the discharge vessel is provided ,
An excimer lamp characterized in that a cooling means is provided for cooling a light transmission portion in the outer tube of the discharge vessel .   The heating mechanism is configured by a cylindrical body that is disposed so as to extend along the tube axis of the inner tube and through which the heat exchange medium for heating is circulated. Excimer lamp.   The excimer lamp according to claim 2, wherein the second electrode is formed of a cylindrical body.

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