JP2007103067A - Halogen lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent occurrence of trouble such as deformation or breakage of a filament when a halogen lamp is vertically lit. <P>SOLUTION: This halogen lamp is provided with: a glass bulb with a sealing part having metal foil embedded therein formed at one end thereof; a filament arranged along an axis of the glass bulb in a light emission space of the glass bulb; an internal lead having one end connected to the filament and the other end connected to the metal foil; a supporter having one end connected to the filament for holding the filament; and insulation members with the internal lead and the supporter held thereto. The halogen lamp is characterized by arranging, adjacently to one another, two or more insulation members in a space between the filament and the sealing part. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a halogen lamp for heating a workpiece by irradiating the workpiece with emitted light.

  End-sealed halogen lamps are widely used as light sources for various devices used for illumination, heating of semiconductor wafers, and the like. In the field of lighting, it is widely used as a light source for hanging lamps used for stage lighting, concert hall lighting and the like, and a light source for road lighting. On the other hand, in the semiconductor manufacturing process, heat treatment is employed in various processes such as film formation, and in order to improve the yield and quality in the semiconductor manufacturing process, the temperature of an object to be processed such as a semiconductor wafer is rapidly increased or decreased. Since rapid thermal processing (RTP) is desirable, halogen lamps are used in RTP applications.

FIG. 4 is a front view showing a conventional halogen lamp, and FIG. 5 is a cross-sectional view showing a state in which the halogen lamp shown in FIG. 4 is incorporated in a reflecting mirror.
As shown in FIG. 4, the halogen lamp 30 has a quartz glass bulb 31 in which a sealing portion 32 in which a pair of metal foils 39a and 39b are embedded at one end is formed and an exhaust pipe remaining portion 33 is formed in the other end. And the filament 34 disposed along the axis of the bulb 31 in the light emitting space in the bulb 31, one end connected to the end of the filament 34 on the sealing portion 32 side, and the other end connected to the metal foil 39b. The first internal lead 35 is connected to the end of the filament 34 on the exhaust pipe remaining portion 33 side, and is inserted and held in the exhaust pipe residual portion 33, and the other end is connected to the metal foil 39a. A pair of supporters 37a and 37b for holding the filament 34, a first internal lead 35, and a second internal lead 36, which are opposed to each other with the filament 34 interposed therebetween. Insulation between the supporter 37a and the supporter 37b is ensured, and a single insulating member 38, which is held by welding, and the sealing portion 32 of the valve 31 is inserted into the internal cavity and fixed integrally with the valve 31. A base 40 and a power supply terminal 41 for power supply projecting outward from the base portion 40.

As shown in FIG. 5, the halogen lamp 30 is disposed in the concave reflecting mirror 42 with the exhaust pipe remaining portion 33 positioned in the front, and the base portion 40 of the halogen lamp 30 is integrated with the concave reflecting mirror 42. The halogen lamp 30 and the concave reflecting mirror 42 are integrally fixed with an adhesive. The concave reflecting mirror 42 is in a state in which the front glass 44 is fitted into the opening on the front side and the internal space is sealed.
JP-A-2005-71689

  In recent years, the halogen lamp 30 is strongly required to reduce the size of the concave reflecting mirror 42 covering the periphery, and accordingly, the halogen lamp 30 itself is also required to be reduced in size. However, when the concave reflecting mirror 42 is downsized, the volume of the internal space of the concave reflecting mirror 42 is reduced, so that the temperature of the internal space of the concave reflecting mirror 42 is likely to rise, and the halogen lamp 30 is downsized. In this case, the distance between the filament 34 that is a heat source and the insulating member 38 is reduced. Thereby, when the halogen lamp 30 is vertically lit, the insulating member 38 is melted, both ends of the insulating member 38 hang down toward the sealing portion 32, and the supporters 37a and 37b holding the filament 34 are sealed. By displacing to the part 32 side, stress is applied to the filament 34 via the supporters 37a and 37b. The filament 34 is fixed to the valve 31 by one end of the second internal lead 36 connected to the end on the exhaust pipe remaining portion 33 side being inserted and held in the exhaust pipe remaining portion 33. Therefore, when the stress is applied to the filament 34, the filament 34 is deformed, and in the worst case, there is a possibility of disconnection.

  Further, when the halogen lamp 30 is turned on in an environment where vibration occurs, the vibration is applied to the insulating member 38 in a melted state, so that the deformation of the insulating member 38 is promoted. It is considered that there is a greater risk of deformation or disconnection. In particular, when the halogen lamp 30 is used as a light source for hanging lamps such as stage lighting and concert hall lighting as described above, or a light source for road lighting, in particular, the filament 34 is susceptible to vibration. It is considered that the problem of deformation or disconnection frequently occurs.

  In view of the above, an object of the present invention is to prevent a problem that a filament is deformed or disconnected when a halogen lamp is vertically lit.

  In order to solve the above problems, the present inventors have examined the following three means. That is, (1) in order to prevent the supporters 37a and 37b from being displaced toward the sealing portion 32 when the insulating member 38 is melted, and to improve the vibration resistance, the halogen lamp shown in FIG. 2, means for extending the entire length of the supporters 37 a and 37 b and embedding the base ends of the supporters 37 a and 37 b inside the sealing portion 32, and (2) separating the insulating member 38 from the filament 34 that is a heat source, thereby (3) In order to displace the supporters 37a and 37b toward the sealing portion 32 and to improve the vibration resistance, as shown in FIG. This means is also disposed in the vicinity of the exhaust pipe remaining portion 33 in the internal space and fixes the supporters 37a and 37b in both the upper and lower directions.

However, the means (1) to (3) are difficult to adopt due to the following problems. According to the means (1), since a large number of wires are embedded in the sealing portion 32, the operation is complicated. Further, in the sealing portion 32, the quartz glass, the first internal lead 35, and the first 2, the pressure resistance of the sealing portion 32 is reduced, and the sealing portion 32 may be damaged during lighting and airtightness may be impaired. According to the means (2) and (3), since the total length of the bulb 31 is increased, the precondition that the halogen lamp 30 is reduced in size cannot be satisfied.
Therefore, the present inventors have completed the present invention as a result of repeated studies in order to solve the above-described problems without impairing the pressure resistance of the sealing portion 32 and without increasing the total length of the valve 31.

  That is, the invention of claim 1 is a glass bulb in which a sealing portion in which a metal foil is embedded at one end is formed, and in a light emitting space in the glass bulb, a filament disposed along the axis of the glass bulb, One end connected to the filament and the other end connected to the metal foil, one end connected to the filament, a supporter holding the filament, and an insulating member holding the internal lead and the supporter The two or more insulating members are adjacently arranged in the space between the filament and the sealing portion.

  Note that “adjacently arranged” means that when a plurality of separate insulating members are adjacent to each other, one insulating member is not completely in contact with another insulating member, or one The insulating member includes a part of the insulating member that is partly joined to another insulating member by welding, for example, to form a joint.

  Furthermore, the invention of claim 2 is characterized in that the supporter is held on the center side of the insulating member as compared with the internal lead. The “center side of the insulating member” means the central side in the direction orthogonal to the axial direction of the bulb or filament in the insulating member.

  According to the halogen lamp of the first aspect of the invention, since two or more insulating members are arranged adjacent to each other in the space between the filament and the sealing portion, the insulating member located on the filament side is a heat source. Since the infrared rays radiated toward the insulating member located on the sealing portion side are shielded by the insulating member located on the filament side by heating and melting with the infrared rays emitted from the filament and becoming cloudy, the sealing portion side The insulating member located at a lower temperature than the insulating member located on the filament side. In this case, even if the halogen lamp is reduced in size, the insulation member is prevented from drooping toward the sealing portion, and the stress applied to the filament through the supporter is alleviated. As a result, the filament is deformed or disconnected. It can be surely prevented.

  According to the halogen lamp of the second aspect of the present invention, the supporter is held on the center side of the insulating member as compared with the internal lead, thereby further preventing the filament from being deformed or broken. can do.

  According to the halogen lamps of the first and second aspects of the present invention, even when the lamp is lit in an environment in which vibration is likely to occur, it is possible to reliably prevent a problem that the filament is deformed or disconnected.

[First Embodiment]
FIG. 1 is a diagram for explaining a halogen lamp according to a first embodiment of the present invention. FIG. 1A shows a front view, and FIG. 1B shows a side view.
The halogen lamp 1 includes a bulb 11, a filament 12, a first internal lead 13, a second internal lead 14, a first supporter 15, a second supporter 16, a first insulating member 17, and a second insulating member 18. A base 19 and a power supply terminal 20 are provided, and a vertical lighting system is used. The halogen lamp 1 is used while attached to the concave reflecting mirror 42 shown in FIG.

  The bulb 11 is made of, for example, quartz glass, and a sealing portion 113 in which the first metal foil 112a and the second metal foil 112b are separately embedded is formed at one end, and an exhaust pipe remaining portion 111 is formed at the other end. The sealing portion 113 has a shape with a reduced diameter as compared with other portions. The light emission space S in the bulb 11 is filled with a halogen gas for performing a halogen cycle, together with an inert gas such as nitrogen gas. In the case of vertical lighting, for example, the exhaust pipe remaining part 111 is located on the upper side, and the sealing part 113 is located on the lower side.

  The filament 12 is a double coil formed by winding a tungsten wire around a primary coil and then winding the primary coil into a secondary coil shape, and is arranged along the axis of the bulb 11 in the light emitting space S in the bulb 11. Has been. However, the filament 12 is not limited to a double coil, and may be a single coil in which a tungsten wire is wound around a primary coil.

  One end of the first internal lead 13 is connected to the end of the filament 12 on the exhaust pipe remaining portion 111 side of the bulb 11, and the light emitting space S in the bulb 11 extends parallel to the axis of the bulb 11, and in the vicinity of the other end. The other end is embedded in the sealing portion 113 and connected to the first metal foil 112a. Further, one end of the first internal lead 13 is inserted and held in the exhaust pipe remaining part 111 of the valve 11 so that the filament 12 does not tilt. One end of the second internal lead 14 is connected to the end of the filament 12 on the side of the sealing portion 113 in the bulb 11, and the other end is connected to the second metal foil 112b. The first internal lead 13 and the second internal lead 14 are fixed to the first insulating member 17 and the second insulating member 18, for example, by welding.

  The first supporter 15 and the second supporter 16 are arranged to face each other with the filament 12 interposed therebetween, and are respectively attached to intermediate portions in the axial direction of the filament 12 so that the axis of the filament 12 coincides with the axis of the valve 11. The filament 12 is held. The base end portions of the first supporter 15 and the second supporter 16 are fixed to the first insulating member 17 and the second insulating member 18, for example, by welding.

  In the light emitting space S in the bulb 11, the first insulating member 17 and the second insulating member 18 are disposed adjacent to the space between the filament 12 and the sealing portion 113. The longitudinal directions of the first insulating member 17 and the second insulating member 18 are orthogonal to the axial direction of the bulb 11 or the filament 12.

  The first insulating member 17 is composed of, for example, two columnar glass pieces made of quartz glass. Between each glass piece, the first internal lead 13, the second internal lead 14, the first supporter 15 and Each glass piece is formed by melting the second supporter 16 so that they are not in contact with each other, and these members are held in the light emitting space S in the bulb 11. The configuration of the second insulating member 18 is the same as that of the first insulating member 17. Since the first insulating member 17 and the second insulating member 18 are made of an insulating material, insulation between the first internal lead 13, the second internal lead 14, the first supporter 15, and the second supporter 16 is achieved. Secured.

  The 1st insulating member 17 and the 2nd insulating member 18 are spaced apart and arrange | positioned through the space of 1 mm-3 mm in the light emission space S in the bulb | ball 11. FIG. When the halogen lamp of the present invention is manufactured, the first insulating member 17 and the second insulating member 18 are two glass pieces (also referred to as glass pieces A and B) to be the first insulating member 17. In order to form two glass pieces (also referred to as glass pieces C and D) to be the second insulating member by melting at almost the same time, separation between the glass pieces A and B and the glass pieces C and D is performed. When the distance is small, a part of the first insulating member 17 and the second insulating member 18 may be welded to form a joint portion. Even in such a state, it is considered that the effect of reducing the deformation amount of the first insulating member 17 described later can be obtained.

  The base 19 is made of an insulating material such as alumina, for example, and has a bottomed hole for inserting the sealing portion 113 of the valve 11 on one surface. The halogen lamp 1 and the base 19 are integrated by inserting the sealing portion 113 of the bulb 11 into the bottomed hole. A power supply terminal 20 for supplying power to the halogen lamp 1 protrudes from the other surface of the base 19.

  According to the halogen lamp of the first embodiment as described above, the first internal lead 13, the second internal lead 14, the first supporter 15, and the second supporter 16 include two insulating members (first The first insulating member 17 and the second insulating member 18 are disposed adjacent to each other in the space between the filament 12 and the sealing portion 113. Has been. Accordingly, when the downsized halogen lamp, that is, the halogen lamp in which the filament 12 and the first insulating member 17 are close to each other, is turned on vertically, the second insulating member 18 is compared with the first insulating member 17. There is an effect that the temperature becomes low and the first insulating member 17 and the second insulating member 18 are unlikely to hang down to the sealing portion 113 side. This point is clear from the result of the first experiment described later. As a result, it is considered that the stress transmitted to the filament 12 via the first supporter 15 and the second supporter 16 in the direction of the sealing portion 113 is relaxed, and the deformation and disconnection of the filament 12 can be prevented. . The reason why the second insulating member 18 is in a lower temperature state than the first insulating member 17 is that the first insulating member 17 becomes white turbid when the first insulating member 17 is melted by the infrared rays radiated from the filaments 12, and becomes white turbid. This is considered to be because the infrared rays toward the second insulating member 18 are blocked by the member 17.

Here, according to the halogen lamp of the first embodiment, in principle, the second insulating member 18 is at a lower temperature than the first insulating member 17, except that the concave reflecting mirror 42 is cooled. For other reasons, the temperatures of the first insulating member 17 and the second insulating member 18 may be equal. Even in such a case, the first insulating member 17 can be prevented from drooping toward the sealing portion 113, and this point has been confirmed by a second experiment described later.
Further, according to the halogen lamp of the first embodiment, it is considered that the vibration resistance is improved because the melt deformation of the first insulating member 17 is suppressed. This point is the result of the third experiment described later. It is clear from

[Second Embodiment]
FIG. 2 is a diagram for explaining a halogen lamp according to a second embodiment of the present invention. FIG. 2A shows a front view, and FIG. 2B shows a side view. Parts denoted by the same reference numerals as those in FIG. 1 indicate the same or corresponding parts as those in FIG.
In the halogen lamp 2 of the second embodiment, the first internal lead 13 and the second internal lead 14 are welded and held on the end side of the first insulating member 17 and the second insulating member 18, The first supporter 15 and the second supporter 16 are welded to the center side of the first insulating member 17 and the second insulating member 18 as compared with the first internal lead 13 and the second internal lead 14. This is different from the halogen lamp 1 of the first embodiment.

  According to the halogen lamp 2 of the second embodiment, the deformation amount of the first insulating member 17 is larger than that of the halogen lamp of the first embodiment, as shown in the results of first to third experiments described later. Therefore, when the halogen lamp is reduced in size, it is possible to more reliably prevent the filament 12 from being deformed or disconnected. The reason is as follows.

  That is, the first supporter 15 and the second supporter 16 are heavy in weight and are supported only by the first insulating member 17 and the second insulating member 18 and are not supported by the sealing portion 113. . Therefore, when the first supporter 15 and the second supporter 16 are supported on the end side of the first insulating member 17 and the second insulating member 18, when the lamp is turned on vertically, the filament 12 side The possibility that the first insulating member 17 positioned melts and the end side hangs down cannot be completely excluded. However, if the first supporter 15 and the second supporter 16 are supported on the center side of the first insulating member 17 and the second insulating member 18 as in the structure shown in FIG. Even if the center side of the member 17 hangs down slightly, both ends of the first insulating member 17 are securely fixed by the first internal lead 13 and the second internal lead 14 fixed to the sealing portion 113. It is considered that the sag of the insulating member 17 of 1 decreases.

Below, the 1st thru | or 3rd experiment conducted in order to confirm the effect of this invention is demonstrated.
[First experiment]
The halogen lamps of the first embodiment and the second embodiment were respectively produced with the specifications shown below.
The bulb 11 is made of quartz glass and has a maximum outer diameter of 27 mm and a total length of 150 mm. The bulb 11 is filled with 0.08 MPa of nitrogen gas and 0.08 kPa of halogen compound.
The filament 12 is formed by winding a tungsten wire having a wire diameter of 0.38 mm around a primary coil and winding the primary coil into a double coil. The double coil has an outer diameter of 9 mm and a total length of 20 mm.
The first insulating member 17 and the second insulating member 18 are each formed by welding two quartz glass pieces. The insulating member 17 and the insulating member 18 each have an outer diameter of 3 mm, a total length of 20 mm, and a volume of 141 mm ³ . The separation distance between the first insulating member 17 and the second insulating member 18 is 1.5 mm.

As a comparative example, a conventional halogen lamp shown in FIG. 4 was manufactured with the same specifications as the halogen lamp of the above example. The insulating member 38 has an outer diameter of 4.2 mm, a total length of 20 mm, and a volume of 282 mm ³ .

[First experiment]
The halogen lamp of the first embodiment, the halogen lamp of the second embodiment, and the halogen lamp of the comparative example were each turned on vertically, and vertical vibration was applied to the halogen lamp by the vertical vibration generating mechanism. Specifically, a halogen lamp was vertically lit at 100 V-5 KW, and vertical vibration with a seismic intensity of 3 G and a frequency of 5 to 60 Hz was applied to the halogen lamp. After the halogen lamp was lit for 500 hours under these conditions, the amount of sag T of the first insulating member 17 was measured. The amount of sag of the first insulating member 17 is T shown in FIG.
The first experiment is intended to measure the amount of sag T of the first insulating member 17 by vertically lighting the halogen lamp in the atmosphere and applying vertical vibration. The results of the first experiment are shown in Table 1.

  According to Table 1, the following facts were found. In the halogen lamp of the comparative example shown in FIG. 4, the temperature of the insulating member 38 was 1300 ° C., and the amount of sag T of the insulating member 38 toward the sealing portion 113 was 1.4 mm. On the other hand, in the halogen lamp of the first embodiment, the temperature of the second insulating member 18 is 1215 ° C., which is lower than the temperature of the first insulating member 17 (1300 ° C.). . The amount T of the first insulating member 17 hanging in the direction of the sealing portion 113 is 0.2 mm, and the second insulating member 18 does not hang down, which is superior to the halogen lamp of the comparative example. . The halogen lamp of the second embodiment is more excellent than the halogen lamp of the first embodiment because the first insulating member 17 and the second insulating member 18 do not hang down.

[Second experiment]
A total of 36 halogen lamps of the first embodiment, the halogen lamp of the second embodiment, and the halogen lamp of the comparative example, 12 each, were produced, and each was placed in an electric furnace. Under temperature conditions, the amount of deformation of the first insulating member 17 after having been lit continuously for 2000 hours under the lighting conditions (lamp power and lamp voltage) shown in Table 2 was measured. That is, the second experiment assumes that there is no temperature difference between the first insulating member 17 and the second insulating member 18 in the halogen lamps of the first and second embodiments, and the ambient temperature of the halogen lamp. It is an object to measure the amount of sag of the first insulating member 17 by keeping the constant. The results of the second experiment are shown in Table 2.

  According to Table 2, the following facts were found. In the halogen lamp of the comparative example shown in FIG. 4, the insulating member 38 hangs down in the direction of the sealing portion 32 when the temperature in the electric furnace is 1100 ° C. or higher under any lighting conditions. In the halogen lamp of the first embodiment, the drooping amount of the first insulating member 17 is remarkably smaller than the halogen lamp of the comparative example under all conditions of 100V-1 KW, 100V-2 KW, and 100V-5 KW. Therefore, it was superior to the halogen lamp of the comparative example. The halogen lamp of the second embodiment is superior to the halogen lamp of the first embodiment because the first insulating member 17 does not hang down under any temperature condition and lighting condition.

[Third experiment]
The halogen lamp of the first embodiment, the halogen lamp of the second embodiment, and the halogen lamp of the comparative example are each arranged in an electric furnace, and the halogen lamp is vertically lit by a vertical vibration generating mechanism with the halogen lamp vertically lit. A vibration was given. Specifically, the temperature in the electric furnace was 1100 ° C., the halogen lamp was vertically lit under the lighting conditions shown in Table 3, and vertical vibration with a seismic intensity of 3 G and a frequency of 5 to 60 Hz was applied. After the halogen lamp was lit continuously for 2000 hours under these conditions, the amount of sag T of the first insulating member 17 was measured. That is, in the third experiment, the ambient temperature of the halogen lamp is made constant, and the first insulating member 17 and the second insulating member 18 in the halogen lamps of the first and second embodiments do not cause a temperature difference. The purpose is to measure the amount of sag T of the first insulating member 17 by applying vibration to these halogen lamps. The results of the third experiment are shown in Table 3.

  According to Table 3, the following facts were found. In the halogen lamp of the comparative example shown in FIG. 4, the insulating member 38 hangs down in the direction of the sealing portion 32 under any lighting conditions. In the halogen lamp of the first embodiment, the first insulating member 17 hangs down only when it is lit under the condition of 100 V-5 KW, and the first insulating member 17 does not hang down under other lighting conditions. It was superior to the halogen lamp of the comparative example. The halogen lamp of the second embodiment was further superior to the halogen lamp of the first embodiment because the first insulating member 17 did not hang down under any lighting conditions.

It is a figure explaining the halogen lamp of the 1st Embodiment of this invention. It is a figure explaining the halogen lamp of the 2nd Embodiment of this invention. It is a figure explaining the experiment conducted in order to confirm the effect of this invention. It is a front view which shows the conventional halogen lamp. It is sectional drawing which shows the state which incorporated the halogen lamp shown in FIG. 4 in the reflective mirror. It is a front view which shows the halogen lamp considered in the previous step leading to this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Halogen lamp 2 Halogen lamp 11 Valve | bulb 111 Exhaust pipe remainder 112a Metal foil 112b Metal foil 113 Sealing part 12 Filament 13 1st internal lead 14 2nd internal lead 15 1st supporter 16 2nd supporter 17 1st Insulating member 18 Second insulating member 19 Base 20 Power supply terminal 30 Halogen lamp 31 Valve 32 Sealing portion 33 Exhaust pipe remaining portion 34 Filament 35 First internal lead 36 Second internal lead 37a Supporter 37b Supporter 38 Insulating member 39a Metal foil 39b Metal foil 40 Base 41 Feed terminal 42 Concave reflector 43 Neck 44 Front glass

Claims (2)

A glass bulb in which a sealing portion in which a metal foil is embedded at one end is formed, a filament disposed along the axis of the glass bulb in a light emitting space in the glass bulb, one end is connected to the filament, and the other In a halogen lamp including an internal lead having an end connected to the metal foil, a supporter having one end connected to the filament and holding the filament, and an insulating member holding the internal lead and the supporter.
A halogen lamp, wherein two or more insulating members are disposed adjacent to each other in a space between the filament and the sealing portion. 2. The halogen lamp according to claim 1, wherein a base end portion of the supporter is held on a center side of the insulating member as compared with the internal lead.

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