KR102117421B1 - Heater fixing device and substrate heat tretment apparatus using it - Google Patents

Abstract

The present invention relates to a heater fastening device for a device for applying heat treatment to a substrate and a substrate heat treatment device using the heater fastening device. A heater fastening device and a substrate heat treatment device using the same include: a chamber for heat treating the substrate; A heater made of a tubular body incorporating one or more heating wires; A heater fixing flange portion for fixing the end of the tube body outside the chamber through-hole formed on at least one side of the chamber so that the tube body is inserted with a clearance; A lead portion connecting the heating wire to a power source; And a lead fixing unit for drawing and fixing the lead portion out of the chamber. It includes. As a result, a hole in the chamber wall coupled with the heater is formed in a long hole shape larger than the diameter of the heater tube, and thus the heater is easily assembled and removed by tilting and detaching the heater, and damage to the heater can be prevented during assembly and removal. In addition, by preventing rotation of the lead portion, it is possible to prevent the deformation of the disconnection and the heating wire at the joining portion of the heating wire and the lead portion.

Description

Heater fastening device and substrate heat treatment device using the same{HEATER FIXING DEVICE AND SUBSTRATE HEAT TRETMENT APPARATUS USING IT}

The present invention relates to a heater fastening device and a substrate heat treatment device using the same, and more particularly, to a fastening device for fastening a heater for applying heat treatment to the substrate to the chamber and a substrate heat treatment device using the same.

2. Description of the Related Art In order to manufacture a semiconductor or display device, a device for heat treatment of a substrate such as a wafer or glass is required.

As one of the substrate heat treatment devices, a device that controls the temperature of the substrate by controlling the energy emitted by the lamp for heating the substrate, such as a halogen lamp installed inside the chamber, is used.

In the lamp-type substrate heat treatment apparatus, at least one substrate is seated in the chamber, and a bar-type heater is installed in the chamber to heat-treat the substrate at the top or bottom of the substrate.

In order to maintain the heater, the conventional heat treatment apparatus had to repair or replace the entire heater after opening the chamber. Therefore, there is a problem that the repair and replacement of the heater is complicated and takes a lot of time and money.

According to Korean Patent Application Publication No. 10-2010-0051977, in order to compensate for this, it is possible to separate the heater through holes in both walls of the chamber to which the heater is coupled as shown in FIG. 1. However, as the size of the substrate to be heat-treated increases, the length of the heater increases, and accordingly, there is a problem in that it is difficult to insert a heater having a long length through holes in both walls of the chamber. In addition, during the heater insertion process, there was a problem in that the surface of the heater was damaged by rubbing with a hole in both walls of the chamber.

In addition, another conventional heater fastening device has a problem in that the welding part is damaged or the heating wire is deformed when the terminal is rotated or pulled out to fix the terminal to the chamber when welding the heating wire and the terminal to connect the power to the heating wire.

In order to solve the above-mentioned problems of the background art, a heater fastening device is used to facilitate removal and assembly of the heater by forming holes in both walls of the chamber to be fastened with the heater to be inserted with a clearance when assembling the tube body of the heater. The object is to provide a substrate heat treatment apparatus.

In order to solve the problem of another background art described above, an object of the present invention is to provide a heater fastening device that prevents damage due to rotation at a coupling portion of a lead portion connecting a heating wire and power in the heater.

The heater fastening device of the present invention for solving the above-described problem is a heater fastening device for fastening a heater made of a tube body having one or more heating wires to a chamber for heat treatment of a substrate, wherein the tube body is inserted while having a clearance. A heater fixing flange portion for fixing an end portion of the tube body outside the chamber through-hole formed on at least one side of the chamber; A lead portion connecting the heating wire to a power source; And a lead fixing portion for drawing and fixing the lead portion outside the chamber. It includes.

Preferably, the chamber through-hole is formed in a long hole shape. At this time, the chamber through hole is formed in a vertical diameter larger than the horizontal diameter.

Preferably, the heater fixing flange portion is formed to have a smaller horizontal width than a vertical width.

Preferably, the heater is made of an inner tube having an inner heating wire therein and an outer tube surrounding the outer heating wire wound around the outer circumferential surface of the inner tube, wherein the lead portion includes an inner lead connected to one end of the inner heating wire; And an external lead connected to at least one end of the external heating wire.

Preferably, the lead portion is interposed between the heater and the lead fixing portion to prevent rotation of the inner and outer leads when the lead portion is coupled to the lead fixing portion;

Preferably, the inner lead, an anti-rotation protrusion is formed on the intermediate outer circumferential surface, and the lead anti-rotation portion is formed with a protrusion insertion groove in which the anti-rotation protrusion is inserted and fixed.

Preferably, the outer lead is formed with an anti-rotation plate connected to the external heating wire at an end, and the lead anti-rotation portion has a plate insertion groove into which the anti-rotation plate is inserted.

Preferably, the lead rotation preventing portion, the end of the outer lead is fixed to the outer circumferential surface includes a rotation preventing pipe surrounding the inner tube body.

A substrate heat treatment apparatus using the heater fastening apparatus of the present invention for solving the other problems described above includes: a chamber for heat treatment of the substrate; A heater made of a tubular body incorporating one or more heating wires; A heater fixing flange portion for fixing the end portion of the tube body outside the chamber through-hole formed on at least one side of the chamber so that the tube body is inserted with a clearance; A lead portion connecting the heating wire to a power source; And a lead fixing portion for drawing and fixing the lead portion outside the chamber. It includes.

Preferably, the heater is made of an inner tube having an inner heating wire therein and an outer tube surrounding the outer heating wire wound on the outer circumferential surface of the inner tube, wherein the lead portion includes an inner lead connected to one end of the inner heating wire; And an external lead connected to at least one end of the external heating wire.

According to the heater fastening device of the present invention and the substrate heat treatment device using the same, assembling and removing the heater is simplified by forming a hole in the chamber wall coupled with the heater in a long hole shape larger than the diameter of the heater tube and tilting the heater to detach it. And it is possible to prevent damage to the heater during removal.

Further, by preventing the rotation of the lead portion through a lead rotation preventing portion between the heater and the lead fixing portion, it is possible to prevent the deformation of the disconnection and the heating wire at the joining portion of the heating wire and the lead portion.

1 is a schematic view showing a process of fastening a heater to a conventional chamber.
Figure 2 is a schematic view showing the side of the chamber to which the heater is coupled by the present invention.
Figure 3 is a perspective view showing a state of assembling or removing the heater in the chamber according to the present invention.
Figure 4 is a cross-sectional view showing a state in which the heater is fastened to the chamber according to the first embodiment of the present invention.
5 is a component assembly diagram constituting a first embodiment of the present invention.
Figure 6 is a perspective view showing the fastening of the lead preventing portion and the lead portion according to the first embodiment of the present invention.
7 is a cross-sectional view showing a state in which the heater is fastened to the chamber according to the second embodiment of the present invention.
8 is a component assembly diagram constituting a second embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The heater fastening device of the present invention can be divided into first and second embodiments, and the components of each embodiment are basically the same, but there are differences in some configurations. In addition, among the various embodiments of the present invention, the same reference numerals will be used for components having the same function and function, and the description of the same components as the first embodiment will be omitted from the description of the second embodiment. .

The substrate heat treatment apparatus using the heater fastening device according to the first embodiment of the present invention is largely shown in FIGS. 2 to 6, the chamber 100, the heater 200, the heater fixing flange 300, the lead 400 ), a lead fixing part 500 and a lead rotation preventing part 600.

The chamber 100 has an internal space to heat-treat the substrate, and forms chamber through holes 110 larger than the diameter of the heater tube on both walls of the chamber 100 so as to insert and fix the tube body. The chamber through-hole 110 may be formed in a long hole having a vertical diameter larger than a horizontal diameter so that the tube body of the heater 200 is inserted with a clearance. Due to this, one end of the heater 200 that is vertically fastened to the wall of the chamber 100 may be horizontally removed, and the other end may be tilted up and down to remove the long hole-shaped chamber through-hole 110 of the chamber 100 It may be formed only on one side.

Although not shown in the drawing, the chamber through hole 110 according to another embodiment of the present invention is formed to be inclined downwardly from the outside to the inside so that the inside of the wall of the chamber 100 is larger than the outside, to the chamber 100 The heater 200 may be tilted up and down to provide a space that can be easily detached.

On the other hand, the chamber 100 is composed of the upper chamber 101, the lower chamber 102, as shown in Figures 3 to 4, and the upper and lower chambers 101, 102 by sliding left and right to separate. You can. By separating the upper and lower chambers 101 and 102, the chamber 100 is opened, and replacement and repair of the heater 200 may be facilitated through the opened space. In addition, it is also possible to assemble and remove only the heater 200 through the chamber through-hole 110 formed on both sides of the chamber 100 as in the prior art.

The heater 200 can be used as long as it is a heater made of a tube body having one or more heating wires. The heater 200 used in the present invention has an inner tube 211 having an inner heating wire 212 therein, a space between the inner tube 211 and an outer heating wire 222 wound on the outer circumferential surface of the inner tube 211 ) Is made of the outer tube 221 surrounding.

The heater fixing flange part 300 is fixed to the wall of the chamber 100 with a bolt, forms a heater coupling hole 310 coupled to the heater 200 in the center, and a chamber through hole 110 and a heater coupling hole 310 ), the tube body is fixed outside the chamber 100. At this time, the heater fixing flange portion 300 is formed to have a smaller horizontal width than the vertical width, thereby minimizing the distance from the neighboring heater 200. Due to this, a larger number of heaters can be used.

The heater fixing flange portion 300 may include an airtight member 320 to prevent gas in the chamber 100 from leaking out of the chamber 100 during heat treatment of the substrate. The hermetic member 320 is composed of an O-ring 321 between the wall of the chamber 100 and the heater fixing flange 300 and an O-ring 322 between the heater coupling port 310 and the heater.

The lead part 400 is formed of a conductor to connect a heating wire to a power source, and includes an inner lead 410 connected to one end of the inner heating wire 212 and two outer leads 420 connected to both ends of the outer heating wire 222. Is done.

Specifically, one end of the inner lead 410 is formed with a groove, and the inner lead 410 and the inner heating wire 212 can be coupled by welding while the end of the inner heating wire 212 is inserted into the groove. The other end of the inner lead 410 may be connected to a power source to transmit power to the inner heating wire 212. At this time, the inner lead 410 is formed with an anti-rotation protrusion 411 to prevent rotation of the inner lead 410 on the intermediate outer circumferential surface so that damage to the welding area does not occur. The anti-rotation protrusion 411 may have a cross-sectional shape of a polygon.

In addition, one end of the outer lead 420 is formed with a groove, and the outer lead 420 and the outer heating wire 222 may be coupled by welding while the end of the outer heating wire 222 is inserted into the groove. The other end of the external lead 420 may be connected to a power source to transmit power to the external heating wire 222. At this time, the outer lead 420 is formed with an anti-rotation plate 421 to prevent rotation of the outer lead 420 at an end connected to the outer heating wire 222 so as not to cause damage to the welding area.

The lead fixing part 500 is fixed to the heater fixing flange part 300 as an insulator, has a hole through which the lead part 400 passes, and the lead part 400 is taken out and fixed outside the chamber 100. . At this time, when the distance between the inner lead 410 and the outer lead 420 is increased to connect the power to the lead 400, the inner and outer leads 410, 420 may not be shorted or shorted.

An insulating member 510 may be provided between the inner lead 410 and the outer lead 420 spaced apart by the lead fixing part 500. Accordingly, short circuit and short circuit between the inner and outer leads 410 and 420 may be prevented.

In addition, the fastening member 520 may be provided at an end where the lead portion 400 is drawn out. The fastening member 520 may be formed of a nut and fastened to the lead portion 400 to fix the lead fixing part 500, the insulating member 510, and the lead rotation prevention block 630.

The lead rotation preventing unit 600 is an insulator when the lead unit 400 is rotationally coupled to the lead fixing unit 500 to prevent rotation of the inner and outer leads 410, 420 and the heater 200 and the lead fixing unit ( 500) interposed between the lead portion to prevent the rotation of the lead block 630. Lead rotation prevention block 630, as shown in Figure 6 to prevent the rotation of the lead portion 400, the protrusion insertion groove 611 to be fixed to the rotation prevention protrusion 411 formed on the inner lead 410 is inserted It can be formed. The protrusion insertion groove 611 is formed at the hole entrance through which the inner lead 410 passes, thereby preventing rotation of the inner lead 410 and at the same time preventing the shape of the inner heating wire 212 from being deformed.

In addition, the plate rotation groove 621 may be formed in the lead rotation prevention block 630 such that the rotation prevention plate 421 formed on the outer lead 420 is inserted and fixed. The plate insertion groove 621 is formed at the hole entrance through which the outer lead 420 passes, thereby preventing rotation of the outer lead 420 and at the same time, preventing the shape of the outer heating wire 222 from being deformed.

The second embodiment of the present invention differs from the structure of the outer lead 420 constituting the lead part 400 and the structure of the lead rotation preventing part 600 in comparison with the first embodiment. Hereinafter, a description will be given with reference to FIGS. 7 to 8, focusing on components of the second embodiment having a difference from the first embodiment.

The lead rotation prevention part 600 may include a rotation prevention tube 622 to prevent rotation of the outer lead 420 so that damage to the welding area does not occur. The anti-rotation tube 622 is formed in a tube shape to surround the inner tube body 211, and at least one end of the outer lead 420 is fixed to the outer circumferential surface. Due to this, when the lead portion 400 is rotationally coupled to the lead fixing unit 500, the inner tube 211 is wrapped and the outer lead 420 can be prevented from rotating by the fixed anti-rotation pipe 622.

In the above, a specific embodiment of the present invention has been mainly described with reference to the drawings, but the scope of the present invention will be apparent even if it deviates from the technical idea described in the claims to its variants or equivalents.

100: chamber
200: heater
300: heater fixing flange portion
400: lead part
500: Lead High Government
600: lead rotation preventing part

Claims (11)

In the heater fastening device for fastening the heater 200 made of a tube body having one or more heating wires for the substrate heat treatment to the chamber 100,
A heater fixing flange portion 300 fixing an end portion of the tube body outside the chamber through-hole 110 formed on at least one side of the chamber 100 so that the tube body is inserted while having a clearance;
A lead portion 400 connecting the heating wire to a power source;
A lead fixing part 500 for drawing and fixing the lead part 400 out of the chamber 100; And
When the lead portion 400 is coupled to the lead fixing portion 500, the lead portion is interposed between the heater 200 and the lead fixing portion 500 to prevent rotation of the lead portion 400 Reed rotation prevention unit 600 for fixing the 400; Heater fastening device comprising a. The method according to claim 1,
The chamber through-hole 110 is a heater fastening device, characterized in that formed in a long hole. The method according to claim 2,
The chamber through-hole 110 is a heater fastening device characterized in that the vertical diameter is larger than the horizontal diameter. The method according to claim 1,
The heater fixing flange 300 is a heater fastening device characterized in that the horizontal width is formed smaller than the vertical width. The method according to claim 1,
The heater 200 is made of an inner tube 211 having an inner heating wire 212 therein and an outer tube 221 surrounding the outer heating wire 222 wound on the outer circumferential surface of the inner tube 211. ,
The lead part 400 may include an inner lead 410 connected to one end of the inner heating wire 212; And an external lead (420) connected to at least one end of the external heating wire (222). delete The method according to claim 5,
The inner lead 410, the anti-rotation protrusion 411 is formed on the middle outer peripheral surface,
The lead rotation preventing part 600, the heater locking device, characterized in that the protrusion preventing groove 611 is inserted and fixed is formed with a protrusion insertion groove (611). The method according to claim 5,
The outer lead 420 is formed with an anti-rotation plate 421 connected to the outer heating wire 222 at an end,
The lead rotation preventing part 600, the heater fastening device characterized in that the plate insertion groove 621 is inserted into the rotation preventing plate 421 is formed. The method according to claim 5,
The lead rotation preventing part 600, the heater fastening device, characterized in that it comprises an anti-rotation tube (622) surrounding the inner tube body 211 is fixed to the end of the outer lead 420 on the outer circumferential surface. A chamber 100 for heat-treating the substrate;
A heater 200 made of a tubular body incorporating one or more heating wires;
A heater fixing flange portion 300 fixing an end portion of the tube body outside the chamber through-hole 110 formed on at least one side of the chamber 100 so that the tube body is inserted while having a clearance;
A lead portion 400 connecting the heating wire to a power source;
A lead fixing part 500 for drawing and fixing the lead part 400 out of the chamber 100; And
When the lead portion 400 is coupled to the lead fixing portion 500, the lead portion is interposed between the heater 200 and the lead fixing portion 500 to prevent rotation of the lead portion 400 Reed rotation prevention unit 600 for fixing the 400; Substrate heat treatment apparatus comprising a. The method according to claim 10,
The heater 200 is made of an inner tube 211 having an inner heating wire 212 therein and an outer tube 221 surrounding the outer heating wire 222 wound on the outer circumferential surface of the inner tube 211. ,
The lead part 400 may include an inner lead 410 connected to one end of the inner heating wire 212; And an external lead (420) connected to at least one end of the external heating wire (222).

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