JP4987539B2 - Heating device - Google Patents

Description

  The present invention relates to a heating apparatus used for heat treatment of a glass substrate, a metal substrate such as a semiconductor lead frame, or a resin substrate, which is a component such as a liquid crystal display panel or a plasma display panel.

  When heat-treating a glass substrate which is a component such as a liquid crystal display panel or a plasma display panel, a heated gas circulation type clean oven has been conventionally used (for example, see Patent Document 1). In this clean oven, a plurality of glass substrates that are to be heated are arranged in a thermostatic chamber in a multi-stage shape, and heat treatment is performed by heating the heated object with a heated gas that circulates in the thermostatic chamber by a blower fan. Do.

  In the case of the above-described heated gas circulation type clean oven, the object to be heated such as a glass substrate can be accommodated in a multi-stage shape, so it is difficult to make the temperature distribution in the thermostat uniform even though the space efficiency is high. is there. Further, since the heated gas is stirred and circulated by the blower fan, there is a high possibility that the cleanliness in the thermostatic chamber will deteriorate. Further, when a lightweight member such as a lead frame is heat-treated, the object to be heated may move from a predetermined position due to the wind pressure of the circulating convection heating gas.

  Therefore, a plurality of shelf heaters composed of far infrared panel heaters having a function of radiating far infrared rays from both sides are arranged in multiple stages in the furnace body, and each space formed between these shelf heaters is heated. A heating furnace as a region has been proposed (for example, see Patent Document 2).

JP 2001-56141 A JP 2001-317872 A

  In the case of the multistage heating furnace described in Patent Document 2, a large number of shelf heaters using double-sided heating type far-infrared panel heaters are arranged. Therefore, the spaces formed between these shelf heaters are each made efficient. It is excellent in that it can be heated automatically. However, when actually performing heat treatment using this multi-stage heating furnace, it is necessary to house or take out the heated objects one by one in a large number of spaces formed between the shelf heaters, These operations require a great deal of labor and time.

  In recent years, a method for handling a plurality of substrates such as semiconductor lead frames in a state in which they are accommodated in a magazine has become the mainstream, and therefore, in the heat treatment process, the substrate is placed in or out of the heating area together with the magazine. There is a growing demand for heating devices that can do this.

  The problem to be solved by the present invention is to provide a heating apparatus which can be put in and out and heat-treated in a magazine unit containing a plurality of objects to be heated, and has excellent temperature distribution uniformity.

The heating device according to the present invention includes a plurality of heating side walls disposed opposite to each other in a box-shaped external furnace body formed of a wall body having heat insulation properties, and a heating chamber for storing a magazine in which an object to be heated is stored. A magazine chamber provided between the side walls for heating, a heating back wall disposed on the back side of the magazine chamber, heating means provided on the heating side walls and the heating back wall, A door body arranged to be openable and closable at a position away from the heating side wall on the front side,
The wall is formed of a plurality of plates arranged with a gap between them ,
Gas supply means for supplying a heating gas to the magazine chamber on the heating back wall, at least one gas diffusion chamber, an air supply path for supplying gas to the gas diffusion chamber, and the gas diffusion chamber A plurality of gas supply holes opened on the surface facing the magazine chamber, and a plate heater and a heat shield as the heat generating means are provided on the back surface of the heating back wall. And

  With such a configuration, a magazine in which a plurality of objects to be heated is stored in the magazine chamber as it is, the front of the magazine chamber is closed with a door, and then the heating side wall and the heating By heating the back wall, the object to be heated contained in the magazine can be heat-treated. When the door is opened after the heat treatment, the article to be heated accommodated in the magazine can be taken out of the magazine chamber as it is. The magazine chamber is heated in at least three directions by a plurality of heating side walls and a heating back wall, and is surrounded by a wall having heat insulation formed by a plurality of plates arranged with a gap therebetween. Because it is located inside the external furnace, it has excellent temperature distribution uniformity.

  Here, if a magazine holding member that can be taken in and out of the magazine chamber is provided in the magazine chamber in a state in which the magazine is placed, when the magazine containing the article to be heated is inserted into or removed from the magazine chamber Since it becomes possible to perform work by placing the magazine on the magazine holding member, it is possible to speed up the loading and unloading work.

  Also, if the magazine storage area in the magazine chamber can be changed, if the type or size of the object to be heated or the heat treatment conditions are changed, it becomes possible to cope by changing the magazine storage area. Increased versatility.

On the other hand, in the heating apparatus of the present invention, gas is supplied to the heating back wall, gas supply means for supplying the heating gas to the magazine chamber, at least one gas diffusion chamber, and gas to the gas diffusion chamber. And a plurality of gas supply holes opened on the surface facing the magazine chamber in communication with the gas diffusion chamber, and a plate heater which is the heat generating means on the back surface of the heating back wall and it is provided with a heat shield plate.

By adopting such a configuration, the gas supplied to the heating back wall by the gas supply means flows into the gas diffusion chamber via the air supply path, flows and diffuses therein, and then a plurality of gases. It passes through the supply hole and is supplied to the magazine chamber. Therefore, the gas flowing into the gas diffusion chamber is heated and agitated in the interior to reach a uniform temperature, and then supplied to the magazine chamber, so that the uniformity of the temperature distribution can be further improved. Further, since the gas can be heated uniformly by heating the gas over the entire heating back wall generated by the heating means, it is effective in improving the uniformity of the temperature distribution.

  Further, a cooling means can be provided in the external furnace body. With such a configuration, the object to be heated in the magazine chamber can be quickly cooled by the cooling means, so that the cooling time can be shortened and the efficiency of the work process can be improved. . In addition, since the object to be heated can be rapidly cooled and the cooling rate can be controlled, the cooling process can be diversified.

  In this case, if the gas flow path for blowing the cooling gas into the external furnace is provided as the cooling means, the object to be heated in the magazine chamber can be rapidly cooled by the cooling gas blown into the external furnace.

  On the other hand, if a tubular body through which a cooling fluid can flow is disposed as the cooling means in the external furnace body, cooling can be performed without bringing cooling gas into contact with an object to be heated in the magazine chamber. It is possible to avoid adverse effects due to the working gas.

  Further, if an exhaust means for exhausting the gas in the external furnace body is provided, a gas harmful to the object to be heated generated during the heat treatment can be exhausted to the outside. In addition, since the object to be heated in the magazine chamber can be heat-treated in a vacuum atmosphere by evacuating the furnace body, heat treatment that is not adversely affected by gas can be performed.

  According to the present invention, it is possible to provide a heating apparatus that can be put in and out and is heat-treated in a magazine unit that accommodates a plurality of objects to be heated, and that has excellent temperature distribution uniformity.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a partially cutaway front view showing a heating device according to an embodiment of the present invention, FIG. 2 is a plan view of the heating device shown in FIG. 1, FIG. 3 is a side view of the heating device shown in FIG. 1 is a rear view of the heating apparatus shown in FIG. 1, FIG. 5 is a sectional view taken along line AA in FIG. 1, FIG. 6 is a sectional view taken along line BB in FIG. .

  As shown in FIGS. 1-7, in the heating apparatus 10 of this embodiment, the box-shaped formed with the wall body (the back wall 11a, the bottom wall 11b, the side wall 11c, and the top wall 11d) which has heat insulation. Two heating side walls 12 are disposed opposite to each other in the external furnace body 11, a magazine chamber 13 is provided therebetween, and a heating back wall 14 is disposed on the back side of the magazine chamber 13. The heating side wall 12 and the heating back wall 14 are provided with plate heaters 12h and 14h and heat shield plates 25 and 31, respectively, which are heat generating means. And the door body 15 is arrange | positioned in the position away from the end surface of the side wall 12 for a heating in the front side of the magazine chamber 13 so that opening and closing is possible.

  The door body 15 is pivotally supported around a plurality of support shafts 15a, and includes an opening / closing lever 15b with a lock mechanism for keeping the door body 15 in a closed state. The back wall 11a, the bottom wall 11b, the side wall 11c, the top wall 11d, and the door body 15 are each formed by a plurality of plate members 11p and 15p arranged in parallel to each other with a gap therebetween. A plate-shaped protective cover 15 d having a large number of through holes 15 c is attached to the front surface of the door body 15 with a gap in parallel with the door body 15.

  The external furnace body 11 has a rectangular parallelepiped shape that is long in the front-rear direction, and a support plate 17 is attached to the lower surface of the bottom wall 11b with a gap therebetween. On the back surface of the external furnace body 11, one air supply pipe 18, two exhaust pipes 19, and two gas flow paths 49 are respectively piped in a state of penetrating the back wall 11 a. A top plate 20 and a bottom plate 21 are attached above and below the heating side wall 12 and the heating back wall 14, and a plurality of spacers 22 are provided in order to provide a gap between the lower surface of the bottom plate 21 and the upper surface of the bottom wall 11 b of the external furnace body 11. Is arranged. As described above, the magazine chamber 13 is surrounded by the two heating side walls 12, the heating back wall 14, the top plate 20, and the bottom plate 21 except for the front surface, and the back wall of the external furnace body 11. 11a, the bottom wall 11b, the side wall 11c, and the top wall 11d are arranged in the external furnace body 11 in a state separated from the top wall 11d.

  As shown in FIGS. 3 and 4, the back wall 11a is provided with an air supply pipe 18, two exhaust pipes 19 and two gas flow paths 49 with their open ends protruding from the back wall 11a. Has been. Below the back wall 11a, a control unit 16 having a connector 16a for supplying power to the plate heaters 12h and 14h, sending and receiving electrical signals, and the like is provided. If the connector 16a is connected to a control device (not shown) that can set the heat treatment process (heating temperature, heating time, gas supply / stop, etc.), it will automatically follow the preset process in the control device. Heat treatment can be performed.

  As shown in FIGS. 5 and 6, the air supply pipe 18 passes through the back wall 11 a and is connected to the back surface of the heating back wall 14, and the two exhaust pipes 19 communicate with the external furnace body 11. . Each of the two gas flow paths 49 penetrates the back wall 11a and is inserted into the external furnace body 11, and is piped to form a U-shape in the gap between the inner surface of the external furnace body 11 and the outer surface of the heating side wall 12. The tip is fixed to the back wall 11a and closed by a closing member 49s. Each of the two gas flow paths 49 is provided with a large number of blowing holes 49 a for blowing cooling gas toward the heating side wall 12.

  As shown in FIGS. 5 and 6, an air supply pipe 18, which is a gas supply means for supplying gas to the magazine chamber 13, is connected to the back side of the heating back wall 14 and supplied to the magazine chamber 13. A plurality of exhaust pipes 19 serving as a discharge path for the gas is piped through the back wall 11 a of the external furnace body 11. The heating back wall 14 includes an inner wall 14a, an intermediate wall 14b, and an outer wall 14c arranged in parallel to each other. A first gas diffusion chamber 27 is formed between the outer wall 14c and the intermediate wall 14b, and a second gas diffusion chamber 28 is formed between the intermediate wall 14b and the inner wall 14a.

  On the other hand, a pair of left and right rails 24b are provided on the upper surface of the bottom plate 21 in the magazine chamber 13, and a magazine holding member 24a for mounting the magazine 23 is slidably attached to these rails 24b. The magazine holding member 24a has a frame shape in which a through region 24c narrower than the bottom surface of the magazine 23 is provided in a portion where the magazine 23 is placed, and a finger is placed in an oval gripping hole 24d opened at the tip. It can be slid along the rail 24b by operating it back and forth. A stopper 21a protrudes from a central portion of the bottom plate 21 in the magazine chamber 13, and a columnar stopper 21b is erected at a portion near the heating side wall 12 near the heating back wall 14.

  When the magazine holding member 24a is pulled out by placing a finger on the gripping hole 24d, the abutting portion 24e provided at the rear edge of the holding member 24a is locked so as to contact the stopper 21a so that it cannot be pulled out further. When 24a is pushed in, its rear edge contacts the stopper 21b and is locked in that position. Accordingly, after the magazine holding member 24a is pulled out with the door 15 opened and the magazine 23 is placed on the upper surface of the magazine holding member 24a, it is pushed in until the magazine holding member 24a comes into contact with the stopper 21b. It is accommodated in a predetermined position.

  Next, the structure, function, and the like of the heating back wall 14 constituting the heating device 10 will be described based on FIGS. 8 is a perspective view showing the heating back wall 14, FIG. 9 is a front view of the heating back wall 14 shown in FIG. 8, FIG. 10 is a sectional view taken along the line DD in FIG. 9, and FIG. FIG. 12 is a cross-sectional view taken along line E, and FIG. 12 is a cross-sectional view taken along line FF in FIG.

  As shown in FIGS. 8 to 12, the heating back wall 14 includes an inner wall 14a, an intermediate wall 14b and an outer wall 14c arranged in parallel with each other, a plate heater 14h and a heat shield plate 31 attached to the back side of the outer wall 14c. And. As shown in FIG. 9, a total of 112 gas supply holes 14y having an inner diameter of about 2 mm are provided in the inner wall 14a, with 16 in the vertical direction and 7 in the horizontal direction at intervals of about 10 mm. Further, as shown in FIG. 11, the intermediate wall 14b is provided with a total of 28 through holes 14x having an inner diameter of about 4 mm at intervals of about 20 mm, 8 in the vertical direction and 4 in the horizontal direction. Furthermore, as shown in FIG. 12, one air supply port 14d which is a through hole having an inner diameter of about 15 to 20 mm is opened at the center of the outer wall 14c, and an air supply pipe 18 is connected to the air supply port 14d. .

  As shown in FIGS. 10 and 11, the through hole 14x is not formed in the central portion of the intermediate wall 14b facing the air supply port 14d of the outer wall 14c. This is for avoiding that the gas emitted from the air supply port 14 d flows directly into the second gas diffusion chamber 28 without diffusing in the first gas diffusion chamber 27. In the present embodiment, the sum of the opening areas of the plurality of through holes 14x in the intermediate wall 14b and the sum of the opening areas of the plurality of gas outlets 14y in the inner wall 14a are set to be substantially equal. However, the inner diameter and the number of the through holes 14x, the gas supply holes 14y, and the air supply ports 14d are not limited to these.

  In the heating back wall 14, the gas supplied from the outside passes through the air supply pipe 18, passes through the air supply port 14d, is introduced into the first gas diffusion chamber 27, and is a plate heater attached to the back surface of the outer wall 14c. Indirect heating in 14h. For this reason, impurities are not mixed into the gas from the plate heater 14h. The gas heated in the first gas diffusion chamber 27 is diffused in the first gas diffusion chamber 27, and then passes through the plurality of through holes 14 x of the intermediate wall 14 b into the second gas diffusion chamber 28. After flowing in and diffusing again in the second gas diffusion chamber 28, the gas is discharged from a plurality of gas outlets 14y provided in the inner wall 14a. For this reason, the heated gas can be blown out uniformly over a wide range in the magazine chamber 13.

  Further, since the plate heater 14h, which is a heat generating means, is attached to the back surface of the outer wall 14c constituting the first gas diffusion chamber 27, the electrical wiring for supplying power to the plate heater 14h is simple and maintenance is easy. . Further, since the plate heater 14h is also provided around the gas inlet 14d on the back surface of the outer wall 14c, the periphery of the gas inlet 14d where the gas immediately after being introduced into the first gas diffusion chamber 27 exists is concentrated. It is possible to heat and the heating efficiency is also good.

  Furthermore, an intermediate wall 14b having a plurality of through holes 14x is provided between the gas inlet 14d of the outer wall 14c and the plurality of gas outlets 14y of the inner wall 14a. Therefore, in the first gas diffusion chamber 27, the gas flowing from the gas inlet 14d toward the gas outlet 14y of the inner wall 14a is dispersed in a plurality of regions by passing through the plurality of through holes 14x of the intermediate wall 14b. The gas can be heated uniformly. The intermediate wall 14b may be omitted and only one gas diffusion chamber may be provided, or two or more intermediate walls may be provided.

  When heat treatment is performed using the heating device 10, as described above, the door 15 is opened, the magazine holding member 24a is pulled out, and the magazine 23 containing the article to be heated is placed on the magazine holding member 24a as it is. After that, if the magazine holding member 24 a is pushed in, the magazine 23 is accommodated in a predetermined position in the magazine chamber 13. After that, if the door 15 is closed and the plate heaters 12h and 14h are energized, the heating side wall 12 and the heating back wall 14 generate heat, and the heated object accommodated in the magazine 23 in the magazine chamber 13 is heated. be able to. The magazine chamber 13 is disposed in a heat-resistant box-shaped external furnace body 11 and is heated from three directions by the two heating side walls 12 and the heating back wall 14, so that the temperature distribution is excellent in uniformity. ing.

  At this time, if gas is supplied from the outside to the air supply pipe 18 piped to the heating back wall 14, the gas flowing into the first gas diffusion chamber 27 from the air supply pipe 18 through the air supply port 14d as described above is obtained. After being diffused while being heated inside, the gas passes through the plurality of through holes 14x of the intermediate wall 14b, flows into the second gas diffusion chamber 28, diffuses while being heated again therein, and then has a high temperature of a predetermined temperature. It becomes gas and flows into the magazine chamber 13 from the plurality of gas supply holes 14y of the inner wall 14a.

  The hot gas flowing into the magazine chamber 13 flows from the back side to the front side in the magazine chamber 13 and then passes through the gap between the front surface of the magazine chamber 13 and the door body 15 shown in FIG. 13 to the outside. Then, after flowing through the gap between the external furnace body 11 and the magazine chamber 13 (top plate 20, bottom plate 21 and heating side wall 12) and reaching the back side of the heating back wall 14, the two exhaust pipes 19 And is discharged to the outside of the heating device 10. In this case, the exhaust pipe 19 can be forcibly exhausted by connecting a gas suction means.

  In this way, the hot gas uniformly heated by passing through the first gas diffusion chamber 27 and the second gas diffusion chamber 28 in the heating back wall 14 heated by the plate heater 14 h is supplied into the magazine chamber 13. Therefore, the uniformity of the temperature distribution in the magazine chamber 13 can be maintained. Further, by providing the plate heater 14h as a heating means on the back surface of the heating back wall 14, the gas is heated in the entire heating back wall 14 which is the plate heater 14h, so that the gas can be heated uniformly. it can.

  Furthermore, since the heated gas supplied from the heating back wall 14 circulates in the magazine chamber 13 and is discharged from the exhaust pipe 19 provided in the external furnace body 11, the cleanliness stability is also excellent. Thus, the heated object in the magazine 23 is not soiled. In addition, although nitrogen is suitable as a gas supplied to the magazine chamber 13, it is not limited to this.

  In the heating device 10, the exhaust pipe 19, which is an exhaust path, is provided on the back wall 11 a of the external furnace body 11, so that the gas flowing out of the magazine chamber 13 through the gap between the front surface of the magazine chamber 13 and the door body 15 After passing through the gap between the external furnace body 11 and the magazine chamber 13 (top plate 20, bottom plate 21 and heating side wall 12) and flowing into the back side of the heating back wall 14, it is discharged from the exhaust pipe 19. . Therefore, the gas supplied from the heating back wall 14 to the magazine chamber 13 flows inside and outside the magazine chamber 13 and then is exhausted from the exhaust pipe 19, so that a uniform temperature distribution can be obtained.

  A wall body (back wall 11a, bottom wall 11b, side wall 11c, top wall 11d) and door body 15 forming the external furnace body 11 of the heating device 10 and a plurality of plate members 11p arranged in parallel with each other with a gap therebetween. Since it is formed by 15p, it exhibits excellent heat insulation and is effective in maintaining a uniform temperature distribution in the magazine chamber 13 disposed in the external furnace body 11.

  When the heat treatment is completed, the power supply to the plate heater 14 h of the heating back wall 14 is stopped, and the inside of the magazine chamber 13 can be cooled by supplying gas to the magazine chamber 13 through the air supply pipe 18. Therefore, the object to be heated in the magazine 23 can be rapidly cooled or the cooling time can be arbitrarily set as required. For this reason, the efficiency of the work process can be achieved by diversifying the cooling process or shortening the cooling time. When the object to be heated falls to a predetermined temperature, the object to be heated can be taken out together with the magazine 23 from the magazine chamber 13 by opening the door 15 and pulling out the magazine holding member 24a.

  Since the heating device 10 includes the magazine holding member 24a that can be taken in and out of the magazine chamber 13 with the magazine 23 placed thereon, it is easy to put in and out the magazine 23 containing the heated material into and out of the magazine chamber 13. Excellent in properties.

  In addition, since the storage area of the magazine 23 in the magazine chamber 13 can be changed by changing the position of the stopper 21b and the interval between the rails 24b, the type and size of the object to be heated or the heat treatment conditions are changed. The accommodation area of the magazine 23 can be changed to cope with it, and versatility is also excellent.

  In the heating device 10, after the power supply to the plate heaters 12 h and 14 h is stopped, the object to be heated can be cooled together with the magazine 23 by supplying a cooling gas from the air supply pipe 18 to the magazine chamber 13. As another cooling means, a gas flow path 49 having a large number of blowing holes 49a is provided. Therefore, if the cooling gas introduced through the gas flow path 49 is blown out into the external furnace body 11 from the blowout hole 49a, the object to be heated in the magazine chamber 13 can be cooled more rapidly.

  As other cooling means, a tubular body (not shown) through which a cooling fluid can flow is piped in the external furnace body 11 in the same manner as the gas flow path 49, and the cooling medium supplied from the outside is placed in the tubular body. It can also be made to pass. In this way, since it is possible to cool the object to be heated in the magazine chamber 13 without bringing the cooling gas into contact with the object to be heated, adverse effects due to the cooling gas or the like can be avoided.

  Further, if an exhaust means (for example, a vacuum pump) for exhausting the gas in the external furnace body 11 is connectable to the exhaust pipe 19, a gas harmful to the heated object generated during the heat treatment, etc. Can be discharged to the outside. In this case, since the object to be heated in the magazine chamber 13 can be heat-treated in a vacuum atmosphere by evacuating the external furnace body 11, heat treatment that is not adversely affected by gas can be performed.

  The heating device of the present invention can be widely used in a heat treatment process of a glass substrate or a metal substrate such as a semiconductor lead frame or a resin substrate which is a constituent member of a liquid crystal display panel or a plasma display panel.

It is a partially notched front view which shows the heating apparatus which is embodiment of this invention. It is a top view of the heating apparatus shown in FIG. It is a side view of the heating apparatus shown in FIG. It is a rear view of the heating apparatus shown in FIG. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is CC sectional view taken on the line in FIG. It is a perspective view of the heating back wall which comprises the heating apparatus shown in FIG. It is a front view of the back wall for a heating shown in FIG. It is the DD sectional view taken on the line in FIG. It is the EE sectional view taken on the line in FIG. It is the FF sectional view taken on the line in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Heating device 11 External furnace body 11a Back wall 11b Bottom wall 11c Side wall 11d Top wall 11p, 15p Plate material 12 Heating side wall 12h, 14h Plate heater 13 Magazine chamber 14 Heating back wall 14a Inner wall 14b Intermediate wall 14c Outer wall 14d Air supply port 14x, 15c Through hole 14y Gas supply hole 15 Door 15a Support shaft 15b Open / close lever 15d Protective cover 16 Controller 16a Connector 17 Support plate 18 Air supply pipe 19 Exhaust pipe 20 Top plate 21 Bottom plate 21a, 21b Stopper 22 Spacer 23 Magazine
24a magazine holding member 24b rail 24c penetrating region 24d gripping hole 24e contact portion 25, 31 heat shield plate 27 first gas diffusion chamber 28 second gas diffusion chamber 49 gas channel 49a outlet hole 49s closing member

Claims (7)

Provided between a plurality of heating side walls opposed to each other in a box-shaped external furnace body formed of a heat-insulating wall body and the heating side walls for accommodating a magazine in which an object to be heated is stored. Magazine chamber, a heating back wall disposed on the back side of the magazine chamber, the heating side wall and heating means provided on the heating back wall, and the heating side wall on the front side of the magazine chamber And a door body that can be opened and closed at a position away from
The wall is formed of a plurality of plates arranged with a gap between them ,
Gas supply means for supplying a heating gas to the magazine chamber on the heating back wall, at least one gas diffusion chamber, an air supply path for supplying gas to the gas diffusion chamber, and the gas diffusion chamber A plurality of gas supply holes opened on the surface facing the magazine chamber, and a plate heater and a heat shield as the heat generating means are provided on the back surface of the heating back wall. A heating device.   The heating apparatus according to claim 1, wherein a magazine holding member that can be taken in and out of the magazine chamber in a state where the magazine is placed is provided in the magazine chamber.   The heating apparatus according to claim 1 or 2, wherein a storage area of the magazine in the magazine chamber is changeable. The heating device according to any one of claims 1 to 3 , wherein a cooling means is provided in the external furnace body. The heating apparatus according to claim 4 , wherein a gas flow path for blowing a cooling gas into the external furnace body is provided as the cooling means. The heating apparatus according to claim 4 , wherein a tubular body capable of flowing a cooling fluid is disposed in the external furnace body as the cooling means. Heating apparatus according to any one of claims 1 to 6, characterized in that a discharge means for discharging the outer furnace body gas.

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