TW202405355A - Heating device and heating plate - Google Patents

Abstract

The present invention provides a heating device that achieves high temperature uniformity in a plane of a large-area plate-shaped or sheet-shaped object to be heated. This heating device comprises a plurality of heating plates vertically disposed at intervals, and a heating space demarcated by heating surfaces of heating plates vertically facing each other. Each of the heating plates has a rectangular metallic plate, and a plurality of heater elements (11A-11C) which are embedded in the metallic plate and on which heating wires (13A-13C) are routed. The heater elements (11A-11C) are arranged in an arrangement direction L of the metallic plate, and each extend in an extension direction W orthogonal to the arrangement direction L. The plurality of heater elements (11A-11C) vary in width in the arrangement direction L, and in the extension direction W, the respective routing densities of the heating wires (13A-13C) of the plurality of heater elements (11A-11C) vary.

Description

Heating devices and heating plates

The present invention relates to a heating device that is used for heat treatment of glass substrates, semiconductor lead frames, or other metal plates, synthetic resin plates, and other plate-shaped or sheet-shaped components.

As a device for heat-treating relatively large glass substrates that are components of liquid crystal display panels, etc., a heating furnace has been proposed, in which many rack-like heating racks are arranged at fixed intervals in the upper and lower directions within the furnace body. The space parts formed between the rack-shaped heaters are used as drying chambers respectively; the rack-shaped heaters are composed of far-infrared panel heaters with double-sided heating. Heating-type far-infrared panel heaters radiate far-infrared rays from both sides by heating the heat sink (see Patent Document 1.)

In the case of the heating furnace described in Patent Document 1, since many rack-shaped heaters composed of double-sided heating far-infrared panel heaters are arranged, the advantage is that it can be formed between these rack-shaped heaters. Each space part (drying chamber) is heated efficiently.

However, the heat energy emitted by the many shelf-like heaters arranged in the up and down direction will rise in the heating furnace and tend to be concentrated in the area near the roof wall surface in the furnace; therefore, the temperature in the upper area of the furnace will Higher than the temperature in the lower area of the furnace, it is extremely difficult to remove the temperature difference between the upper area in the furnace and the lower area in the furnace.

Patent Document 2 discloses a heating device, which is configured to include a plurality of heating walls arranged to face each other at a distance in a space surrounded by a heat insulating material, a heating means provided on the heating wall, and A plurality of heat transfer walls arranged with a distance between the heating walls, a plurality of heat radiation members arranged in a shelf shape between the heat transfer walls, and between the heat radiation members adjacent in the vertical direction Set the heating space of the heated object. Since the heating device disclosed in Patent Document 2 is heated by a heating wall provided in a vertical direction, the size of the object to be heated that can be accommodated in the heating space is limited. The technology disclosed in Patent Document 2 was not originally intended to uniformly heat a large-area plate or sheet-shaped object, so it is difficult to heat a large-area object at a uniform temperature within the surface. [Known technical documents] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2001-317872 [Patent Document 2] Japanese Patent Application Publication No. 2005-352306

[Problem to be solved by the invention]

Generally speaking, it is very difficult to uniformly distribute the temperature over a wide surface with good accuracy because the heating device is placed in the atmosphere and is often affected by external interference. If many heaters and many temperature sensors are installed for in-plane temperature management, it is possible to heat a large area evenly with good accuracy, but the cost of the device will increase. Furthermore, if many heaters and many temperature sensors are installed, it will be difficult to stack the heating spaces in the vertical direction.

The problem to be solved by the present invention is to provide a heating device that can uniformly heat a large-area plate-shaped or sheet-shaped object to be heated at low cost. [Technical means to solve problems]

The heating device of the present invention has: A plurality of heating plates are arranged at intervals in the up and down direction; and The heating space is divided by the heating surfaces of the heating plate facing each other in the up and down direction, and is used to accommodate the object to be heated; Each of the heating plates has Rectangular metal plates, and A plurality of heating elements are built into the metal plate and equipped with heating wires; The plurality of heating elements are arranged in the first direction of the metal plate, and each extends in a second direction orthogonal to the first direction; The width of the plurality of heating elements changes in the first direction, or the arrangement interval changes; In the second direction, the wiring density of the heating wires of each of the plurality of heating elements changes. [Effects of the invention]

According to the present invention, since a heating space is defined between opposing heating plates and the structure of the heating element built in the heating plate is optimized, a large-area plate-like or sheet-like object to be heated can be uniformly heated Ground heating.

Hereinafter, the heating device 1 as an embodiment of the present invention will be described based on the drawings. As shown in Figures 1 to 7, the heating device 1 has a plurality of rectangular heating plates 10 arranged at equal intervals in the up and down direction, and is divided by opposing heating plates 10, 10 to accommodate plates or sheets. The heating space 30 of the object to be heated 20 is shaped like this. Furthermore, there is also a temperature adjusting device 40 for adjusting the temperature of each heating plate 10 . In addition, although the heating plates 10 are arranged at equal intervals in the up and down direction, the heating plates 10 are not limited to this, and the intervals may not be equal.

Figure 1 shows the front side of the heating device 1; the left and right ends of the plurality of heating plates 10 on the front side are supported by a pair of left and right support plates 50L and 50R, and the left and right ends of the back side are similarly supported by a pair of left and right support plates 50L and 50R. Supported by support plates 50L and 50R. Each of the pair of support plates 50L and 50R on the front side and the back side is arranged facing each other; on the facing surfaces, a plurality of supporting plates are formed in the horizontal direction at equal intervals (corresponding to the height of the heating space 30) in the up and down direction. The groove 51 has a rectangular cross section (refer to Figures 1 and 2). The left and right ends of the front side and the back side of the heating plate 10 are respectively embedded in these plural grooves 51 so that each heating plate 10 is positioned in the up and down direction. The object to be heated contained in the heating space 30 is heated by the upper and lower heating plates 10 .

The heating space 30 has openings on the front side and the back side, and the two sides of the heating space 30 also have openings between the support plates 50L and 50L and between the support plates 50R and 50R. That is, the heating space 30 has openings on four sides. By having an opening in each heating space 30, the heat treatment step performed by the heating device 1 can be continuously connected with other steps.

On the opposing surfaces of each pair of support plates 50L and 50R, further, strip-shaped guide members 60L and 60R having an L-shaped cross section are fixed slightly above the groove 51 with screws (not shown). (Refer to FIGS. 1 to 3 and 11 ); the guide members 60L and 60R are used to guide the object 20 to be heated into the heating space 30 . The guide bar members 60L and 60R are arranged horizontally toward the front-rear direction L (see FIG. 3 ) of the heating device 1 . Guidance members 61L and 61R are installed on the near side of the guide bar members 60L and 60R (the front side of the heating device 1, the left side in FIG. 3) to smoothly guide the object 20 to be heated into the heating space 30.

The upper and lower end sides of the pair of support plates 50L and 50R on the front and rear sides of the heating device 1 are connected by a top plate 71 and a bottom plate 72 respectively. Short leg members 73L and 73R are respectively installed on the bottom surface of the bottom plate 72 , and the lower ends of these leg members 73L and 73R are fixed to the middle plate 74 . Longer leg members 75L and 75R are respectively installed on the bottom surface of the middle plate 74 , and the lower ends of these leg members 75L and 75R are fixed to the base 76 .

Preferably, the pair of left and right support plates 50L, 50R on the front side of the heating device 1 and the pair of left and right support plates 50L, 50R on the back side of the heating device 1 are made of stainless steel, and the top plate 71, the bottom plate 72, the leg members 73L, 73R, the middle plate 74, the leg members 75L, 75R and the base 76 are made of stainless steel with the same material as the pair of left and right support plates 50L, 50R, but are not limited thereto, and may also be made of aluminum or aluminum alloy (or for Formed by aluminum or aluminum alloys with a matte surface treatment to suppress the dissipation of radiant heat.

As shown in FIG. 4A , the plate-shaped object to be heated 20 is horizontally inserted into the heating space 30 from the induction member 61L, 61R side. As shown in FIG. 4B , the object 20 to be heated is heated while being sandwiched between the upper and lower heating plates 10 . After the heat treatment, the object 20 to be heated is moved out in the horizontal direction from the opening on the back side opposite to the side of the induction members 61L and 61R, as shown in FIG. 4C .

Here, the heating plate 10 of this embodiment will be described. The heating plate 10, as shown in FIGS. 5 to 7, has three heating elements 11A, 11B, and 11C built therein. Here, the direction in which the heating elements 11A, 11B, and 11C are arranged is regarded as the arrangement direction L (first direction), and the extending direction of the heating elements 11A, 11B, and 11C is regarded as the extending direction W (the second direction). Each of the heating element elements 11A, 11B, and 11C is a so-called planar heater, which is made of a substantially rectangular electrically insulating sheet 12A, 12B, or 12C of mica or the like, with heating wires 13A, 13B wired in a zigzag shape. ,13C. In the heating element elements 11A, 11B, 11C, in the extending direction W of the sheets 12A, 12B, the wiring of the heating wires 13A, 13B, 13C in the end regions W1, W1 on both sides of the central region W2 Density is higher. The width of the heating element 11A, 11B, and 11C in the arrangement direction L is that the heating element 11B in the central region L2 is relatively wide, while the width of the heating element 11A and 11C in both end regions L1 is relatively narrow. The heating element elements 11A and 11C have the same structure, and the distributions of width and wiring density are also the same. The heating plate 10 is configured by sandwiching both surfaces of the heating element elements 11A, 11B, and 11C with metal plates 15A and 15B made of stainless steel alloy or the like. The metal plates 15A and 15B have their peripheral portions joined to each other by welding or the like. The metal plates 15A and 15B constituting both sides of the heating plate 10 have the same temperature distribution.

In this embodiment, a plurality of heating elements are built into the heating plate 10, and the heating wires of each heating element are arranged from one end in the extending direction W to the other end. Then, by changing the width of the heating elements in the arrangement direction L and also changing the wiring density in the extension direction W, the in-plane distribution of the heat generated by the heating plate 10 can be adapted to withstand the environment in which the heating plate 10 is installed. External distractions. By optimizing the in-plane distribution of the heat generated by the heating plate 10 in response to external environmental disturbances and combining the above-mentioned temperature adjustment device 40, a high degree of in-plane uniformity of the temperature of the heating plate 10 can be achieved. In addition, the structure of the heating element of the heating plate 10 is just an example, and it goes without saying that it can be changed in various ways in response to external interference in the environment.

Each heating plate 10 is provided with temperature sensors 14A and 14B composed of thermocouples and the like. The temperature sensor 14A is located in the center Ct of the heating element 11B in the arrangement direction L. The temperature sensor 14B is located approximately in the center of the heating element 11A in one of the end regions L1. The number of temperature sensors is not limited to this, but one heating plate 10 needs to be equipped with at least one temperature sensor. The heating element 11C is not provided with a temperature sensor. The heating element 11C is formed bilaterally symmetrically with the heating element 11A, and has the same size and structure as the heating element 11A. The temperature distribution on the heating element 11C can be estimated from the detected temperature of the heating element 11A. That is, by making the arrangement or structure of the plurality of heating elements symmetrical with respect to the respective center lines of the arrangement direction L and the extension direction W, the number of temperature sensors can be reduced.

As shown in FIG. 5 , from the surface of one end of the heating plate 10 in the extending direction W, the power wire 16 that supplies current to the heating wires 13A, 13B, and 13C is led to the outside; and is used to connect the temperature sensors 14A and 14B. The cable 17 to the temperature adjustment device 40 is also led out from the surface of one end of the heating plate 10 in the extending direction W to the outside. This feature prevents the power cord 16 and the cable 17 from interfering with the heating plate 10 when the heating plates 10 are stacked, which is of great benefit.

The temperature regulating device 40 shown in FIG. 1 is electrically connected to the heating wires 13A, 13B, and 13C of each heating plate 10, and can independently control the power supplied to each of the heating wires 13A, 13B, and 13C. Specifically, the temperature adjustment device 40 independently controls the heating amounts of the plurality of heating elements 11A, 11B, and 11C of the plurality of heating plates 10 so that the temperature sensors provided on each of the plurality of heating plates 10 The detection temperatures of 14A and 14B can follow the target temperature. The temperature of a heating plate 10 is adjusted by relatively reducing the supply of the heating wire 13B to the central area L2 when, for example, the temperature in the central area is higher than the target temperature and the temperature in the end area is lower than the target temperature. The power supplied to the heating wires 13A and 13C in both end regions L1 is relatively increased, so that the temperature distribution within the surface of the heating plate 10 can be uniformized regardless of external interference from the environment. If a plurality of heating plates 10 are stacked, the temperature of the heating plate 10 arranged above will be higher than that of the heating plate 10 arranged below because the heat energy will rise from below to above. The temperature regulating device 40 controls the power supply to relatively reduce the calorific value of each of the heating elements 11A, 11B, and 11C of the heating plate 10 arranged above, and to relatively increase the heating element 11A of the heating plate 10 arranged below. , 11B, and 11C respectively, thereby making the entire temperature of the plurality of heating plates 10 uniform. As a result, the large-area plate-shaped or sheet-shaped object to be heated 20 can be heated uniformly in the entire heating space 30 of the heating device 1 .

The heating element elements 11A, 11B, and 11C built in the heating plate 10 may be, for example, planar heaters or strip heaters described below. The following two types of planar heaters can be cited as examples, depending on the material or shape of the heating wire. 1) Wire type Material: Ni-Cr series (nickel-chromium wire), Fe-Cr-AI series (iron-chromium-aluminum wire), iron-chromium-aluminum resistance wire, etc. For example, a wire-shaped heating wire is wound around an insulator, or laid flat against the plane of the insulator for wiring. If the wire is wound around an insulator, it can be wound more densely by changing the winding pitch. Furthermore, if it is a type where the wires are flat against the plane of the insulator, a dense surface can be ensured by the layout of the wires. 2) Band type (also called heating band) Material: Ni-Cr series (nickel-chromium wire), Fe-Cr-AI series (iron-chromium-aluminum wire), stainless steel wire, etc. This is a method of winding a strip-shaped heating wire around an insulator, or etching a sheet and wiring it into a flat shape. If it is the type of winding tape for insulation, dense winding can be achieved by changing the winding pitch. Furthermore, if it is a type formed by etching, dense and dense surfaces can be achieved through pattern layout.

In the above embodiment, the heating elements 11A, 11B, and 11C are formed into three regions, including the central region W2 where the wiring density of the heating wires 13A, 13B, and 13C is relatively loose, and the ends on both sides where the wiring density is relatively dense. regions W1, W1; but of course, it is not limited to this, and more regions can be formed. Furthermore, the number of heating element elements constituting the heating plate 10 is not limited to three, and four or more heating elements may be arranged. Furthermore, the wiring density of the heating wires 13A, 13B, and 13C is set so that the end regions W1 on both sides become denser in stages compared with the central region W2 in the width direction; but of course, it may also be It gradually becomes denser from the center in the width direction to the ends on both sides.

Other implementation forms The heating plate 10 is disclosed as having a planar heater sandwiched between two metal plates; it may also be attached to one metal plate and a rod-shaped heater is built-in. The heating plate 100 shown in FIGS. 8 to 10 is a generally rectangular metal plate 101 with a plurality of holes 102 arranged in the arrangement direction L, and these holes are arranged in the extending direction W orthogonal to the arrangement direction L. Extend up. Rod-shaped heaters 103 are inserted into the plurality of holes 102 respectively. The arrangement intervals of the rod heaters 103 in the arrangement direction L gradually narrow from the center Ct to both ends E. The rod-shaped heater 103 is arranged symmetrically with respect to the center Ct. In addition, the plurality of holes 102 are preferably through holes, but of course they may not be through holes. It can be appropriately determined by considering the performance of the rod-shaped heater 103 and so on. As shown in FIG. 10 , in the extending direction W of the rod-shaped heater 103 , the wiring density of the heating wires 103A in the two end regions W1 and W1 of the rod-shaped heater 103 is higher than that in the central region W2 . In this embodiment, there are a plurality of rod-shaped heaters 103 as heating element elements built into the heating plate 100, and each rod-shaped heater 103 is arranged from one end to the other in the extending direction W of the heating plate 100. Ends. Then, by changing the arrangement spacing of the heating element elements in the arrangement direction L, and also changing the wiring density in the extension direction W, the in-plane distribution of the heat generated by the heating plate 100 can be adapted to withstand the environment in which the heating plate 100 is installed. external interference. By optimizing the in-plane distribution of the heat generated by the heating plate 100 in response to external environmental disturbances and combining the above-mentioned temperature adjustment device 40, a high degree of in-plane uniformity of the temperature of the heating plate 100 can be achieved.

As shown in FIG. 9 , the heating plate 100 is provided with temperature sensors 104A and 104B at the center Ct in the arrangement direction L and at one of its ends. The temperature sensors 104A and 104B can be embedded in the heating plate 100 or fixed on the surface of the heating plate 100 . In addition, the wiring density of the heating wire 103A of the rod-shaped heater 103 is set so that the end regions W1 on both sides become denser in stages compared with the central region W2; however, of course, the wiring density may also be increased in the width direction. Center, gradually becoming denser towards both ends.

Here, a specific example of the rod heater 103 will be described. As an example of a rod-shaped heater structure, the following can be mentioned. 1) Reel winding type This is a wire-shaped heating wire wound around the outer periphery of a magnesium oxide reel. With this, even thin heating wires can be accommodated by being wound on a spool, so that heating wires with a large capacity range can be stably fixed, so the entire heater can be stretched and formed. High temperature specifications are available. 2) Hollow core type This is a method of forming a wire-like heating wire into a coil shape without a reel. Therefore, since it is coil-shaped, the heating wire needs to have mechanical strength to stabilize its shape after molding, so the range of heat capacity is small. In addition, powdered magnesium oxide is sandwiched between the heating element and the outer cylindrical metal for insulation.

The object 20 to be heated may be a sheet-like object or a plate-like object. The object 20 to be heated is inserted into the heating space 30 by a crane or a robotic arm (not shown). At this time, the left and right guiding members 61L and 61R guide the object to be heated 20 into the heating space 30 without damaging it.

Here, the object to be heated 20 will be described. Generally speaking, there are the following two types of objects to be heated (workpieces). 1) Hard type (also called plate type) Strong flakes. Substrates, plastic boards, glass boards, etc. fall into this category. This type of heated object (workpiece) can be placed directly into the furnace for heating. The holding method in the furnace is to make the holding member resist the contactable part of the heated object (workpiece). If it is a substrate, it means that the waste edge of the substrate is to be held. The holding member is an induction member or a pin rod provided on the upper surface of the heating plate 10 as will be described later, or the like. This type of workpiece can also be directly held by the above-mentioned guide members 60L and 60R. 2) Soft type (also called sheet type) Flexible flakes. Films or foils, rubber sheets, etc. fall into this category. This type of heated object (workpiece) cannot be placed directly into the furnace due to transportation considerations, so it is placed in a jig for heating. The holding method in the furnace refers to the holding of the fixture. The holding member is the same as 1) above.

Figure 12 shows that when the object to be heated 20 is a plate-shaped object, in order to prevent the object to be heated 20 from directly touching the heating plates 10 and 100 when it is inserted into the heating space 30, the heating element is On the outside, a plurality of pin rods 81 are erected in a straight line and at equal intervals in the length direction.

Figure 13 shows that when the object to be heated 20 is a soft sheet, the peripheral part of the object to be heated 20 is fixed to the rectangular frame-shaped jig 82, and the object to be heated 20 is installed on the jig 82. state, and can be placed into the heating space 30.

FIG. 14 shows that in order to prevent the heated object 20 fixed to the fixture 82 shown in FIG. 13 from directly touching the heating plates 10 and 100 when it is guided into the heating space 30, the heating element is On the outside, a plurality of pin rods 81 are erected in a straight line toward the length direction.

In this embodiment, the heating space 30 accommodating the object to be heated 20 is uniformly heated from its top to bottom by its respective heating plate 10, so that there is no unevenness in each heating space 30. The ground is heated evenly.

Furthermore, the heating device 1 of this embodiment may further include gas supply means 90 for supplying an inert gas or a specific gas into the plurality of heating spaces 30 (see FIG. 17 ). The gas supply means 90 is an ejection nozzle device 92 having a plurality of ejection ports 91 arranged in a row at the opening on the back side of each heating space 30. Each discharge nozzle device 92 is a square box-shaped object extending in the width direction W, and has a plurality of discharge ports 91 formed at equal intervals on the side close to the heating space 30 side. Each of the ejection nozzle devices 92 is supplied with gas from a gas supply source (not shown) through a supply pipe 93 from its back surface. Once the gas is supplied, it will be evenly dispersed left and right in the discharge nozzle device 92 , and the gas will be discharged equally from each discharge port 91 . Since the supplied gas can replace the air in the heating space 30 with an inert gas or a specific gas, the oxidation of the object to be heated 20 can be prevented by introducing the inert gas, or the object to be heated 20 can be oxidized by reaction with the introduced specific gas. The heated object 20 is subjected to surface treatment.

In the heating device 1 of this embodiment, a plurality of heating plates 10 or 100 arranged in a shelf shape are supported by support plates, and the space between the support plates, that is, the front, rear, left and right sides of the device are open. In this way, the heated object 20 can be moved in and out of the heating device 1 more easily. If necessary, the heated object 20 can also be moved in and out from the left and right sides of the device, making it easier to move in and out.

When the gas is supplied from the back of the heating device 1 to the heating space 30, instead of the left and right support plates 50L and 50R supporting the heating plate 10 or 100 from the front and back, a cover may be provided on the side of each device. The entire side surface supports the plates 83L and 83R to lock the gas in the heating space 30 (see FIGS. 15 to 18 ).

In this embodiment, the guide members 60L and 60R are used as an example to hold the object 20 to be heated. However, the guide members 60L and 60R are not limited thereto. For example, the support plates 50L and 50R may be provided with support plates 50L and 50R to sandwich the object 20 from above and below. The clamping member may directly form holding grooves in the support plates 50L and 50R, and hold the heated object 20 with the support plates 50L and 50R. [Industrial availability]

The heating device of the present invention can be widely used in industrial fields that perform heat treatment on glass substrates, semiconductor lead frames, or other metal plates or synthetic resin plates and other plate-shaped or sheet-shaped components.

1:Heating device 10:Heating plate 11A, 11B, 11C: Heating element 12A, 12B, 12C: flakes 13A, 13B, 13C: Heating wire 14A, 14B: Temperature sensor 15A, 15B: Metal plate 16:Power cord 17:Cable 20: Heated object 30: Heating space 40:Temperature regulating device 50L, 50R: support board 51: Groove 60L, 60R: guide bar components 61L, 61R: induced components 71: Top plate 72: Base plate 73L,73R: foot column components 74:Medium plate 75L, 75R: foot column components 76:Abutment 81: Pin rod 82:Jig 83L, 83R: Side support plate 90:Gas supply means 91:Spout 92:Ejection nozzle device 93: Supply pipeline 100:Heating plate 101:Metal plates 102:hole 103: Rod heater 103A: Heating wire 104A, 104B: Temperature sensor W: extension direction L: Arrangement direction A,B,D:arrow Ct:Central L1,W1: end area L2, W2: Central area

[Fig. 1] shows a front view of a heating device according to an embodiment of the present invention. [Fig. 2] An enlarged view of the portion enclosed by the circle indicated by arrow A in Fig. 1. [Fig. [Fig. 3] A side view of the heating device shown in Fig. 1. [Fig. 4A] shows a scene in which an object to be heated is placed in the heating space of the heating device shown in Fig. 1 and is an enlarged side view of the portion enclosed by an ellipse indicated by arrow B in Fig. 3. [Fig. 4B] illustrates a scene when an object to be heated is placed in the heating space of the heating device shown in Fig. 1, which is a side view corresponding to Fig. 4A. [Fig. 4C] illustrates the scene of taking out the heated object from the heating space of the heating device shown in Fig. 1, which corresponds to the side view of Fig. 4A. [Fig. 5] A top view of an embodiment of the heating plate used in the heating device shown in Fig. 1. [Fig. [Fig. 6] A front view of the heating plate shown in Fig. 5. [Fig. 7] A top view schematically illustrating the wiring of the heating wire element provided inside the heating plate shown in Fig. 5. [Fig. [Fig. 8] A front view of another embodiment of the heating plate used in the heating device shown in Fig. 1. [Fig. [Fig. 9] A top view of the heating plate shown in Fig. 8. [Fig. 10] A schematic view of a rod-shaped heater installed inside the heating plate shown in Fig. 8. [Fig. [Fig. 11] An exploded perspective view showing the object to be heated, the guide bar member that guides the object to be heated to the heating space, and the heating plate. [Fig. 12] A perspective view showing a situation in which a pin rod is erected on the heating element so that the object to be heated does not directly contact the heating surface of the heating plate in the heating space. [Fig. 13] Fig. 13 is a schematic exploded perspective view illustrating when the object to be heated is a sheet-like object, the object to be heated is fixed to the frame and guided to the heating space along the guide bar member. [Figure 14] shows that when the sheet-like object to be heated is fixed to the frame, in order to prevent the frame from directly contacting the heating plate in the heating space, a pin rod is erected at the position of the heating plate corresponding to the jig. A three-dimensional view of the scene. [Fig. 15] A front view illustrating a situation in which the heating device shown in Fig. 1 is provided with a back plate provided with a plurality of gas supply holes deep in the heating space in order to supply gas into the heating space. [Fig. 16] A side view showing the supply of inert gas in the heated space. [Fig. 17] Cross-sectional view of line C-C in Fig. 5. [Fig. 18] An enlarged view of a portion surrounded by a circle indicated by an arrow D in Fig. 17. [Fig.

11A, 11B, 11C: Heating element

12A, 12B, 12C: flakes

13A, 13B, 13C: Heating wire

16:Power cord

W: extension direction

L: Arrangement direction

L1,W1: end area

L2, W2: Central area

Claims (1)

A heating device containing: At least three or more heating plates are arranged at predetermined intervals in the up and down direction; and, The heating space is divided by the heating surfaces of the heating plate facing each other in the up and down direction, and is used to accommodate the object to be heated; The heating spaces adjacent in the vertical direction are separated by the heating plate; The heating plate contains: Rectangular metal plates; and, A plurality of heating elements are built into the metal plate and equipped with heating wires; The heating device also includes: A temperature sensor is provided in each of the plurality of heating plates; and, Temperature control means independently controls the calorific value of each of the plurality of heating elements of the plurality of heating plates, so that the detected temperature of the temperature sensor provided on each of the plurality of heating plates follows the target temperature; This temperature control means performs the following controls: The calorific value of each of the plurality of heating element elements of the heating plate arranged above is relatively reduced, and the calorific value of each of the plurality of heating element elements of the heating plate arranged below is relatively increased.

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