JP4740732B2 - Heating device - Google Patents

Description

  The present invention relates to a heating apparatus used for heat treatment of a glass substrate, a metal substrate such as a semiconductor lead frame, or a resin substrate, which is a constituent member of a liquid crystal display panel or a plasma display panel.

  As a heat treatment apparatus for a glass substrate which is a constituent member such as a liquid crystal display panel, a heated gas circulation type clean oven has been conventionally used (see, for example, Patent Document 1). In this clean oven, a glass substrate or the like, which is a member to be heat-treated, is accommodated in a thermostat, and heat treatment is performed using a heated gas that circulates in the thermostat using a fan.

  However, in the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates heat-treated materials such as glass substrates in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. In addition, there is a high possibility that the cleanliness is deteriorated by the stirring action of the heated gas. Further, when the object to be heat treated is a lightweight member such as a lead frame, the object to be heat treated may move from a predetermined position by circulating convection of the heated gas.

  Therefore, a plurality of shelf heaters composed of far infrared panel heaters having a function of radiating far infrared rays from both sides are arranged in multiple stages in the furnace, and each space portion formed between these shelf heaters is defined as a heating region. A heating furnace has been proposed (see, for example, Patent Document 2).

JP 2001-56141 A JP 2001-317872 A

  In the case of the heating furnace described in Patent Document 2, a large number of shelf heaters composed of double-sided heating type far-infrared panel heaters are arranged. Therefore, each space portion formed between these shelf heaters is efficiently formed. It is excellent in that it can be heated. However, when heat-treating an object to be heated, the objects to be heated must be accommodated or taken out one by one in a large number of spaces formed between these shelf heaters. Takes a lot of effort and time.

  In recent years, handling of semiconductor lead frames, etc., in units of magazines in which a plurality of such semiconductor lead frames are accommodated has become the mainstream, and even in the heat treatment process, the magazines can be put into and out of the heating area. The demand for a simple heating device is increasing.

  The problem to be solved by the present invention is to provide a heating device which can be charged, heat-treated and taken out in a magazine unit containing a plurality of objects to be heated, and has excellent temperature distribution uniformity. is there.

A heating device according to the present invention is arranged on a magazine housing chamber provided between a plurality of heating side walls opposed to each other in a box-shaped external furnace body formed of a heat insulating material, and on the back side of the magazine housing chamber. The heating back wall, the heating side wall and the heating means provided on the heating back wall, and the door disposed to be openable and closable at a position away from the heating side wall on the front side of the magazine housing chamber A body, and an auxiliary door disposed between the door and the magazine storage chamber ,
In order to supply a heating gas to the magazine housing chamber, a first gas supply means is provided on the heating back wall, an exhaust path is provided in the external furnace body,
The heating back wall has at least one gas diffusion chamber formed in the heating back wall, an air supply path which is the first gas supply means for supplying gas to the gas diffusion chamber, and A plurality of gas supply holes opened on the surface facing the magazine housing chamber in communication with the gas diffusion chamber,
The heating means is provided on the back surface of the heating back wall .

  With such a configuration, a magazine containing a plurality of objects to be heated is inserted as it is into a magazine storage chamber provided between a plurality of heating side walls, and the magazine is formed with an auxiliary door body and a door body. After the storage chamber is closed, the heating side wall and the heating back wall are heated by the heating means, whereby the heat-treated material in the magazine storage chamber can be heat-treated together with the magazine. Then, after the heat treatment is completed, the auxiliary door body and the door body are opened, and it becomes possible to take out the heat-treated object together with the magazine from the magazine storage chamber. Further, the magazine housing chamber is formed in a box-shaped external furnace body made of a heat insulating material, and is heated from at least three directions by a plurality of heating side walls and a heating back wall, so that the temperature distribution is uniform. Is also excellent.

Here, in order to supply a heating gas to the magazine housing chamber, a first gas supply means is provided in the heating back wall, and an exhaust path is provided in the external furnace body, so that the gas is supplied from the heating back wall. Since the heated gas circulates in the magazine storage chamber and the magazine, the uniformity of the temperature distribution is improved. In addition, the heated gas supplied from the heating back wall circulates in the magazine housing chamber and in the magazine, and then is discharged from the exhaust port provided in the external furnace body, so the cleanliness stability is also excellent. . For this reason, the to-be-heated material in a magazine is not polluted. The gas supplied to the magazine chamber is preferably a reducing gas or an inert gas, but air can be used as long as the object to be heated does not oxidize or can be oxidized. . Note that if nitrogen is used as the gas, heat treatment in an oxygen-free atmosphere can be performed.

Further, the heating back wall includes a supply path which is the first gas supply means for supplying a gas diffusion chamber which is at least one form, the gas to the gas diffusion chamber to the heating back wall A plurality of gas supply holes opened on a surface facing the magazine housing chamber in communication with the gas diffusion chamber, so that the gas supplied to the heating back wall passes through the air supply path. Then, the gas flows into the gas diffusion chamber, flows and diffuses in the gas diffusion chamber, passes through the plurality of gas supply holes, and is supplied to the magazine housing chamber. That is, since the gas flowing into the gas diffusion chamber is heated and stirred in the gas diffusion chamber and then supplied to the magazine housing chamber, the uniformity of the temperature distribution can be further improved.

Furthermore , since the heating means is provided on the back surface of the heating back wall, the gas is heated in the entire heating back wall generated by the heating means, so that the gas can be uniformly heated. Moreover, since gas does not touch a heating means directly, generation | occurrence | production of dust is suppressed and a cleanliness improves.

  On the other hand, if the exhaust path is provided in the back surface of the external furnace body, the gas supplied from the heating back wall to the magazine housing chamber flows and diffuses in the magazine housing chamber toward the front, and then the auxiliary door body. After flowing out of the magazine storage chamber from between the heating side wall and flowing between the heating side wall and the external furnace body and flowing to the back side, it is discharged from the exhaust port on the back side of the external furnace body It becomes. Therefore, the gas supplied from the heating back wall to the magazine housing chamber circulates thoroughly inside and outside the magazine housing chamber and then exhausted from the exhaust port, thereby further improving the uniformity of temperature distribution. it can.

  If a second gas supply means for supplying a cooling gas for the object to be heated in the magazine housing chamber is provided, the object to be heated in the magazine housing chamber is supplied from the second gas supply means. It becomes possible to cool by the cooling gas. Therefore, it becomes possible to rapidly cool the object to be heated or to arbitrarily set the cooling time as necessary, and not only can the cooling process be diversified, but also the work process by shortening the cooling time. Efficiency can be improved.

  In this case, as the second gas supply means, a gas flow path for blowing a cooling gas toward the heating side wall can be provided in the external furnace body. With such a configuration, it is possible to efficiently cool an object to be heated accommodated in the magazine housing chamber by blowing cooling gas to the heating side wall forming the magazine housing chamber and rapidly cooling the heating side wall. Can do. Further, since the cooling gas does not directly touch the article to be heated in the magazine housing chamber, it is possible to avoid an adverse effect caused by the contact of the cooling gas.

  According to the present invention, it is possible to provide a heating device that can be charged, heat-treated and taken out in a magazine unit containing a plurality of objects to be heated, and has excellent temperature distribution uniformity.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a front view showing a heating device according to an embodiment of the present invention, FIG. 2 is a plan view of the heating device shown in FIG. 1, FIG. 3 is a side view of the heating device shown in FIG. 1, and FIG. FIG. 5 is a partially omitted cross-sectional view taken along line XX of FIG. 1. 6 is a partially omitted front view of the magazine housing chamber constituting the heating device shown in FIG. 1, FIG. 7 is a sectional view taken along the line AA in FIG. 6, and FIG. 8 is a view of the heating back wall shown in FIG. FIG. 9 is an arrow view taken along the line C-C of the heating back wall shown in FIG. 7, and FIG. 10 is an arrow view taken along the line D-D of the heating back wall shown in FIG. It is.

  As shown in FIGS. 1-6, the heating apparatus 10 of this embodiment is provided between the two side walls 12 for heating opposingly arranged in the box-shaped external furnace body 11 formed with the heat insulating material. Magazine housing chamber 13, heating back wall 14 disposed on the back side of the magazine housing chamber 13, heating side walls 12 and plate heaters 12h, 14h provided on the heating back wall 14 as heating means, respectively. The door body 15 is disposed so as to be openable and closable at a position away from the end face of the heating side wall 12 on the front side of the magazine housing chamber 13, and the auxiliary door body is disposed between the door body 15 and the magazine housing chamber 13. 16. The door body 15 is pivotally supported around a plurality of hinges 15a and includes a lock mechanism 15b for keeping the door body 15 in a closed state. The auxiliary door body 16 is attached by a plurality of stays 16 a at a position away from the back surface of the door body 15 so as to be substantially parallel to the door body 15.

  The external furnace body 11 has a rectangular parallelepiped shape that is long in the front-rear direction, and a plurality of support legs 17 formed of a V-shaped plate material are disposed on the lower surface of the bottom wall 11b. The exhaust pipe 19 is piped through the back wall 11a. A top plate 20 and a bottom plate 21 are respectively attached above and below the heating side wall 12 and the heating back wall 14, and a plurality of spacers 22 are disposed between the bottom surface of the bottom plate 21 and the top surface of the bottom wall 11 b of the external furnace body 11. ing. Therefore, the magazine housing chamber 13 is surrounded by the two heating side walls 12, the heating back wall 14, the top plate 20, and the bottom plate 21, and the back wall 11a, the bottom wall 11b, the side wall 11c, and the top wall 11d of the external furnace body 11. It is arranged in the position away from.

  In the magazine storage chamber 13, a plurality of support members 24 for placing the magazine 23 are arranged at positions near the four corners of the upper surface of the bottom plate 21. On the inner side of each support member 24 (center side of the magazine housing chamber 13), stepped support portions 24a and 24b for supporting the magazine 23 are provided, and on the front side of each support portion 24a and 24b, When the magazine 23 is placed on the support member 24, a guide slope 24g for guiding the bottom surface to the support portions 24a and 24b is formed. In the present embodiment, the magazine 23 is placed on the support portion 24b, but can be placed on the support portion 24a according to the size in the width direction of the magazine. On the left and right inner surfaces of the magazine 23, a plurality of lateral groove portions 23a for horizontally holding the lead frame 25 which is a non-heat-treated product are formed at regular intervals. The magazine 23 and the lead frame 25 shown in FIG. 4 are examples, and the present invention is not limited to this.

  On the other hand, as shown in FIG. 7, an air supply pipe 18, which is a gas supply means for supplying gas to the magazine housing chamber 13, is connected to the back side of the heating back wall 14 and supplied to the magazine housing chamber 13. A plurality of exhaust pipes 19 serving as gas discharge paths are penetrating through the back wall 11 a of the external furnace body 11. The heating back wall 14 includes an inner wall 14a, an intermediate wall 14b, and an outer wall 14c arranged in parallel with each other with a plurality of frame-like spacers 26 interposed therebetween. A first gas diffusion chamber 27 is formed between the outer wall 14c and the intermediate wall 14b, and a second gas diffusion chamber 28 is formed between the intermediate wall 14b and the inner wall 14a.

  As shown in FIG. 8, a total of 112 gas supply holes 14y having an inner diameter of about 2 mm are provided in the inner wall 14a at intervals of about 10 mm, ie, 16 in the vertical direction and 7 in the horizontal direction. As shown in FIG. 9, the intermediate wall 14b is provided with a total of 28 through-holes 14x having an inner diameter of about 4 mm, 8 in the vertical direction and 4 in the horizontal direction at intervals of about 20 mm. Further, as shown in FIG. 10, one air supply port 14d, which is a through hole having an inner diameter of about 15 to 20 mm, is opened at the center of the outer wall 14c, and an air supply pipe 18 is connected to the air supply port 14d. . In order to avoid the gas exiting the air supply port 14d from flowing into the second gas diffusion chamber 28 without diffusing in the first gas diffusion chamber 27, as shown in FIGS. A through hole 14x is not formed in the central portion of the intermediate wall 14b facing the air supply port 14d of 14c. The inner diameter and the number of the through holes 14x, the gas supply holes 14y, and the air supply ports 14d are not limited to these numerical values.

  When heat treatment is performed using the heating apparatus 10 of the present embodiment, a magazine 23 that accommodates a plurality of objects to be heated (lead frames 25) is accommodated in the magazine accommodation chamber 13 formed between the plurality of heating side walls 12. After charging in the same state and closing the magazine housing chamber 13 with the auxiliary door body 16 and the door body 15, the heating side wall 12 and the heating back wall 14 having heating means (plate heaters 12h, 14h) are heated. Thus, the lead frame 25 in the magazine housing chamber 13 can be heat-treated together with the magazine 23. After the heat treatment is completed, the auxiliary door body 16 and the door body 15 can be opened, and the lead frame 25 can be taken out together with the magazine 23 from the magazine housing chamber 13. The magazine housing chamber 13 is formed in a box-shaped external furnace body 11 formed of a heat insulating material, and is heated from three directions by a plurality of heating side walls 12 and a heating back wall 14, so that the temperature distribution is uniform. Also excellent in properties.

  Further, in order to supply gas to the magazine housing chamber 13, an air supply pipe 18 serving as gas supply means is provided on the heating back wall 14, and an exhaust pipe 19 serving as an exhaust path is provided on the back wall 11 a of the external furnace body 11. . Accordingly, the gas flowing into the first gas diffusion chamber 27 from the supply pipe 18 through the supply port 14d diffuses therein, and then passes through the plurality of through holes 14x of the intermediate wall 14b, respectively, and then passes through the second gas diffusion chamber 28. After flowing in and diffusing inside, the gas passes through the plurality of gas supply holes 14y of the inner wall 14a and flows into the magazine storage chamber 13.

  After the gas flowing into the magazine storage chamber 13 circulates in the magazine storage chamber 13, it passes through the gap S between the front of the magazine storage chamber 13 and the auxiliary door body 16 shown in FIG. After flowing out and passing through the top plate 20, the bottom plate 21 and the gap between the heating side wall 12 and the external furnace body 11 and flowing into the back side of the heating back wall 14, the plurality of exhaust pipes 19 Each is discharged to the outside of the heating device 10.

  In this way, the gas heated by passing through the first gas diffusion chamber 27 and the second gas diffusion chamber 28 in the heating back wall 14 that is generating heat by the plate heater 14 h circulates in the magazine housing chamber 13. Therefore, the uniformity of temperature distribution can be maintained. Further, since the plate heater 14h, which is a heating means, is provided on the back surface of the heating back wall 14, the gas is heated by the entire heating back wall 14 generated by the plate heater 14h, so that the gas is uniformly heated. be able to. Furthermore, since the heated gas supplied from the heating back wall 14 circulates in the magazine housing chamber 13 and is then discharged from the exhaust pipe 19 provided in the external furnace body 11, the cleanliness stability is also excellent. The lead frame 25 in the magazine 23 is not soiled. In addition, although nitrogen is suitable as a gas supplied to the magazine storage chamber 13, it is not limited to this.

  In the heating device 10, the exhaust pipe 19 that is an exhaust path is provided on the back wall 11 a of the external furnace body 11, so that the gap S between the front surface of the magazine housing chamber 13 and the auxiliary door body 16 is moved out of the magazine housing chamber 13. The gas that has flowed out passes through the gap between the top plate 20, the bottom plate 21 and the heating side wall 12 and the external furnace body 11, flows into the back side of the heating back wall 14, and then is discharged from the exhaust pipe 19. It becomes. Therefore, the gas supplied from the heating back wall 14 to the magazine housing chamber 13 circulates through the inside and outside of the magazine housing chamber 13 and then is exhausted from the exhaust pipe 19, thereby further improving the temperature distribution uniformity. Can be improved.

  After the heat treatment is finished, the inside of the magazine housing chamber 13 may be cooled by stopping the heat generation of the plate heater 14h of the heating back wall 14 and supplying gas to the magazine housing chamber 13 through the air supply pipe 18. it can. Therefore, the object to be heated (such as the lead frame 25 in the magazine 23) can be rapidly cooled or the cooling time can be arbitrarily set as necessary. For this reason, the efficiency of the work process can be achieved by diversifying the cooling process or shortening the cooling time.

  Next, another embodiment of the present invention will be described with reference to FIGS. 11 is a front view showing a heating device according to another embodiment, FIG. 12 is a plan view of the heating device shown in FIG. 11, FIG. 13 is a side view of the heating device shown in FIG. 11, and FIG. FIG. 15 is a partially cutaway front view showing the internal structure of the heating apparatus shown in FIG. 11, FIG. 16 is a partially cutaway side view showing the internal structure of the heating apparatus shown in FIG. FIG. 17 is a partially enlarged view of FIG.

  As shown in FIGS. 11 to 15, the heating device 30 of the present embodiment is formed between two heating side walls 32 arranged to face each other in a box-shaped external furnace body 31 formed of a heat insulating material. Magazine storage chamber 33, a heating back wall 34 disposed on the back side of the magazine storage chamber 33, heating side walls 32 and plate heaters 32h and 34h provided on the heating back wall 34 as heating means, respectively. And a door body 35 that can be opened and closed at a position away from the end face of the heating side wall 32 on the front side of the magazine housing chamber 33. The door body 35 is L-shaped in plan view, is pivotally supported around a support shaft 35a, and includes a lock mechanism 35b for keeping the door body 35 in a closed state.

  The external furnace body 31 has a rectangular parallelepiped shape that is long in the front-rear direction, and a heat shield plate 31e is disposed on the lower surface side of the bottom wall 31b with a plurality of spacers 31s interposed, and on the lower surface of the heat shield plate 31e, A plurality of support legs 37 having a screw type height adjusting mechanism are arranged. On the back surface of the external furnace body 31, base end portions 49 a and 49 b of the first air supply pipe 38, the second air supply pipe 49 and the exhaust pipe 39 are piped in a state of penetrating the back wall 31 a. A top plate (not shown) and a bottom plate 41 are respectively attached above and below the heating side wall 32 and the heating back wall 34, and a plurality of spacers are provided between the bottom surface of the bottom plate 41 and the top surface of the bottom wall 31 b of the external furnace body 31. (Not shown) is arranged. Accordingly, the magazine housing chamber 33 is surrounded by the two heating side walls 32, the heating back wall 34, the top plate and the bottom plate 41, and from the back wall 31a, the bottom wall 31b, the side wall 31c and the top wall 31d of the external furnace body 31. It is located at a distance.

  In the magazine housing chamber 33, a plurality of roller-shaped support members 44 for placing the magazine 43 are rotatably arranged. Since each support member 44 is rotatable around a support shaft 44a arranged in the left-right direction when viewed from the front of the external furnace body 31, when the magazine 43 is taken in and out of the magazine housing chamber 33, these support members 44 are able to rotate. The rotation of the support member 44 can be used, and the workability is excellent. Further, in order to set the magazine 43 at a fixed position in the magazine housing chamber 33, guide members 44g are provided on the left and right sides of the support member 44, and a stopper 44s is provided on the portion near the heating back wall 34. . The magazine 43 is the same as the magazine 23 described above, but its size and shape are not particularly limited.

  On the other hand, as shown in FIGS. 15 to 17, a first supply pipe 38, which is a gas supply means into the magazine housing chamber 33, is connected to the back side of the heating back wall 34 and supplied to the magazine housing chamber 33. A plurality of exhaust pipes 39 serving as a discharge path for the gas that has been exhausted are piped through the back wall 11 a of the external furnace body 31. The heating back wall 34 includes an inner wall 34a, an intermediate wall 34b, and an outer wall 34c that are arranged in parallel with each other, with the intermediate wall 34b sandwiched between the frame-like projecting portions 34af and 34cf. A first gas diffusion chamber 47 is formed between the outer wall 34c and the intermediate wall 34b, and a second gas diffusion chamber 48 is formed between the intermediate wall 34b and the inner wall 34a.

  In the inner wall 34a, as in the inner wall 14a shown in FIG. 8, a total of 112 gas supply holes (not shown) having an inner diameter of about 2 mm are opened at intervals of about 10 mm, 7 in the vertical direction and 7 in the horizontal direction. Yes. Similarly to the intermediate wall 14b shown in FIG. 9, the intermediate wall 34b has eight through holes (not shown) having an inner diameter of about 4 mm in the vertical direction and four in the horizontal direction at intervals of about 20 mm. It has been established. Further, in the central portion of the outer wall 34c, as with the outer wall 14c shown in FIG. 10, one air supply port 34d which is a through hole having an inner diameter of about 15 to 20 mm is opened, and the first air supply pipe 38 is formed in the air supply port 34d. Is connected.

  As shown in FIGS. 14 to 17, as a gas flow path that is a second gas supply means for supplying a cooling gas for an object to be heated (not shown) accommodated in the magazine accommodating chamber 33, A tubular second air supply pipe 49 that blows out a cooling gas toward the left and right heating side walls 32 is disposed inside the external furnace body 31. The second air supply pipe 49 is arranged in a substantially U shape in the horizontal direction, and each base end portion 49a, 49b is piped through the back wall 31a. In the pair of left and right second supply pipes 49 located in the external furnace body 31, a plurality of through holes 49 c are formed in the portion facing the heating side wall 32 at integral intervals along the longitudinal direction.

  When heat treatment is performed using the heating device 30 of the present embodiment, a magazine 43 that accommodates a plurality of objects to be heated (not shown) is accommodated in the magazine accommodation chamber 33 formed between the plurality of heating side walls 32. The magazine is loaded as it is, and the magazine housing chamber 33 is closed with the door 35. And the to-be-heated material in the magazine storage chamber 33 can be heat-processed with the magazine 43 by making the heating side wall 32 and the heating back wall 34 which have a heating means (plate heater 32h, 34h) generate heat. The magazine housing chamber 33 is formed in a box-shaped external furnace body 31 formed of a heat insulating material, and is heated from three directions by a plurality of heating side walls 32 and a heating back wall 34, so that the temperature distribution is uniform. Also excellent in properties.

  In addition, since the gas heated by passing through the first gas diffusion chamber 47 and the second gas diffusion chamber 48 in the heating back wall 34 that generates heat by the plate heater 34h circulates in the magazine housing chamber 33, Uniformity of temperature distribution can be maintained. Thus, the structure of the heating back wall 34 is the same as that of the heating back wall 14, and can exhibit the same actions and effects as the heating back wall 14.

  When the heat treatment is finished, after the operation of the heat generating means (plate heaters 32h, 34h) and the supply of gas through the first supply pipe 38 are stopped, the cooling gas is supplied to the left and right second supply pipes 49, and a plurality of penetrations are made. Cooling gas is blown from the holes 49 c to the heating side walls 32 of the magazine housing chamber 33. In this case, the cooling gas is sent from the base end portions 49 a and 49 b of the second air supply pipe 49 that is piped through the back wall 31 a of the external furnace body 31. Thus, the object to be heated accommodated in the magazine accommodating chamber 33 can be efficiently cooled by rapidly cooling the heating side wall 32 with the cooling gas blown out from the plurality of through holes 49c.

  Therefore, it becomes possible to rapidly cool the object to be heated or to arbitrarily set the cooling time as necessary, and not only can the cooling process be diversified, but also the work process by shortening the cooling time. Efficiency can be improved. In the case of this embodiment, since the cooling gas does not directly touch the object to be heated in the magazine housing chamber 33, it is possible to avoid an adverse effect caused by the contact of the cooling gas. Note that the blowing of the cooling gas from the through hole 49c of the second air supply pipe 49 is not an indispensable work condition. Therefore, after the heat treatment is completed, the heating means (plate heaters 32h, 34h) and the like can be stopped and allowed to cool. . The structure and function of other parts are the same as those of the heating device 10 described above.

  The heating device of the present invention can be widely used in a heat treatment process of a glass substrate, a metal substrate such as a semiconductor lead frame, or a resin substrate, which is a constituent member of a liquid crystal display panel or a plasma display panel.

It is a front view which shows the heating apparatus which is embodiment of this invention. It is a top view of the heating apparatus shown in FIG. It is a side view of the heating apparatus shown in FIG. It is a partially notched front view of the heating apparatus shown in FIG. FIG. 2 is a partially omitted sectional view taken along line XX in FIG. 1. FIG. 2 is a partially omitted front view of a magazine housing chamber constituting the heating device shown in FIG. 1. It is sectional drawing in the AA of FIG. It is an arrow line view in the BB line of the heating back wall shown in FIG. It is an arrow line view in the CC line of the heating back wall shown in FIG. It is an arrow line view in the DD line of the heating back wall shown in FIG. It is a front view which shows the heating apparatus which is other embodiment of this invention. It is a top view of the heating apparatus shown in FIG. It is a side view of the heating apparatus shown in FIG. FIG. 12 is a partially omitted horizontal sectional view of the heating device shown in FIG. 11. It is a partially notched front view which shows the internal structure of the heating apparatus shown in FIG. It is a partially cutaway side view which shows the internal structure of the heating apparatus shown in FIG. FIG. 17 is a partially enlarged view of FIG. 16.

Explanation of symbols

10, 30 Heating device 11, 31 External furnace body 11a, 31a Back wall 11b, 31b Bottom wall 11c, 31c Side wall 11d, 31d Top wall 12, 32 Heating side wall 12h, 14h, 32h, 34h Plate heater 13, 33 Magazine storage Chamber 14, 34 Heating back wall 14a, 34a Inner wall 14b, 34b Intermediate wall 14c, 34c Outer wall 14d, 34d Air supply port 14x Through hole 14y Gas supply hole 15, 35 Door body 15a Hinge 15b, 35b Lock mechanism 16 Auxiliary door body 16a stay 17, 37 support leg 18, 38 air supply pipe 19, 39 exhaust pipe 20 top plate 21, 41 bottom plate 22 spacer 23, 43 magazine 23a lateral groove portion 24, 44 support member 24a, 24b support portion 24g guide slope 25 lead frame 26 , 31s Special 27, 47 First gas diffusion chamber 28 , 48 Second gas diffusion chamber 31e Heat shield plate 34af, 34cf Frame-like protrusion 35a, 44a Support shaft 38 First supply pipe 44g Guide member 44s Stopper 49 Second supply pipe 49a, 49b Base end portion 49c Through hole S Gap

Claims (4)

A magazine housing chamber provided between a plurality of heating side walls opposed to each other in a box-shaped external furnace body formed of a heat insulating material; and a heating back wall disposed on the back side of the magazine housing chamber; A heating means provided on the heating side wall and the heating back wall, a door body that can be opened and closed at a position away from the heating side wall on the front side of the magazine housing chamber, and the door body, and an auxiliary door body that is disposed between the magazine housing chamber,
In order to supply a heating gas to the magazine housing chamber, a first gas supply means is provided on the heating back wall, an exhaust path is provided in the external furnace body,
The heating back wall has at least one gas diffusion chamber formed in the heating back wall, an air supply path which is the first gas supply means for supplying gas to the gas diffusion chamber, and A plurality of gas supply holes opened on the surface facing the magazine housing chamber in communication with the gas diffusion chamber,
A heating apparatus , wherein the heating means is provided on a back surface of the heating back wall . The exhaust heating device routes the claim 1, wherein provided on the rear portion of the outer furnace body. The heating apparatus according to claim 1 or 2, further comprising a second gas supply means for supplying a cooling gas for an object to be heated in the magazine housing chamber. The heating apparatus according to claim 3 , wherein a gas flow path for blowing a cooling gas toward the heating side wall is provided in the external furnace body as the second gas supply means.

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