TW202111269A - Heating device and heating method - Google Patents

Abstract

To provide a heating device and a heating method with which uniformity of temperature distribution in a depth direction of a multi-stage heating device can be achieved. A heating device (100) is characterized by comprising: a plurality of heating wall bodies (10) that are erected so as to oppose each other with a distance therebetween; a plurality of heat generating means (11) provided respectively to the plurality of heating wall bodies (10); and a plurality of metal heat radiating members (12) that are disposed spaced apart in a shelf-like manner in the vertical direction in regions between the opposing heating wall bodies (10), and that conduct heat from the heating wall bodies. The heating device is also characterized in that: the plurality of heating wall bodies (10) and the plurality of heat radiating members (12) define, in the vertical direction, a plurality of accommodation spaces (14) for respectively accommodating objects (13) to be heated; the top and bottom of each of the plurality of accommodation spaces (14) is defined by the opposing heat radiating members (12); and the heat generating means (11) are disposed at a higher density in a peripheral section compared to a center section in the depth direction of the heating wall bodies.

Description

Heating device, heating system and heating method

The present invention relates to a heating device, a heating system and a heating method.

Patent Document 1 uses a cleaning oven of a heating gas circulation method that heat-treats plate-shaped objects such as glass substrates, which are constituent members of a liquid crystal display panel (for example, refer to Patent Document 1). In this clean oven, an object to be heat-treated, such as a glass substrate, is housed in a constant temperature bath, and heating gas circulated by a fan is used in the constant-temperature bath to heat the object to be heated. In the case of a clean oven of the heating gas circulation method, since it is easy to adopt a structure in which heated objects such as glass substrates are housed in multiple layers, it is excellent in space efficiency. However, the reverse is that it is difficult to uniformize the heating temperature distribution. If it is stirred, the cleanliness is likely to be reduced. In addition, when the object to be heated is relatively lightweight, the circulatory convection of the heating gas moves the object to be heated from a predetermined position.

The heating furnace of Patent Document 2 is a large number of shed heaters. Both sides of a heat radiating plate with a heating element are coated with a thin layer of far-infrared radiating ceramics inside. Infrared radiating double-sided heating type far-infrared panel heaters are arranged in multiple layers at regular intervals in the vertical direction in the furnace body, and each space formed between these shed heaters is used as a drying room. .

Patent Document 3 is provided with: facing and erected heating walls, and a plurality of heat radiating members arranged in a shelf shape between them and heated by conduction heat from the heating walls, and the heat Each space between the radiation members serves as a storage space to contain the glass substrate, which is the object to be heated, and heat treatment is performed by the radiation heat from the upper and lower heat radiation members. Since each storage space is divided, the uniformity of the temperature distribution is also excellent, and the heat accumulation phenomenon in the upper space caused by the rise of heat does not occur. In addition, since heating air is not blown, clean heating treatment can be realized.

In addition, the heating device of Patent Document 4 is the heating device of Patent Document 3, in which a pair of heat transfer walls are provided in close contact with the inside of a pair of heating walls, and heat is radiated between the heat transfer walls. The components are arranged in a shed shape to improve temperature uniformity.

In Patent Document 5, in order to solve the problem that the temperature of the upper storage space in the compartment structure of Patent Document 3 is still higher than the lower storage space, the electric heaters in the heating wall are arranged at intervals , It is arranged such that the upper part of the heating wall is larger than the lower part of the heating wall, and the lower part generates a larger amount of heat than the upper part. In addition, a heat insulating part is provided in the middle of the heating wall so that heat does not conduct upward. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Publication No. 2001-56141 [Patent Document 2] JP 2001-317872 A [Patent Document 3] JP 2013-200077 A [Patent Document 4] JP 2005-352306 A [Patent Document 5] JP 2005-055152 A

[The problem to be solved by the invention]

As described above, in Patent Documents 3 to 5, it is disclosed that the heating device that heats the object by disposing the object to be heated in the multi-layered storage space, the problem of the temperature difference between the upper storage space and the lower storage space is Corresponding by the above methods. On the other hand, with respect to the temperature distribution in the horizontal direction of each of the above-mentioned storage spaces, since the heat in the peripheral part is more likely to escape to the outside than the heat in the central part, there is a problem that the temperature is likely to be lowered. Among them, the countermeasure to the temperature distribution in the left-right direction is to arrange the heating wall on the left and right, but the countermeasure to the problem of the temperature distribution in the depth direction has not been disclosed.

The problem to be solved by the present invention is to provide a heating device and a heating method that are excellent in uniformity of temperature distribution and stability of cleanliness. In particular, there is provided a heating device and a heating method that can realize the uniformity of the temperature distribution in the depth direction of the multilayer heating device. [Technical means to solve the problem]

The heating device of the present invention is provided with: a plurality of heating walls that are arranged to face each other at a distance, and a plurality of heating means provided on each of the plurality of heating walls, and the plurality of heating walls The facing areas of the walls are arranged in a shed shape with a distance in the up and down direction and conduct heat from the heating wall, a plurality of heat radiation members made of metal, the plurality of heating walls and the plurality of heat The radiation member delimits a plurality of storage spaces for separately accommodating objects to be heated in the vertical direction. The upper and lower sides of each of the plurality of storage spaces are delimited by the heat radiation members facing each other, and the heating means The arrangement density is in the depth direction of the heating wall, and the peripheral part is higher than the central part.

With this structure, in the depth direction of the heating wall, the density of the heat generating means is arranged so that the peripheral part has a higher density than the central part, so the heat generation at both ends in the depth direction will increase. As a result, the temperature of the heat radiation member that receives heat conduction from the heating wall also rises at both ends in the depth direction, and the uniformity of the surface temperature can be improved. This kind of heat radiating member is provided with an object to be heated in each containing space arranged up and down, because the object to be heated is uniformly heated by the heat radiated from the upper and lower heat radiating members, so it can be realized Heat treatment with excellent uniformity of temperature distribution. And "arranged to...higher density" means not only arranging separate heat-generating means (such as coil heaters) at high density, but also includes part of continuous heat-generating means (such as coil heaters) Make it denser (squeezed) than its adjacent part.

The heating means is composed of a plurality of coil heaters extending substantially the entire length of the heating wall in the depth direction of the heating wall, and one or more coils of the plurality of coil heaters The winding line pitch of the shaped heater may be set so that the peripheral part is narrower than the central part. With this structure, in the depth direction, the peripheral portion, which is likely to have a lower temperature than the central portion, will generate more heat, and the uniformity of the surface temperature of the heating wall can be improved.

The heating means is composed of a plurality of coiled heaters extending substantially the entire length of the heating wall in the depth direction of the heating wall, and the vertical interval of the plurality of coiled heaters is The lower part may be narrower than the upper part. With this structure, in the heating wall, the lower part where the temperature is easily lowered than the upper part will generate a larger amount of heat. By increasing the uniformity of the surface temperature of the heating wall in the vertical direction, the heat radiation plate The uniformity of the temperature between them can be improved.

Preferably, the plurality of heating walls facing each other are directly formed at positions corresponding to each other on each wall surface facing each of the storage space sides, and each has a flat plate-shaped object to be heated. The back surface of each side edge in the width direction receives a supporting surface extending in the depth direction of the storage space. With this structure, the object to be heated can be held by the heat radiating member at a uniform interval, and the object to be heated can be uniformly heated in the plane by radiating heat.

Preferably, it can be used to have: at least one temperature sensor provided on each of the plurality of heating walls; and to enable detection of at least one temperature sensor provided on each of the plurality of heating walls In a way that the temperature follows the target temperature, each of the plurality of heating means provided in the above-mentioned plurality of heating walls is individually controlled by a temperature control means that independently controls the amount of heat generation; structure. With this structure, the temperature unevenness between the heating walls can be corrected, and the uniformity of the heating treatment can be improved.

The heating system of the present invention further has: any one of the heating devices described above, and a chamber accommodating the heating device. The chamber has a ventilating mechanism, which is provided by: a suction for taking in the atmosphere at the bottom The air port and the exhaust port for exhausting the atmosphere in the top plate part to ventilate the chamber.

The heating method of the present invention uses any one of the above heating devices or the above heating system to heat the object to be heated. [Effects of the invention]

According to the present invention, it is possible to provide a heating device that is excellent in the uniformity of temperature distribution and stability of cleanliness, and can quickly respond to changes in at least the widthwise dimension of the object to be heated.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described based on FIGS. 1 to 6. As shown in Figure 1, the heating device 100 is provided with a plurality of heating walls 10 (10A to 10C) arranged facing each other at a distance, and a plurality of heat generating means provided on the heating wall 10 The coil-shaped heater 11, and the plurality of heat emitting members 12 arranged in a shed shape at a distance in the vertical direction (A1-A2 direction) in the facing area of the plurality of heating walls 10, and the plurality of heat emitting members 12 arranged in the vertical direction The storage space 14 of the object to be heated 13 between the adjacent heat radiation members 12.

The upper end side and the lower end side of the heating wall 10 are respectively connected by the top plate 16 and the bottom plate 17, and the lower surface of the bottom plate 17 is supported by the stand unit 30.

The heating wall 10 is formed of stainless steel, and is a structural member that serves as a partition wall on both sides and the center of the box-shaped heating device 100 and serves as a heat source of the heating device. In this embodiment, it consists of 3 pieces of the wall body 10A for left-side heating, the wall body 10B for central heating, and the wall body 10C for right-side heating. In each heating wall body 10, a plurality of through holes 24 are opened in the horizontal direction from the front side to the back side, and the coil heater 11 is inserted into these through holes 24 so as to be detachable.

As shown in FIG. 3 in detail, the coil heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed in a metal tube (sheath) 11s. In Fig. 3, it is simplified and shown, but the heating wire 11w wound into a coil shape reciprocates from the right end to the left end, and two wires extend from the right end. Between the reciprocating heating wires 11w and between the heating wires 11w and the metal pipe 11s, they are insulated by an insulating layer made of solidified powdery magnesium oxide. Fig. 3(a) shows an example of the coil-shaped heater 11A which shows that the pitch of the heating wire 11w is uniform, and the uniform heating value in the longitudinal direction can be obtained. On the other hand, Figure 3(b) shows the coiling line pitch of the heating wire 11w, which is smaller at both ends W1 and W1, and larger at the center part W2. The heat generation at both ends is higher than the heat generation at the center part. An example of a larger coil heater 11B.

The arrangement of the coil heater 11 in each heating wall body 10 is as shown in FIG. 4A, all the through holes 24 are arranged with a narrow interval in the lower part and a wide interval in the upper part, and insert: the heating wire 11w described above The coil-shaped heater 11B has a small pitch at both ends and a large center section. As a result, in the vertical direction (A1-A2 direction) of each heating wall body 10, since the heat generation increases in the lower part where the coil-shaped heater 11B is arranged at a small interval, the temperature of the lower part where the temperature is likely to decrease is likely to increase. high. In addition, in the depth direction (B1-B2 direction), the heat generation at both ends in the depth direction where the temperature tends to decrease is increased, and the temperature distribution becomes uniform.

However, the arrangement of the coil heater 11 is not limited to this. As shown in Fig. 4B, each through hole 24 in the lower part of the heating wall 10 may be inserted: the coiling line pitch of the heating wire 11w is In the coil heater 11B with small ends and large at the center, in the upper through hole 24, a coil heater 11A with a uniform winding wire pitch of the heating wire 11w is inserted. Thereby, only by increasing the heat generation amount of the lower part of the heating wall body 10 where the heat at both ends in the front-rear direction is particularly easily taken away, the temperature distribution can be made uniform.

And as shown in Fig. 4C, it is also possible to insert in the through holes 24 at the lowermost and uppermost parts of the heating wall 10: the heating wire 11w has a smaller winding line pitch at both ends and at the center. In the large coiled heater 11B, in each through hole 24 in the middle, a coiled heater 11A with a uniform pitch between the winding wires of the heating wire 11w is inserted. Therefore, for example, in the case where the heating device is installed in the chamber, the heat is easily taken away by the airflow in the chamber, and only the uppermost and lowermost ends of the heating wall 10 in the front-rear direction are enlarged. By generating heat, the temperature distribution can be made uniform. In addition, the wiring of each coil-shaped heater 11 extends from the back side of the heating device 100.

In each heating wall body 10, as shown in FIG. 1, other plural through holes 25 are opened in the horizontal direction from the front side, and the temperature sensor 15 is inserted. Independently controlled by temperature adjustment means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature: a plurality of coiled heaters 11 respectively installed in each heating wall 10 The heat of each. Alternatively, the plurality of coil-shaped heaters 11 are grouped into a plurality of groups, and the heating value of each group is independently controlled. In addition, the structure and arrangement of the coil-shaped heater 11 described above can realize the uniformity of the temperature of the heating wall 10 when the heating means is controlled by the temperature adjustment means. In other words, for reasons such as turbulent flow interference, it is not easy to achieve uniformity of the temperature of the heating wall 10 if only the temperature adjustment means is used. Therefore, the heating can be achieved by taking measures for the structure and arrangement of the coil heater 11 The uniformity of the temperature of the wall body 10.

The heat radiation member 12 is a member that is arranged in a shelf shape with a distance in the vertical direction in the facing area of the heating wall 10 so that the heat from the heating wall 10 is conducted. In this embodiment, the grooves in the heating wall bodies 10 on both sides are fitted into the grooves and arranged in a shed shape. Each heat radiation member 12 is formed of an aluminum plate with black electroplating applied to the surface, and an excellent heat radiation function can be obtained.

Each accommodating space 14 is a space delimited by heating walls 10 on both sides and upper and lower heat radiation members 12. The objects to be heated are housed one by one. Heat treatment with radiant heat. The heating wall 10 is formed with a groove 10t extending in the depth direction (B1-B2 direction) of the housing space at positions corresponding to each other on each wall surface facing each housing space 14 side. The lower inner surface is a support surface that receives the back surface of each side edge portion in the width direction of the flat plate-shaped object 13 to be heated. Using a predetermined conveying device, the object to be heated is carried in such that the both ends in the left-right direction of the object to be heated enter each groove 10t, and the object to be heated can be placed on the support surface. If the edges on both sides of the object to be heated 13 are opened so as to be heat-transferable, the temperature of the object to be heated 13 is likely to become uneven at the edges on both sides. Therefore, by directly transferring heat to the side edges of the object 13 to be heated through the supporting surface of the groove 10t, the temperature of the object to be heated 13 can be made uniform.

The front surface 14a (refer to FIG. 2) of each storage space 14 is an opening. By opening the front face 14a, the heated and expanded air inside the containing space can be dissipated to the outside. Since the back surface 14b side is closed, even if the heated and expanded air inside the accommodating space escapes to the outside, the air does not easily flow into the accommodating space 14 from the outside. In addition, an opening and closing door (not shown) for opening and closing the opening may be provided in accordance with the size of the opening of the front surface 14a. This opening/closing door is opened when the object 13 to be heated is carried in and out, and is closed when heated. However, when the opening and closing door is closed, the interior of the storage space may not be completely sealed. For example, a gap is formed between the opening and closing door and the opening so that the heated and expanded air can escape. As a result, the heated and expanded air inside the accommodating space 14 only escapes to the outside, and the air does not flow into the accommodating space 14 from the outside, so convection does not easily form in the accommodating space 14.

As shown in FIG. 5, the back surface 14b side of each storage space 14 is closed by a back wall member 26. Here, the back wall member 26 can be provided with an air supply path 27 that can introduce gas into the storage space 14. Thus, as indicated by the arrow G in FIG. 5, the gas flows from the back surface 14b side of the storage space 14 toward the front surface 14a side, and is discharged from the aforementioned gap to the outside of the storage space 14. Examples of this gas include an inert gas for preventing oxidation on the surface of the object to be heated, a gas for causing a specific chemical reaction with the surface of the object to be heated 13, and the like. In addition, the flow of this gas is adjusted in a very weak laminar flow that does not wind up dust.

Between the top two heat radiation members 12 and the bottom two heat radiation members 12, each is an empty space where the object to be heated 13 is not introduced, and it is used to form a heat insulating layer of air. Space 20T, 20B.

The stand unit 30 is arranged on the floor surface on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device body on it. It is provided with an insulating function to prevent the heat of the heating device 100 from being transmitted to the floor surface, and an anti-vibration function to prevent the vibration of the floor surface from being transmitted to the heating device body.

The main body of the heating device 100 including the rack unit 30 may also be arranged in the chamber 200 as shown in Fig. 6 to prevent dust from entering from the outside and to prevent heat exhaust from affecting the installation place of the clean room, etc. . In this chamber 200, the blower fan 230 provided at the exhaust port 220 of the ceiling of the chamber discharges the hot exhaust gas of the heating device 100 inside the chamber 200, thereby forming a negative pressure in the chamber 200 Inside, outside air is introduced from the suction port 210 at the bottom left. A HEPA filter (not shown) is provided inside the air inlet 210 to prevent dust from entering from the outside.

Next, the operation of the heating device 100 of the present invention having such a structure will be described with reference to FIGS. 1 to 4A. When the heating device 100 is used, a predetermined conveying device is used, and each object to be heated is carried into each storage space 14 through the opening of the front surface 14 a of each storage space 14. When the coil heater 11 starts to be energized, the heat treatment can be performed in accordance with a predetermined pattern. By a temperature adjustment means not shown, each or each group of the heating value of the plurality of coil heaters 11 is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature.

Since the heating walls 10 are arranged on the left and right of each accommodating space 14, and the heat radiation members 12 are arranged on the upper and lower sides, the heating walls 10 are radiated from the heating walls 10 on the left and right that are heated by the heat of the coil heater 11 Heat and heat radiated upward and downward from the heat radiating member 12 that generates heat by the heat conduction from these heating walls are heated. Heating is performed so that each heating wall body 10 becomes a target temperature, and since each heat radiation member 12 is also heated to the same temperature as the heating wall body 10, the temperature uniformity between the storage spaces 14 becomes high. Here, the coil-shaped heater 11 has a heating wire 11w with a coil-shaped heater 11B whose heating wire 11w is smaller at the ends and larger at the center. Therefore, in the depth direction of the heating wall 10, The heat generation at both ends in the depth direction (B1-B2 direction) where the temperature tends to decrease is increased, and the temperature distribution is uniformized. Therefore, the temperature distribution in the depth direction in each storage space 14 is also uniformized. Therefore, the inside of each storage space 14 is not unevenly heated, but it is uniformly heated, and the uniformity of the temperature distribution in the whole heating apparatus 100 is also good.

In addition, since each storage space 14 is divided as described above, the heat accumulation phenomenon and the overheating phenomenon in the upper space caused by the rise of the hot air do not occur. In addition, since the heating gas is not stirred and circulated by the fan, the stability of the cleanliness is also excellent, and the object to be heated is not moved by the gas flow.

In addition, by providing an air path 27 in each storage space 14, the air in the storage space 14 can be replaced with an inert gas or a specific gas. Therefore, it is also possible to prevent oxidation of the object to be heated 13 by introducing an inert gas, or to apply a surface treatment to the object to be heated 13 by a reaction with the introduced specific gas.

In addition, the aforementioned heating device 100 is only an example of the heating device of the present invention, and the present invention is not limited to the heating device 100. For example, the arrangement density of the heating means in the depth direction is set to be higher in the peripheral part than in the central part. In this embodiment, in the heating wall 10, the heating wire 11w is wound at the two ends. The coil-shaped heater 11B, which is small and large in the center, is arranged to extend in the depth direction. However, the present invention is not limited to this. In the heating wall body 10, the coil-shaped heater 11A or 11B is arranged to extend in the vertical direction, and the arrangement interval in the depth direction may be small at both ends. Large in the central part. In addition, the heating means is not limited to the coil heater. Other heaters and heating pipes may be used. These heaters and heating pipes may be arranged so as to extend in the vertical direction. Big.

In the present embodiment, in each heating wall body 10, the heating value of the coil heater 11 located in each part is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature. However, it is not limited to this. If the target temperature uniformity is slow, the heating value of the coil heater 11 may be individually controlled for each area, or the heating value of all the coil heaters may be controlled in a batch.

In this embodiment, an opening and closing door (not shown) is provided on the front surface 14a of each storage space 14 of the object to be heated so that it can be opened and closed, and a gas path 27 is provided in the back wall member 26 of the back surface 14b so that gas can be supplied. However, depending on usage conditions, etc., it may be okay to omit these.

In the heating device 100 described above, the heating wall body 10, the top plate 16, and the bottom plate 17 are formed of stainless steel, and the heat radiation member 12 is formed of an aluminum plate with black plating applied to the surface. However, it is not limited to these materials. The heating walls 10A to 10C, the top plate 16, the bottom plate 17 and the like are made of aluminum and aluminum alloy (or aluminum and aluminum that have been treated with a matte surface in order to suppress radiant heat dissipation). Alloy) can also be formed. In addition, the surface treatment of the heat radiation member 12 is not limited to black plating, and a surface treatment that can suppress radiant heat dissipation, for example, a matte surface treatment may be used. [Industrial availability]

The heating device of the present invention can be widely used in the industrial field for heat treatment of various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates, and synthetic resin plates.

10,10A~10C: Wall for heating 10t: groove 11, 11A, 11B: coil heater 11s: Metal tube (sheath) 11w: hot line 12: Heat radiation member 13: Object to be heated 14: Containment Space 14a: front 14b: back 15: Temperature sensor 16: top plate 17: bottom plate 20T, 20B: Insulation layer 24: Through hole 25: Through hole 26: Back wall member 27: Inhalation path 30: stand unit 100: heating device 200: Chamber 210: suction port 220: exhaust port 230: Blower fan W1: Both ends W2: Central

[Figure 1] A front view showing a heating device according to an embodiment of the present invention. [Figure 2] A right side view of the heating device shown in Figure 1. [Figure 3] shows the appearance of a heating heater. [Fig. 4A] A cross-sectional view showing an example of the arrangement of the heating heater in the heating wall. [Fig. 4B] A cross-sectional view showing an example of the arrangement of the heating heater in the heating wall. [Fig. 4C] A cross-sectional view showing an example of the arrangement of the heating heater in the heating wall. [Figure 5] An explanatory diagram showing the flow of air in each storage space. [Fig. 6] An explanatory diagram showing the flow of air in an example of the air-conditioning chamber of the heating device.

10,10A~10C: Wall for heating

10t: groove

11: Coil heater

12: Heat radiation member

13: Object to be heated

14: Containment Space

15: Temperature sensor

16: top plate

17: bottom plate

20T, 20B: Insulation layer

24: Through hole

25: Through hole

30: stand unit

100: heating device

Claims (8)

A heating device, Equipped with: a plurality of heating walls that are erected to face each other at a distance, and a plurality of heating means provided on each of the plurality of heating walls, and the facing areas of the plurality of heating walls A plurality of heat radiating members made of metal that are arranged in a shed shape with a distance in the vertical direction and conduct heat from the heating wall body, The plurality of heating walls and the plurality of heat radiating members delimit the plurality of housing spaces for separately accommodating objects to be heated in the vertical direction, and the upper and lower sides of each of the plurality of housing spaces are caused by the heat facing each other. The radioactive components are delimited, The arrangement density of the heat generating means is higher in the peripheral part than in the central part in the depth direction of the heating wall. Such as the heating device of claim 1, wherein The heating means is composed of a plurality of coil heaters extending substantially the entire length of the heating wall in the depth direction of the heating wall, and one or more coils of the plurality of coil heaters The winding line pitch of the shaped heater is set so that the peripheral part is narrower than the central part. Such as the heating device of claim 1, wherein The heating means is composed of a plurality of coiled heaters extending substantially the entire length of the heating wall in the depth direction of the heating wall, and the vertical interval of the plurality of coiled heaters is It is configured so that the lower part is narrower than the upper part. Such as the heating device of any one of claims 1 to 3, wherein: The plurality of heating walls facing each other have: are directly formed at positions corresponding to each other on each wall surface facing each of the storage space sides, and each of the flat plate-shaped objects in the width direction of the object to be heated is formed directly corresponding to each other. A supporting surface extending in the depth direction of the storage space received by the back surface of the side edge portion. Such as the heating device of claim 4, wherein The storage space has openings delimited by the heating wall and the heat radiation member on the front side and the back side, and the opening on the back side is closed by a closing member. The heating device according to any one of claims 1 to 3, which has: At least one temperature sensor provided on each of the aforementioned plural heating walls; and In such a way that the detected temperature of at least one temperature sensor provided on each of the plurality of heating walls follows the target temperature, each of the plurality of heating means provided on the plurality of heating walls is set to Temperature adjustment means with independent control of heat generation. A heating system, further having: The heating device of any one of claims 1 to 5, and A chamber containing the aforementioned heating device, The aforementioned chamber has a ventilating mechanism, which ventilates the chamber through an intake port for taking in the atmosphere at the bottom and an exhaust port for exhausting the atmosphere at the top plate portion. A heating method, Use the heating device as in any one of claims 1 to 6, or the heating system as in claim 7 to heat the object to be heated.

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