JP2021042928A - Heating device and heating method - Google Patents

Abstract

To provide a heating deice having excellent uniformity of a temperature distribution and cleanliness and also having excellent heating velocity.SOLUTION: A heating device comprises a plurality of wall bodies 10 for heating oppositely arranged at intervals, a plurality of coil-shaped heaters 11 built into the plurality of wall bodies 10 for heating, respectively, a plurality of metallic heat transfer members 12 arranged into a shelf shape at intervals vertically to the opposite regions of the plurality of wall bodies 10 for heating and transferring heat from the wall bodies 10 for heating. The plurality of wall bodies 10 for heating and the plurality of heat transfer members 12 define a plurality of storage spaces 14 for storing objects W to be heated, and the plurality of storage spaces 14 comprise opening parts 14a and 14b defined by the wall bodies 10 for heating and the heat transfer members 12 at the front sides and the back sides, and upper faces 12f of the heat transfer members 12 on the respective lower sides of the plurality of storage spaces 14 define holding faces capable of directly holding the objects W to be heated.SELECTED DRAWING: Figure 3

Description

The present invention relates to a heating device and a heating method.

Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. A heating furnace is disclosed in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space portion formed between these shelf-shaped heaters is used as a drying chamber.
In the case of the heating furnace described in Patent Document 2, the heat generated from a large number of shelf-shaped heaters arranged in the vertical direction tends to rise in the heating furnace and collect in the region near the top wall in the furnace. The temperature of the upper region of the furnace is higher than the temperature of the lower region of the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region of the furnace and the lower region of the furnace.

Patent Document 3 discloses a heating device for improving the uniformity of temperature distribution and cleanliness. Specifically, a plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a plurality of heating wall facing regions. A plurality of metal heat radiating plates arranged in a shelf shape with a distance in the vertical direction are provided, and the plurality of heating walls and the plurality of heat radiating plates are for accommodating objects to be heated. It defines multiple accommodation spaces. In the heating device disclosed in Patent Document 3, by controlling the temperature of each accommodation space so as to be a set temperature, the object to be heated can be heated to a uniform temperature and the temperature between the accommodation spaces can be made uniform. Further, in the heating device disclosed in Patent Document 3, since the heated gas is not circulated, the cleanliness in each accommodation space can be improved.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2005-055152

By the way, in the heating device disclosed in Patent Document 3, heat radiating plates are arranged above and below the object to be heated, and the radiant heat from the radiant plates is used to heat the object to be heated, so that the capacity is relatively large. In the case of an object to be heated, it takes a relatively long time to heat it to the set temperature.

One of an object of the present invention is to provide a heating device and a heating method which are excellent in temperature distribution uniformity and cleanliness and are excellent in heating rate.

The heating device according to the first aspect of the present invention includes a plurality of heating walls arranged to face each other at a distance from each other.
A plurality of heat generating means built in each of the plurality of heating walls, and
A plurality of metal heat transfer members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated, and the plurality of storage spaces are the heating wall body and the heat transfer. A heating device having openings defined by members on the front side and the back side.
The upper surface of the heat transfer member below each of the plurality of accommodation spaces defines a holding surface capable of directly holding the object to be heated.

The heating device according to the second aspect of the present invention includes a plurality of heating walls arranged to face each other at a distance from each other.
A plurality of heat generating means built in each of the plurality of heating walls, and
A plurality of metal heat transfer members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated, and the plurality of storage spaces are the heating wall body and the heat transfer. A heating device having openings defined by members on the front side and the back side.
The upper surface of the heat transfer member on the lower side of each of the plurality of accommodation spaces is at least three or more that support the facing surface so that the facing surface of the object to be heated is arranged close to the upper surface. It has a support protrusion.

The heating method according to the third aspect of the present invention includes a plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a plurality of heat generating means. The plurality of heating members are provided with a plurality of metal heat transfer members which are arranged in a shelf shape in the facing region of the heating wall body at a distance in the vertical direction and conduct heat from the heating wall body. The wall body and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated, and the plurality of storage spaces are defined by the wall body for heating and the heat transfer member. It is a heating method using a heating device having openings to be formed on the front side and the back side.
The object to be heated is heated while the facing surface of the object to be heated is entirely held on the upper surface of the heat transfer member below the accommodation space.

The heating method according to the fourth aspect of the present invention includes a plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a plurality of heat generating means. The plurality of heating members are provided with a plurality of metal heat transfer members which are arranged in a shelf shape in the facing region of the heating wall body at a distance in the vertical direction and conduct heat from the heating wall body. The wall body and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated in the vertical direction, and the plurality of accommodation spaces are the heating wall body and the heat transfer member. A heating method using a heating device having openings defined by the above on the front side and the back side.
The object to be heated is heated with the surface facing the object to be heated close to the upper surface of the heat transfer member below the accommodation space.

According to the present invention, there is provided a heating device and a heating method that are excellent in temperature distribution uniformity and cleanliness and are also excellent in heating rate.

The front view which shows the heating apparatus which concerns on one Embodiment of this invention. A side view of the heating device of FIG. An enlarged front view of a main part of the heating device of FIG. A side view of the heating device of FIG. The enlarged view of the main part of the heating apparatus which concerns on 2nd Embodiment of this invention. The figure which shows the structural example of the upper surface of a heat transfer member. The figure for demonstrating an example of the method of carrying in / out the object to be heated of the heating apparatus of this invention. A side view of the heating device of FIG. 7.

Hereinafter, the heating device 1 according to the embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the heating device 1 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance, and a plurality of coils which are heat generating means provided on the heating wall body 10. The shape heater 11, a plurality of heat transfer members 12 arranged in a shelf shape at intervals in the vertical directions A1 and A2 in the facing regions of the plurality of heating walls 10, and heat transfer members 12 adjacent to each other in the vertical direction. A storage space 14 for the object to be heated W provided between them, and a heat insulating material 23 provided so as to cover the outer wall surfaces of the left side heating wall body 10A and the right side heating wall body 10C arranged at both ends. I have.

The upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.

The heating wall body 10 is a structural member formed of a metal such as an aluminum alloy or stainless steel and forming a partition wall on both side surfaces and a center of the box-shaped main heating device 1, and is a member that serves as a heat source for the heating device. is there. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each heating wall body 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24, respectively.

The coiled heater 11 has a structure in which a heating wire wound in a coil shape is housed inside a metal tube (sheath). The heating wire and the metal tube are insulated by an insulating layer made of powdered magnesium oxide.

As shown in FIG. 1, the arrangement of the coiled heaters 11 in each heating wall body 10 is inserted into all the through holes 24 in which the intervals are narrow in the lower part and wide in the upper part. As a result, in the vertical directions A1 and A2 of each heating wall body 10, the amount of heat generated is large in the lower part where the arrangement interval of the coiled heaters 11 is small, so that the temperature of the lower part, which tends to be low, is raised. Further, in the depth directions B1 and B2, the amount of heat generated at both ends in the depth direction, where the temperature tends to decrease, is increased so that the temperature distribution becomes uniform.

As shown in FIG. 1, each heating wall body 10 is provided with a plurality of other through holes 25 in the horizontal direction from the front side, and a temperature sensor 15 is inserted therein. The calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the amount of heat generated is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall body 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coil heater 11, the heating wall 10 can be made uniform. Achieves temperature uniformity.

The heat transfer member 12 is a member that is arranged in a shelf shape at a distance in the vertical direction in the facing region of the heating wall body 10 to conduct heat from the heating wall body 10. In the present embodiment, the heating walls 10 on both sides are fitted into grooves formed in the walls 10 and arranged in a shelf shape. Each heat transfer member 12 is formed of an aluminum plate whose surface is plated with black, so that excellent heat radiation function and heat conduction function can be obtained.

As shown in FIG. 3, each accommodating space 14 accommodates the object to be heated W in a space defined by the heating walls 10 on both sides and the upper and lower heat transfer members 12. The upper surface of the heat transfer member 12 on the lower side of each accommodation space 14 is a flat and smooth holding surface 12f capable of directly holding the object to be heated W.
The flatness of the surface Wf of the object to be heated facing the holding surface 12f is ensured so as to be in close contact with the holding surface 12f, and the surface Wf is evenly contacted with the holding surface 12f.

The concave grooves 10t provided in each accommodation space 14 serve as a positioning mechanism that receives both ends of the object W to be heated in the width directions C1 and C2 and determines the position of the object W to be heated in the accommodation space 14. There is.

An opening 14a (see FIG. 2) is formed on the front surface side of each accommodation space 14. The opening 14b on the back side of each storage space 14 is closed by the back wall member 26. That is, each accommodation space 14 is opened only at the opening 14a on the front side. By providing the opening 14a on the front side, the air heated and expanded inside the accommodation space can escape to the outside. Since the opening 14b on the back side is closed, even if the air heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside.

The gantry unit 30 is arranged on the floor on which the heating device 1 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 1 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.
The heat insulating material 23 is provided to minimize thermal disturbance to the left side heating wall body 10A and the right side heating wall body 10C from the outside air, and is formed of a heat insulating material such as glass fiber. ing.

When the heating device 1 is used, as shown in FIG. 4, each object to be heated W is carried into each storage space 14 through an opening 14a on the front side of each storage space 14 by using a predetermined transfer device. The carry-in method is a lift-up lift-down method in which the facing surface Wf of the object to be heated W is placed directly on the holding surface 12f. Alternatively, the object to be heated W is inserted by sliding it on the lower heat transfer member 12.

If the coiled heater 11 is energized, the heat treatment can be executed according to a predetermined program.
By a temperature controlling means (not shown), the calorific value of the plurality of coiled heaters 11 is independently controlled individually or for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.

In each storage space 14, each heating wall body 10 and the upper and lower heat transfer members 12 are also heated to the same temperature as the heating wall body 10, and the object to be heated W is also uniformly heated. At this time, by placing the facing surface Wf of the object to be heated W directly on the holding surface 12f, the heating rate of the object to be heated W is improved by the heat conduction action of the lower heat transfer member 12. That is, it is better to heat the object W to be heated by utilizing the heat conduction action of the lower heat transfer member 12 than to heat the object W to be heated by heat radiation from both the upper and lower heat transfer members 12. The speed is greatly improved.

The heating device 1 exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 1.
The heat generating means is not limited to the coiled heater, and other heaters or heat pipes may be used.
Further, although the back side of the heating device 1 is closed, when the object to be heated W is taken out from the back side, the opening 14b on the back side may be opened.

Second Embodiment Next, the heating apparatus according to the second embodiment of the present invention will be described with reference to FIGS. 5 and 6. In FIGS. 5 and 6, the same reference numerals are used for the same components as those in the first embodiment.
In the above embodiment, the heating rate of the object W to be heated is improved by placing the object W to be heated directly on the upper surface 12f of the lower heat transfer member 12.
However, if the flatness of the facing surface Wf of the object W to be heated is not sufficiently secured, the facing surface Wf and the upper surface 12f may be in a point contact state, and uneven heating of the object W to be heated may occur. ..
In the present embodiment, a configuration for suppressing uneven heating of the object W to be heated will be described even when the flatness of the facing surface Wf of the object W to be heated and the upper surface 12f of the heat transfer member 12 is not sufficiently secured. To do.

FIG. 6 shows the configuration of the upper surface 12f of the heat transfer member 12. The upper surface 12f is provided with three or more support protrusions 12p that support the facing surfaces of the object W to be heated.
The support protrusion 12p is made of the same material as the heat transfer member 12 or a different material, and has a diameter of, for example, about 1 to 2 mm. As the support protrusion 12p, a pin-shaped member may be embedded in the heat transfer member 12, or the upper surface 12f may be scraped to form a protrusion.
The surface of the support projection 12p that comes into contact with the facing surface Wf of the object to be heated W is preferably a spherical surface or a surface that is curved in a protruding shape in order to maintain point contact.
The height of the support protrusion 12p is preferably as low as possible while preventing contact from the viewpoint of bringing the facing surface Wf of the object to be heated W as close as possible to the upper surface 12f of the heat transfer member 12. The height of the support protrusion 12P is preferably in the range of, for example, 10 μm to 1 mm. The gap G between the facing surface Wf of the object to be heated W and the upper surface 12f of the heat transfer member 12 formed by the support projections 12p has the flatness of the facing surface Wf of the object W to be heated and the upper surface 12f of the heat transfer member 12. Correspondingly, it is set within a range in which the object to be heated W and the heat transfer member 12 do not partially come into contact with each other.

According to the present embodiment, by providing the support protrusion 12p on the heat transfer member 12, the object to be heated is prevented from partially contacting the facing surface Wf of the object W to be heated and the upper surface 12f of the heat transfer member 12 as much as possible. By bringing the facing surface Wf of W and the upper surface 12f of the heat transfer member 12 close to each other, the amount of heat transferred from the heat transfer member 12 to the object W to be heated is increased to improve the heating rate, and the object W to be heated It is possible to suppress uneven heating.

Next, an example of a method for carrying in and out the object to be heated in the heating device of the present invention will be described with reference to FIGS. 7 and 8. In addition, in FIG. 7 and FIG. 8, the same reference numerals are used for the same components as those in the first and second embodiments.

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As shown in FIG. 7, guide grooves 18 are machined in the heating walls 10 on both sides of each storage space 14. The guide groove 18 is for supporting the movement of the object to be heated W in the depth direction, and both ends of the object W to be heated in the width directions C1 and C2 are inserted. In addition to the guide groove 18, the heating wall body 10 can be provided with a guide mechanism, and the heat transfer member 12 can be provided with a guide mechanism for guiding the object to be heated W.

As shown in FIG. 8, the object to be heated W is sequentially carried into the accommodation space 14 through the opening 14a on the front surface side, and a plurality of objects W to be heated are simultaneously accommodated in the accommodation space 14.
By pushing the new heated object W toward the back side through the opening 14a on the front side, the plurality of heated objects W already accommodated in the accommodating space 14 are slid on the heat transfer member 12 while being slid. It can be moved sequentially.
It is necessary to secure a distance for the pushing amount L of the new object W to be heated so as not to affect uniform heating.
The opening 14b on the back side is left open, and the object to be heated W is sequentially carried out through the opening 14b. Instead of leaving the opening 14b open, a notch hole through which the object to be heated W can pass may be formed on the back surface side.

The heating device according to the present invention can be widely used in the industrial field of performing heat treatment of all objects to be heated including various plate-shaped members and three-dimensional objects.

1: Heating device 10: Heating wall body 10A: Left side heating wall body 10B: Central heating wall body 10C: Right side heating wall body 10t: Groove 11: Coiled heater 12: Heat transfer member 12f: Top surface (holding surface) )
12p: Support protrusion 14: Accommodation space 14a, 14b: Opening 15: Temperature sensor 16: Top plate 17: Bottom plate 18: Guide groove 23: Insulation material 24, 25: Through hole 26: Back wall member 30: Mount unit A1, A2: Vertical direction B1, B2: Depth direction C1, C2: Width direction G: Gap L: Pushing amount W: Heated object Wf: Facing surface

Claims (5)

Multiple heating walls arranged facing each other at a distance,
A plurality of heat generating means built in each of the plurality of heating walls, and
A plurality of metal heat transfer members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated, and the plurality of storage spaces are the heating wall body and the heat transfer. A heating device having openings defined by members on the front side and the back side.
A heating device in which the upper surface of the heat transfer member below each of the plurality of accommodation spaces defines a holding surface capable of directly holding the object to be heated. Multiple heating walls arranged facing each other at a distance,
A plurality of heat generating means built in each of the plurality of heating walls, and
A plurality of metal heat transfer members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat transfer members define a plurality of storage spaces for accommodating the objects to be heated, and the plurality of storage spaces are the heating wall body and the heat transfer. A heating device having openings defined by members on the front side and the back side.
The upper surface of the heat transfer member on the lower side of each of the plurality of accommodation spaces is at least three or more that support the facing surface so that the facing surface of the object to be heated is arranged close to the upper surface. The heating device according to claim 1, which has a support protrusion. The heating device according to claim 2, wherein the support protrusion has a height from the upper surface in the range of 10 μm to 10 mm. A plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a distance in the vertical direction from a plurality of facing regions of the heating walls. A plurality of metal heat transfer members that are arranged in a shelf shape and conduct heat from the heating wall body, and the plurality of heating wall bodies and the plurality of heat transfer members are provided. A plurality of accommodating spaces for accommodating the objects to be heated are defined, and the plurality of accommodating spaces have openings defined by the heating wall body and the heat transfer member on the front side and the back side. It is a heating method using a device,
A heating method in which the object to be heated is heated while the facing surface of the object to be heated is entirely held on the upper surface of the heat transfer member below the accommodation space. A plurality of heating walls arranged to face each other at a distance, a plurality of heat generating means provided in each of the plurality of heating walls, and a distance in the vertical direction from a plurality of facing regions of the heating walls. A plurality of metal heat transfer members that are arranged in a shelf shape and conduct heat from the heating wall body, and the plurality of heating wall bodies and the plurality of heat transfer members are provided. A plurality of accommodating spaces for accommodating objects to be heated are defined in the vertical direction, and the plurality of accommodating spaces have openings defined by the heating wall body and the heat transfer member on the front side and the back side. It is a heating method using the heating device of
A heating method in which the object to be heated is heated in a state where the surface facing the object to be heated is arranged close to the upper surface of the heat transfer member below the accommodation space.

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