JP2005352306A - Heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heating device excellent in uniform temperature distribution and in stability of cleanliness. <P>SOLUTION: The heating device 1 comprises: a plurality of heating walls 4, 5 vertically arranged to oppose each other with a clearance inside a space 3 surrounded by a heat insulating material 2a constituting a rectangular parallelepiped box shaped heater 2; a plurality of hole sections 6 horizontally provided in the heating walls 4, 5; electric heaters 7 removably inserted into the hole sections 6; a plurality of heat transfer walls 8, 9 arranged with a clearance between the heating walls 4, 5; a plurality of platelike heat radiating members 10 arranged like shelves between the heat transfer walls 8, 9; and housing spaces 12 provided between the heat radiating members 10 adjacent in vertical direction for housing an object to be heated 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a heating apparatus used for heat treatment of a glass substrate, a semiconductor lead frame, or other metal plate which is a constituent member of a liquid crystal display panel, a plasma display panel, or the like.

  As a device for heat-treating a glass substrate which is a constituent member such as a liquid crystal display panel, a heated gas circulation type clean oven has been conventionally used (for example, see Patent Document 1). This clean oven accommodates an object to be heat treated such as a glass substrate in a thermostat and heat-treats the object to be heated using a heated gas circulated by a fan in the thermostat.

  However, in the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates a heated object such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the cleanliness will deteriorate due to the stirring of the heated gas. When the object to be heated is relatively light, the object to be heated may move from a predetermined position by circulating convection of the heated gas.

  Therefore, a number of shelves comprising a far-infrared panel heater of a double-sided heating type in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-radiating plate having a heating element inside, and far-infrared radiation is emitted from both sides by heating the heat-radiating plate. A heating furnace has been developed in which a plurality of heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space portion formed between the shelf heaters is a drying chamber (see, for example, Patent Documents). 2).

JP 2001-56141 A (page 2-5) JP 2001-317872 A (page 3-9)

  In the case of the heating furnace described in Patent Document 2, a large number of shelf heaters composed of double-sided heating type far-infrared panel heaters are arranged. Therefore, each space portion formed between these shelf heaters (drying) It is excellent in that the chamber can be efficiently heated.

  However, in this heating furnace, heat generated from a large number of shelf heaters arranged in the vertical direction tends to rise in the heating furnace and collect in a region near the top wall in the furnace. The temperature in the upper region is higher than the temperature in the lower region in the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region in the furnace and the lower region in the furnace.

  The problem to be solved by the present invention is to provide a heating device having excellent temperature distribution uniformity and cleanliness stability.

  The heating device according to the present invention includes a plurality of heating walls disposed opposite to each other in a space surrounded by a heat insulating material, heating means provided on the heating wall, and a space between the heating walls. Between a plurality of heat transfer walls disposed at a distance from each other, a plurality of heat radiation members disposed in a shelf shape between the heat transfer wall bodies, and a heat radiation member adjacent in the vertical direction. And an accommodation space for the object to be heated.

  With such a configuration, the plurality of objects to be heated existing in the space surrounded by the heat insulating material are respectively provided with heating walls and heat transfer walls on the left and right sides, and heat radiation on the top and bottom. The member is arranged. Therefore, in each housing space, the heat radiated from the left and right heating walls and the heat transfer wall raised by the heat of the heat generating means, and a plurality of heats via these heat transfer walls It reaches the radiating member and is heated by the heat radiated up and down from the heat radiating member. For this reason, the inside of each accommodation space will be heated uniformly, and it will become the thing excellent in the uniformity of temperature distribution.

  The heating means is provided only on the heating wall, and each storage space is partitioned by the heat transfer wall located on the left and right of each, and the heat radiating member located on the top and bottom. Not only is the temperature distribution even in the housing space, the heat distribution phenomenon in the upper space due to the rise of hot air and the overheating phenomenon do not occur. Further, since the heated gas is not stirred or circulated by the fan, the stability of the cleanliness is excellent, and the heated object is not moved by the gas flow. Further, since the accommodation space is arranged in the space surrounded by the heat insulating material, heat dissipation is small and energy saving can be achieved.

  Here, it is desirable to provide a plurality of gas flow paths for supplying an inert gas into the accommodation space in the heating wall body and the heat transfer wall body. With such a configuration, the inert gas heated by passing through the plurality of gas flow paths provided in the heating wall body and the heat transfer wall body is supplied into each housing space, and the interior thereof Therefore, the uneven distribution of heat in each accommodation space can be eliminated, the uniformity of temperature distribution can be further improved, and oxidation of the object to be heated can be prevented. Further, it is not necessary to separately provide a means for heating the inert gas.

  On the other hand, it is desirable to arrange the heating wall and the heat transfer wall in close contact with each other. With such a configuration, the heat transfer from the heating wall body to the heat transfer wall body is performed quickly and reliably, so that the thermal efficiency is improved. Further, since the inert gas is supplied into the accommodation space, the gas flow paths formed in the heating wall body and the heat transfer wall body can be minimized, so that the inert gas can be supplied smoothly.

  In addition, it is desirable to provide a concave gas diffusion region communicating with the gas flow path on at least one of the contact surfaces of the heating wall and the heat transfer wall. With such a configuration, the plurality of gas flow paths provided in the heating wall body and the plurality of gas flow paths provided in the heat transfer wall body communicate with each other through this gas diffusion region. Therefore, the inert gas supplied from the outside passes through the gas flow path of the heating wall body, flows into the gas diffusion region, diffuses therein, and after being sufficiently mixed, It passes through the gas flow path of the wall body and flows into each accommodation space. For this reason, the temperature of the inert gas flowing into each accommodation space is made uniform, and the uniformity of the temperature distribution is further improved.

  Further, since the inert gas is diffused and mixed in the gas diffusion region existing between the heating wall and the heat transfer wall, heat from the heating wall to the heat transfer wall is obtained. Since the temperature distribution of the heat transfer wall itself is made uniform, the uniformity of the temperature distribution for each accommodation space is further improved. In addition, since an equal internal pressure is generated in the entire inert gas flowing into the gas diffusion region, the inert gas is evenly distributed from the plurality of gas flow paths of the heat transfer wall communicating with the gas diffusion region toward the respective accommodation spaces. The temperature difference between the storage spaces due to the change in the gas flow rate is less likely to occur.

  Furthermore, it is desirable that the heat transfer wall can be inserted and removed between the heating walls in a state where the heat transfer wall is integrated with the heat radiation member. With such a configuration, since the heat transfer wall and the heat radiation member can be attached to and detached from the heating wall, it is necessary to change the size of the accommodation space by changing the size of the object to be heated. In this case, it is possible to cope by replacing only the heat transfer wall and the heat radiation member accordingly, so that the heating wall can be shared and the equipment can be rationalized.

  According to the present invention, the following effects can be obtained.

(1) A plurality of heating walls disposed opposite to each other in a space surrounded by a heat insulating material, heating means provided on the heating walls, and the heating walls are spaced apart. A plurality of heat transfer wall bodies arranged in a row, a plurality of heat radiating members arranged in a shelf shape between the heat transfer wall bodies, and an object to be heated provided between the heat radiating members adjacent in the vertical direction Provided with the storage space, it becomes excellent in uniformity of temperature distribution and stability of cleanliness.

(2) If a plurality of gas flow paths for supplying an inert gas into the accommodation space are provided in the heating wall and the heat transfer wall, the uneven distribution of heat in each accommodation space can be eliminated, The uniformity of temperature distribution is further improved.

(3) If the heating wall body and the heat transfer wall body are arranged in close contact with each other, the thermal efficiency is improved and the inert gas is supplied smoothly.

(4) If a concave gas diffusion region communicating with the gas flow path is provided on at least one of the contact surfaces of the heating wall and the heat transfer wall, the temperature of the inert gas flowing into each accommodation space The temperature distribution of the heat transfer wall itself is further uniformed, further improving the uniformity of the temperature distribution for each storage space and changing the gas flow rate. It is possible to suppress the temperature difference due to the.

(5) If the heat transfer wall body is integrated with the heat radiating member so that it can be taken in and out between the heating wall bodies, if it is necessary to change the size of the housing space, heat transfer is performed accordingly. Since only the wall for heat and the heat radiating member can be replaced, the heating wall can be shared and the equipment can be rationalized.

  Hereinafter, a heating apparatus according to an embodiment of the present invention will be described with reference to the drawings. 1 is a partially omitted front view showing a state in which a heating apparatus according to an embodiment of the present invention is accommodated in a heat insulating container, FIG. 2 is a partially omitted perspective view of the heating apparatus shown in FIG. 1, and FIG. 2 is a partially omitted perspective view of the heating device shown in FIG.

  FIG. 1 shows a state in which an opening / closing door (not shown) in the front of a heating furnace 2 incorporating a heating device 1 of the present embodiment is removed. As shown in the figure, the heating device 1 includes a plurality of heating devices arranged vertically opposite to each other at a distance in a space 3 surrounded by a heat insulating material 2a constituting a heating furnace 2 having a rectangular parallelepiped box shape. Wall bodies 4, 5, a plurality of holes 6 provided in the heating wall bodies 4, 5 in the horizontal direction, and an electric heater 7, which is a heating means detachably inserted into these holes 6 And a plurality of heat transfer wall bodies 8 and 9 arranged at a distance between the heating wall bodies 4 and 5, and a flat plate shape arranged in a shelf shape between the heat transfer wall bodies 8 and 9 In order to accommodate the object to be heated 11, a plurality of heat radiating members 10 that have been subjected to the above operation and a storage space 12 provided between the heat radiating members 10 adjacent in the vertical direction are provided.

  The heat insulating material 2a has a structure in which glass wool is sandwiched between stainless steel plates, and the heating wall bodies 4 and 5 and the heat transfer wall bodies 8 and 9 are made of stainless steel. The heat radiation member 10 is formed of an aluminum plate having a surface plated with black. A gate-shaped heating unit 20 is formed by connecting the upper surfaces of the heating walls 4 and 5 with the top plate 13, and leg members 14 are attached to the lower surfaces of the heating walls 4 and 5, respectively. The top plate 13 and the leg member 14 are made of stainless steel made of the same material as the heating wall bodies 4 and 5.

  As shown in FIGS. 1 and 2, the heating wall body 4 and the heat transfer wall body 8, and the heating wall body 5 and the heat transfer wall body 9 are arranged in close contact with each other. As shown in FIG. 4, the housing 30 is formed by integrating the heat transfer walls 8 and 9 and the heat radiating member 10, and the housing 30 is the heating wall 4 constituting the heating unit 20. , 5 can be taken in and out. The accommodating portion 30 shelves the heat radiation members 10 along the plurality of locking grooves 18 and 19 formed in the horizontal direction on the opposing surfaces of the plurality of heat transfer walls 8 and 9 arranged facing each other. The heat transfer walls 8 and 9 are fixed to each other with a bolt (not shown) inserted from the outer surface of the heat transfer walls 8 and 9 toward the heat radiation member 10.

  Further, in the heat transfer walls 8 and 9, holding grooves 28 and 29 for detachably holding the object to be heated 11 are provided between the locking grooves 18 and 19 adjacent in the vertical direction. , 19 is formed in parallel. And the latching | locking part 15 which has the bolt hole 15a of a horizontal direction protrudes in the vicinity of the upper-lower end of the front of the heat transfer wall bodies 8 and 9, and these wall latches 4 and 5 are these latching. A recess 16 that can be engaged with the member 15 is formed, and a female screw hole 16 a is formed inside the recess 16.

  The housing portion 30 in which the heat transfer wall bodies 8 and 9 and the heat radiation member 10 are integrated is inserted between the heating wall bodies 4 and 5 constituting the heating portion 20, and there are four locations. The stoppers 15 can be engaged with the recesses 16, respectively, the bolts 17 can be inserted into the bolt holes 15a, and screwed into the female screw holes 16a, so that the state shown in FIGS. As shown in FIG. 3, the accommodating portion 30 can be put in and out between the heating walls 4 and 5 constituting the heating portion 20 even when the object to be heated 11 is accommodated in each accommodating space 12. it can.

  Next, based on FIGS. 4-7, the structure, function, etc. of the accommodating part 30 which consists of the heat-transfer wall bodies 8 and 9 and the heat radiation member 10 are demonstrated. 4 is a perspective view showing a housing portion constituting the heating device shown in FIG. 1, FIG. 5 is a side view of the heat transfer wall shown in FIG. 4, FIG. 6 is a cross-sectional view taken along line AA in FIG. FIG. 6 is a sectional view taken along line BB in FIG. 5.

  As shown in FIGS. 4 to 7, in the accommodating portion 30, the accommodating spaces 12 are formed between the heat radiating members 10 adjacent to each other in the vertical direction, and the heat transfer wall bodies 8 positioned on the left and right sides of the accommodating space 12. , 9 are formed with holding grooves 28, 29 in the horizontal direction. As shown in FIGS. 6 and 7, insertion and removal work of the object to be heated 11 (not shown) is performed in the vicinity of one end of the holding grooves 28 and 29 (the back portion of the housing portion 30). In order to facilitate, slope portions 28a and 29a and widened portions 28b and 29b are formed.

  In addition, in the heat transfer wall bodies 8 and 9, the heat transfer wall bodies 8 and 9 are thickened at portions located between the locking grooves 18 and 19 and the holding grooves 28 and 29 adjacent in the vertical direction. A plurality of gas flow paths 38, 39 penetrating in the direction are opened. These gas flow paths 38 and 39 are arranged at regular intervals along the horizontal direction. As will be described later, these gas flow paths 38 and 39 are for feeding an inert gas supplied from the outside into the plurality of storage spaces 12 during the heat treatment.

  Next, the structure and function of the heating unit 20 will be described with reference to FIGS. 8 is a front view showing the heating unit constituting the heating device shown in FIG. 1, FIG. 9 is a side view of the heating unit shown in FIG. 8, FIG. 10 is a cross-sectional view taken along the line CC in FIG. It is a DD sectional view taken on the line.

  As shown in FIGS. 8 to 11, in the heating unit 20, a plurality of gas flow paths 34 and 35 penetrating in the thickness direction are formed in the opposing heating wall bodies 4 and 5, and heating is performed. Concave gas diffusion regions 24 and 25 communicating with the gas flow paths 34 and 35 are formed on the opposing surfaces of the wall bodies 4 and 5, respectively. As shown in FIGS. 9 and 10, the plurality of gas flow paths 34 and 35 are arranged at regular intervals along the diagonal lines of the heating wall bodies 4 and 5 having a quadrangular side shape. As will be described later, these gas flow paths 34 and 35 are for feeding an inert gas supplied from the outside into the gas diffusion regions 24 and 25 during the heat treatment.

  When the accommodating portion 30 shown in FIG. 4 or the like is inserted into the heating portion 20 shown in FIG. 8, the heating device 1 as shown in FIG. 2 is formed, and the vertical sectional view of the heating device 1 is as shown in FIG. Become. That is, as shown in FIG. 12, the gas diffusion regions 24 and 25 respectively communicating with the gas flow paths 34 and 35 provided in the heating walls 4 and 5 are covered with the heat transfer walls 8 and 9, respectively. As a result, the gas flow paths 38 and 39 communicate with each other. Therefore, the inert gas supplied from the outside to the gas flow paths 34 and 35 flows into the gas diffusion regions 24 and 25, and flows and diffuses in the gas diffusion regions 24 and 25, respectively. , 9 passes through the gas flow paths 38, 39 and flows into the accommodating space 12.

  As described above, in the heating device 1, in the storage spaces 12 for the plurality of objects to be heated 11 existing in the space 3 surrounded by the heat insulating material 2 a constituting the heating furnace 2, heating walls are provided on the left and right of each. The bodies 4 and 5 and the heat transfer walls 8 and 9 are arranged, and the heat radiation member 10 is arranged above and below. Therefore, in each storage space 12, the left and right heating walls 4, 5 and the heat transfer walls 8, 9 raised by the heat of the heating means (electric heater 7), and these heat transfer walls The heat radiating members 10 reach the plurality of heat radiating members 10 via 8 and 9 and are heated by the heat radiated up and down from the heat radiating members 10. For this reason, the inside of each accommodation space 12 will be heated uniformly, and it is excellent in the uniformity of temperature distribution.

  The electric heater 7 which is a heat generating means is provided only on the heating walls 4 and 5, and each storage space 12 is positioned on the left and right of the heat transfer walls 8 and 9 and above and below. Therefore, the temperature distribution in each housing space 12 is excellent, and the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not stirred or circulated by the fan, the stability of the cleanliness is excellent, and the heated object is not moved by the gas flow. Moreover, since the heating device 1 incorporating the accommodation space 12 is arranged in the space 3 surrounded by the heat insulating material 2a, there is little heat dissipation and energy saving can be achieved.

  Further, since the plurality of gas flow paths 34, 35, 38, 39 for supplying the inert gas into the accommodation space 12 are provided in the heating wall bodies 4, 5 and the heat transfer wall bodies 8, 9, Since the inert gas heated by passing through these gas flow paths 34, 35, 38, 39 is supplied into each storage space 12 and circulates in each storage space 12, The uneven distribution of heat can be eliminated, which is effective in improving the uniformity of the temperature distribution.

  On the other hand, in the heating apparatus 1, the heating wall body 4 and the heat transfer wall body 8, and the heating wall body 5 and the heat transfer wall body 9 are disposed in close contact with each other, so that the heating wall body 4 is arranged. , 5 to the heat transfer wall bodies 8, 9 can be performed quickly and reliably, and the thermal efficiency can be increased. Further, the gas flow paths 34, 35, 38, 39 formed in the heating wall bodies 4, 5 and the heat transfer wall bodies 8, 9 for supplying the inert gas into the accommodation space 12 can be minimized. As a result, the inert gas can be supplied smoothly.

  Further, since the heating wall bodies 4 and 5 are provided with the concave gas diffusion regions 24 and 25 communicating with the gas flow paths 34 and 35, respectively, a plurality of gases provided in the heating wall bodies 4 and 5 are provided. The flow paths 34 and 35 and the plurality of gas flow paths 38 and 39 provided in the heat transfer walls 8 and 9 are in communication with each other through the gas diffusion regions 24 and 25. Therefore, the inert gas supplied from the outside passes through the gas flow paths 34 and 35 of the heating walls 4 and 5 and flows into the gas diffusion regions 24 and 25, respectively, and flows and diffuses therein. After being sufficiently mixed, the gas passes through the gas flow paths 38 and 39 of the heat transfer walls 8 and 9 and flows into the respective accommodation spaces 12. For this reason, the temperature of the inert gas flowing into each accommodation space 12 is made uniform, and the uniformity of the temperature distribution can be further improved.

  Further, since the inert gas is diffused and mixed in the gas diffusion regions 24, 25 existing between the heating walls 4, 5 and the heat transfer walls 8, 9, the heating wall The heat transfer from 4 and 5 to the heat transfer walls 8 and 9 is performed uniformly. For this reason, the temperature distribution of the heat transfer walls 8 and 9 itself is made uniform, which is effective in improving the uniformity of the temperature distribution in each storage space 12. Further, since an equal internal pressure is generated in the entire inert gas flowing into the gas diffusion regions 24, 25, a plurality of gas flow paths 38, 8 of the heat transfer walls 8, 9 communicating with the gas diffusion regions 24, 25, respectively. The inert gas can flow out uniformly from 39 to each accommodation space 12, and the temperature difference of each accommodation space 12 resulting from the change of the gas flow rate supplied from the outside does not easily arise.

  Further, in the heating device 1, since the accommodating portion 30 can be taken in and out of the heating portion 20, the heat transfer wall bodies 8 and 9 and the heat radiation member 10 can be attached to and detached from the heating wall bodies 4 and 5. It is. Therefore, when it is necessary to change the size of the accommodation space 12 by changing the size of the article 11 to be heated, it is possible to cope with it by replacing only the heat transfer walls 8 and 9 and the heat radiation member 10 accordingly. . For this reason, the heating wall bodies 4 and 5 can be shared, and rationalization of equipment can be achieved.

  Next, a heating apparatus which is another embodiment of the present invention will be described with reference to FIG. FIG. 13 is a front view showing a heating device according to another embodiment. In addition, the part which attached | subjected the code | symbol same as the code | symbol as described in FIGS. 1-12 in FIG. 13 is a part which exhibits the same function and effect as the component part of the heating apparatus 1 which attached | subjected the code | symbol, Omitted.

  As shown in FIG. 13, in the heating device 40, the heating wall bodies 4 are connected to each other in the vertical direction and arranged at three places on the left and right sides, and a plurality of accommodating portions 30 can be inserted and removed between these heating wall bodies 4. Is arranged. With such a configuration, a large number of objects to be heat-treated can be processed in one heat treatment step, so that work efficiency is greatly improved.

  The heating device of the present invention can be widely used in heat treatment of glass substrates, semiconductor lead frames, and other metal plates, which are constituent members of liquid crystal display panels and plasma display panels.

It is a partially-omission front view which shows the state by which the heating apparatus which is embodiment of this invention was incorporated in the heating furnace. It is a partially-omission perspective view of the heating apparatus shown in FIG. It is a partially-omission perspective view of the heating apparatus shown in FIG. It is a perspective view which shows the accommodating part which comprises the heating apparatus shown in FIG. It is a side view of the wall body for heat transfer shown in FIG. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is a front view which shows the heating part which comprises the heating apparatus shown in FIG. It is a side view of the heating part shown in FIG. It is CC sectional view taken on the line in FIG. It is the DD sectional view taken on the line in FIG. It is a vertical sectional view of the heating apparatus shown in FIG. It is a front view which shows the heating apparatus which is other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,40 Heating device 2 Heating furnace 2a Heat insulating material 3 Space 4, 5 Heating wall 6 Hole 7 Electric heater 8, 9 Heat transfer wall 10 Heat radiation member 11 Heated object 12 Storage space 13 Top plate 14 Leg Member 15 Locking portion 15a Bolt hole 16 Recess 16a Female screw hole 17 Bolt 18, 19 Locking groove 20 Heating portion 24, 25 Gas diffusion region 28, 29 Holding groove 28a, 29a Inclined surface 28b, 29b Widening portion 30 Housing portion 34 , 35, 38, 39 Gas flow path

Claims (5)

  A plurality of heating walls disposed opposite to each other in a space surrounded by a heat insulating material, a heating unit provided on the heating wall, and a distance between the heating walls. A plurality of heat transfer wall bodies arranged, a plurality of heat radiation members arranged in a shelf shape between the heat transfer wall bodies, and a heated object provided between the heat radiation members adjacent in the vertical direction A heating apparatus comprising a space for storing objects.   The heating apparatus according to claim 1, wherein a plurality of gas flow paths for supplying an inert gas into the housing space are provided in the heating wall body and the heat transfer wall body.   The heating apparatus according to claim 1 or 2, wherein the heating wall body and the heat transfer wall body are disposed in close contact with each other.   The heating apparatus according to claim 3, wherein a concave gas diffusion region communicating with the gas flow path is provided on at least one of the contact surfaces of the heating wall and the heat transfer wall.   The heating device according to any one of claims 1 to 4, wherein the heat transfer wall body can be inserted and removed between the heating wall bodies in a state of being integrated with the heat radiation member.

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