KR20180064003A - Apparatus for intense pulsed light sintering with water colorable - Google Patents

Abstract

Disclosed is a light sintering apparatus capable of water cooling. The light sintering apparatus comprises a light emitting unit emitting light; and a cooling unit having an inner hole in which the light emitting unit is positioned and cooling the light emitting unit through circulation of water through the inner hole.

Description

[0001] The present invention relates to a light sintering apparatus capable of cooling water,

The present invention relates to a water sintering apparatus capable of water cooling.

Recently, various electronic devices such as smart devices, OLEDs, and solar cells are being developed as electronic and information communication technologies are developed. Printing electronic technology is utilized to produce electronic devices for use in such electronic devices. Printed electronics technology is a technology to produce functional electronic devices with desired functions by printing functional ink with conductivity, insulation and semiconductivity on plastic, film, paper, glass and substrate through industrial printing process technique.

Such printing electronic technology can be applied to various materials by printing, and it enables mass production, large area and simplification of processes through the manufacturing process different from the existing electronic industry.

The printing electronics process consists of three steps: printing, drying and sintering. At this time, the sintering process has a great influence on the performance of the product. Sintering is a process that has significant value in the next generation of technology by making nanoparticles dissolve to form functional thin films in solid form. The general sintering process is performed by thermal sintering, microwave sintering, laser sintering, and so on. The conventional heat sintering method is difficult to apply to a flexible substrate susceptible to heat because the sintering process proceeds in a high-temperature vacuum chamber environment and other sintering methods require a long process time and complicated steps, have.

In order to solve such a problem, a light sintering technique has been developed as disclosed in the patent documents of the following prior art documents. The optical sintering technique can dissolve the nanoparticles by propagating the white light generated from the xenon lamp, so that the functional thin film can be produced much faster and in a larger quantity than the conventional method using heat. However, the conventional photo-sintering equipment is only capable of local sintering, has a low uniformity of sintering, and is difficult to apply to a large-area substrate.

In addition, general light sintering is performed after printing a metal ink such as a substrate and drying it, so that there is a problem that a separate drying equipment other than the optical sintering equipment must be used.

Accordingly, there is an urgent need for a solution for solving the problems of the conventional optical sintering equipment.

KR 10-2012-0135424 A

The present invention provides a light sintering apparatus capable of performing drying and sintering together.

Further, the present invention is to provide a light sintering apparatus having an improved light sintering efficiency even in a large area.

The present invention also provides a light sintering apparatus with improved light uniformity.

The present invention also provides a light sintering apparatus capable of water cooling.

According to one aspect of the present invention, there is provided a light sintering apparatus capable of water cooling.

According to an embodiment of the present invention, there is provided a light emitting device comprising: a light emitting portion that emits light; And a cooling part having an inner hole in which the light emitting part is located and cooling the light emitting part through circulation of water through the inner hole.

An inlet for injecting water into the cooling unit; And a discharge port for discharging water located in the cooling section.

The cooling unit may further include a connection member communicating with at least one of the injection port and the discharge port and a part of the inner hole.

At least one of the injection port and the discharge port is formed to be protruded or depressed on one surface of the housing of the light sintering apparatus.

The light sintering apparatus further includes a through hole for inserting a wire for power supply to the light emitting unit.

The electric wire is in contact with the light emitting portion through one surface of the inner hole and a ring for preventing the water from being discharged to the outside of the inner hole may be positioned at a portion where the electric wire and the inner hole are in contact with each other.

The cooling unit may be formed of a transparent material through which the light emitted from the light emitting unit located in the inner hole can be transmitted.

The outlet may be formed so as to surround an electric wire connected to one end of the inner hole and communicate with the through hole.

According to another embodiment of the present invention, A light emitting unit located below the reflector and emitting light; And a cooling unit formed to surround the outer shape of the light emitting unit and cooling the light emitting unit.

The cooling unit may include: a body including the light emitting portion; Storage where water is temporarily stored; And a connecting member connecting the body and the reservoir.

An inlet for injecting water into the reservoir; And an outlet for discharging water from the body or the reservoir.

The reservoir may be located in an empty space above the reflector.

By providing the light sintering apparatus according to one embodiment of the present invention, drying and sintering can be performed together.

Further, the present invention has an advantage that light sintering efficiency is improved and light uniformity is improved even in a large area.

1 is a view showing a light sintering apparatus according to an embodiment of the present invention.
2 is a cross-sectional view of a light sintering apparatus according to an embodiment of the present invention.
3 is a view for explaining light uniformity of a first light emitting unit according to an embodiment of the present invention.
4 is a view for explaining light uniformity of a second light emitting unit according to an embodiment of the present invention;
5 is a view showing a light sintering apparatus according to another embodiment of the present invention.
6 is a view illustrating a method of forming a conductive film using a light sintering apparatus according to an embodiment of the present invention.
7 is a rear view of a light sintering apparatus according to an embodiment of the present invention.
8 is a view showing a light sintering apparatus according to another embodiment of the present invention.
9 is a rear view of a light sintering apparatus according to another embodiment of the present invention.

As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. In this specification, the terms "comprising ", or" comprising "and the like should not be construed as necessarily including the various elements or steps described in the specification, Or may be further comprised of additional components or steps. Also, the terms "part," " module, "and the like described in the specification mean units for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software .

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view of a light sintering apparatus according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of a light sintering apparatus according to an embodiment of the present invention. 4 is a view for explaining light uniformity of a second light emitting unit according to an embodiment of the present invention, and FIG. 7 is a view for explaining light uniformity of a light emitting unit according to an embodiment of the present invention. FIG. 8 is a view showing a light sintering apparatus according to another embodiment of the present invention. FIG.

The light sintering apparatus 100 is an apparatus for drying and sintering a material to be processed. Referring to FIG. 1, a light sintering apparatus 100 according to an embodiment of the present invention includes a housing 70, a reflection sheath 30 positioned inside the housing 70, and a reflection wall 40, The first light emitting portion 10 and the second light emitting portion 20 are positioned below the first light emitting portion 30.

Here, the reflector 30 and the reflecting wall 40 can reflect light emitted by at least one of the first light emitting portion 10 and the second light emitting portion 20 toward the top surface of the object to be processed.

Here, the material to be treated refers to a target material to be photo-sintered, such as fine metal particles and precursors patterned on plastic, paper, film, glass, substrate (S) At this time, the object to be processed may include ceramics such as titanium oxide, lithium cobalt oxide, silicon oxide, and the like as well as metals such as copper, iron, molybdenum, nickel, aluminum, gold and platinum. The material to be treated may also be nano- or micro-sized, in which case the surface area ratio of the particles becomes large and the light absorption increases. For example, an object to be processed is a metal nano ink printed on a substrate S, and an electrode of an electronic device such as a solar cell can be formed through a drying and sintering step. However, the object to be processed is not limited to the metal nano ink forming the electrode. The workpiece patterned on the substrate S or the like is dried by light and sintered. At this time, light is generated in at least one of the first light emitting portion 10 and the second light emitting portion 20.

The first light emitting portion 10 and the second light emitting portion 20 are light sources for emitting light. Here, the second light emitting units 20 may be configured as a pair, and may be arranged to face each other with the first light emitting unit 10 therebetween.

The first light emitting portion 10 and the second light emitting portion 20 are not shown in the drawings, but may be disposed on the same plane. However, the present invention is not limited thereto.

For example, the second light emitting portion 20 may be disposed below the plane where the first light emitting portion 10 is disposed.

The first light emitting portion 10 and the second light emitting portion 20 may be formed in a cylindrical shape having a predetermined length. The first light emitting portion 10 and the second light emitting portion 20 may have a diameter of 100 mm or less in the cross sectional plane (circular plate cross section) cut in the direction perpendicular to the longitudinal direction.

However, the shapes and diameters of the first light emitting portion 10 and the second light emitting portion 20 are not limited thereto, and it is obvious that they may be formed in different shapes or the cross-sectional diameters may be different.

In addition, the first light emitting portion 10 and the second light emitting portion 20 can be selectively turned on / off in the drying step and the sintering step, respectively. That is, at least one of the first light emitting portion 10 and the second light emitting portion 20 can be irradiated onto the object to be processed.

The first light emitting portion 10 and the second light emitting portion 20 may be any one of a xenon lamp, an infrared lamp, and an ultraviolet lamp. Of course, the lamp is not limited to the lamp described above, and it is natural that another lamp may be used.

A xenon lamp is a lamp that emits light by discharge occurring in xenon gas and generates extreme ultraviolet light having a broad spectrum of light between 60 nm and 2.5 nm. This white light can be irradiated to the object to be photo-sintered.

An infrared lamp is a light source that generates infrared light and is used to dry the object to be treated in the drying step.

The ultraviolet lamp is a light source that generates ultraviolet light and can be used together with a xenon lamp in the sintering step. When the ultraviolet light is irradiated during the sintering process by the white correlation of the xenon lamp, sintering is possible even if the energy of the white light is small. The reason for this is that when the object to be treated is a metal nano ink, ultraviolet light serves to break the linkage linking the polymer contained in the ink. In addition, it is possible to maintain high sintering uniformity and increase sintering efficiency through irradiation of a composite light by a xenon lamp, an ultraviolet lamp, and an infrared lamp.

Therefore, the infrared lamp can be used as the second light emitting portion 20 to dry the object, and then the sintered body can be sintered by replacing the xenon lamp with the first light emitting portion 10 or the second light emitting portion 20 with the xenon lamp . That is, in the sintering process, any one of the first light emitting portion 10 and the second light emitting portion 20 may be a xenon lamp. At this time, the light emitting portion other than the xenon lamp may be turned off or may be irradiated with ultraviolet light.

The light emitted from the first light emitting portion 10 and the second light emitting portion 20 is diverged in the up, down, left, and right directions and irradiated to the object to be processed arranged below. At this time, the light diverged upward can be reflected by the reflector 30 and irradiated to the object to be processed.

The first light emitting portion 10 and the second light emitting portion 20 may be located inside the cooling portion 80, respectively.

Referring to FIG. 2, the cooling unit 80 has an empty space therein. Each of the light emitting units 10 and 20 is located in the empty space 81. As the water circulates, the light emitting unit 10 , 20). Here, the cooling section 80 may have a plurality of empty spaces (holes). Each of the empty spaces (holes) can be positioned individually with the respective light emitting portions 10, 20.

The light sintering apparatus 100 according to an embodiment of the present invention includes an injection port 82 into which water is inputted and an outlet 83 through which water is discharged for injecting water into the hollow space 81 inside the cooling section 80, Or the like.

The cooling unit 80 may further include a connecting member 84 for smoothly injecting or discharging water into the inner hollow space 81.

The connection member 84 connects at least one of the empty space 81 in the cooling unit 80 with the inlet 82 and the discharge port 83 to connect the water to the empty space 81 in the cooling unit 80. [ As shown in FIG.

The connecting member 84 can directly connect at least one of the empty space 81 inside the cooling unit 80 to the inlet 82 and the outlet 83. [

The connecting member 84 may also connect one end of each of the plurality of empty spaces 81 included in the cooling section 80 to each other. For example, the first empty space included in the cooling unit 80 surrounds the first light emitting unit 10, and the second empty space and the third empty space surround the pair of second light emitting units 20 Suppose you are wrapping. For example, one end of the first empty space and one end of the second empty space may be connected to each other by a connecting member, and the other end of the first empty space and the other end of the second empty space may be connected to each other by a connecting member 9). Further, a portion of the first empty space or the second empty space may be connected to at least one of the inlet 82 and the outlet 83, respectively. Accordingly, the water flowing through the injection port 82 flows through the first empty space and the second empty space, and then can be discharged to the outside through the exhaust port 83. At this time, one end of the third hollow space may be directly connected to the injection port 82, and the other end of the third hollow space may be directly connected to the discharge port 83. Accordingly, the water introduced through the injection port 82 flows through the third empty space and can be discharged to the outside through the discharge port 83.

For example, one end of the first empty space and one end of the second empty space may be communicated with each other by a connecting member, and the other end of the second empty space and the other end of the third empty space may be communicated with each other by the connecting member .

At this time, the other end of the first empty space may communicate with the injection port 82, and one end of the third empty space may communicate with the discharge port 83.

Accordingly, the water introduced through the inlet 82 flows through the first empty space, the second empty space, and the third empty space, and then is discharged to the outside through the outlet 83 connected to one end of the third empty space have.

At least one of the injection port 82 and the discharge port 83 may protrude through one surface of the housing 70.

For example, at least one of the inlet 82 and the outlet 83 is connected to the inner hollow space 81 of the cooling unit 80 in which water surrounds the first light emitting unit 10 and the second light emitting unit 20 A housing (not shown) which faces upward in which the inner hollow space 81 of the cooling part 80 surrounding the first light emitting part 10 and the second light emitting part 20 is located is provided so as to smoothly inject or discharge water. 70, respectively.

In order to allow the water to circulate smoothly, the inlet 82 is provided at an upper portion where the inner empty space 81 of the cooling portion 80 surrounding the first light emitting portion 10 and the second light emitting portion 20 is located, And the discharge port 83 may be formed at a lower portion of the first light emitting portion 10 and the second light emitting portion 20. [ That is, the discharge port 83 may be formed to protrude from one surface of the housing 70, which faces the reflecting wall.

Water is injected from the upper part of the reflector 30 and injected into the inner hollow space 81 of the cooling part 80 through the connecting member 84 and then through the inner hollow space 81 of the cooling part 80 And can be discharged to the discharge port 83.

The inner hollow space 81 in which the light emitting units 10 and 20 are positioned may be formed of a transparent material since the light emitted from the light emitting units 10 and 20 must be transmitted. Of course, the present invention can be applied equally to a material that can transmit the light emitted by the light emitting units 10 and 20 located in the inner empty space (hole) even if the material is not a transparent material.

For example, the cooling section 80 may be formed of quartz.

The light sintering apparatus 80 according to an exemplary embodiment of the present invention may have a through hole 710 through which wires for power supply to the light emitting units 10 and 20 are inserted.

The electric wire may pass through one end of the cooling part 80 through the through hole 710 and may be connected to one end of the light emitting part 10.20. At this time, a ring can be fastened to one end of the cooling part 80 through which the electric wire is passed, to prevent water contained in the empty space 81 inside the cooling part 80 from being discharged through the joint part Not shown).

In this specification, it is assumed that the inner space and the connection portion of the electric wire are sealed through the ring connection. However, the same can be applied to the case where the inner space to which the electric wire is connected besides the ring can be sealed. Of course.

7, the discharge port 83 and the discharge port 83 are formed on the same surface. However, according to the method of implementation, the discharge port 83 is formed to surround the electric wire connected to one end of the cooling part 80, And may be formed to protrude through the hole 710.

One end of the discharge port 83 is connected to one end of the internal hollow space 81 of the cooling section 80 and the other end of the discharge port 83 is connected to the other end of the discharge port 83. [ The through hole 710 may be formed to be in communication with the through hole 710. because of this,

The water is injected into the upper portion of the light sintering apparatus 100 and discharged through the rear surface of the light sintering apparatus 100 through the discharge port 83, There is an advantage that it can be circulated smoothly.

8 shows a structure of a cooling unit according to another embodiment of the present invention.

8, a cooling unit 800 according to another embodiment of the present invention includes a body 810, a reservoir 820, a connecting member 830, an inlet 840, and an outlet 850 .

The light emitting units 10 and 20 are positioned inside the body 810. Accordingly, the body 810 is formed of a transparent material such that the light emitting portions 10 and 20 transmit the light emitted from the light emitting portions 10 and 20.

The body 810 may be formed to independently surround each light emitting portion.

The reservoir 820 is a means for storing water.

The reservoir 820 is located on top of the reflector 30 and can be in direct communication with the inlet 840. In this way, the reservoir 820 can temporarily store the water to be injected through the inlet 840 and then provide it to the body 810 via the connecting member 830. [

The connecting member 830 functions to connect the reservoir 820 and the body 810 to inject the water stored in the reservoir 820 into the body 810.

One end of the connecting member 830 is connected to a part of the reservoir 820 and the other end of the connecting member 830 is connected to a part of the body 810.

The injection port 840 communicates with the reservoir 820 and is a means for water injection.

Water is introduced through the injection port 840 and is temporarily stored in the reservoir 820 before the light emitting portions 10 and 20 are injected directly into the body 810 in which the light is emitted, (810).

The injection port 840 may be formed to protrude through the upper surface of the housing 70, as described above with reference to FIG.

1, 2, 7, and 8, the injection port is formed to protrude through the upper surface of the housing 70. However, the injection port may be formed in the form of a hole penetrating the upper surface of the housing 70 .

It is a matter of course that the injection port 840 can be applied to both the protruding shape and the recessed shape regardless of the shape in which the water can be injected from the outside.

The outlet 850 is a means for discharging water from the body 810 or the reservoir 820.

The outlet 850 is spaced a certain distance from one end of the body 810 and the connecting member 830 to smoothly discharge the water heated by the light emitting units 10 and 20 inside the body 810 And may be connected to the other end of the body 810. 8, the outlet 850 may be formed in the same shape as the inlet 840 in the same plane as the inlet 840, although the outlet 850 is not shown. 7, the outlet 850 may be formed on a surface different from the inlet 840. In this case, the rear surface of the housing 70 is communicated with a through hole through which the electric wire penetrates The first light emitting portion 10 is located below the central curved portion 31 of the optical sintering apparatus 100 and the second light emitting portion 10 is located below the auxiliary curved portion 33 A pair of second light emitting portions 20 are shown as being located.

The light sintering apparatus 100 is not shown in the figure but the first light emitting portion 10 is positioned below the central curved portion 31 and the pair of the first light emitting portion 10 is located below the main curved portion 32. [ Two light emitting portions may be positioned, and a pair of third light emitting portions may be positioned below the auxiliary curved portion 33. [

The reflector 30 is formed into a predetermined shape having a predetermined length. The lower surface of the reflector 30 is disposed on the first light emitting portion 10 and the third light emitting portion 20 so that the light emitted from the first light emitting portion 10 and the second light emitting portion 20 is emitted upward And reflects the light.

The first light emitting portion 10 may be disposed under the central portion L of the lower surface of the reflector 30. In addition, the lower surface of the reflector 30 may be formed to be laterally symmetrical with respect to a center line passing through the center portion L along the longitudinal direction.

To explain this in more detail, the lower surface of the reflector 30 is formed to include the central curved portion 31, the main curved portion 32 and the auxiliary curved portion 33, as shown in FIG.

At this time, a center curved portion 31 is formed on the basis of the center line of the lower surface of the reflector 30, and both ends of the central curved portion 31 are formed so as to be in contact with the main curved portion 32, The auxiliary bending portion 33 is formed to be in contact with the auxiliary bending portion 33.

Referring to FIG. 2, it can be seen that a pair of main curved portions 32 and a pair of auxiliary curved portions 33 are formed symmetrically with respect to the center curved portion 31 of the reflector 30.

The central curved portion 31 is formed on the first light emitting portion 10. At this time, the central curved portion 31 is formed in a curved shape that is recessed upward from the lower surface of the reflector 30. The center of the central curved portion 31 may be formed to correspond to the center line of the central portion L of the reflector 30 and be curved so as to be laterally symmetrical with respect to the center line .

The central curved portion 31 reflects the light emitted upward from the light emitted from the first light emitting portion 10.

The main bending portion 32 is formed to be in contact with the both ends of the central bending portion 31 in a one-to-one correspondence with each other, and may be formed to be bilaterally symmetrical with respect to the central bending portion 31.

Like the central curved portion 31, the main curved portion 32 is recessed upwardly from the lower surface of the reflector 30 to be curved.

Accordingly, the first main bend portion is formed in contact with the left end of the center bend portion 31, and the second main bend portion is formed in contact with the right end of the central bend portion 31.

The auxiliary curved portion 33 is concavely recessed upward from the lower surface of the reflector 30 to be curved.

One end of each of the auxiliary curved portions 33 is formed in contact with the other end of each of the pair of main bent portions 32 in a one-to-one correspondence with each other. That is, the auxiliary curved portions 33 are formed one by one on both sides of the pair of main bent portions 32 so as to form a left-right symmetry.

More specifically, the first auxiliary bending portion is formed in contact with the left end of the main bending portion 32, and the second auxiliary bending portion is formed in contact with the right end of the main bending portion 32.

Below the pair of auxiliary curved portions 33, a pair of second light emitting portions 20 are disposed one by one, respectively. Therefore, the light diverted upward from the light emitted by the second light emitting portion 20 can be reflected by the auxiliary curved portion 33 and irradiated with the object to be processed.

The reflector 30 may be manufactured by mixing any one or two or more of various metals such as gold, silver, aluminum, and iron, and non-metallic materials such as ceramics and alumina. However, the reflector 30 is not necessarily made of the above-described material, and a mixture of any one or more of these materials may be coated on the lower surface of the reflector 30.

In other words, the light sintering apparatus 100 according to the embodiment of the present invention is formed such that the central curved portion 31 is curved upward so that the lower surface of the reflector 30 is symmetrical with respect to the central portion L A pair of main bent portions 32 are formed to extend from the respective side ends of the central bent portion 31 and are curved upward and a pair of auxiliary curved portions 33 are extended from the respective side ends of the main bent portion 32 And is curved upward.

The first light emitting portion 10 is disposed below the central curved portion 31 and the second light emitting portion 20 is disposed below each of the pair of main curved portions 32 with respect to the central portion of the reflector 30 And light emitted upward from the light emitted from each of the first light emitting portion 10 to the second light emitting portion 20 passes through the central curved portion 31, the pair of main curved portions 32, and the pair of the auxiliary curved portions 33 and is irradiated onto the object to be processed.

The first light emitting portion 10 is arranged such that the central curved portion 31 is disposed below the pair of main curved portions 32 and the second light emitting portion 20 is located below the pair of auxiliary curved portions 33 .

At this time, the object to be printed is dried using the infrared lamp as the second light emitting portion 20, and the sintered product is sintered by replacing the xenon lamp with the first light emitting portion 10 or the second light emitting portion 20 with the xenon lamp However, it is also possible to irradiate the first light emitting portion 10 and the second light emitting portion 20 with composite light by using a light emitting portion that is not a xenon lamp as an ultraviolet lamp.

Therefore, it is possible to obtain a high sintering uniformity and electric conductivity, enable large-scale sintering, and perform drying and sintering continuously. This has the effect of contributing to productivity improvement and manufacturing cost reduction through mass production and high-speed production.

In addition, the light sintering apparatus 100 according to an embodiment of the present invention may further include a pair of reflective walls 40. Here, the reflecting walls 40 are formed as a pair extending downward from both ends of the reflector 30 respectively. In addition to the function of supporting the reflector 30, the reflecting wall 40 reflects the light emitted by the first light emitting portion 10 and the second light emitting portion 20, which are deflected from the object to be processed on the inner surface, It can play a role of investigating with water.

The reflecting wall 40 may be formed by mixing any one or two or more of various metals such as gold, silver, aluminum, and iron, and non-metallic materials such as ceramics and alumina.

However, the reflection wall 40 is not necessarily made of the above-described material like the reflection gutters 30, and a mixture of any one or more of these materials is coated on the inner surface of the reflection wall 40 to be manufactured It is possible.

The inner surface of the reflecting wall 40 is a surface on which the pair of reflecting walls 40 face each other and reflects a part of the light emitted by the first emitting portion 10 and the second emitting portion 20 .

The optical sintering apparatus 100 according to an embodiment of the present invention may further include a housing 70 covering the reflector 30 and the reflecting wall 40. The housing 70 surrounds the upper surface of the reflector 30 and the outer surface of the reflector wall 40 to fix the reflector 30 and the reflector wall 40, 40).

In addition, the light sintering apparatus 100 according to an embodiment of the present invention may further include a fixing unit 50 for fixing the object to be processed. The fixing unit 50 fixes the object to be processed between the pair of reflective walls 40 and separates the object from the lowermost end of the reflective wall 40 by a predetermined distance .

In addition, the optical sintering apparatus 100 according to an embodiment of the present invention may further include an optical filter 60. Here, the optical filter 60 is an optical element that selectively transmits or blocks a component having a specific wavelength band in the light. The optical filter 60 is disposed below the first light emitting portion 10 and the second light emitting portion 20 and has a wavelength band of white light, infrared light, and ultraviolet light according to a substrate or the like on which the object to be processed or the object to be processed is printed, And the like.

At this time, the optical filter 60 can be fixed by the reflective wall 40. For example, a sliding groove may be formed on the inner surface of each of the pair of reflecting walls 40 so that the optical filter 60 is slidably attached. However, the optical filter 60 does not necessarily have to be fixed to or slid on the reflecting wall 40 to be detachable.

The light sintering efficiency of the light sintering apparatus according to an exemplary embodiment of the present invention can be improved by forming the central curved portion 31, the main curved portion 32 and the auxiliary curved portion 33 of the reflector 30, The position of the light emitting portion 20, the height and arrangement of the reflecting wall 40, and the like, and the relationship with each parameter.

Therefore, it is necessary to derive conditions with optimum light sintering efficiency. Hereinafter, a detailed description will be given based on Fig.

The shape and curvature of the reflector 30 with improved light sintering efficiency were optimized through a MATLAB program. The positions of the first light emitting portion 10 and the third light emitting portion 20 and the height and arrangement of the reflective wall 40 are set corresponding to the shape and the curvature of the reflector 30. As a result, the relationship between optimized variables and different variables is as follows.

The vertical distance from the central portion L of the reflector 30 to the center of the first light emitting portion 10 is 100 mm or less and the vertical distance from the center of the first light emitting portion 10 to the fixing portion 50 is 60 to 150 mm have. At this time, the vertical distance from the center of the reflector 30 to the center of the second light emitting portion 20 may be 50 mm or less.

In addition, the center curved portion 31 may be formed in an arc shape having a circular arc radius of 1 to 100 mm.

The main bend section 32 may be formed in an arc shape having a circular arc radius of 10 to 100 mm and a string length connecting both ends of the main bent section 32 may be 10 to 200 mm or less. At this time, the vertical distance from the center of the reflector 30 to the center of the second light emitting portion 20 may be shorter than the length of the strings forming the main curved portion 32.

The horizontal line passing through the first light emitting portion 10 and the imaginary line extending from the first light emitting portion 10 to the second light emitting portion 20 may have a predetermined angle.

The auxiliary curved portion 33 may be formed in an arc shape having a circular arc radius of 1 to 100 mm. Here, the outer surface of the second light emitting portion 20 may be disposed downwardly in contact with the arc center of the auxiliary curved portion 33. At this time, the distance from the arc center of the auxiliary curved portion 33 to the center of the second light emitting portion 20 may be shorter than the arc radius of the auxiliary curved portion 33.

The reflective wall 40 is disposed in a direction perpendicular to the reflector 30 and the vertical distance from the center L of the reflector 30 to the end of the reflective wall 40, Here, the horizontal distance from the center of the reflector 30 to the inner surface of the reflecting wall 40 may be longer than the length of the strings connecting both ends of the main curved portion 32. The vertical distance from the center L of the reflector 30 to the end of the reflective wall 40 may be longer than the vertical distance from the center of the reflector 30 to the center of the first light emitting portion 10.

As shown in FIG. 3, it can be seen that the intensity of the light source of the first light emitting portion reaching the article to be processed according to an embodiment of the present invention is uniformly distributed. 3 (a) shows the intensity of the light source of the first light emitting portion in a three-dimensional graph, and FIG. 3 (b) shows two-dimensional data viewed in the z-axis direction in which the intensity of the light source over the entire area is uniform Able to know.

As shown in FIG. 4, the light sintering apparatus according to an embodiment of the present invention can uniformly distribute the intensity of the light source of the second light emitting portion reaching the object to be processed. 4 (a) shows the intensity of the light source of the second light emitting portion in a three-dimensional graph, and FIG. 4 (b) shows two-dimensional data viewed in the z-axis direction.

5 is a view showing a light sintering apparatus according to another embodiment of the present invention. Referring to FIG. 5, the structure of the reflector 530 differs from that of the reflector 40 of FIG. 1 in the light sintering apparatus 500 according to another embodiment of the present invention, and the remaining structures are all the same.

Therefore, only the structure of the different reflector 530 will be described below, and a duplicate description will be omitted.

As shown in FIG. 5, the reflector 530 of the light sintering apparatus 500 is formed to be laterally symmetrical with respect to the center L of the lower surface.

1, a spacing groove 535 is formed in the central portion L of the lower surface of the reflector 530. [

The spacing grooves 535 are formed to be spaced apart from the center L of the lower surface of the reflector 530 and have a certain depth in the vertical direction from the center L of the lower surface of the reflector 530.

The shape of the spacing groove 535 may be various shapes such as a rectangle, a circle, and a polygon, and may be applied without limitation if the first central curved portion 431a and the second central curved portion 431b have a shape have.

The first central curved portion 531a and the second central curved portion 531b are formed so as to be in contact with the opposite ends of each of the spacing grooves 535 so as to be laterally symmetrical with respect to the spacing grooves 535. [

The first central curved portion 531a and the second central curved portion 531b are formed in a downward curved shape with respect to a portion in contact with the spacing groove 535. [ That is, the arc of the first central curved portion 531a and the circular arc of the second central curved portion 531b may be formed in the same shape as a circular arc. The first central curved portion 531a and the second central curved portion 531b are formed so as to have a circular arc shape in which the portion in contact with the spacing groove 535 is bent upward downward with respect to the portion contacting the spacing groove 535 .

The inner side surfaces of the spacing grooves 535 reflect light upward emitted from the light emitted by the first light emitting portion 510 and the second light emitting portion 520 disposed below the reflector 530 to the object to be processed Or the material composition may be applied.

The inner side surface of the spacing groove 535 may include light emitted upward by the first light emitting portion 510 and the second light emitting portion 520 disposed at the lower portion of the reflector 530 Reflective material, or the material composition may be applied.

The inner upper surface of the spacing groove 535 reflects light emitted upward by the first light emitting portion 510 and the second light emitting portion 520 disposed at the lower portion of the reflector 530 Or the material composition may be applied.

A part of the inner surfaces of the spacing grooves 535 may include a first light emitting portion 510 and a second light emitting portion 520 disposed below the reflector 530. Of the light emitted by the second light emitting portion 520, Or it may be formed by applying the material composition.

The spacing groove 535 may be formed to have a certain depth on the lower surface of the reflector 530 or may be formed to contact with the housing 570 formed on the outer surface of the reflector 530 have.

6 is a view illustrating a method of forming a conductive film using a light sintering apparatus according to an embodiment of the present invention.

In step 610, the metal nano ink is printed in the first step. The metal nano ink can be printed on the substrate and patterned. For example, the substrate may be plastic, film, paper, glass, or the like.

In step 620, the metal nano ink is dried in the second step.

In this case, the object to be treated on the substrate S is heated by radiating infrared rays, whereby the object to be processed can be dried.

In step 630, the metal nano ink is sintered to the third step.

The sintering process of the metal nano ink may be performed simultaneously with the process of drying the metal nano ink, or may be performed after the drying process of the metal nano ink is completed.

The light sintering apparatus 100 may irradiate the substrate on which the object to be processed is formed with the xenon lamp light through at least one of the first light emitting unit 10 to the second light emitting unit 20 to sinter the object to be processed. Hereinafter, in order to facilitate understanding and explanation, it is assumed that the first light emitting unit 10 is a xenon lamp, and that the second light emitting unit 20 is an infrared lamp.

In this sintering process, the second light emitting portion 20, which is an infrared lamp, is turned off, and only the first light emitting portion 10 can be turned on. The sintering process through the irradiation of white light emitted from the xenon lamp is performed by a single pulse sintering process for irradiating one pulse, a multi-pulse sintering process for dividing energy of the white light into multiple pulses, or a sintering process Step sintering.

However, the second light emitting portion 20, which is an infrared lamp, is not necessarily turned off in the sintering process. The second light emitting unit 20 may be replaced with an ultraviolet lamp from an infrared lamp after the drying process.

In such a case, ultraviolet light can be irradiated together with white light in a sintering process. At this time, in the case of two-step sintering, the ultraviolet lamp may be turned off at any one of the preheating step and the sintering step.

For example, the light sintering apparatus 100 may include a first light emitting unit 10 as an ultraviolet lamp and a second light emitting unit 20 as an infrared lamp.

In this case, in the step of drying the metal nano ink, the light sintering apparatus 100 can dry the printed metal nano ink by irradiating infrared rays through the second light emitting portion 20. [ After drying the metal nano ink, the second light emitting portion 20 can be replaced with a xenon lamp in an infrared lamp.

Therefore, in the sintering process, after the second light emitting portion 20 is replaced with a xenon lamp in an infrared lamp, white nano-ink may be irradiated to sinter the dried nano ink. At this time, the first light emitting portion 10 may be irradiated with an ultraviolet lamp and the ultraviolet light may be irradiated together with the white light.

Here, as described above, the sintering process can proceed with two step sintering in which sintering is performed through a short pulse after preheating through short pulse sintering, multiple pulse sintering, or multiple pulses. In the case of such a two-step sintering process, the ultraviolet lamp may be turned off during the preheating or sintering process.

In another embodiment, the first light emitting portion 10 of the light sintering apparatus 100 may be a xenon lamp. Therefore, after the metal nano ink is dried by irradiating infrared rays with the second light emitting portion 20 as an infrared lamp, the second light emitting portion 20 is replaced with a xenon lamp, and then the first light emitting portion 10 and the second light emitting portion The dried metal nano ink can be sintered by irradiating white light through the light emitting portion 20.

At this time, the wavelengths of the white light emitted from the first light emitting portion 10 and the second light emitting portion 20 may be different from each other.

That is, when white light having different wavelengths are simultaneously irradiated through the first light emitting portion 10 and the second light emitting portion 20, when a predetermined time elapses, the two white light beams overlap each other to form an overlapped pulse, . The overlap pulse has an energy larger than the energy of each of the white light beams emitted from the first light emitting portion 10 and the second light emitting portion 20, and the waveform becomes closer to the stepped shape.

Generally, in order to make a step-like pulse, the electric signal of the main power generator must be controlled. However, the optical sintering apparatus 100 according to the embodiment of the present invention requires a step- Can be formed.

By using the thus formed stepwise pulse waveform for sintering, the electrical conductivity of the metal nano ink and the wrinkling of the printed film can be prevented.

The conductive film forming method using the light sintering apparatus according to the embodiment of the present invention can also be applied to a roll-to-roll process. That is, even when the substrate on which the object is printed moves from the left reflective wall to the right reflective wall, the object to be processed can be dried through the infrared lamp and sintered through the xenon lamp.

It will be apparent to those skilled in the art that various modifications, additions and substitutions are possible, without departing from the spirit and scope of the invention as defined by the appended claims. Should be regarded as belonging to the following claims.

100: light sintering apparatus
10: first light emitting portion 20: second light emitting portion
30: reflector 31: center curvature
32: main bend 33: secondary bend
40: reflective wall 50:
60: optical filter 70: housing
80:
81: Inner empty space 82: Inlet port
83: outlet 84: connecting member

Claims (12)

A light emitting portion for emitting light; And
And a cooling part having an inner hole in which the light emitting part is located and cooling the light emitting part through circulation of water through the inner hole.
The method according to claim 1,
An inlet for injecting water into the cooling unit; And
And a discharge port for discharging water located in the cooling section.
3. The method of claim 2,
The cooling unit includes:
And a connection member communicating with at least one of the injection port and the discharge port and a part of the inner hole.
3. The method of claim 2,
Wherein at least one of the injection port and the discharge port is formed to be protruded or recessed on one surface of the housing of the optical sintering apparatus.
The method of claim 3,
Wherein the light sintering apparatus further comprises a through hole for inserting a wire for power supply to the light emitting unit.
6. The method of claim 5,
Wherein the electric wire is in contact with the light emitting portion through one surface of the inner hole,
And a ring for preventing the water from being discharged to the outside of the inner hole is positioned in a portion where the electric wire and the inner hole are in contact with each other.
The method according to claim 1,
Wherein the cooling portion is formed of a transparent material through which the light emitted from the light emitting portion located in the inner hole can be transmitted.
6. The method of claim 5,
The outlet
And is formed to surround an electric wire connected to one end of the inner hole, and is formed to communicate with the through hole.
Reflector;
A light emitting unit located below the reflector and emitting light; And
And a cooling part formed to surround the outer shape of the light emitting part and cooling the light emitting part.
10. The method of claim 9,
The cooling unit includes:
A body including the light emitting portion;
Storage where water is temporarily stored; And
And a connecting member for connecting the body and the reservoir.
11. The method of claim 10,
An inlet for injecting water into the reservoir; And
And a discharge port for discharging water from the body or the reservoir.
11. The method of claim 10,
Wherein the reservoir is located in an empty space above the reflector.

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