WO2020241488A1

WO2020241488A1 - Heating device and heating method

Info

Publication number: WO2020241488A1
Application number: PCT/JP2020/020284
Authority: WO
Inventors: 利彰神吉; 貴大木邊
Original assignee: 株式会社九州日昌
Priority date: 2019-05-31
Filing date: 2020-05-22
Publication date: 2020-12-03
Also published as: TW202111269A; JPWO2020241488A1; JP7079042B2

Abstract

[Problem] To provide a heating device and a heating method with which uniformity of temperature distribution in a depth direction of a multi-stage heating device can be achieved. [Solution] A heating device (100) is characterized by comprising: a plurality of heating wall bodies (10) that are erected so as to oppose each other with a distance therebetween; a plurality of heat generating means (11) provided respectively to the plurality of heating wall bodies (10); and a plurality of metal heat radiating members (12) that are disposed spaced apart in a shelf-like manner in the vertical direction in regions between the opposing heating wall bodies (10), and that conduct heat from the heating wall bodies. The heating device is also characterized in that: the plurality of heating wall bodies (10) and the plurality of heat radiating members (12) define, in the vertical direction, a plurality of accommodation spaces (14) for respectively accommodating objects (13) to be heated; the top and bottom of each of the plurality of accommodation spaces (14) is defined by the opposing heat radiating members (12); and the heat generating means (11) are disposed at a higher density in a peripheral section compared to a center section in the depth direction of the heating wall bodies.

Description

Heating device and heating method

The present invention relates to a heating device and a heating method.

Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. A heating furnace is disclosed in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space portion formed between these shelf-shaped heaters is used as a drying chamber.

Patent Document 3 includes a heating wall body erected facing each other, and a plurality of heat radiating members arranged in a shelf shape and heated by conduction heat from the heating wall body, which are arranged in a shelf shape. Each space between the heat radiating members is used as a storage space to house the glass substrate to be heated, and heat treatment is performed by the radiant heat from the upper and lower heat radiating members. Since each accommodation space is partitioned, the uniformity of temperature distribution is excellent, and the heat accumulation phenomenon in the upper space due to the rise of hot air does not occur. Moreover, since the heating air is not sprayed, a clean heat treatment is realized.

Further, in Patent Document 4, in the heating device of Patent Document 3, a pair of heat transfer walls that are in close contact with the inside of the pair of heating walls are provided, and heat radiation members are arranged in a shelf shape between the heat transfer walls. Disclosed is a heating device that has been arranged to improve temperature uniformity.

In Patent Document 5, in order to solve the problem that the temperature of the upper accommodation space is still higher than that of the lower accommodation space even in the partition structure of Patent Document 3, the arrangement interval of the electric heaters in the heating wall is used for heating. By making it larger at the upper part than the lower part of the wall body, the amount of heat generated at the lower part than the upper part is increased. In addition, a heat insulating portion is provided in the middle of the heating wall to prevent heat from being conducted upward.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2013-200077 Japanese Unexamined Patent Publication No. 2005-352306 Japanese Unexamined Patent Publication No. 2005-055152

As described above, Patent Documents 3 to 5 disclose a heating device for arranging and heating an object to be heated in a multi-stage storage space, and the temperature difference between the upper storage space and the lower storage space. The problems are dealt with by each of the above methods.
On the other hand, regarding the temperature distribution in the horizontal direction of each of the accommodation spaces, there is a problem that the temperature tends to decrease in the peripheral portion than in the central portion because heat easily escapes to the outside. Of these, the temperature distribution in the left-right direction is dealt with by arranging the heating walls on the left and right, but the measure for the problem of the temperature distribution in the depth direction is not disclosed.

An object to be solved by the present invention is to provide a heating device and a heating method having excellent uniformity of temperature distribution and stability of cleanliness.
In particular, it is an object of the present invention to provide a heating device and a heating method capable of realizing uniformity of temperature distribution in the depth direction of a multi-stage heating device.

The heating device of the present invention includes a plurality of heating walls erected facing each other at a distance, a plurality of heat generating means provided on each of the plurality of heating walls, and a plurality of the heating devices. A plurality of metal heat radiating members, which are arranged in a shelf shape in the facing region of the wall body at a distance in the vertical direction and conduct heat from the heating wall body, are provided, and the plurality of heating wall bodies are provided. And the plurality of heat radiating members define a plurality of accommodating spaces for accommodating the objects to be heated in the vertical direction, and the upper and lower sides of each of the plurality of accommodating spaces are defined by the opposing heat radiating members. ,
The heat generating means is arranged at a higher density in the peripheral portion than in the central portion in the depth direction of the heating wall body.
, Characterized by.

With such a configuration, in the depth direction of the heating wall body, the heat generating means are arranged at a higher density in the peripheral portion than in the central portion, so that the amount of heat generated is large at both ends in the depth direction. As a result, the temperature of the heat radiating member that receives heat conduction from the heating wall also rises at both ends in the depth direction, and the uniformity of the surface temperature is improved. When the object to be heated is arranged in each accommodation space in which such heat radiating members are arranged vertically, the object to be heated is uniformly heated by the heat radiated from the upper and lower heat radiating members, so that the temperature Heat treatment with excellent distribution uniformity is realized.
In addition, "arranged at high density" means not only arranging separated heat generating means (for example, coiled heater) at high density, but also a part of continuous heat generating means (for example, one turn of coiled heater). Is also included in the state of being packed with the adjacent portion.

The heat generating means comprises a plurality of coiled heaters extending in a depth direction in the plane of the heating wall body to substantially the entire length of the heating wall body, and one or more coiled heaters among the plurality of coiled heaters. The winding pitch may be set narrower in the peripheral portion than in the central portion. With such a configuration, in the depth direction, heat generation becomes large in the peripheral portion where the temperature tends to be lower than that in the central portion, and the uniformity of the surface temperature of the heating wall body is enhanced.

The heat generating means comprises a plurality of coiled heaters extending in a depth direction in the plane of the heating wall body to substantially the entire length of the heating wall body, and the plurality of coiled heaters are lower than the upper portion in the vertical direction. It may be arranged at a narrow interval in. With such a configuration, in the heating wall body, the heat generation amount is increased in the lower part where the temperature tends to be lower than that in the upper part, and the uniformity of the vertical surface temperature of the heating wall body is improved. , The temperature uniformity between the heat radiation plates is improved.

Preferably, the plurality of heating walls facing each other are formed on each side in the width direction of the flat plate-shaped object to be heated, which is directly formed at positions corresponding to each other on each wall surface on the side facing the accommodation space. A configuration can be adopted in which each of the support surfaces extends in the depth direction of the storage space for receiving the back surface of the edge portion. With such a configuration, the object to be heated can be held by the heat radiating member at a uniform interval, and the object to be heated is uniformly heated in the plane by the radiant heat.

Preferably, at least one temperature sensor provided on each of the plurality of heating walls and
Each of the plurality of heat generating means provided in each of the plurality of heating walls generates heat so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. A configuration having a temperature control means for independently controlling the amount and a temperature control means can be adopted.
With this configuration, it is possible to correct the non-uniformity of the temperature between the heating walls, and the uniformity of the heat treatment is enhanced.

The heating system of the present invention is a heating system further comprising any of the above heating devices and a chamber accommodating the heating devices, wherein the chamber has an air intake port for taking in air at the bottom and an atmosphere at the ceiling. It is characterized by having a ventilation mechanism for ventilating the inside of the chamber through an exhaust port for discharging.

The heating method of the present invention is characterized in that the object to be heated is heated by using any of the above heating devices or the above heating system.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a heating device having excellent uniformity of temperature distribution and stability of cleanliness, and at least capable of quickly responding to a change in the size of an object to be heated in the width direction.

It is a front view which shows the heating apparatus which is an embodiment of this invention. It is a right side view of the heating device shown in FIG. It is an external view which shows the heater for heating. It is sectional drawing which shows an example of the arrangement of the heating heater in the heating wall body. It is sectional drawing which shows an example of arrangement of a heating heater in a heating wall body. It is sectional drawing which shows an example of the arrangement of the heating heater in the heating wall body. It is explanatory drawing which shows the air flow in each accommodation space. It is explanatory drawing which shows the air flow in an example of the air-conditioning chamber of a heating device.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6. As shown in FIG. 1, the heating device 100 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance, and a plurality of coils which are heat generating means provided on the heating wall body 10. A plurality of heat radiating members 12 arranged in a shelf shape with a distance in the vertical direction (A1-A2 direction) in the facing regions of the shape heater 11 and the plurality of heating walls 10, and heat radiating adjacent to each other in the vertical direction. It is provided with a storage space 14 for the object to be heated 13 provided between the members 12.

The upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.

The heating wall 10 is a structural member made of stainless steel and forming a partition wall on both side surfaces and a center of the box-shaped main heating device 100, and is also a member that serves as a heat source for the heating device. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each heating wall body 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24, respectively.

As shown in detail in FIG. 3, the coiled heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed inside a metal tube (sheath) 11s. Although shown in a simplified manner in FIG. 3, the heating wire 11w wound in a coil reciprocates from the right end to the left end, and two lead wires extend from the right end. Between the reciprocating heating wire 11w and between the heating wire 11w and the metal tube 11s, an insulating layer made of powdered magnesium oxide is insulated.
FIG. 3A shows an example of a coiled heater 11A in which the winding pitch of the heating wire 11w is uniform and a uniform heating amount can be obtained in the longitudinal direction.
On the other hand, in FIG. 3B, the winding pitch of the heating wire 11w is small at both ends W1 and W1 and large at the center W2, so that the amount of heat generated at both ends is larger than the amount of heat generated at the center. An example of the coiled heater 11B formed in is shown.

As shown in FIG. 4A, the coiled heaters 11 in each heating wall 10 are arranged with the winding pitch of the heating wire 11w in all the through holes 24 having a narrow space at the bottom and a wide space at the top. However, a coiled heater 11B that is small at both ends and large at the center is inserted. As a result, in the vertical direction (A1-A2 direction) of each heating wall body 10, the amount of heat generated increases in the lower part where the coiled heater 11B is arranged at a small interval, so that the temperature of the lower part, which tends to be low, is increased. ing. Further, in the depth direction (B1-B2 direction), the amount of heat generated at both ends in the depth direction, where the temperature tends to decrease, is increased so that the temperature distribution becomes uniform.

However, the arrangement of the coiled heater 11 is not limited to this, and as shown in FIG. 4B, for example, the winding pitch of the heating wire 11w is small at both ends in each through hole 24 at the lower part of the heating wall body 10. A large coiled heater 11B may be inserted in the central portion, and a coiled heater 11A having a uniform winding pitch of the heating wire 11w may be inserted into the through hole 24 at the upper portion. As a result, it is possible to increase only the calorific value of the lower part of the heating wall body 10 in which the heat at both ends in the front-rear direction is particularly easily taken away, and to make the temperature distribution uniform.

Further, as shown in FIG. 4C, a coiled heater 11B having a coiled heater 11B having a small winding pitch at both ends and a large winding pitch at the center is provided in the through holes 24 at the bottom and the top of the heating wall 10. A coiled heater 11A having a uniform winding pitch of the heating wire 11w may be inserted into each through hole 24 in the middle. As a result, for example, when the heating device is installed in the chamber, only the amount of heat generated at both ends in the front-rear direction of the uppermost portion and the lowermost portion of the heating wall body 10 in which heat is easily taken away by the air flow in the chamber Can be increased to make the temperature distribution uniform.
The wiring of each coiled heater 11 extends from the back side of the heating device 100.

As shown in FIG. 1, each heating wall body 10 is provided with a plurality of other through holes 25 in the horizontal direction from the front side, and the temperature sensor 15 is inserted therein. The calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the amount of heat generated is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall body 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coil heater 11, the heating wall 10 can be made uniform. Achieves temperature uniformity.

The heat radiating member 12 is a member that is arranged in a shelf shape at a distance in the vertical direction in the facing region of the heating wall body 10 to conduct heat from the heating wall body 10. In the present embodiment, the heating walls 10 on both sides are fitted into the grooves formed in the walls 10 and arranged in a shelf shape. Each heat radiating member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiating function can be obtained.

Each storage space 14 is a space defined by the heating walls 10 on both sides and the upper and lower heat radiating members 12, and accommodates one object to be heated one by one and radiates heat from the upper and lower heat radiating members 12. It is designed to be heat-treated with. In the heating wall body 10, a groove 10t extending in the depth direction (B1-B2 direction) of the accommodation space is formed at a position corresponding to each other on each wall surface on the side facing each accommodation space 14, and the groove 10t is formed. The lower inner surface serves as a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object to be heated 13. Using a predetermined transport device, the object to be heated can be carried in so that both ends in the left-right direction thereof enter the grooves 10t and placed on the support surface. If both side edges of the object to be heated 13 are thermally opened, the temperature of the object to be heated 13 tends to be non-uniform at both edge portions. Therefore, the temperature of the object to be heated 13 is made uniform by directly transferring heat to both side edges of the object to be heated 13 through the support surface of the groove 10t.

The front surface 14a (see FIG. 2) of each accommodation space 14 is open. By opening the front surface 14a, the air heated and expanded inside the accommodation space can escape to the outside. Since the back surface 14b side is closed, even if the air heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside.
Depending on the size of the opening on the front surface 14a, an opening / closing door (not shown) that opens and closes the opening can be provided. The opening / closing door is opened when the object to be heated 13 is carried in and out, and is closed when the object 13 is heated. However, even when the opening / closing door is closed, the inside of the accommodation space is not completely sealed, and a gap can be formed between the opening / closing door and the opening so that the heated and expanded air can escape. As a result, the air heated and expanded inside the accommodation space 14 only escapes to the outside, and the air does not flow into the inside of the accommodation space 14 from the outside, so that convection is less likely to be formed in the accommodation space 14. it can.

As shown in FIG. 5, the back surface 14b side of each accommodation space 14 is closed by the back wall member 26, and the back wall member 26 is provided with an air supply path 27 capable of introducing gas into the accommodation space 14. it can. As a result, as shown by the arrow G in FIG. 5, gas flows from the back surface 14b side to the front surface 14a side of the accommodation space 14, and is discharged to the outside of the accommodation space 14 through the gap. Examples of this gas include an inert gas for preventing oxidation of the surface of the object to be heated, a gas for causing a specific chemical reaction with the surface of the object 13 to be heated, and the like.
The flow rate of this gas is adjusted so that it becomes a very weak laminar flow that does not wind up particles.

Between the two heat radiating members 12 at the top and between the two heat radiating members 12 at the bottom, there is an empty space where the object to be heated 13 is not introduced, and a heat insulating space for forming an air heat insulating layer. It is 20T and 20B.

The gantry unit 30 is arranged on the floor on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 100 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.

The main body of the heating device 100 including the gantry unit 30 is a chamber as shown in FIG. 6 in order to prevent particles from being mixed in from the outside and to prevent exhaust heat from affecting other devices in the installation location such as a clean room. It may be arranged in 200. In this chamber 200, the blower fan 230 provided at the exhaust port 220 on the ceiling of the chamber exhausts the heat exhaust of the heating device 100 inside the chamber 200, and the intake port 210 at the lower left is inside the chamber 200 which has become negative pressure. More outside air is introduced. A HEPA filter (not shown) is provided inside the intake port 210 to prevent particles from being mixed in from the outside.

Next, the operation of the heating device 100 of the present invention configured in this way will be described with reference to FIGS. 1 to 4A.
When the heating device 100 is used, each object to be heated is carried into each storage space 14 through the opening of the front surface 14a of each storage space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
By a temperature control means (not shown), the calorific value of the plurality of coiled heaters 11 is independently controlled individually or for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.

Since heating walls 10 are arranged on the left and right sides of each accommodation space 14 and heat radiating members 12 are arranged above and below each accommodation space 14, the left and right heating walls 10 that have been heated by the heat of the coiled heater 11 are arranged. It is heated by the heat radiated from the heat radiating member 12 and the heat radiated up and down from the heat radiating member 12 that generates heat by heat conduction from these heating walls.
Since each heating wall body 10 is heated to a target temperature and each heat radiating member 12 is also heated to the same temperature as the heating wall body 10, the temperature uniformity between the accommodation spaces 14 is high.
Here, as the coiled heater 11, the coiled heater 11B having a small winding pitch of the heating wire 11w at both ends and a large winding pitch at the center is used, so that the temperature drops in the depth direction of the heating wall 10. The amount of heat generated at both ends in the depth direction (B1-B2 direction), which tends to be large, is increased, and the temperature distribution is made uniform. Therefore, the temperature distribution in the depth direction in each accommodation space 14 is also made uniform.
Therefore, the inside of each accommodation space 14 is heated evenly and evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.

Further, since each storage space 14 is partitioned as described above, the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not agitated or circulated by the fan, the stability of the cleanliness is excellent, and the object to be heated does not move due to the gas flow.

Further, by providing the air supply path 27 in each accommodation space 14, it is possible to replace the air in the accommodation space 14 with an inert gas or a specific gas. Therefore, it is possible to prevent oxidation of the object to be heated 13 by introducing an inert gas, or to perform surface treatment on the object to be heated 13 by utilizing the reaction with the introduced specific gas.

The heating device 100 described above exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.
For example, as a means for increasing the arrangement density of the heat generating means in the depth direction to the peripheral portion rather than the central portion, in the present embodiment, in the heating wall body 10, the winding pitch of the heating wire 11w is small at both ends and in the central portion. A large coiled heater 11B is arranged so as to extend in the depth direction. However, in the present invention, the present invention is not limited to this, and in the heating wall body 10, the coiled

heaters

11A or 11B are arranged so as to extend in the vertical direction, and the arrangement interval in the depth direction is made small at both ends and large at the center. You may.
Further, the heat generating means is not limited to the coiled heater, and may be other heaters or heat pipes. These are arranged so as to extend in the vertical direction, and the arrangement interval in the depth direction is made small at both ends and large at the center. May be good.

Further, in the present embodiment, in each heating wall body 10, the calorific value of the coiled heater 11 located at each portion is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature. When the target temperature uniformity is loose, the calorific value of the coiled heater 11 may be controlled in the zone, or the calorific value of all the coiled heaters may be controlled collectively.

Further, in the present embodiment, an opening / closing door (not shown) is provided on the front surface 14a of each storage space 14 of the object to be heated so that the door can be opened and closed, and an air supply path 27 is provided on the back wall member 26 on the back surface 14b. Although it is possible to supply gas, these may be omitted depending on the conditions of use and the like.

Further, in the heating device 100, the heating wall body 10, the top plate 16, and the bottom plate 17 are made of stainless steel, and the heat radiating member 12 is made of an aluminum plate whose surface is plated with black. However, the material is not limited to these materials, and the heating walls 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy that has been subjected to a matte surface treatment to suppress the dissipation of radiant heat. ) Can also be formed. Further, the surface treatment of the heat radiating member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.

The heating device according to the present invention can be widely used in the industrial field of heat-treating various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates, and synthetic resin plates.

10,10A-

10C Heating wall

11, 11A, 11B Coil heater 11s Metal tube (sheath)
11w Heating wire 12 Heat radiation member 13 Heated object 14 Storage space 14a Front surface 14b Back surface 15 Temperature sensor 16 Top plate 17

Bottom plate

20T, 20B Insulation layer 24 Through hole 25 Through hole 26 Back wall member 27 Intake path 30 Stand unit 100 Heating device 200 Chamber 210 Intake port 220 Exhaust port 230 Blower fan W1 Both ends W2 Central part

Claims

A plurality of heating walls erected facing each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and up and down on the facing regions of the plurality of heating walls. A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the direction and conduct heat from the heating wall body, are provided, and the plurality of heating wall bodies and the plurality of heat radiating members are provided. Is to define a plurality of storage spaces for accommodating the objects to be heated in the vertical direction, and the upper and lower sides of each of the plurality of accommodating spaces are defined by the opposing heat radiating members.
The heating device is characterized in that the heat generating means is arranged at a higher density in a peripheral portion than in a central portion in the depth direction of the heating wall body.
The heat generating means comprises a plurality of coiled heaters extending in a depth direction in the plane of the heating wall body to substantially the entire length of the heating wall body, and one or more coiled heaters among the plurality of coiled heaters. The heating device according to claim 1, wherein the winding pitch is set narrower in the peripheral portion than in the central portion.
The heat generating means comprises a plurality of coiled heaters extending in a depth direction in the plane of the heating wall body to substantially the entire length of the heating wall body, and the plurality of coiled heaters are lower than the upper portion in the vertical direction. The heating device according to claim 1, which is arranged at narrow intervals in the above.
Heating device.
The plurality of heating walls facing each other are formed directly at positions corresponding to each other on the wall surfaces on the side facing the accommodation space, and the back surface of each side edge portion in the width direction of the flat plate-shaped object to be heated. The heating device according to any one of claims 1 to 3, each having a support surface extending in the depth direction of the storage space for receiving the storage space.
The accommodation space has openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the opening on the back side side is closed by the closing member. 4. The heating device according to 4.
At least one temperature sensor provided on each of the plurality of heating walls,
Each of the plurality of heat generating means provided in each of the plurality of heating walls generates heat so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. The heating device according to claim 1 to 5, further comprising a temperature control means for independently controlling the amount.
The heating device according to any one of claims 1 to 5.
A heating system that further comprises a chamber for accommodating the heating device.
The chamber is a heating system having a ventilation mechanism for ventilating the inside of the chamber through an intake port for taking in air at the bottom and an exhaust port for discharging air at the ceiling.
A heating method for heating an object to be heated by using the heating device according to any one of claims 1 to 6 or the heating system according to claim 7.