JP2021185557A - Heating device and heating method - Google Patents

Abstract

To provide a heating device which improves uniformity of temperature distribution and stability of cleanliness and is also capable of dealing with heat treatment of a heated object of comparatively large heat capacity, and a heating method.SOLUTION: The present invention relates to a heating device 1 comprising a heating space 14, for storing a heated object therein, which is defined at least partially by a heating body including heat generation means. The heating space 14 comprises a heating gas supply section 40 including a first opening 14a and a second opening 14b which is opposed thereto, and supplying a heating gas HGS in one direction from the side of the second opening 14b toward the first opening 14a. The heating space 14 is defined in such a manner that a plurality of heating spaces are stacked in a vertical direction, by a plurality of heating wall bodies 10 each including the heat generation means and disposed oppositely while being separated from each other, and a plurality of metallic heat conducting members 12 which are disposed in opposed regions of the plurality of heating wall bodies 10 while being separated from each other in a vertical direction, and conducting heat from the heating wall bodies 10.SELECTED DRAWING: Figure 2

Description

The present invention relates to a heating device and a heating method.

Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the degree of cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. Disclosed is a heating furnace in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber.

Patent Document 3 includes a heating wall body erected facing each other, and a plurality of heat conductive members arranged in a shelf shape and heated by conduction heat from the heating wall body, which are arranged in a shelf shape. Each space between the heat conductive members is used as a heating space to accommodate the glass substrate to be heated, and heat treatment is performed by heat radiated from the upper and lower heat conductive members. Since each heating space is partitioned, the uniformity of the temperature distribution is excellent, and the heat accumulation phenomenon in the upper space due to the rise of hot air does not occur. Moreover, since the heated air is not sprayed, a clean heat treatment is realized.

Further, in Patent Document 4, in the heating device of Patent Document 3, a pair of heat transfer walls that are in close contact with the inside of the pair of heating walls are provided, and heat conduction members are arranged in a shelf shape between the heat transfer walls. Disclosed is a heating device that has been arranged to improve temperature uniformity.

In Patent Document 5, in order to solve the problem that the temperature of the upper heating space is still higher than that of the lower heating space even in the partition structure of Patent Document 3, the arrangement interval of the electric heaters in the heating wall is for heating. By making it larger at the upper part than the lower part of the wall body, the amount of heat generated at the lower part than the upper part is increased. In addition, a heat insulating portion is provided in the middle of the heating wall to prevent heat from being conducted upward.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2013-200077 Japanese Unexamined Patent Publication No. 2005-352306 Japanese Unexamined Patent Publication No. 2005-055152

As described above, Patent Documents 3 to 5 disclose a heating device in which an object to be heated is arranged and heated in a heating space provided in multiple stages. Regarding the temperature distribution in the horizontal direction of each of the heating spaces, the temperature tends to decrease in the peripheral portion than in the central portion because the heat easily escapes to the outside.
Further, in a heating device as disclosed in Patent Documents 3 to 5, when the heat capacity of the object to be heated is relatively large, it takes a long time to heat to a required temperature.

An object to be solved by the present invention is to provide a heating device and a heating method which are excellent in the uniformity of temperature distribution and the stability of cleanliness and can be used for heat treatment of an object to be heated having a relatively large heat capacity. It is in.

The heating device of the present invention is a heating device having a heating space for accommodating an object to be heated, which is at least partially defined by a heating body provided with heat generating means.
The heating space has a first opening and a second opening facing the first opening.
It has a heating gas supply unit that supplies heating gas in one direction from the side of the second opening toward the first opening.

The heating space is provided with a plurality of heating walls that are provided with heat generating means and are arranged to face each other at a distance, and the heating spaces are arranged at a distance in the vertical direction in a facing region of the plurality of heating walls. It is possible to adopt a configuration in which a plurality of heat conductive members made of metal for conducting heat from the wall body are defined so as to be stacked in the vertical direction.

Alternatively, a configuration can be used in which the heating space is defined by opposing heating surfaces of a plurality of heating plates, each provided with heating means and spaced vertically spaced apart.

Preferably, the heating gas supply unit can adopt a configuration having a plate facing the first opening and a plurality of supply holes formed in the plate.

Alternatively, the heating gas supply unit may adopt a configuration in which the region for supplying the heating gas is unevenly distributed with respect to the second opening.

The heating method of the present invention is a heating method in a heating device having a heating space for accommodating an object to be heated, which is at least partially defined by a heating body provided with heat generating means.
The heating space has a first opening and a second opening facing the first opening.
While heating the object to be heated accommodated in the heating space by the heat from the heat generating means, the heating gas is supplied in one direction from the side of the second opening toward the first opening. It is characterized by heating the object to be heated.

According to the present invention, high temperature distribution uniformity and stability of cleanliness can be obtained, heat treatment of an object to be heated having a relatively large heat capacity can be supported, and the time required for heat treatment can be shortened.

The front view which shows the heating apparatus which concerns on one Embodiment of this invention. It is a right side view of the heating apparatus shown in FIG. It is an external perspective view of a heating gas supply part. It is a cross-sectional view of a heating gas supply part. Front view of the ejection plate of the heating gas supply section. Front view of other ejection plates. Front view of yet another ejection plate. Front view of yet another ejection plate. The front view which shows the heating apparatus which concerns on other embodiment of this invention. FIG. 6 is a vertical sectional view of the heating device of FIG.

Hereinafter, the heating device 1 according to the embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the heating device 1 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance from each other, and a plurality of coils as heat generating means provided on the heating wall body 10. The shape heater 11, a plurality of heat conductive members 12 arranged at a distance in the vertical direction (A1-A2 direction) in the facing regions of the plurality of heating walls 10, and heat conductive members 12 adjacent to each other in the vertical direction. It is provided with a heating space 14 of the object to be heated 13 provided between them, and a heating gas supply unit 40.

The upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.
The heating wall 10 is made of stainless steel and is a structural member forming the partition walls on both side surfaces and the center of the box-shaped main heating device 1, and is also a member that serves as a heat source for the heating device. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each heating wall 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24.
The coil-shaped heater 11 has a structure in which a heating wire wound in a coil shape is housed inside a metal tube (sheath). The heating wire wound in a coil shape is insulated by an insulating layer made of powdered magnesium oxide.

As shown in FIG. 1, each heating wall body 10 is provided with another plurality of through holes 25 in the horizontal direction from the front side, and a temperature sensor 15 is inserted therein. The calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the calorific value is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coil heater 11, the heating wall 10 can be used. Achieves temperature uniformity.

The heat conductive member 12 is a member arranged in the facing region of the heating wall 10 at a distance in the vertical direction to conduct heat from the heating wall 10. In the present embodiment, they are fitted into grooves formed in the heating wall bodies 10 on both sides and arranged in a shelf shape. Each heat conductive member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiation function can be obtained.

Each heating space 14 is defined by the heating walls 10 on both sides and the upper and lower heat conductive members 12, and the front side opening 14a as the first opening and the back side opening 14b as the second opening. It is a space having and. The heated object 13 is housed in the heating space 14, and the heated object 13 is generated by the heat from the heating wall 10, the heat from the upper and lower heat conductive members 12, and the heating gas from the heating gas supply unit 40. It is designed to be heat-treated.

In the heating wall body 10, a groove 10t extending in the depth direction of the heating space 14 is formed at a position corresponding to each other on the wall surface on the side facing each heating space 14, and the lower inner surface of the groove 10t is formed. It is a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object to be heated 13. Using a predetermined transport device, the object to be heated 13 can be carried in so that both ends in the left-right direction thereof enter each groove 10t and placed on the support surface. When both side edges of the object to be heated 13 are thermally opened, the temperature of the object to be heated 13 tends to be non-uniform at both edges. Therefore, the temperature of the object to be heated 13 is made uniform by directly transferring heat to both side edges of the object to be heated 13 through the support surface of the groove 10t. In the present embodiment, the object to be heated 13 has a flat plate shape, but various forms can be adopted without limitation.

Between the two heat conductive members 12 at the top and between the two heat conductive members 12 at the bottom, there is an empty space in which the object to be heated 13 is not introduced, and a heat insulating space for forming an air heat insulating layer. It is 20T and 20B.

The gantry unit 30 is arranged on the floor on which the heating device 1 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 1 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.

As shown in FIG. 2, each of the heating gas supply units 40 is provided so as to close the corresponding back side opening 14b. The heating gas HGS is supplied in one direction from the heating gas supply unit 40 toward the front side opening 14a, and the heating gas HGS flows out from the front side opening 14a to the outside of the heating space 14 through the heating space 14. The heating gas HGS flowing in one direction through the heating space 14 is supplied by heating the gas GS supplied to the heating gas supply unit 40 in the heating gas supply unit 40. Air is used as the gas GS, but the heating gas HGS can be replaced with an inert gas or a specific gas. It is possible to heat the object to be heated 13 while preventing oxidation by the heated inert gas. Further, by using the specific gas, it is possible to heat the object to be heated 12 while applying the surface treatment by utilizing the reaction between the specific gas and the object to be heated 13.

When the heating device 1 is used, each heated object 13 is carried into each heating space 14 through the front side opening 14a of each heating space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
By a temperature controlling means (not shown), the calorific value of the plurality of coiled heaters 11 is controlled individually or independently for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.
Since each heating wall 10 is heated to a target temperature and each heat conductive member 12 is also heated to the same temperature as the heating wall 10, the temperature uniformity between the heating spaces 14 is high.
In addition to heating the coiled heater 11, the object to be heated 13 is heated by the heating gas HGS supplied from the heating gas supply unit 40.

Here, the structure of the heating gas supply unit 40 will be described with reference to FIGS. 3 and 4.
In FIGS. 3 and 4, 41 is an ejection plate, 42 is an internal plate, 43 is a back plate, 44 is a plate heater, 45 is a back plate, and 46 is an air supply pipe.
As shown in FIG. 4, a closed space CH2 is formed between the ejection plate 41 and the inner plate 42, and a closed space CH1 is formed between the inner plate 42 and the back plate 43.
The plate heater 44 is provided on the back surface of the back plate 43 and is held between the back plate 45 and the back plate 43. The plate heater 44 is fed through an electric wiring (not shown) to generate heat, and heats the ejection plate 41, the internal plate 42, and the back plate 43.
A plurality of ejection holes 41p are formed in the ejection plate 41.
A plurality of through holes 42p are formed in the inner plate 42, and these through holes 42p are formed at positions different from the ejection holes 41p of the ejection plate 41.
The air supply pipe 46 penetrates the back plate 43, the plate heater 44, and the back plate 45, and the tip portion communicates with the closed space CH1. The air supply pipe 46 is connected to a gas supply pipe (not shown), receives a gas GS such as air, and discharges the gas GS to the closed space CH1.

In the heating gas supply unit 40, the gas GS supplied from the outside is introduced into the closed space CH1 through the air supply pipe 46 and heated by the plate heater 44. Therefore, impurities are not mixed into the gas GS from the plate heater 44. Further, the gas GS heated in the closed space CH1 is diffused in the closed space CH1, then passes through the plurality of through holes 42p of the inner plate 42 and flows into the closed space CH2, and then flows into the closed space CH2. After being diffused again in the inside, it is discharged from a plurality of ejection holes 41p formed in the ejection plate 41. Therefore, the heated heating gas HGS can be blown out to the corresponding heating space 14.

The object to be heated 13 accommodated in each heating space 14 is heated by the heat supplied from the coiled heater 11 and is heated by the heating gas HGS from the heating gas supply unit 40. The flow rate of the heated gas HGS can be adjusted so that it becomes a very weak laminar flow that does not wind up the particles.
As shown in FIG. 5A, the plurality of ejection holes 41p formed in the ejection plate 41 are arranged entirely and evenly with respect to the rectangular back surface side opening 14b.
In order to heat the object to be heated 13 to the target temperature, the temperature of the coiled heater 11 may be controlled and the temperature of the heating gas HGS may be controlled.

Until the object to be heated 13 reaches the target temperature, the heating time is shortened by using both the coiled heater 11 and the heating gas HGS, and after the object to be heated 13 reaches the target temperature, the heating gas HGS It is also possible to cut off the supply.

Various methods for distributing the heating gas HGS can be considered.
For example, as in the ejection plate 41B shown in FIG. 5B, a plurality of ejection holes 41p can be provided only in the upper region of the back surface side opening 14b. With such a configuration, the gas accumulated in the ceiling region of the heating space 14 can be discharged to the outside through the front side opening 14a.
Similarly, as in the ejection plate 41C shown in FIG. 5C, a plurality of ejection holes 41p can be provided only in the lower region of the back opening 14b.
Further, as in the ejection plate 41D shown in FIG. 5D, it is possible to unevenly distribute a plurality of ejection holes 41p only in the left and right portions of the back surface side opening 14b.
In short, various methods of flowing the heated gas HGS can be adopted depending on the conditions such as the form and capacity of the object to be heated 13.
Further, in the present embodiment, the gas GS is heated by using the plate heater 44 so that the heating gas HGS flows through the heating space 14, but the present invention is not limited to this, and the heating gas is preheated. It is also possible to directly supply the HGS to the heating space 14 by using the ejection plate 41 or the like.

The above-mentioned heating device 1 exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 1.
The heat generating means is not limited to the coiled heater, and may be other heaters or heat pipes. These may be arranged so as to extend upward, and the arrangement interval in the depth direction may be small at both ends and large at the center. ..
Further, in the present embodiment, in each heating wall body 10, the calorific value of the coiled heater 11 located in each portion is independently controlled so that the detected temperature of each temperature sensor 15 becomes the target temperature. However, when the target temperature uniformity is loose, the calorific value of the coiled heater 11 may be controlled in the zone, or the calorific value of all the coiled heaters may be controlled collectively.

Further, in the present embodiment, an opening / closing door may be provided in the front opening 14a of each heating space 14 of the object to be heated while forming a gap so that the heating gas HGS flows out.

Further, in the heating device 1, the heating wall 10, the top plate 16, and the bottom plate 17 are made of stainless steel, and the heat conductive member 12 is made of an aluminum plate whose surface is plated with black. However, the material is not limited to these materials, and the heating wall bodies 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy having a matte surface treatment to suppress the dissipation of radiant heat). ) Can also be formed. Further, the surface treatment of the heat conductive member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.

6 and 7 show examples of other heating devices of the present invention.
The heating device 100 has a plurality of rectangular heating plates 110 arranged at equal intervals in the vertical direction, and accommodates a plate-shaped or sheet-shaped heated object 120 defined by facing heating plates 110, 110. Has a heating space 130 for the purpose. In addition, it has a temperature control device 160 for controlling the temperature of each heating plate 110. The heating plates 110 are arranged at equal intervals in the vertical direction, but the present invention is not limited to this, and the heating plates 110 may not be at equal intervals.

FIG. 6 shows the front surface of the heating device 1. In the plurality of heating plates 110, the left and right ends on the front side thereof are supported by a pair of left and right support plates 150L and 150R, and the left and right ends on the back side thereof are also supported. Similarly, it is supported by a pair of left and right support plates 150L and 150R. The pair of support plates 150L and 150R on the front side and the back side are arranged so as to face each other, and a plurality of rectangular grooves having a rectangular cross section are arranged at equal intervals in the vertical direction on the facing surfaces thereof (height of the heating space 130). It is formed in the horizontal direction. The left and right ends of the front side and the back side of the heating plate 110 are fitted into these plurality of grooves, respectively, and the respective heating plates 110 are positioned in the vertical direction. The object to be heated 120 housed in the heating space 130 is heated by the upper and lower heating plates 110.

The front side and the back side of the heating space 130 have openings 131 and 132, and both side surfaces of the heating space 130 are also open between the support plates 150L and 150L and between the support plates 150R and 150R. That is, the heating space 130 is open on all sides.
By providing an opening in each heating space 130, the heat treatment step by the heating device 100 can be continuously connected to other steps.

The opening 132 on the back side of the heating space 130 is provided with a heating gas supply unit 140 so as to close the opening 132.
The heating gas supply unit 140 has a structure similar to that of the heating gas supply unit 40 of the above-described embodiment, and includes a plurality of ejection holes 141p for outputting the heating gas HGS toward the front opening 131.

1: Heating device 10: Wall body for heating (heating body)
10t: Groove 11: Coiled heater 12: Heat conductive member 13: Heated object 14: Heating space 14a: Front side opening 14b: Back side opening 15: Temperature sensor 16: Top plate 17: Bottom plate 20B, 20T: Insulation Spaces 24, 25: Through holes 30: Mount unit 40: Heating gas supply unit 41: Ejection plate 41p: Ejection holes 42: Internal plate 42p: Through holes 43: Back plate 44: Plate heater 45: Back plate 46: Air supply pipe 100 : Heating device 110: Heating plate (heating body)
120: Heated object 130: Heating space 131: Front side opening 132: Opening 160: Temperature control device 140: Heating gas supply unit 141p: Ejection holes 150L, 150R: Support plates CH1, CH2: Closed space GS: Gas HGS : Heating gas

Claims (6)

A heating device having a heating space for accommodating an object to be heated, at least partially defined by a heating body provided with heat generating means.
The heating space has a first opening and a second opening facing the first opening.
A heating device further comprising a heating gas supply unit that supplies heating gas in one direction from the side of the second opening toward the first opening. The heating space is provided with a plurality of heating walls that are provided with heat generating means and are arranged to face each other at a distance, and the heating spaces are arranged at a distance in the vertical direction in a facing region of the plurality of heating walls. The heating device according to claim 1, wherein a plurality of heat conductive members made of metal for conducting heat from the wall body are defined so as to be stacked in the vertical direction. The heating device according to claim 1, wherein the heating space is defined by facing heating surfaces of a plurality of heating plates each provided with heat generating means and arranged at intervals in the vertical direction. The heating device according to any one of claims 1 to 3, wherein the heating gas supply unit has an ejection plate facing the first opening and having a plurality of ejection holes formed therein. The heating device according to any one of claims 1 to 3, wherein the heating fluid supply unit has a region for supplying the heating gas unevenly distributed with respect to the second opening. A heating method in a heating device having a heating space for accommodating an object to be heated whose at least a part is defined by a heating body provided with a heat generating means.
The heating space has a first opening and a second opening facing the first opening.
While heating the object to be heated accommodated in the heating space by the heat from the heat generating means, the heating gas is supplied in one direction from the side of the second opening toward the first opening. A heating method that heats an object to be heated.

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