JPH05226262A - Surface treatment device - Google Patents

Abstract

PURPOSE:To embody instantaneous modification control of the intensity of ultraviolet rays without affecting adversely the reaction induced by the generation of dust or out gas only in every wavelength area but also in a selective wavelength area in a surface processing which uses a photochemical reaction. CONSTITUTION:Two boards 6a and 6b, which transmit ultraviolet rays, are laid out substantially in parallel with each other in the middle of an ultraviolet lamp 4 and a workpiece 3 with a clearance. A mixed fluid of a substance unable to absorb the ultraviolet rays and a substance capable of absorbing the ultraviolet rays is arranged to flow into the clearance under the control of the velocity and flow rate. This construction makes it possible to change the transmittance of the ultraviolet rays in short time and without generating dust under control. In addition, it is very simple to form the part which controls the amount of the transmitted ultraviolet rays and embody the reduction in the cost of this device, thereby providing an effective means for practical application.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus, and more specifically, to a photochemical reaction using light energy.
The present invention relates to a surface treatment method and apparatus for performing surface treatment such as thin film formation on a solid surface, etching, cleaning and modification.

[0002]

2. Description of the Related Art Surface treatment using a photochemical reaction has a wide range of applications because it is less damaged than a plasma treatment method and the apparatus is simple. Ultraviolet rays are often used as light for surface treatment using photochemical reactions. Since the photochemical reaction depends on the ultraviolet intensity and the amount of light, control of the ultraviolet intensity is essential. The following method is conceivable as a method for controlling the intensity of ultraviolet rays in all wavelength regions. (1) Change of output of ultraviolet lamp, (2) Change of coldest point temperature of ultraviolet lamp.

The change of the output of the ultraviolet lamp of (1) is a value determined at the time of designing the lamp, and the change after the lamp is completed, that is, the change during the surface treatment, deteriorates the performance and life of the lamp. There is a problem such as letting. Changing the cold spot temperature of the ultraviolet lamp of (2) requires several minutes or more to change the ultraviolet intensity, and thus it is difficult to control the instantaneous reaction when the reaction is started or interrupted. Therefore, for instantaneous control, there has been proposed one that uses a movable light-shielding plate as a dimming or light-shielding means (Japanese Patent Laid-Open No. 3-3294).
No. 1). On the other hand, as a method of selectively controlling the wavelength of light, an optical filter or the like is used for constant wavelength control. However, instantaneously variable wavelength selection control has not been realized, in which processing conditions are changed promptly during the reaction.

[0004]

As a surface treatment apparatus utilizing a photochemical reaction, it is possible to instantaneously control the light intensity and the amount of light, at the same time, the reaction of the surface treatment section is not adversely affected, and the life of the apparatus is long. It is important that the cost of the device is economical. The device utilizing the movable light-shielding plate or the optical filter, when the adverse effect on the chemical reaction due to dust or outgas during operation becomes a problem,
Cannot be adopted. The present inventors insert a long and narrow ultraviolet lamp into the sheath and extend the life of the lamp and therefore the surface treatment device and make it possible to instantaneously control the light intensity and the amount of light. A method and a device for flowing a fluid for controlling the passage characteristic have been invented (Japanese Patent Application No. 2-155).
No. 152, "Surface Treatment Method and Apparatus"). However, in the above invention, it has been found that it is difficult to realize economically because of difficulty in the configuration of the sheath, mounting, and maintaining the uniformity of the amount of fluid between the surface-treated object and the ultraviolet lamp. .

The main object of the present invention is to control the instantaneous change of the intensity or quantity of light, especially ultraviolet light, not only over the entire wavelength range but also over a selective wavelength range, which adversely affects the reaction due to dust generation or outgas. The object is to realize a surface treatment apparatus which is performed without giving a simple and economical structure.

[0006]

In order to achieve the above object, the surface treatment apparatus of the present invention comprises a light source and the above solid state as a means for controlling the intensity or the light amount of the light irradiating the surface of the solid to be treated. A container disposed between the surfaces and having a space having a plurality of substantially parallel plates or films that transmit the light, and a control means for controlling at least one of the fluid composition of the fluid to be contained in the container and the flow rate of the fluid. And is configured.

The control means selectively or collectively controls at least one of the intensity attenuation rate and the wavelength of the light that reaches the surface of the object to be processed, which is absorbed by the fluid layer. Further, preferably, in order to downsize the apparatus, the container constitutes a part of a wall forming a processing chamber in which an object to be processed is placed. Furthermore, in order to roughly adjust the thickness of the fluid, a plurality of containers are prepared and detachably mounted in the processing chamber so that they can be replaced as needed. Also,
A preferred embodiment of the surface treatment apparatus of the present invention uses a lamp that emits ultraviolet rays as a light source, the fluid contained in the container is mainly nitrogen and oxygen, and the amount of ozone is controlled by a gas containing ozone. is there.

[0008]

According to the above construction, light (ultraviolet rays) is transmitted between a plurality of light transmitting flat plates or films by passing a fluid through which light passes, and ultraviolet rays are blocked by flowing a fluid through which light is absorbed or reflected. Or it is dimmed. Further, by appropriately mixing the fluid that transmits and the fluid that absorbs or reflects, the transmittance and wavelength of light can be controlled according to the mixing ratio. Since the composition of the fluid flowing into the space for injecting the fluid can be changed in a short time, not only a shutter function of instantaneously blocking light can be realized, but also a specific wavelength can be selectively absorbed and blocked. Further, since the fluid layer is composed of a plurality of flat plates and the above-mentioned plurality of flat plates at a predetermined interval and has a simple structure of a wall member that constitutes a container for containing a fluid, designing and manufacturing are facilitated, and the device is economically manufactured. realizable. Further, by making the container for containing the fluid a part of the wall of the processing chamber in which the object to be processed is placed, the structure of the device can be made small and simple, so that an economical device can be obtained.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an embodiment of the surface treatment apparatus according to the present invention. An object to be processed 3 is placed on the stage 2 in the processing chamber 1.
To place. A lamp chamber 5 accommodating an ultraviolet lamp 4 serving as a light source is mounted above the processing chamber 1. The processing chamber 1 and the lamp chamber 5 are partitioned by windows 6a and 6b. Both the windows 6a and 6b are flat plates made of synthetic quartz, and a wall member 18 for holding the flat plates 6a and 6b at predetermined intervals.
Together with this, it constitutes a container for containing a fluid. By preparing many wall members 18 having different heights, it is possible to set an arbitrary interval, that is, the thickness of the fluid. The space 7 sandwiched between the windows 6a and 6b is kept airtight with the surroundings. In this space, gas A, gas B and gas C are used as external pipes via the flow rate adjusting means 8a, 8b, 8c. They are connected by an introduction pipe 9. Further, an exhaust pipe 10 is connected to face this.

In this embodiment, the gas A is nitrogen, the gas B is oxygen, and the gas C is ozone. The processing gas P is introduced from the nozzle 12 into the processing chamber 1 through the flow rate adjusting means 11. The gas P used for processing is discharged to the outside by the pressure control valve 14 and the exhaust pump 15 connected to the exhaust pipe 13. The stage 2 is controlled to an appropriate temperature by the temperature adjusting means 15. The lamp chamber 5 has a nitrogen gas suction pipe 1
6a and the exhaust pipe 16b are attached. The drawings are
Although only a side sectional view is shown, the wall member 18 has a rectangular, circular, or elliptical shape, and the upper introduction pipe 9 and the exhaust pipe 10 are arranged so that the fluid can be quickly and uniformly distributed.

The operation of each part in the configuration shown in FIG. 1 will be described. The object 3 to be processed is placed on the stage 2 in the processing chamber 1, and the object 3 to be processed, that is, the stage 2 is set to the temperature control means 1.
7, the temperature is controlled to a proper temperature. Surface treatment gas P
Is introduced from the nozzle 12 through the flow rate adjusting means 11, and the opening degree of the pressure control valve 14 is adjusted to set and control the internal pressure of the processing chamber 1. The ultraviolet lamp 4 is turned on in advance. A constant flow rate of nitrogen is supplied from the gas suction pipe 16a of the lamp chamber 5 to the lamp chamber 5.
It is supplied inside and discharged from the exhaust pipe 16b. As a result, the inside of the lamp chamber 5 is always completely filled with a nitrogen atmosphere, so that not only the absorption of ultraviolet rays by the atmosphere is prevented but also the lamp is not overheated.

When the gas B, that is, oxygen and the gas C, that is, ozone are mixed and introduced into the space 7, the ultraviolet rays emitted from the ultraviolet lamp 4 pass through the synthetic quartz window 6a having a good transmission characteristic with respect to the ultraviolet rays. However, since it is absorbed by ozone and oxygen in the space 7, the intensity of the ultraviolet rays that pass therethrough is greatly attenuated, and it becomes difficult to cause a photochemical reaction on the surface of the object 3 to be processed. That is, the space 7 functions as a shield for ultraviolet rays. The ultraviolet absorption rate of the space 7 is controlled by the height of the space 7, that is, the thickness of the wall member 18, the gas composition, and the like.

Next, when gas A, that is, nitrogen, is introduced as the gas to be introduced into the space 7 instead of the oxygen and ozone, the nitrogen does not absorb the ultraviolet rays, so that the ultraviolet rays pass through the space 7 and also through the window 6b. It penetrates and is irradiated to the to-be-processed object 3 in the processing chamber 1. As a result, the photochemical reaction proceeds on the surface of the object 3 to be processed, and the desired surface treatment is performed. When the surface treatment is stopped, the gas supplied to the space 7 is switched to the gas B and the gas C again to block the ultraviolet rays in the space 7, so that the photochemical reaction is suppressed. As described above, since the surface treatment can be performed in a very clean environment in which there are no movable objects that are sources of foreign matters or objects that deteriorate the purity of the atmosphere in the processing chamber 1, the finish characteristics of the object to be processed 3 are It is also possible to improve the yield and reliability.

Further, in the present embodiment, the intensity of the ultraviolet rays applied to the object to be treated 3 can be freely controlled by appropriately mixing the gas A, that is, nitrogen, the gas B, that is, oxygen, and the gas C, that is, ozone. Since the intensity of the ultraviolet rays applied to the object to be treated 3 can control the reaction rate and reaction process of the photochemical reaction, it is possible to optimize the surface treatment rate, control the film quality in thin film formation, and stabilize the surface treatment for a long period of time. It also has the effect.

FIG. 2 is a sectional view of another embodiment of the surface treatment apparatus according to the present invention. It should be noted that components having the same functions and functions as those of the embodiment of FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted. The present embodiment shows an apparatus configuration in the case where the object 3 to be processed is processed in an atmospheric pressure atmosphere. The exhaust pipe 13 is
It is connected to an exhaust duct (not shown). Processing room 1
The air tightness of is not required as much as in the first embodiment. Window 6
Since there is almost no pressure difference between the two sides of b, the thickness of the window 6b can be reduced to a fraction of that of the first embodiment. As a result, the transmittance of ultraviolet rays that pass through the window 6b is increased, so that not only the surface treatment efficiency is increased, but also the device structure can be simplified, so that the reliability can be improved and the cost can be reduced.

FIG. 3 is a sectional view of still another embodiment of the surface treatment apparatus according to the present invention. The present embodiment is the surface treatment apparatus having the simplest structure in the case where it is not necessary to distinguish between the gas to be put into the lamp chamber 5 and the gas in the space 7 of the above embodiment.
It should be noted that components having the same functions and functions as those of the embodiment of FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted. The container 7 forming the fluid layer and the lamp chamber 5 are integrated to form a new lamp chamber 5 ', and the lamp chamber 5'and the processing chamber 1 are partitioned by a flat plate 6b that transmits light. ing. The oxygen gas A and the nitrogen gas B are sucked into the integrated chamber 5'through the introduction pipe 9 into the chamber 5 ', while the ratios of the oxygen gas A and the nitrogen gas B are controlled by the flow rate adjusting means 8a and 8b. The transmittance of ultraviolet rays is controlled by the proportion of oxygen gas. The switching speed is slightly inferior to that of the above-mentioned embodiment because the volume of gas to be put into the chamber 5'is increased, but the apparatus is equipped with a gas source, a gas introduction pipe, and a transparent flat plate 6a
Etc. are omitted and the structure is extremely simple.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments. In the embodiment, the light source is the ultraviolet ray source, but it is obvious that other light source can be used, and accordingly, the kind of gas to be put in the container is also different.

[0018]

According to the present invention, the surface treatment can be carried out in a very clean environment in which there are no movable objects as sources of foreign matters or objects deteriorating the purity of the atmosphere in the processing chamber.
The finishing characteristics of the object to be processed can be improved, and the yield and reliability can be improved. In addition, since the transmittance of ultraviolet rays can be changed and controlled in an instantaneously short time, there is an effect that the reaction process can be accurately controlled. A compact and highly reliable shutter function can also be realized. In particular, the configuration of the fluid layer that controls the amount of light transmission is flat, constitutes a part of the wall of the lamp chamber and the processing chamber, and is detachably mounted, so that the device has an extremely simple structure, The cost of the device can be reduced.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of a surface treatment apparatus according to the present invention.

FIG. 2 is a sectional view of another embodiment of the surface treatment apparatus according to the present invention.

FIG. 3 is a sectional view of still another embodiment of the surface treatment apparatus according to the present invention.

[Explanation of symbols]

11 ... Flow rate adjusting means 1 ... Processing chamber, 12 ... Nozzle 3 ... Processing object, 13 ... Exhaust pipe 4, UV lamp, 14 ... Pressure control valve 5, 5 '... Lamp chamber 15 ... Exhaust pump 6a, 6b ... Window ( Flat plate), 16 ... Tube 7 ... Space, 17 ... Temperature adjusting means 8a, 8b, 8c ... Flow rate adjusting means, 18 ... Wall 9 ... Introducing tube, 10 ... Exhaust tube.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Internal reference number FI technical display location // H01L 21/31 B 8518-4M (72) Inventor Motohiro Hashizaki 888 Fujihashi, Ome City, Tokyo Hitachi Co., Ltd. Ome Plant (72) Inventor Masao Karai 888 Fujibashi, Ome City, Tokyo Hitachi Co., Ltd. Ome Plant

Claims (8)

[Claims] 1. An apparatus for performing surface treatment by irradiating a surface of a solid, which is an object to be processed, with light from a light source, wherein the plurality of substantially parallel light-transmitting elements are disposed between the light source and the solid and transmit the light. And a control means for controlling at least one of a fluid composition and a fluid flow rate of a fluid to be placed in the container. A surface treatment device characterized by being configured. 2. A processing chamber in which a solid, which is an object to be processed, is disposed, a lamp chamber in which a lamp as a light source is housed, a processing chamber and the lamp chamber which are sandwiched between the processing chamber and the light from the lamp are transmitted therethrough. A container having a plurality of parallel plates or membranes and walls for holding the plates or membranes at regular intervals, and a control means for controlling at least one of the composition of the fluid to be placed in the container and the flow rate of the fluid. A surface treatment device characterized by being configured as follows. 3. The surface treatment apparatus according to claim 1 or 2, wherein the plurality of plates are synthetic quartz. 4. The surface treatment apparatus according to claim 1 or 2, wherein the light source is a lamp that emits ultraviolet rays, and the fluid contained in the container is a gas mainly containing nitrogen and oxygen and containing ozone. A surface treatment device characterized by the above. 5. The surface treatment apparatus according to claim 2, wherein
The surface treatment apparatus, wherein the plate of the container constitutes a part of the wall of the processing chamber. 6. The surface treatment apparatus according to claim 2, wherein
The surface treatment apparatus, wherein the container is detachably attached to the treatment chamber and the lamp chamber. 7. An apparatus for performing surface treatment by irradiating a surface of a solid, which is an object to be processed, with light from a light source, wherein a lamp chamber having a lamp serving as the light source therein, and the solid placed inside the lamp chamber. A processing chamber, a part of a boundary wall between the lamp chamber and the processing chamber, and a flat plate that transmits the light, and at least one of the composition of the fluid to be put into the lamp chamber and the flow rate of the fluid is controlled. And a control means for controlling the surface treatment apparatus. 8. The surface treatment apparatus according to claim 7,
The surface treatment apparatus, wherein the light is ultraviolet light and the fluid is a mixture of nitrogen gas and oxygen gas.