JP7079044B2 - Heating device and heating method - Google Patents

Description

The present invention relates to a heating device and a heating method.

Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the degree of cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. Disclosed is a heating furnace in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber.
In the case of the heating furnace described in Patent Document 2, the heat generated from a large number of shelf-shaped heaters arranged in the vertical direction tends to rise in the heating furnace and collect in the region near the top wall in the furnace. The temperature of the upper region of the furnace is higher than the temperature of the lower region of the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region of the furnace and the lower region of the furnace.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2013-200077 Japanese Unexamined Patent Publication No. 2005-352306 Japanese Unexamined Patent Publication No. 2005-055152

Patent Document 3-5 discloses a heating device for improving the uniformity and cleanliness of the temperature distribution.
In the past, there has been a demand for further improvement in temperature distribution uniformity and cleanliness.

An object to be solved by the present invention is to provide a heating device and a heating method having excellent temperature distribution uniformity and cleanliness.

The heating device of the present invention comprises a plurality of heating walls arranged opposite to each other at a distance from each other.
A plurality of heat generating means provided in each of the plurality of heating walls, and
A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
The plurality of accommodation spaces have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the opening on the back side side is closed by the closing member.

Preferably, a metal pull-out mechanism having a closing portion that closes the opening on the front surface side and an insertion portion that is inserted into the accommodation space and is in direct contact with the heating wall or the heat radiating member. Further have.

More preferably, the insertion portion is formed so that an object to be heated can be mounted.

In the heating method of the present invention, the object to be heated is heated by using the above-mentioned heating device.

According to the present invention, there is provided a heating device having excellent uniformity of temperature distribution and cleanliness, and a heating method using the heating device.

The front view which shows the heating apparatus which concerns on 1st Embodiment of this invention. The side view of the heating apparatus of FIG. The figure which shows the structure of the coil type heater. FIG. 6 is a cross-sectional view of the heating device of FIG. 1 showing the arrangement of coiled heaters. The enlarged view of the main part of the heating apparatus which concerns on 2nd Embodiment of this invention. FIG. 5 is a side view of the heating device of FIG. The enlarged view of the main part of the heating apparatus which concerns on 3rd Embodiment of this invention. A side view of the heating device of FIG. 7. The top view of the heating apparatus which concerns on 4th Embodiment of this invention. FIG. 9 is a side view of the heating device of FIG. The top view of the heating apparatus which concerns on 5th Embodiment of this invention. FIG. 11 is a side view of the heating device of FIG.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the heating device 100 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance from each other, and a plurality of coils as heat generating means provided on the heating wall body 10. The shape heater 11, a plurality of heat radiating members 12 arranged in a shelf shape in the facing regions of the plurality of heating walls 10 at intervals in the vertical directions A1 and A2, and the heat radiating members 12 adjacent to each other in the vertical direction. A storage space 14 for the object to be heated W provided between them, a heat insulating material 23 provided so as to cover the outer wall surfaces of the left side heating wall 10A and the right side heating wall 10C arranged at both ends, and the left side. A plurality of protruding members 50 (50A, 50B) provided on the outer wall surface of the heating wall body 10A and the right side heating wall body 10C via the heat insulating material 23 are provided.

The upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.

The heating wall 10 is a structural member made of a metal such as an aluminum alloy or stainless steel, which forms a partition wall on both side surfaces and a center of the box-shaped main heating device 100, and is a member that serves as a heat source for the heating device. be. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each heating wall 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24.

As shown in FIG. 3 in detail, the coil-shaped heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed inside a metal tube (sheath) 11s. Although shown in a simplified manner in FIG. 3, the heating wire 11w wound in a coil shape reciprocates from the right end to the left end, and two lead wires extend from the right end. The space between the reciprocating heating wire 11w and the heating wire 11w and the metal tube 11s are insulated by an insulating layer made of powdered magnesium oxide.
The coiled heater 11 is formed so that the winding pitch of the heating wire 11w is small at both ends W1 and W1 and large at the central portion W2, and the calorific value at both ends is larger than the calorific value at the central portion. ing.

As shown in FIG. 4, the arrangement of the coiled heaters 11 in each heating wall 10 is inserted into all the through holes 24 in which the spacing is narrow at the bottom and wide at the top. As a result, in the vertical directions A1 and A2 of each heating wall 10, the calorific value increases in the lower portion where the arrangement interval of the coil-shaped heater 11 is small, so that the temperature of the lower portion, which tends to be low, is increased. Further, in the depth directions B1 and B2, the amount of heat generated at both ends in the depth direction, where the temperature tends to decrease, is increased so that the temperature distribution becomes uniform.

As shown in FIG. 1, each heating wall 10 is provided with another plurality of through holes 25 in the horizontal direction from the front side, and a temperature sensor 15 is inserted therein. The calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the calorific value is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coiled heater 11, the heating wall 10 can be used. Achieves temperature uniformity.

The heat radiating member 12 is a member that is arranged in a shelf shape at a distance in the vertical direction in the facing region of the heating wall body 10 to conduct heat from the heating wall body 10. In the present embodiment, they are fitted into grooves formed in the heating wall bodies 10 on both sides and arranged in a shelf shape. Each heat radiating member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiating function can be obtained.

Each accommodation space 14 is a space defined by the heating walls 10 on both sides and the upper and lower heat radiating members 12, and accommodates one object to be heated one by one and radiates heat from the upper and lower heat radiating members 12. It is designed to be heat-treated with. In the heating wall body 10, a groove 10t extending in the depth directions B1 and B2 of the accommodation space is formed at a position corresponding to each other on the wall surface on the side facing each accommodation space 14, and the lower side of the groove 10t is formed. The inner surface is a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object W to be heated. Using a predetermined transport device, the object to be heated can be carried in so that both ends in the left-right direction thereof enter each groove 10t, and can be placed on the support surface. When both side edges of the object W to be heated are thermally opened, the temperature of the object W to be heated tends to be non-uniform at both edge portions. Therefore, by directly transferring heat to both side edges of the object to be heated W through the support surface of the groove 10t, the temperature of the object to be heated W is made uniform.

An opening 14a (see FIG. 2) is formed on the front surface side of each accommodation space 14. The opening 14b on the back surface side of each accommodation space 14 is closed by a back wall member 26 as a closing member. That is, each accommodation space 14 is opened only at the opening 14a on the front side. By providing the opening 14a on the front side, the air heated and expanded inside the accommodation space can escape to the outside. Since the opening 14b on the back side is closed, even if the air or gas heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside. There is.

Between the two heat radiating members 12 at the top and between the two heat radiating members 12 at the bottom, there is an empty space in which the object to be heated W is not introduced, and a heat insulating space for forming an air heat insulating layer. It is 20T and 20B.

The gantry unit 30 is arranged on the floor on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 100 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.

The heat insulating material 23 is provided to minimize thermal disturbance to the left side heating wall body 10A and the right side heating wall body 10C from the outside air, and is formed of a heat insulating material such as glass fiber. ing.

Next, the operation of the heating device 100 of the present invention will be described.
When the heating device 100 is used, each object to be heated is carried into each storage space 14 through the opening 14a on the front side of each storage space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
By a temperature controlling means (not shown), the calorific value of the plurality of coiled heaters 11 is controlled individually or independently for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.

Since the heating walls 10 are arranged on the left and right sides of each accommodation space 14 and the heat radiating members 12 are arranged above and below, the left and right heating walls 10 heated by the heat of the coiled heater 11 are arranged. It is heated by the heat radiated from the heat radiating member 12 and the heat radiated up and down from the heat radiating member 12 that generates heat by heat conduction from these heating walls.
Since each heating wall 10 is heated to a target temperature and each heat radiating member 12 is also heated to the same temperature as the heating wall 10, the temperature uniformity between the accommodation spaces 14 is high.
Here, as the coiled heater 11, the winding pitch of the heating wire 11w is small at both ends and large at the center, so that the temperature tends to decrease in the depth direction of the heating wall 10 in the depth directions B1 and B2. The amount of heat generated at both ends of the coil is large, and the temperature distribution is uniform. Therefore, the temperature distribution in the depth direction in each accommodation space 14 is also made uniform.
Therefore, the inside of each accommodation space 14 is heated evenly and evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.

Further, each of the accommodation spaces 14 does not generate a heat accumulation phenomenon and an overheating phenomenon in the upper space due to the rise of hot air due to the above configuration. Further, since the heated gas is not agitated or circulated by the fan, the cleanliness is excellent and the object to be heated does not move due to the gas flow.

The above-mentioned heating device 100 exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.
The heat generating means is not limited to the coiled heater, and other heaters or heat pipes may be used.

2nd Embodiment FIGS. 5 and 6 show the heating apparatus according to the second embodiment.
The heating device 100A shown in FIGS. 5 and 6 has the same configuration as that of the first embodiment except that the drawing mechanism 80 is provided.
The pull-out mechanism 80 is formed of a metal plate and has a closing portion 81 that closes the opening 14a on the front surface side, and a plate-shaped insertion portion 82 that is inserted into the accommodation space 14.
When the opening 14a on the front surface side is closed, the closed portion 81 forms a predetermined gap Gp between the upper end portion of the closed portion 81 and the upper end side of the opening portion 14a, as shown in FIGS. 5 and 6. It is formed to be.
The insertion portion 82 is placed so as to be in direct contact with the heat radiating member 12.

The object W to be heated may be mounted in the groove 10t described above, or may be placed directly on the insertion portion 82 of the drawer mechanism 80 or placed via a jig. Since the insertion portion 82 is in direct contact with the heat radiating member 12, it is heated to the same temperature as the heat radiating member 12 and the heating wall body 10. Therefore, the object to be heated W placed on the insertion portion 82 is also heated to the same temperature as the heat radiating member 12 and the heating wall body 10.

When the opening area of the opening 14a is too large, the predetermined gap Gp of the closing portion 81 is covered with a large amount of air flowing into the accommodation space 14 from the outside when the opening 14a is opened. It may reduce the temperature uniformity of the heated material W. Therefore, when the opening 14a is closed by the closing portion 81, it is possible to prevent a large amount of air from flowing into the accommodation space 14 from the outside. The predetermined gap Gp is provided so that the heated and expanded air can escape to the outside of the accommodation space 14. It is considered that if the gap Gp is too small, the air flow to the outside becomes faster and the temperature uniformity of the object to be heated near the gap Gp decreases. Further, when the accommodating space 14 is completely sealed, a flow of heated air is generated in the accommodating space 14, so that air circulation is reduced, so that heat transfer is weakened and a long heating time is required. That is, by optimizing the opening area of the opening 14a with a predetermined gap Gp, the temperature uniformity of the object to be heated W can be kept good and the heating time can be optimized. Further, by providing a predetermined gap Gp, it is also effective for discharging the outer gas emitted from the object to be heated W.
A configuration that does not form a predetermined gap Gp can also be adopted.

Third Embodiment FIGS. 7 and 8 show a heating device according to the third embodiment.
The heating device 100B shown in FIGS. 7 and 8 has the same configuration as that of the first embodiment except that the heating device 100B is provided with a drawer mechanism 180.
The pull-out mechanism 180 includes a closing portion 181 and an insertion portion 182 like the above-mentioned pull-out mechanism 80, but the insertion portion 182 is different from the above-mentioned insertion portion 82 in that it is mounted in the groove 10t. In this case, the object to be heated W is placed directly on the insertion portion 182 or via a jig.
A predetermined gap Gp is formed between the closed portion 181 and the opening portion 14a as described above.
By holding the insertion portion 182 in the groove 10t, the heating wall body 10 and the insertion portion 182 come into direct contact with each other, and the insertion portion 182 is maintained at the same temperature as the heating wall body 10. Therefore, the temperature uniformity of the object W to be heated can be kept good, and the heating time can be optimized.

Fourth Embodiment FIGS. 9 and 10 show a heating device according to the fourth embodiment.
The heating device 100C shown in FIGS. 9 and 10 has the same configuration as that of the first embodiment except that the heating device 100C is provided with a drawer mechanism 280. Further, the structure of the drawer mechanism 280 is basically the same as that of the drawer mechanism 80 described above. However, the drawer mechanism 280 is provided with a plurality of holding members 283 for mounting the heated object W made of a three-dimensional structure on the insertion portion 282. By providing the holding member 283, it is possible to heat the object to be heated W made of a three-dimensional structure while maintaining the posture.

Fifth Embodiment FIGS. 11 and 12 show a heating device according to a fifth embodiment.
The drawer mechanism 380 shown in FIGS. 11 and 12 has a closing portion 381 that closes the opening 14a and an insertion portion 382 that is mounted in the groove 10t.
A predetermined gap Gp is formed between the lower end side of the closed portion 381 and the lower end side of the opening portion 14a.
In the insertion portion 382, a plurality of notch portions 384 for setting the object to be heated W of the three-dimensional structure are arranged in a row. By fitting a part of the object to be heated W into the notch portion 384, the object to be heated W is set in the insertion portion 382.
Gas discharge holes 383 are arranged on both sides of the notch portions 384 formed in a row.

In this embodiment, when the object W to be heated set in the notch portion 384 is heated and the outer gas is released, the outer gas is heavier than normal air, so that the back surface side of the insertion portion 382 is passed through the gas discharge hole 383. Is discharged to. The outer gas discharged to the back surface side of the insertion portion 382 is discharged to the outside through a predetermined gap Gp formed at the lower end portion of the opening 14a.

In the above-described embodiment, a predetermined gap Gp is formed between the opening portion 14a and the closing portion 381, but the present invention is not limited to this, and an opening may be provided in the closing portion 381.
Further, in the heating device 100, the heating wall 10, the top plate 16, and the bottom plate 17 are made of stainless steel, and the heat radiating member 12 is made of an aluminum plate whose surface is plated with black. However, the material is not limited to these materials, and the heating walls 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy that has been subjected to a matte surface treatment to suppress the dissipation of radiant heat. ) Can also be formed. Further, the surface treatment of the heat radiating member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.

The heating device according to the present invention shall be widely used in an industrial field for heat-treating all objects to be heated, including various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates, and three-dimensional objects. Can be done.

10: Heating wall body 10A: Left side heating wall body 10B: Central heating wall body 10C: Right side heating wall body 10t: Groove 11: Coiled heater 11s: Metal tube 11w: Heating wire 12: Heat radiating member 14: Accommodation space 14a: Opening 14b: Back surface 15: Temperature sensor 16: Top plate 17: Bottom plate 20B: Insulation space 20T: Insulation space 23: Insulation material 24: Through hole 25: Through hole 26: Back wall member 30: Mount unit 50 : Protruding member 80: Pull-out mechanism 81: Closing part 82: Inserting part 100: Heating device 100A: Heating device 100B: Heating device 100C: Heating device 180: Pull-out mechanism 181: Closing part 182: Inserting part 280: Pulling-out mechanism 282: Insertion Part 283: Holding member 380: Pull-out mechanism 381: Closing part 382: Inserting part 383: Gas discharge hole 384: Notch part Gp: Gap W: Heated object W1: End part W2: Central part

Claims (11)

Multiple heating walls arranged facing each other at a distance,
A plurality of heat generating means provided in each of the plurality of heating walls, and
A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
The plurality of accommodation spaces have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the openings on the back side side are closed by the closing member.
A closed portion that closes the opening on the front surface side, and a closed portion.
A heating device further comprising a metal pull-out mechanism having an insertion portion inserted into the accommodation space and in direct contact with the heating wall or the heat radiating member . The heating device according to claim 1 , wherein the closed portion is formed so that a predetermined gap is formed between the closed portion and the opening on the front surface side when the opening is closed. The heating device according to claim 2, wherein the predetermined gap is formed on the upper end side of the opening. The heating device according to claim 2, wherein the predetermined gap is formed on the lower end side of the opening. The heating device according to claim 1 , wherein the insertion portion is formed so that an object to be heated can be mounted. The heating device according to claim 5 , wherein the insertion portion is provided with a holding member for mounting a heated object made of a three-dimensional structure. The heating device according to claim 5 , wherein a notch for mounting a heated object made of a three-dimensional structure is formed in the insertion portion. The heating device according to claim 1 , wherein the insertion portion is directly placed on the heat radiating member. Each of the plurality of heating walls facing each other has a support surface extending in the depth direction of the accommodation space formed directly at a position corresponding to each other on each wall surface on the side facing the accommodation space.
The heating device according to claim 1 , wherein both ends of the insertion portion are received by the support surface. At least one temperature sensor provided in each of the plurality of heating walls, and
The amount of heat generated by the plurality of heat generating means provided in each of the plurality of heating walls is set so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. The heating device according to any one of claims 1 to 9 , further comprising a temperature control means for individually controlling or grouping the plurality of heat generating means for independently controlling the amount of heat generated for each group. A heating method for heating an object to be heated using the heating device according to any one of claims 1 to 10 .

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