KR101729728B1 - Recirculation Cooling Unit and Heat Treatment Apparatus Having the Same - Google Patents

Abstract

The present invention relates to a process chamber comprising a process chamber and a process chamber, wherein one side is connected to a first pipe of the process chamber and the other side is connected to a second pipe of the process chamber to suck and cool the process gas in the process chamber, A circulation cooling unit for alternately switching between a first direction in which the supply direction is sucked from the first pipe and supplied to the second pipe and a second direction in which the second direction is sucked from the second pipe and supplied to the first pipe, Start.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a circulating cooling unit and a heat-

The present invention relates to a circulation cooling unit for alternately switching a supply direction by cooling and re-supplying a process gas of a process chamber used in a heat treatment process of a substrate, and a heat treatment apparatus having the same.

In general, a heat treatment apparatus used for a flat panel display such as an LCD or an OLED, or a glass substrate for a solar cell or a crystallization of an amorphous silicon thin film formed on the surface of a glass substrate, includes a batch type heat treatment apparatus and an inline type heat treatment apparatus There is a device. In the batch type heat treatment apparatus, since the heat treatment of the glass substrate proceeds in a sealed state, the heat treatment characteristics of the glass substrate are improved.

The batch type heat treatment apparatus performs a heat treatment process in a state where a plurality of glass substrates are stacked in a single wafer process in the process chamber. When the heat treatment process is completed, the batch type heat treatment apparatus supplies a process gas such as nitrogen gas to the interior of the glass substrate to cool the glass substrate. The batch type heat treatment apparatus is also used for heat treatment of a semiconductor wafer.

However, since the batch type heat treatment apparatus supplies the process gas to the process chamber from one side and discharges the process gas to the other side of the process chamber, the amount of the process gas used is increased and the heat treatment cost is increased. Further, when the inside of the plant where the batch type heat treatment apparatus is installed needs to regulate the positive pressure, the process gas discharged from the batch type heat treatment apparatus affects the positive pressure control in the factory, which is a problem.

In addition, the above-described problems can be similarly generated in an in-line type heat treatment apparatus.

The present invention provides a circulation cooling unit that can be used in a process chamber in a process of heat-treating a glass substrate and re-supply the process gas to the process chamber by cooling the process gas to be discharged, and to alternately change the supply direction, and a heat treatment apparatus having the same.

The circulation cooling unit of the present invention is connected to the first pipe of the process chamber on the one side and to the second pipe of the process chamber on the other side to suck and cool the process gas of the process chamber, And a second direction in which the process gas is sucked from the first pipe and supplied to the second pipe and a second direction in which the process gas is sucked from the second pipe and supplied to the first pipe, are alternately switched.

The circulation cooling unit includes a first cooling module connected to the first pipe and cooling the process gas, a blower module having one side connected to the first cooling module and sucking the process gas of the process chamber, And a switching module connected between the first pipe and the first cooling module and the other side connected between the second pipe and the blower so that the process gas alternately flows in the first direction and the second direction have.

The switching module may include a first main pipe having a first main valve, one end connected to the first pipe and the other end connected to the first cooling module, and a second main valve, one end of which is connected to the blower module And a first switching valve, one end of which is connected to the front end of the first main valve in the first main pipe, and the other end of which is connected to the second main pipe, And a second switching valve connected to a front end of the second main valve at one end of the second main pipe, wherein one end of the first main pipe is connected to the rear end of the first main valve at the first main pipe, And a second switching pipe connected to a rear end of the second main valve.

The first main valve and the second main valve are opened and the first switching valve and the second switching valve are shut off in the first direction, and the second direction is closed by the first main valve and the second main valve, 2 main valve is shut off and the first switching valve and the second switching valve are opened.

The circulation cooling unit may include a filter module having one side connected to the blower module and the other side connected to the other side of the switching module and a second cooling module connected between the blower module and the filter module . At this time, the filter module may include a HEPA filter, an UL filter, a carbon filter, or a mesh filter.

The circulation cooling unit may include a first cooling module, one side of which is connected to the first pipe and cools the process gas of the process chamber, and a second cooling module, one side of which is connected to the first cooling module, And a second cooling module for cooling the process gas of the process chamber, the blower module having one side connected to the blower module and the other side connected to the second pipe, . The blower module includes a blower for sucking and supplying the process gas, a first blower pipe having one end connected to the first cooling module and the other end connected to the blower, one end connected to the blower, A second blower pipe connected to the second cooling module, a first sub-blower pipe having one end connected to the first blower pipe and the other end connected to the second blower pipe, and a second sub blower pipe having one end connected to the first blower pipe And a second blower pipe connected between the other end of the first blower pipe and the other end of the first blower pipe and connected to the second blower pipe at the other end thereof between the other end of the first blower pipe and the other end of the second blower pipe, And may include a sub-blower pipe. The blower module may further include a first blower valve coupled to the first blower pipe between one end of the first sub-blower pipe and one end of the second sub blower pipe, and a second blower valve connected to the other end of the first sub- A second sub-blower valve coupled to the first sub-blower pipe, and a second sub-blower valve coupled to the second sub-blower pipe, the second sub-blower valve being coupled to the second sub- As shown in FIG.

Also, the blower module may include a first blower to flow the process gas in the first direction and a second blower to flow the process gas in the second direction, wherein the first blower and the second blower Can be operated alternately.

The circulation cooling unit may further include a first filter module positioned between the second pipe and the second cooling module for filtering the process gas supplied to the second pipe and a second filter module disposed between the first pipe and the first cooling module, And a second filter module for filtering the process gas supplied to the first pipe.

The first filter module may include a first filter having one end connected to the second cooling module and the other end connected to the second pipe, and a second filter having one end connected to one side of the first filter, A first filter filter connected to the other side of the first filter filter, a first main filter valve coupled to a front end of the first filter, and a first sub filter filter installed in the first filter pipe, A second filter pipe connected to the first pipe and having the other end connected to the first cooling module, a second filter pipe having one end connected to one side of the second filter and the other end connected to the other side of the second filter, A second main filter valve coupled to a rear end of the second filter, and a second sub filter valve installed in the second filter pipe. At this time, the first filter and the second filter may include a HEPA filter, an UL filter, a carbon filter, or a mesh filter. In addition, the first direction may be one of the first pipe, the second filter pipe, the first cooling module, the first main blower pipe, the blower, the second main blower pipe, the second cooling module, The filter and the second pipe, and the second direction is configured to flow sequentially through the second pipe, the first filter pipe, the second cooling module, the second sub-blower pipe, the blower and the first sub- The blower pipe, the second cooling module, the second filter, and the first pipe.

The blower may be formed by a ring blower, a turbo blower, a blower, a rotary pump, or a booster pump. The blower may be formed of at least two blowers.

The heat treatment apparatus of the present invention includes a process chamber having a first pipe and a second pipe, the substrate being positioned inside and being heat-treated, and a circulation cooling unit connected between the first pipe and the second pipe, Is formed.

The process chamber also includes an outer housing and an inner housing received within the outer housing, wherein the first pipe is connected to one side of the inner housing through one side of the outer housing, The piping may be connected to the other side of the inner housing through the other side of the outer housing.

In addition, the process chamber may be formed integrally with the outer housing and the inner housing. Further, the process chamber may be a chamber for a batch type heat treatment apparatus or a chamber for an inline type heat treatment apparatus.

The substrate may be a flat panel display device, a glass substrate for a solar cell, or a semiconductor wafer.

The circulation cooling unit and the heat treatment apparatus having the same according to the present invention cool the process gas discharged from the process chamber to supply the process gas to the process chamber again and change the supply direction of the process gas alternately to change the cooling rate And the temperature deviation can be reduced.

In addition, the circulation cooling unit and the heat treatment apparatus having the same according to the present invention cool the process gas discharged from the process chamber and supply the process gas to the process chamber again. Therefore, there is no additional use of the process gas, .

Further, the circulation cooling unit and the heat treatment apparatus having the same according to the present invention can cool the glass substrate more efficiently since the used process gas discharged from the process chamber is cooled and re-supplied.

In addition, the circulation cooling unit and the heat treatment apparatus having the circulation cooling unit according to the present invention do not discharge the process gas into the factory, so that there is no effect on the positive pressure inside the plant.

In addition, the circulating cooling unit and the heat treatment apparatus having the circulation cooling unit according to the present invention include a process chamber and a metal cooling unit, and the path through which the process gas flows forms a closed path. Therefore, it is easy to form a nitrogen atmosphere for controlling the oxygen concentration in the heat treatment process There is an effect.

1 is a configuration diagram of a circulation cooling unit and a heat treatment apparatus having the same according to an embodiment of the present invention.
Figure 2 shows the flow of process gas as it flows in a first direction in the heat treatment apparatus of Figure 1;
Figure 3 shows the flow of process gas as it flows in a second direction in the heat treatment apparatus of Figure 1;
Fig. 4 shows the supply and exhaust when the process gas flows in the first direction in the vacuum chamber of Fig.
Figure 5 shows the supply and exhaust in the process chamber when the process gas flows in the second direction in the heat treatment apparatus of Figure 1;
6 is a configuration diagram of a circulation cooling unit and a heat treatment apparatus having the same according to another embodiment of the present invention.
Fig. 7 is a specific configuration diagram of the blower module of Fig. 6;
8 is a specific configuration diagram of the first filter module of Fig.
FIG. 9 is a specific configuration diagram of the second filter module of FIG. 6. FIG.
10 is a specific configuration diagram of a blower module according to another embodiment of the present invention.

Hereinafter, a circulation cooling unit and a heat treatment apparatus having the same according to the present invention will be described in detail with reference to embodiments and attached drawings.

First, a circulation cooling unit and a heat treatment apparatus having the same according to an embodiment of the present invention will be described.

1 is a configuration diagram of a circulation cooling unit and a heat treatment apparatus having the same according to an embodiment of the present invention.

1, a circulation cooling unit and a heat treatment apparatus 100 including the same according to an embodiment of the present invention includes a process chamber 110, a first cooling module 120, a blower module 130, (Not shown). In addition, the heat treatment apparatus 100 may include a filter module 140 and a second cooling module 150. The heat treatment apparatus 100 may omit the first filter module 140 when filtering for the process gas is not required. Also, the heat treatment apparatus 100 may omit the second filter module 260 when additional cooling of the process gas through the blower module 130 is not required.

The first cooling module 120, the blower module 130 and the switching module 170 cool the high-temperature process gas discharged from the process chamber 110 and re-supply the process gas to the process chamber 110. (100a). In addition, the circulation cooling unit 100a may further include a filter module 140 and a second cooling module 150.

The heat treatment apparatus 100 supplies the process gas cooled into the process chamber 110 after the heat treatment of the substrate 10 proceeds in the process chamber 110 to discharge the substrate 10 The process chamber 110 and the substrate 10 are cooled. At this time, the circulation cooling unit 100a sucks the high-temperature process gas discharged from the process chamber 110 while the blower module 130 operates, and after cooling the first cooling module 120, the process chamber 110 Supply again. At this time, the switching module 170 alternately forms directions in which the blower module 130 sucks and supplies the process gas. That is, the circulation cooling unit 100a allows the process gas to flow in the first direction and to flow in the second direction after a predetermined time. Accordingly, the heat treatment apparatus 100 is supplied to the process chamber 110 while alternately flowing the process gas in the first direction and the second direction to cool the process chamber 110 and the substrate 10. Here, the first direction refers to a direction in which the process gas flows clockwise with the process chamber 110 as a starting point in FIG. 1, and the second direction refers to a direction in which the process gas flows in a counterclockwise direction. Further, the one side or the front end means the side or the end in the direction in which the component gas is first contacted when the process gas flows in the first direction, and the other end or the rear end means the side or end in the opposite direction.

 The heat treatment apparatus 100 forms a closed path through which the process chamber 110 and the circulation cooling unit 100a flow the process gas. Therefore, the heat treatment apparatus 100 prevents the process gas from flowing out to the outside during the cooling of the process chamber 110, thereby reducing the amount of process gas used. In addition, the heat treatment apparatus 100 does not affect the pressure change inside the plant in which the process chamber 110 is installed because the process gas is prevented from flowing out.

The heat treatment apparatus 100 is used for heat treatment of a substrate 10 such as a glass substrate used for a flat panel display such as an LCD or an OLED or for a solar cell. The heat treatment apparatus 100 may also be used for heat treatment of a substrate such as a semiconductor wafer. Therefore, the heat treatment apparatus 100 can be used for heat treatment of a glass substrate or a semiconductor wafer. In addition, the circulation cooling unit 100a can be used in various heat treatment apparatuses for heat-treating glass substrates or wafers.

In the following description, the first cooling module 120, the blower module 130, the first filter module 140, and the second cooling module 150 are respectively included. However, the size of the process chamber 110 And the amount of the process gas to be supplied.

The process chamber 110 includes an outer housing 111, an inner housing 112, a first pipe 113, and a second pipe 114. Although not shown in detail, the process chamber 110 is provided with a heating module (not shown) between the outer housing 111 and the inner housing 112 so that the inner space of the inner housing 112 is set according to a heat treatment condition Heat to temperature. In addition, the process chamber 110 may be formed by mounting a flat plate heater (not shown) along the inner wall in the inner housing 112. In addition, the process chamber 110 may be formed integrally with the outer housing 111 and the inner housing 112.

The process chamber 110 may further include a separate process gas supply pipe (not shown) for supplying the process gas to the inside of the inner housing 112 before or after the heat treatment process.

The process chamber 110 receives the substrate 10 therein and performs heat treatment according to the set heat treatment conditions. The process chamber 110 may maintain an atmospheric pressure state during the heat treatment process or may maintain an inert atmosphere by a process gas such as nitrogen gas.

The process chamber 110 may be formed as a chamber for a batch type heat treatment apparatus. In addition, the process chamber 110 may be formed as a chamber for an in-line type heat treatment apparatus. In the chamber for the batch type thermal processing apparatus and the chamber for the inline type thermal processing apparatus, the inlet and the outlet through which the substrate enters and exit are sealed by separate shutters during the heat treatment process.

The outer housing 111 is formed in a substantially hexahedron shape in which the front side is opened and the inside is empty. The outer housing 111 is formed to receive and enclose the inner housing 112 therein. The outer housing 111 is coupled through both sides so that the first pipe 113 and the second pipe 114 are connected to the inside of the inner housing 112.

The inner housing 112 is open in its front side and has an approximately hollow shape. The inner housing 112 receives the substrate 10 therein and heats the substrate 10 to heat treat the substrate 10. Accordingly, the inner housing 112 is formed to have a sufficient volume to accommodate the substrate 10. [

The inner housing 112 is coupled with a plurality of first pipes 113 passing through one side and a plurality of second pipes 114 passing through the other side. The inner housing 112 allows the substrate 10 to be cooled by the process gas supplied alternately from the first pipe 113 and the second pipe 114. In addition, the inner housing 112 alternately discharges the process gas used for cooling through the second pipe 114 and the first pipe 113. As the process gas, an inert gas such as nitrogen gas or argon gas is used. Further, the oxygen concentration of the process gas can be controlled by the heat treatment process.

The first pipe 113 is in the form of a tube, and one side of the first pipe 113 is coupled to one side of the inner housing 112. The other end of the first pipe 113 is connected to one side of the switching module 170. The first pipe 113 provides a path through which the process gas used in the process chamber 110 is discharged from the process chamber 110. The first pipe 113 provides a path through which the cooled process gas is supplied to the inside of the process chamber 110. That is, the first pipe 113 provides a path through which the process gas is discharged from the process chamber 110 when the process gas flows in the first direction, and when the process gas flows in the second direction, 110, respectively. Meanwhile, although not shown in detail, the first pipe 113 may be formed by branching a plurality of end portions coupled to the inner housing 112. In this case, the first pipe 113 can be more uniformly supplied or exhausted to the inside of the inner housing 112.

In addition, the first pipe 113 may further include a first control valve 113a connected to the first pipe 113 in the middle. The first control valve 113a controls the flow of the process gas flowing through the first pipe 113. The first control valve 113a is closed when the heat treatment is in progress in the process chamber 110 to shut off the flow of the process gas and is opened when the heat treatment is completed so that the process gas can be supplied to the interior of the inner housing 112 .

 The second pipe 114 is in the form of a tube and is coupled to the other side of the inner housing 112. The other side of the second pipe 114 is coupled to the other side of the switching module 170. The second pipe 114 provides a path through which the process gas used in the process chamber 110 is discharged from the process chamber 110. In addition, the second pipe 114 provides a path through which the cooled process gas is fed into the process chamber 110. That is, the second piping 114 provides a path through which the process gas is supplied to the process chamber 110 when the process gas flows in the first direction, and when the process gas flows in the second direction, 110). ≪ / RTI > Meanwhile, although not shown in detail, the second pipe 114 may be formed by branching a plurality of end portions coupled to the inner housing 112. In this case, the second pipe 114 may be more uniformly supplied or exhausted to the inside of the inner housing 112.

The second pipe 114 may further include a second control valve 143 connected to the second pipe 114. The second control valve 143 controls the flow of the process gas flowing in the second pipe 114. The second control valve 143 is closed when the heat treatment is in progress in the process chamber 110 to shut off the flow of the process gas, and is opened when the heat treatment is completed, so that the process gas can be discharged.

Referring to FIG. 2, the inner housing 112 includes a first pipe 113 as a whole and a second pipe 114 as a whole on the other side thereof. Can be formed to flow entirely in the direction of the second pipe 114 from the first pipe 113 or in the direction of the first pipe 113 from the second pipe 114. Accordingly, the substrate 10 is vertically stacked in the inside of the inner housing 112 so that the substrate 10 can be cooled while flowing the process gas more efficiently between the substrates 10.

One side of the first cooling module 120 is connected to one side of the switching module 170 and the other side is connected to the blower module 130. That is, the first cooling module 120 is positioned between one side of the switching module 170 and one side of the blower module 130 based on the flow of the process gas in the first direction. The first cooling module 120 cools the used process gas supplied from the switching module 170 and supplies the cooled process gas to the blower module 130. Thus, the first cooling module 120 cools the process gas to prevent the blower module 130 from being damaged by the high temperature process gas.

The first cooling module 120 may be a general cooling module used for cooling a gas or a liquid. For example, although not shown in detail, the first cooling module 120 may include a cooling housing, a cooling pipe, and a heat sink. The cooling housing is hollow and has an inlet and an outlet at one side and the other side. In addition, the cooling pipe penetrates the cooling housing in the longitudinal direction or the width direction, and is formed so that a cooling medium such as cooling water flows therein. The heat dissipation plate is formed in a plate-like shape and is coupled so as to be arranged in a direction perpendicular to the outer peripheral surface of the cooling pipe. The heat radiating plate is cooled by a cooling medium flowing inside the cooling pipe, and flows into the cooling housing to cool the gas or liquid to be contacted. Accordingly, the first cooling module 120 cools the heat sink by the cooling medium flowing through the cooling pipe, and cools the process gas flowing through the inlet of the cooling housing by contacting the heat sink.

Also, the first cooling module 120 may be formed of a cooling module using a Peltier element. For example, although not shown in detail, the first cooling module 120 may include a cooling housing, a heat sink, and a Peltier element. The cooling housing is hollow and has an inlet and an outlet at one side and the other side. The heat dissipation plate may extend from one side of the cooling housing to the inside of the cooling housing. The Peltier element is coupled to be in contact with the heat sink at one side of the cooling housing. Accordingly, in the first cooling module 120, the heat sink is cooled by the Peltier element, and the process gas flowing through the inlet of the cooling housing is contacted with the heat sink to cool the process gas.

One side of the blower module 130 is connected to the first cooling module 120 and the other side of the blower module 130 is connected to the filter module 140. That is, the blower module 130 is positioned between the rear end of the first cooling module 120 and the front end of the filter module 140 based on the flow of the process gas. In addition, the blower module 130 may be connected to the second cooling module 150 when the second cooling module 150 is formed on the other side. The blower module 130 sucks the process gas in the process chamber 110 through the exhaust pipe 140 and introduces the process gas into the first cooling module 120.

The blower module 130 includes a blower. The blower is preferably formed of a blower which is sealed between the air inlet (not shown) and the air outlet (not shown). For example, the blower may be formed of a ring blower or a turbo blower. The blower 300 may be a rotary pump or a booster pump. The ring blower and the turbo blower are different from each other in specific structure, but the air between the air inlet and the air outlet is hermetically sealed to the outside so as to discharge the gas sucked into the air inlet into the exhaust hole without spilling out. Also, the rotary pump or the booster pump is different from the blowers in its specific structure. However, the blower may function as a blower that discharges gas, which is sealed between the air inlet and the air outlet, to the air outlet without discharging the air into the air outlet. Accordingly, the blower 300 prevents the process gas from being sucked out. Since the ring blower and the turbo blower are generally used, a detailed description thereof will be omitted. Meanwhile, the blower 300 may be a general blower when the air inlet (not shown) and the air outlet (not shown) need not be sealed from the outside.

One side of the filter module 140 is connected to the blower module 130 and the other side of the filter module 140 is connected to the other side of the switching module 170. That is, the filter module 140 is positioned between the blower module 130 and the other side of the switching module 170 based on the flow of the process gas. In addition, the filter module 140 may be connected to the second cooling module 150 when the second cooling module 150 is formed on one side. The filter module 140 filters the process gas supplied from the blower module 130 and supplies the filtered process gas to the switching module 170.

The filter module 140 is formed of a filter such as a Hepa filter, an Ul-wave filter, a carbon filter, or a mesh filter. The filters are widely used in a semiconductor process or a flat panel display device manufacturing process, and a detailed description thereof will be omitted here.

One side of the second cooling module 150 is connected to the blower module 130 and the other side of the second cooling module 150 is connected to the filter module 140. That is, the second cooling module 150 is positioned between the blower module 130 and the filter module 140 based on the flow of the process gas.

The second cooling module 150 further cools the process gas supplied through the blower module 130 and supplies the cooled process gas to the filter module 140. The process gas is rubbed against the blades or fans of the blower module 130 while being blown by the blower module 130, and the temperature of the process gas rises. Accordingly, the second cooling module 150 cools the process gas passing through the blower module 130 and supplies the process gas to the filter module 140, so that the process gas at a lower temperature is supplied to the filter module 140.

Also, the second cooling module 150 may be formed of the same module as the first cooling module 120.

The switching module 170 includes a first main pipe 171 and a second main pipe 172 and a first switching pipe 173 and a second switching pipe 174. The switching module 170 includes a first main valve 171a, a second main valve 172a, a first switching valve 173a, and a second switching valve 174a. Meanwhile, the first main valve 171a and the first switching valve 173a may be formed of one three-way valve. In addition, the second main valve 172a and the second switching valve 174a may be formed as one three-way valve.

One end of the switching module 170 is connected between the first pipe 113 of the process chamber 110 and the first cooling module and the other end of the switching module 170 is connected to the second pipe 114 of the process chamber 110 and the filter module 140 . The switching module 170 supplies the process gas discharged from the first pipe 113 to the first cooling module 120 or to the filter module 140. The switching module 170 supplies the process gas supplied from the filter module 140 to the second pipe 114 or the first pipe 113. That is, the switching module 170 supplies the process gas discharged from the first pipe 113 to the first cooling module 120 when the process gas flows in the first direction, And supplies the gas to the second pipe 114. The switching module 170 supplies the process gas discharged from the second pipe 114 to the first cooling module 120 when the process gas flows in the second direction, Gas is supplied to the first pipe 113.

One end of the first main pipe 171 is connected to the first pipe 113 and the other end is connected to the first cooling module 120. The first main pipe 171 includes a first main valve 171a. The first main pipe 171 provides a path through which the process gas discharged from the first pipe 113 flows to the first cooling module 120. The first main valve 171a controls the flow of the process gas flowing through the first main pipe 171.

One end of the second main pipe 172 is connected to the blower module 130 or the filter module 140 and the other end is connected to the second pipe 114. The second main pipe 172 includes a second main valve 172a. The second main pipe 172 provides a path through which the process gas discharged from the filter module 140 flows to the second pipe 114. The second main valve 172a controls the flow of the process gas flowing through the second main pipe 172.

One end of the first switching pipe 173 is connected to the front end of the first main valve 171a in the first main pipe 171 and the other end of the first switching pipe 173 is connected to the second main pipe 172 It is connected to the front end. The first switching pipe 173 includes a first switching valve 173a. The first switching valve 173a controls the flow of the process gas flowing through the first switching pipe 173. The first switching pipe 173 provides a path through which the process gas supplied from the filter module 140 flows to the first pipe 113. That is, when the first switching valve 173a and the second switching valve 174a are opened while the first main valve 171a and the second main valve 172a are disconnected, the first switching pipe 173 The first cooling module 120 and the first pipe 113 are connected. The first pipe 113 serves as a gas supply source for supplying the process gas to the process chamber 110. The process gas supplied from the filter module 140 is supplied to the process chamber 110 through the first pipe 113, (110).

The second switching pipe 174 is connected at one end to the rear end of the first main valve 171a at the first main pipe 171 and at the other end to the second end of the second main pipe 172a And is connected to the rear end. The second switching line 174 includes a second switching valve 174a. The second switching valve 174a controls the flow of the process gas flowing through the second switching pipe 174. The second switching pipe 174 provides a path through which the process gas discharged from the second pipe 114 flows to the first cooling module 120. That is, when the first switching valve 173a and the second switching valve 174a are opened while the first main valve 171a and the second main valve 172a are disconnected, the second switching pipe 174 is opened The second pipe 114 and the first cooling module 120 are connected. Accordingly, the second pipe 114 serves as an exhaust pipe for exhausting the process gas in the process chamber 110, and the process gas exhausted from the second pipe 114 flows into the first cooling module 120.

Next, the operation of the circulation cooling unit and the heat treatment apparatus having the circulation cooling unit according to an embodiment of the present invention will be described.

Figure 2 shows the flow of process gas as it flows in a first direction in the heat treatment apparatus of Figure 1; Figure 3 shows the flow of process gas as it flows in a second direction in the heat treatment apparatus of Figure 1; Figure 4 shows the supply and exhaust in the process chamber when the process gas flows in the first direction in the heat treatment apparatus of Figure 1; Figure 5 shows the supply and exhaust in the process chamber when the process gas flows in the second direction in the heat treatment apparatus of Figure 1;

First, the substrate 10 is loaded into the process chamber 110 and the heat treatment process is performed. After the heat treatment process is completed, the first control valve 113a of the first pipe 113 and the first control valve 113a of the second pipe 114 The second control valve 114a is opened. The first main valve 171a and the second main valve 172a of the switching module 170 are opened and the first and second switching valves 173a and 174a are shut off. The blower module 130 is operated to discharge the used high temperature process gas inside the process chamber 110 through the first pipe 113 and into the switching module 170. The process gas flows into the first cooling module 120 through the first main pipe 171 of the switching module 170 and is supplied to the second pipe 114 through the filter module 140, ). 2, a path through which the process gas flows in the first direction is formed so that the process gas is exhausted from the first pipe 113 of the process chamber 110, 110 to the second piping 114. At this time, the process gas flows from the second pipe 114 toward the first pipe 113 in the process chamber 110.

Next, after the process gas flows in the first direction for a predetermined time, the first main valve 171a and the second main valve 172a of the switching module 170 are shut off, and the first and second switching valves 173a and 173b 2 switching valve 174a is opened to allow the process gas to flow in the second direction. The used high temperature process gas inside the process chamber 110 is discharged through the second pipe 114 and flows into the switching module 170. The process gas flows into the first cooling module 120 through the second switching pipe 174 of the switching module 170 and flows into the first pipe 113 through the filter module 140 and the first switching pipe 173. [ And flows into the process chamber 110. 3, a path through which the process gas flows in the second direction is formed and supplied to the process chamber 110 after the process gas is discharged from the process chamber 110 and cooled. At this time, the process gas flows from the first pipe 113 toward the second pipe 114 in the process chamber 110.

The process gas is introduced into the first cooling module 120 while being heated to about 450 ° C. in the process chamber 110. The first cooling module 120 cools the process gas to 100 ° C or lower and supplies the cooled process gas to the blower module 130. The process gas is blown by the blower module 130, rubbing against the blades of the blower, and the temperature rises again. The second cooling module 150 further cools the process gas and supplies the cooled process gas to the filter module 140. The second cooling module 150 cools the process gas having the increased temperature and cools it to 40 to 60 ° C. Thus, the thermal processing apparatus 100 allows the cooled process gas to be supplied to the process chamber 110.

The operation of the blower 231 is stopped and the shutter of the process chamber 110 is opened to remove the substrate 10 when the temperature of the process chamber 110 and the substrate 10 falls below a predetermined temperature.

Next, a circulation cooling unit and a heat treatment apparatus having the same according to another embodiment of the present invention will be described.

6 is a configuration diagram of a circulation cooling unit and a heat treatment apparatus having the same according to another embodiment of the present invention. Fig. 7 is a specific configuration diagram of the blower module of Fig. 6; 8 is a specific configuration diagram of the first filter module of Fig. FIG. 9 is a specific configuration diagram of the second filter module of FIG. 6. FIG.

6 to 9, the circulation cooling unit and the heat treatment apparatus 200 including the circulation cooling unit according to another embodiment of the present invention include a process chamber 110, a first cooling module 120, a blower module 230, And a second cooling module (150). The heat treatment apparatus may further include a first filter module 240 and a second filter module 260. The first cooling module 120, the blower module 230, and the second cooling module 150 are connected to a circulation cooling unit 200a for cooling and re-supplying the high-temperature process gas discharged from the process chamber 110 . In addition, the circulation cooling unit 200a may further include a first filter module 240 and a second filter module 260. The circulating cooling unit 200a performs the operation of the switching module 170 of the circulating cooling unit 100a of FIG. 1 together in the blower module.

In the following description, the first cooling module 120, the blower module 230, and the second cooling module 150 are respectively included. However, the size of the process chamber 110 and the amount of the supplied process gas May be formed in two or more of them, respectively. Also, the first filter module 240 and the second filter module 260 may be formed of two or more in order to smoothly filter the process gas.

In addition, the first filter module 240 and the second filter module 260 may be omitted when the heat treatment apparatus 200 does not require filtering for the process gas.

Hereinafter, in the description of other embodiments of the present invention, the same constituent elements as those of the embodiment of the present invention shown in FIG. 1 are denoted by the same reference numerals, and a detailed description thereof will be omitted, .

One side of the first cooling module 120 is connected to the first pipe 113 of the process chamber 110 and the other side of the first cooling module 120 is connected to the blower module 230. When the second filter module 260 is connected to the first cooling module 120, one side of the first cooling module 120 is connected to the other side of the second filter module 260. That is, the first cooling module 120 is positioned between the first pipe 113 or the second filter module 260 and one side of the blower module 230 with respect to the first direction. The first cooling module 120 cools the used process gas supplied from the first pipe 113 or the second filter module 260 and supplies the cooled process gas to the blower module 230. The first cooling module 120 prevents the blower module 230 from being damaged by the high temperature process gas.

The blower module 230 includes a blower 231, a first blower pipe 232, a second blower pipe 233, a first sub-blower pipe 234, a second sub-blower pipe 235, A second sub-blower valve 238, and a second sub-blower valve 239. The first sub-blower valve 238, the second sub-blower valve 238, and the second sub- The blower module 230 is connected to the first cooling module 120 and the second blower pipe 233 is connected to the second cooling module 150 or the first filter module 240, . The blower module 230 sucks the process gas in the first direction through the first cooling module 120 and supplies the process gas to the second cooling module 150 or the first filter module 240, The second cooling module 240, and the second cooling module 150 to supply the process gas to the first cooling module 120. More specifically, the blower module 230 is configured such that the first blower valve 236 and the second blower valve 237 are opened and the first sub-blower valve 238 and the second sub-blower valve 239 are blocked And the first blower valve 236 and the second blower valve 237 are shut off and the first sub-blower valve 238 and the second sub-blower valve 239 are opened To supply the process gas in the second direction.

Meanwhile, the first blower valve 236 and the first sub-blower valve 238 are integrally formed as a first three-way valve, and the second blower valve 237 and the second sub-blower valve 239 are integrally formed And can be formed as a second three-way valve.

One side of the blower 231 is connected to the first cooling module 120 through the first blower pipe 232 and the other side is connected to the second cooling module 150 through the second blower pipe 233. The blower 231 sucks the process gas in the process chamber 110 through the first pipe 113 and flows into the first cooling module 120. The blower 231 sucks the process gas in the process chamber 110 through the second pipe 114 and flows into the second cooling module 150.

The blower 231 may be formed of at least two depending on the amount of the required process gas.

The blower 231 is preferably formed of a blower which is sealed between the air inlet (not shown) and the air outlet (not shown). For example, the blower 231 may be formed of a ring blower or a turbo blower. The ring blower and the turbo blower are different from each other in specific structure, but the air between the air inlet and the air outlet is hermetically sealed to the outside so as to discharge the gas sucked into the air inlet into the exhaust hole without spilling out. Therefore, the blower 231 prevents the process gas from being sucked out. Since the ring blower and the turbo blower are generally used, a detailed description thereof will be omitted.

The first blower pipe 232 has one end connected to the first cooling module 120 and the other end connected to the blower 231. The first blower pipe 232 provides a path for the process gas to flow into the blower 231 when the process gas flows in the first direction.

The second blower pipe 233 has one end connected to the blower 231 and the other end connected to the second cooling module 150. The second blower pipe 233 provides a path through which the process gas escapes from the blower 231 when the process gas flows in the first direction.

The first sub blower pipe 234 has one end connected to the first blower pipe 232 and the other end connected to the second blower pipe 233. The first sub-blower pipe 234 provides a path for the process gas to enter the blower 231 as the process gas flows in the second direction. In addition, the first sub-blower pipe 234 is blocked when the process gas flows in the first direction, so that the process gas does not flow.

The second sub blower pipe 235 has one end connected to the first blower pipe 232 and the other end connected to the second blower pipe 233. At this time, one end of the second sub-blower pipe 235 is connected to the first blower pipe 232 between one end of the first sub-blower pipe 234 and the other end of the first blower pipe 232. The other end of the first sub blower pipe 234 is connected between the other end of the first sub blower pipe 234 and the other end of the second blower pipe 233. The second sub-blower pipe 235 provides a path through which the process gas escapes from the blower 231 when the process gas flows in the second direction. Also, the second sub-blower pipe 235 is blocked when the process gas flows in the first direction, so that the process gas does not flow.

The first blower valve 236 is coupled to the first blower pipe 232 between one end of the first sub-blower pipe 234 and one end of the second sub-blower pipe 235. The first blower valve controls the flow of the process gas into the blower 231 through the first blower pipe 232. Accordingly, when the first blower valve 236 is opened, the process gas flows into the blower 231 through the first blower pipe 232. In addition, when the first blower valve 236 is disconnected from the second sub-blower valve 239, the flow of the process gas into the blower 231 through the first blower pipe 232 is blocked.

The second blower valve 237 is coupled to the second blower pipe 233 between the other end of the first sub-blower pipe 234 and the other end of the second sub-blower pipe 235. The second blower valve controls the flow of the process gas from the blower 231 through the second blower pipe 233. Accordingly, when the second blower valve 237 is opened, the process gas flows out from the blower 231 through the second blower pipe 233. Further, when the second blower valve 237 is shut off, the flow of the process gas from the blower 231 through the second blower pipe 233 is blocked.

The first sub-blower valve 238 is coupled to the first sub-blower pipe 234. The first sub-blower valve 238 controls the flow of process gas into the first sub-blower pipe 234. Thus, when the first sub-blower valve 238 is opened, the process gas flows through the first sub-blower pipe 234. That is, the first sub-blower pipe 234 provides a path through which the process gas escapes from the blower 231 when the process gas flows in the second direction.

The second sub-blower valve 239 is coupled to the second sub-blower pipe 235. The second sub-blower valve 239 controls the flow of process gas into the second sub-blower pipe 235. Thus, when the second sub-blower valve 239 is opened, the process gas flows through the second sub-blower pipe 235. That is, the second sub-blower pipe 235 provides a path for the process gas to flow into the blower 231 when the process gas flows in the second direction.

The first filter module 240 includes a first filter 241 and a first filter pipe 242 and a first main filter valve 243 and a first sub filter 244. The first filter module has one side connected to the second cooling module 150 and the other side connected to the second pipe 114. The first filter module 240 allows the process gas to bypass and flow to the first filter line 242 without flowing into the first filter 241 when the process gas flows in the second direction. The first filter module 240 is connected to the first filter 241 while the heated process gas flowing out of the second pipe 114 of the process chamber 110 is not cooled and flows into the first filter 241 ). Also, the first filter module 240 allows the process gas to flow through the first filter 241 when the process gas flows in the second direction. Accordingly, the first filter module 240 passes the cooled process gas through the second cooling module 150 to the first filter 241, and the process gas is filtered to pass through the second pipe 114, (110).

One side of the first filter 241 is connected to the second cooling module 150 and the other side is connected to the second pipe 114. The first filter 241 filters the process gas supplied from the second cooling module 150 and supplies the process gas to the second pipe 114 when the process gas flows in the first direction. The first filter 241 may include a filter such as a Hepa filter, an Ulf filter, a carbon filter, or a mesh filter. The filters are widely used in a semiconductor process or a flat panel display device manufacturing process, and a detailed description thereof will be omitted here.

One end of the first filter pipe 242 is connected to one side of the first filter 241 and the other end is connected to the other side of the first filter 241. The first filter pipe 242 forms a bypass path through which the process gas flows to the first filter 241. Thus, the first filter line 242 provides a path for the process gas to flow when the process gas flows in the second direction, so that the process gas does not flow to the first filter 241. On the other hand, when the process gas flows in the first direction, the process gas does not flow.

The first main filter valve 243 is coupled to the rear end of the first filter 241 and controls the flow of process gas into the first filter 241. That is, the first main filter valve 243 is closed when the process gas flows in the second direction to block the process gas from entering the first filter 241. Further, the first main filter valve 243 is opened when the process gas flows in the first direction, allowing the process gas to pass through the first filter 241.

The first subfilter valve 244 is installed in the first filter line 242 to control the flow of process gas to the first filter line 242. The first sub-filter 244 is opened when the process gas flows in the second direction to provide a path through which the process gas flows. In addition, the first sub-filter 244 is interrupted when the process gas flows in the first direction to block the process gas from flowing into the first filter line 242.

The second filter module 260 is formed to include a second filter 261 and a second filter pipe 262 and a second main filter valve 263 and a second sub filter valve 264. The second filter module 260 prevents the process gas from flowing into the first filter 241 and flows into the second filter pipe 262 when the process gas flows in the first direction. Further, the second filter module 260 allows the process gas to pass through the second filter 261 when the process gas flows in the second direction. Accordingly, the second filter module 260 passes the cooled process gas through the first cooling module 120 to the second filter 261, and the process gas is filtered to pass through the first pipe 113, (110). The second filter module 260 is connected to the second filter 261 in a state where the heated process gas flowing out of the first pipe 113 of the process chamber 110 is not cooled, ).

One side of the second filter 261 is connected to the first pipe 113 and the other side is connected to the first cooling module 120. The second filter 261 filters the process gas supplied from the first cooling module 120 and supplies the process gas to the first pipe 113 when the process gas flows in the second direction. The second filter 261 may include a filter such as a Hepa filter, an Ul-wave filter, a carbon filter, or a mesh filter.

One end of the second filter pipe 262 is connected to one side of the second filter 261 and the other end is connected to the other side of the second filter 261. The second filter pipe 262 forms a bypass path through which the process gas flows to the second filter 261. Thus, the second filter line 262 provides a path for the process gas to flow when the process gas flows in the first direction, so that the process gas does not flow to the second filter 261.

The second main filter valve 263 is coupled to the front end of the second filter 261 and controls the flow of the process gas into the second filter 261. The second main filter valve 263 is interrupted when the process gas flows in the first direction to block the heated process gas from entering the second filter 261. In addition, the second main filter valve 263 is opened when the process gas flows in the second direction to allow the process gas to pass through the second filter 261.

The second subfilter valve 264 is installed in the second filter line 262 to control the flow of process gas to the second filter line 262. The second subfilter valve 264 is opened when the process gas flows in the first direction to provide a path through which the process gas flows. In addition, the second sub-filter 264 is interrupted when the process gas flows in the second direction to block the process gas from flowing into the second filter line 262.

Next, the operation of the heat treatment apparatus having the circulation cooling unit according to another embodiment of the present invention will be described.

First, the substrate 10 is loaded into the process chamber 110 and the heat treatment process is performed. After the heat treatment process is completed, the first control valve 113a of the first pipe 113 and the first control valve 113a of the second pipe 114 The second control valve 114a is opened. Also, the first filter valve 243 of the first filter module 240 is opened and the first sub filter valve 244 is shut off. Also, the first main blower valve 236 and the second main blower valve 237 of the blower module 230 are opened and the first sub-blower valve 238 and the second sub-blower valve 239 are shut off. Further, the second filter valve 263 of the second filter module 260 is shut off and the second sub filter valve 264 is opened. Thus, the circulation cooling unit forms a path through which the process gas flows in the first direction.

Next, the blower 231 is operated to cause the used high-temperature process gas in the process chamber 110 to flow in the first direction, and the first process gas is supplied to the first cooling module 120 through the first pipe 113 ≪ / RTI > At this time, the process gas flows into the first cooling module 120 while being heated to about 450 ° C. The first cooling module 120 cools the process gas to be introduced into the blower 231 through the first main blower pipe 232. The process gas flowing into the blower 231 is cooled by the first cooling module 120 and cooled to 100 ° C or lower. The process gas passing through the blower 231 is supplied to the second cooling module 150 through the second main blower pipe 233. The process gas passing through the blower 231 is rubbed against the blades of the blower 231, and the temperature rises again. The second cooling module 150 further cools the process gas and supplies it to the first filter module 240. The second cooling module 150 cools the process gas having the increased temperature and cools it to 40 to 60 ° C. Accordingly, the second cooling module 150 can be bypassed when the process gas does not rise in temperature as it passes through the blower 231. The process gas is filtered while passing through the first filter 241 and flows into the process chamber 110 through the second pipe 114.

Next, the circulation cooling unit forms a path through which the process gas flows in the second direction. That is, the first control valve 113a of the first pipe 113 and the second control valve 114a of the second pipe 114 are opened. Further, the first filter valve 243 of the first filter module 240 is shut off and the first sub filter valve 244 is opened. Also, the first main blower valve 236 and the second main blower valve 237 of the blower module 230 are disconnected and the first sub-blower valve 238 and the second sub-blower valve 239 are opened. Further, the second filter valve 263 of the second filter module 260 is opened and the second sub filter valve 264 is shut off. Thus, the circulation cooling unit forms a path through which the process gas flows in the second direction. The process gas flows through the second piping 114 and the second subfilter piping 242 of the first filter module 240 and the second subblowing piping 235 of the second cooling module 150 and the blower module 230, The first sub-blower pipe 234, the first cooling module 120, and the first pipe 113. The first sub- In addition, the process gas flows in the process chamber 110 from the first pipe 113 to the second pipe 114.

The heat treatment apparatus 200 cools the process gas in the process chamber 110 by alternately flowing the process gas in the first direction and the second direction, and supplies the process gas into the process chamber 110 again. The operation of the blower 231 is stopped and the shutter of the process chamber 110 is opened to remove the substrate 10 when the temperature of the process chamber 110 and the substrate 10 falls below a predetermined temperature.

Next, a blower module used in a heat treatment apparatus according to another embodiment of the present invention will be described.

10 is a specific configuration diagram of a blower module according to another embodiment of the present invention.

Referring to FIG. 10, the blower module 330 according to another embodiment of the present invention includes a first blower 331 and a second blower 332. The blower module 330 allows the process gas to flow alternately in the first direction and the second direction. The blower module may be used in place of the blower module 200 constituting the circulating cooling unit of the heat treatment apparatus according to another embodiment of the present invention.

Meanwhile, the first blower 331 and the second blower 332 may be integrally formed. The first blower 331 and the second blower 332 are different from the blower in the direction in which the process gas flows, and are the same or similar to each other in the configuration, and thus a detailed description thereof will be omitted. In addition, the blower module 330 also has a pipe connecting the first cooling module 120 and the second cooling module 150, but since the pipe does not have a characteristic function, .

One side of the first blower 331 is connected to the first cooling module 120 and the other side is connected to the second cooling module 150. The first blower 331 is formed so that the process gas flows in the first direction. That is, the first blower 331 is operated to suck the process gas from the first pipe 113 and supply it to the second pipe 114.

One side of the second blower 332 is connected to the first cooling module 120 and the other side is connected to the second cooling module 150. The second blower 332 is formed so that the process gas flows in the second direction. That is, the second blower 332 is operated to suck the process gas from the second pipe 114 and supply it to the first pipe 113.

The blower module 330 actuates the first blower 331 and stops the second blower 332 to allow the process gas to flow in the first direction. Also, the blower module 330 stops the first blower 331 and activates the second blower 332 to allow the process gas to flow in the second direction.

The heat treatment apparatus re-supplies the process gas used in the process chamber through circulation cooling to form a supply / exhaust flow of the process gas, thereby enabling rapid cooling of the process chamber and the substrate.

Further, since the process gas is supplied to the process chamber 110 while alternately flowing in the first direction and the second direction, the cooling process is shortened by cooling the process chamber 110 and the substrate more efficiently, 110) and the temperature deviation on both sides of the substrate are reduced. 4 and 5, when the process gas flows in the first direction in the heat treatment apparatus, the process gas cooled to the second pipe 114 flows into the process chamber 110, Is discharged to the first pipe (113), the temperature of the second pipe (114) side becomes relatively high. However, when the process gas flows in the second direction, the process gas cooled to the first pipe 113 flows into the first pipe 113, thereby effectively cooling the first pipe 113 side. Accordingly, the temperature of the first pipe 113 side and the temperature of the second pipe 114 side are lowered together in the process chamber 110.

 Also, in the above-described heat treatment apparatus, the nitrogen gas previously supplied to the process chamber 110 is recycled to the process chamber 110 in the metal annealing process requiring oxygen concentration control, whereby the oxygen concentration can be removed without consuming nitrogen gas do.

100, 200: Heat treatment apparatus
100a. 200a: circulating cooling unit
110: process chamber 120: first cooling unit
130, 230, 330: Blower module 140: Filter module
150: second cooling unit 240: first filter module
260: second filter module 170: switching module

Claims (21)

delete One side connected to the first pipe of the process chamber and the other side connected to the second pipe of the process chamber to suck and cool the process gas in the process chamber and then supply the process gas to the process chamber,
A first direction in which the supply direction of the process gas is sucked from the first pipe and supplied to the second pipe and a second direction in which the second pipe is sucked from the second pipe and supplied to the first pipe,
A first cooling module connected to the first pipe and cooling the process gas,
A blower module having one side connected to the first cooling module and a blower for sucking the process gas of the process chamber;
A switching module connected between the first pipe and the first cooling module and the other connected between the second pipe and the blower module and allowing the process gas to alternately flow in the first direction and the second direction, And the circulation cooling unit. 3. The method of claim 2,
The switching module
A first main pipe having a first main valve, one end connected to the first pipe and the other end connected to a first cooling module,
A second main pipe having a second main valve, one end connected to the blower module and the other end connected to the second pipe,
A first switching pipe having a first switching valve and having one end connected to the front end of the first main valve in the first main pipe and the other end connected to the front end of the second main valve in the second main pipe;
And a second switching pipe having one end connected to the rear end of the first main valve in the first main pipe and the other end connected to the rear end of the second main valve in the second main pipe, And the cooling water is cooled. The method of claim 3,
The first main valve and the second main valve are opened and the first and second switching valves are closed in the first direction,
Wherein the first main valve and the second main valve are blocked and the first switching valve and the second switching valve are opened in the second direction. 3. The method of claim 2,
A filter module having one side connected to the blower module and the other side connected to the other side of the switching module;
And a second cooling module connected between the blower module and the filter module. 6. The method of claim 5,
Wherein the filter module is formed to include a HEPA filter, an UL wave filter, a carbon filter, or a mesh filter. One side connected to the first pipe of the process chamber and the other side connected to the second pipe of the process chamber to suck and cool the process gas in the process chamber and then supply the process gas to the process chamber,
A first direction in which the supply direction of the process gas is sucked from the first pipe and supplied to the second pipe and a second direction in which the second pipe is sucked from the second pipe and supplied to the first pipe,
A first cooling module connected to the first pipe and cooling the process gas of the process chamber,
A blower module having one side connected to the first cooling module and sucking the process gas of the process chamber to alternately flow in the first direction and the second direction;
And a second cooling module for cooling the process gas of the process chamber, one side of which is connected to the blower module and the other side of which is connected to the second pipe. 8. The method of claim 7,
The blower module
A blower for sucking and supplying the process gas,
A first blower pipe having one end connected to the first cooling module and the other end connected to the blower,
A second blower pipe having one end connected to the blower and the other end connected to the second cooling module,
A first sub-blower pipe having one end connected to the first blower pipe and the other end connected to the second blower pipe,
And the other end of the first sub blower pipe is connected to the first blower pipe between the one end of the first sub blower pipe and the other end of the first blower pipe and the other end is connected between the other end of the first sub blower pipe and the other end of the second blower pipe And a second sub-blower pipe connected to the second blower pipe. 9. The method of claim 8,
The blower module
A first blower valve coupled to the first blower pipe between one end of the first sub blower pipe and one end of the second sub blower pipe,
A second blower valve coupled to the second blower pipe between the other end of the first sub-blower pipe and the other end of the second sub-blower pipe,
A first sub-blower valve coupled to the first sub-blower pipe and
And a second sub-blower valve coupled to the second sub-blower pipe. 8. The method of claim 7,
The blower module
A first blower for allowing the process gas to flow in the first direction;
And two blowers (320a) for allowing the process gas to flow in the second direction, wherein the first blower and the second blower alternately operate. 8. The method of claim 7,
A first filter module positioned between the second pipe and the second cooling module for filtering the process gas supplied to the second pipe,
Further comprising a second filter module located between the first pipe and the first cooling module for filtering the process gas supplied to the first pipe. 12. The method of claim 11,
The first filter module
A first filter having one side connected to the second cooling module and the other side connected to the second pipe;
A first filter pipe having one end connected to one side of the first filter and the other end connected to the other side of the first filter;
A first main filter valve coupled to a front end of the first filter,
And a first sub-filter valve installed in the first filter pipe,
The second filter module
A second filter having one side connected to the first pipe and the other side connected to the first cooling module;
A second filter pipe having one end connected to one side of the second filter and the other end connected to the other side of the second filter;
A second main filter valve coupled to a downstream end of the second filter,
And a second sub-filter valve installed in the second filter pipe. 13. The method of claim 12,
Wherein the first filter and the second filter are formed by including a HEPA filter, an ULPA filter, a carbon filter, or a mesh filter. 13. The method of claim 12,
Wherein the first direction comprises at least one of the first pipe, the second filter pipe, the first cooling module, the first main blower pipe, the blower, the second main blower pipe, the second cooling module, The first sub-blower pipe, the second sub-blower pipe, the first sub-blower pipe, the second sub-blower pipe, and the second sub-blower pipe, and the second direction is made to flow sequentially through the second pipe, And the second cooling module, the second filter, and the first pipe sequentially. 9. The method according to claim 2 or 8,
Wherein the blower is formed by a ring blower, a turbo blower, a blower, a rotary pump, or a booster pump. 9. The method according to claim 2 or 8,
Wherein the blower is formed of at least two. A process chamber having a first pipe and a second pipe, in which a substrate is positioned and heat-treated;
And a circulation cooling unit connected between the first pipe and the second pipe, the circulation cooling unit being formed according to any one of claims 2 to 14. 18. The method of claim 17,
Wherein the process chamber includes an outer housing and an inner housing received within the outer housing,
The first pipe is connected to one side of the inner housing through one side of the outer housing,
And the second pipe is connected to the other side of the inner housing through the other side of the outer housing. 19. The method of claim 18,
Wherein the process chamber is formed integrally with the outer housing and the inner housing. 18. The method of claim 17,
Wherein the process chamber is a chamber for a batch-type heat-treating apparatus or a chamber for an in-line type heat-treating apparatus. 18. The method of claim 17,
Wherein the substrate is a flat panel display, a glass substrate for a solar cell, or a semiconductor wafer.

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