JP2007170740A - Gas heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas heating device free from intrusion of impurities into a gas from a heat generating means, and capable of supplying the uniformly-heated gas to a wide range and easily performing its maintenance with a simple structure. <P>SOLUTION: This gas heating device 30 comprises a back face wall body 14c having a gas introduction opening 14d, an intermediate wall body 14b having a plurality of through holes 14x, a front face wall body 14a having a plurality of gas supply openings 14y, spaces 26 respectively disposed among the wall bodies, a plate heater 14h attached to an outer face of the back face wall body 14c as a heating means, and a protective member 31 covering the whole plate hater 14h, and an air supply pipe 18 is connected with the gas introduction opening 14d of the back face wall body 14c. By disposing the frame-shaped spacers 26, a first gas diffusion chamber 27 is formed between the back face wall body 14c and the intermediate wall body 14b, and a second gas diffusion chamber 28 is formed between the front face wall body 14a and the intermediate wall body 14b. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a gas heating apparatus having a function of heating and discharging various gases such as supplied air and nitrogen.

  As a heating apparatus used in a heat treatment process or various heating processes of a metal material or a synthetic resin material, an apparatus for heating an object to be processed using a high-temperature gas heated by a heating element has been proposed (for example, (See Patent Documents 1 and 2.) If such a heating apparatus is used, the temperature rise of the workpiece can be accelerated, so that the heat treatment time can be shortened and the heat treatment efficiency can be improved.

  However, since the high-temperature gas used in the heating devices described in Patent Documents 1 and 2 is formed by directly heating the gas with a heating heater, impurities generated from the surface of the heating heater are mixed into the high-temperature gas. As a result of the deterioration of the cleanliness in the heating device, the processing object may be adversely affected.

  Therefore, in order to solve such a problem, a heat treatment apparatus having a structure in which the gas to be heated does not directly touch the heat generating heater has been proposed (see, for example, Patent Document 3).

JP-A-2005-9749 JP 2005-11911 A JP 2004-228462 A

  Since the heating device described in Patent Documents 1 and 2 is a method of blowing a preheated high-temperature gas into the heating device, it can efficiently heat the gas, but as described above, impurities generated from the surface of the heater, etc. May be mixed into the high temperature gas and deteriorate the cleanliness in the heating device.

  On the other hand, in the gas heating device constituting the heat treatment apparatus described in Patent Document 3, since the gas does not directly touch the heat generating heater, it is effective in maintaining the cleanliness in the heat treatment apparatus, but the structure of the gas heating apparatus is complicated. Turn into. For this reason, maintenance work such as when the gas heating means fails is troublesome.

  Furthermore, in the heating apparatus (heat treatment apparatus) described in Patent Documents 1 to 3, since the gas dispersion means is provided to blow out the heated gas to a wide range in the apparatus, the apparatus is complicated. Yes.

  The problem to be solved by the present invention is to provide a gas heating apparatus that can blow out a uniformly heated gas over a wide range without causing impurities to be mixed into the gas from the heating means, and has a simple structure and easy maintenance. There is.

  The gas heating device according to the present invention is attached to the outside of a gas diffusion chamber for diffusing gas flowing in from at least one gas introduction port, and a wall constituting the gas diffusion chamber for raising the temperature of the gas in the gas diffusion chamber. And a plurality of gas outlets for discharging the gas in the gas diffusion chamber. With such a configuration, the gas introduced into the gas diffusion chamber can be heated by the heat generating means attached to the outside of the wall constituting the gas diffusion chamber, so that impurities are mixed into the gas from the heat generating means. Does not occur. Moreover, since the gas heated in the gas diffusion chamber flows and diffuses in the gas diffusion chamber, and is discharged from a plurality of gas outlets, the uniformly heated gas can be blown out over a wide range. Furthermore, since the heat generating means is attached outside the wall constituting the gas diffusion chamber, it has a simple structure and is easy to maintain.

  In this case, if the heat generating means is provided around the gas inlet, the vicinity of the gas inlet where the gas immediately after the introduction is present can be heated intensively, so that the heating efficiency can be improved.

  On the other hand, the back wall body having at least one gas inlet and the front wall body having a plurality of gas outlets are arranged with a gap, and the gas diffusion chamber is formed by closing the outer peripheral portion of the gap. It is desirable. With such a configuration, it is possible to form a gas diffusion chamber that can ensure a relatively wide diffusion region while having an extremely simple structure.

  An intermediate wall body having a plurality of through holes can be provided between the gas inlet and the gas outlet in the gas diffusion chamber. With such a configuration, the gas flowing from the gas inlet to the gas outlet in the gas diffusion chamber is dispersed in a plurality of regions by passing through the plurality of through holes of the intermediate wall body. The uniform heating property of gas can be improved.

  In this case, it is desirable that the number of air outlets of the front wall body be larger than the number of through holes of the intermediate wall body. With such a configuration, it is possible to disperse the gas introduced from the gas inlet into the gas diffusion chamber into a plurality of regions that increase in stages, so that the uniformly heated gas can be distributed over a wide range. It becomes possible to blow out evenly.

  According to the present invention, it is possible to provide a gas heating device that does not cause impurities from being mixed into the gas from the heat generating means, can blow out uniformly heated gas over a wide range, and has a simple structure and easy maintenance.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a perspective view showing a gas heating apparatus according to an embodiment of the present invention, FIG. 2 is a front view of the gas heating apparatus shown in FIG. 1, FIG. 3 is a cross-sectional view taken along the line AA in FIG. 3 is a cross-sectional view taken along line BB in FIG. 3, and FIG. 5 is a cross-sectional view taken along line CC in FIG.

  As shown in FIGS. 1 to 5, the gas heating device 30 of the present embodiment includes a back wall body 14 c having a gas inlet 14 d, an intermediate wall body 14 b having a plurality of through holes 14 x, and a plurality of gas outlets. A front wall body 14a having 14y, a spacer 26 disposed between the respective wall bodies, a plate heater 14h attached to the outer surface of the back wall body 14c as a heating means, and a protection covering the entire plate heater 14h. A gas supply pipe 18 is connected to the gas inlet 14d of the back wall 14c.

  By interposing a frame-shaped spacer 26, a gap is provided between the back wall 14c and the intermediate wall 14b, and the outer peripheral portion of these gaps is closed by the spacer 26, whereby a first gas diffusion chamber 27 is formed. ing. Similarly, a gap is provided between the front wall 14 a and the intermediate wall 14 b by interposing a frame-shaped spacer 26, and the second gas diffusion chamber 28 is closed by closing the outer periphery of these gaps with the spacer 26. Is formed.

  A plate that is attached to the outside of the back wall 14c that constitutes the first gas diffusion chamber 27 and that introduces the gas introduced into the first gas diffusion chamber 27 through the gas inlet port 14d from the outside through the gas inlet 14d. Since it can be heated by the heater 14h, impurities are not mixed into the gas from the plate heater 14h. The gas heated in the first gas diffusion chamber 27 flows and diffuses in the first gas diffusion chamber 27, and then passes through the plurality of through holes 14 x of the intermediate wall body 14 b to be in the second gas diffusion chamber. 28 flows into the second gas diffusion chamber 28 and diffuses, and then is discharged from the plurality of gas outlets 14y of the front wall 14a, so that the uniformly heated gas can be blown out over a wide range. .

  Furthermore, since the plate heater 14h, which is a heat generating means, is attached to the outside of the back wall 14c constituting the first gas diffusion chamber 27, the electric wiring for supplying power to the plate heater 14h is simple and has a simple structure. And maintenance is easy. Further, since the plate heater 14h is attached to the periphery of the gas inlet 14d outside the back wall 14c, the plate heater 14h is concentrated around the gas inlet 14d where the gas immediately after being introduced into the first gas diffusion chamber 27 exists. The heating efficiency is also good.

  Further, a first gas diffusion chamber 27 is formed by interposing a frame-shaped spacer 26 between the back wall body 14c and the intermediate wall body 14b, and a frame shape is formed between the front wall body 14a and the intermediate wall body 14b. Since the second gas diffusion chamber 28 is formed by interposing the spacers 26, a relatively wide diffusion region can be ensured with an extremely simple structure.

  Further, since the intermediate wall 14b having a plurality of through holes 14x is provided between the gas inlet 14d of the back wall 14c and the plurality of gas outlets 14y of the front wall 14a, the first gas diffusion is performed. In the chamber 27, the gas flowing from the gas inlet 14d toward the gas outlet 14y of the front wall 14a is dispersed in a plurality of regions by passing through the plurality of through holes 14x of the intermediate wall 14b. Therefore, the uniform heating property of gas can be improved. The intermediate wall 14b may be omitted and only one gas diffusion chamber may be provided, or two or more intermediate walls may be provided.

  In the present embodiment, as shown in FIG. 2, the front wall body 14a has a total of 112 gas blowout ports 14y having an inner diameter of about 2 mm, with a distance of about 10 mm, 16 pieces in the vertical direction and 7 pieces in the horizontal direction. It has been established. Further, as shown in FIG. 4, the intermediate wall 14b has a total of 28 through holes 14x having an inner diameter of about 4 mm at intervals of about 20 mm, 8 in the vertical direction and 4 in the horizontal direction. Furthermore, as shown in FIG. 5, one gas inlet 14d, which is a through hole having an inner diameter of about 15 to 20 mm, is opened at the center of the back wall 14c, and an air supply pipe 18 is connected to the gas inlet 14d. ing.

  Further, in order to avoid the gas exiting from the gas introduction port 14d from flowing into the second gas diffusion chamber 28 without diffusing in the first gas diffusion chamber 27, as shown in FIGS. The through hole 14x is not opened in the central portion of the intermediate wall 14b facing the gas inlet 14d of the wall 14c. In the present embodiment, the sum of the opening areas of the through holes 14x of the intermediate wall 14b and the sum of the opening areas of the gas outlets 14y of the front wall 14a are set to be substantially equal. It is not limited to.

  As described above, the number of the gas outlets 14y of the front wall body 14a is 112, and the number of the through holes 14x of the intermediate wall body 14b is 28, so that the number of the gas outlets 14y is the number of the through holes 14x. It is set to be larger. Therefore, it is possible to disperse the gas introduced into the first gas diffusion chamber 27 from the gas inlet 14d into a plurality of regions that increase stepwise from the through hole 14x toward the gas outlet 14y. The heated gas can be blown out uniformly over a wide range. In addition, since the number of the gas blower outlets 14y and the number of the through holes 14x are not limited to this, the number, the inner diameter, the arrangement interval, the arrangement area, and the like can be arbitrarily set.

  Next, with reference to FIGS. 6-12, the heating apparatus using the gas heating apparatus 30 mentioned above is demonstrated. 6 is a front view showing a heating device using the gas heating device shown in FIG. 1, FIG. 7 is a plan view of the heating device shown in FIG. 6, FIG. 8 is a side view of the heating device shown in FIG. 10 is a partially cutaway front view of the heating device shown in FIG. 6, FIG. 10 is a partially omitted sectional view taken along the line DD of FIG. 6, and FIG. 11 is a front view of the vicinity of the gas heating device constituting the heating device shown in FIG. 12 is a cross-sectional view taken along the line EE of FIG.

  As shown in FIGS. 6 to 12, the heating device 10 includes a magazine housing chamber formed between two heating side walls 12 disposed opposite to each other in a box-shaped external furnace body 11 formed of a heat insulating material. 13, a gas heating device 30 disposed on the back side of the magazine housing chamber 13, a plate heater 12 h provided on the heating side wall 12 as a heating means, and a heating side wall 12 on the front side of the magazine housing chamber 13. The door body 15 is disposed so as to be openable and closable at a position away from the end surface, and the auxiliary door body 16 is disposed between the door body 15 and the magazine housing chamber 13. The door body 15 is pivotally supported around a plurality of hinges 15a and includes a lock mechanism 15b for keeping the door body 15 in a closed state. The auxiliary door body 16 is attached by a plurality of stays 16 a at a position away from the back surface of the door body 15 so as to be substantially parallel to the door body 15.

  The external furnace body 11 has a rectangular parallelepiped shape that is long in the front-rear direction, and a plurality of support legs 17 formed of a V-shaped plate material are disposed on the lower surface of the bottom wall 11b. The exhaust pipe 19 is piped through the back wall 11a. A top plate 20 and a bottom plate 21 are respectively attached above and below the heating side wall 12 and the gas heating device 30, and a plurality of spacers 22 are disposed between the bottom surface of the bottom plate 21 and the top surface of the bottom wall 11 b of the external furnace body 11. Yes. Therefore, the magazine housing chamber 13 is surrounded by the two heating side walls 12, the gas heating device 30, the top plate 20, and the bottom plate 21, and from the back wall 11a, the bottom wall 11b, the side wall 11c, and the top wall 11d of the external furnace body 11. It is located at a distance.

  In the magazine storage chamber 13, a plurality of support members 24 for placing the magazine 23 are arranged at positions near the four corners of the upper surface of the bottom plate 21. On the inner side of each support member 24 (center side of the magazine housing chamber 13), stepped support portions 24a and 24b for supporting the magazine 23 are provided, and on the front side of each support portion 24a and 24b, When the magazine 23 is placed on the support member 24, a guide slope 24g for guiding the bottom surface to the support portions 24a and 24b is formed. In the present embodiment, the magazine 23 is placed on the support portion 24b, but can be placed on the support portion 24a according to the size in the width direction of the magazine. On the left and right inner surfaces of the magazine 23, a plurality of lateral groove portions 23a for horizontally holding the lead frame 25, which is an object to be heated, are formed at regular intervals. Note that the magazine 23 and the lead frame 25 shown in FIG. 9 are merely examples, and the present invention is not limited thereto.

  On the other hand, as shown in FIG. 12, an air supply pipe 18 is connected to the back side of the gas heating device 30, and a plurality of exhaust pipes 19 serving as discharge paths for the gas supplied to the magazine housing chamber 13 are formed in the external furnace body 11. A through pipe is provided in the back wall 11a. The structure and function of the gas heating device 30 are as described above.

  When heat treatment is performed using the heating device 10, the magazine 23 containing a plurality of objects to be heated (lead frames 25) is kept as it is in the magazine housing chamber 13 formed between the plurality of heating side walls 12. After the magazine housing chamber 13 is closed with the auxiliary door body 16 and the door body 15, the magazine is accommodated by causing the heating side wall 12 having the heating means (plate heaters 12 h, 14 h) and the gas heating device 30 to generate heat. The lead frame 25 in the chamber 13 can be heat-treated together with the magazine 23. After the heat treatment is completed, the auxiliary door body 16 and the door body 15 can be opened, and the lead frame 25 can be taken out together with the magazine 23 from the magazine housing chamber 13. The magazine housing chamber 13 is formed in a box-shaped external furnace body 11 formed of a heat insulating material, and is heated from three directions by the plurality of heating side walls 12 and the gas heating device 30, so that the temperature distribution is uniform. Also excellent.

  In addition, in order to supply gas to the magazine housing chamber 13, an air supply pipe 18 that is a gas supply means is connected to the gas heating device 30, and an exhaust pipe 19 that is an exhaust path is provided on the back wall 11 a of the external furnace body 11. Yes. Therefore, the gas flowing into the first gas diffusion chamber 27 from the supply pipe 18 through the gas inlet 14d diffuses therein, and then passes through the plurality of through holes 14x of the intermediate wall body 14b, respectively. After flowing into the interior 28 and diffusing in the interior, it passes through the plurality of gas outlets 14 y of the front wall 14 a and flows into the magazine housing chamber 13.

  After the gas flowing into the magazine storage chamber 13 circulates in the magazine storage chamber 13, it passes through the gap S between the front of the magazine storage chamber 13 and the auxiliary door body 16 shown in FIG. After flowing out and passing through the gap between the top plate 20, the bottom plate 21 and the heating side wall 12 and the external furnace body 11, and flowing into the back side of the gas heating device 30, the plurality of exhaust pipes 19 respectively. It is discharged outside the heating device 10.

  As described above, the gas heated by passing through the first gas diffusion chamber 27 and the second gas diffusion chamber 28 in the gas heating device 30 generating heat by the plate heater 14 h circulates in the magazine housing chamber 13. The uniformity of temperature distribution can be maintained. In addition, since the plate heater 14h, which is a heating means, is provided on the back surface of the gas heating device 30, the gas is heated by the entire gas heating device 30 generated by the plate heater 14h. it can. Furthermore, since the heated gas supplied from the gas heating device 30 circulates in the magazine housing chamber 13 and is then discharged from the exhaust pipe 19 provided in the external furnace body 11, the cleanliness stability is also excellent. Thus, the lead frame 25 in the magazine 23 is not soiled. In addition, although nitrogen is suitable as a gas supplied to the magazine storage chamber 13, it is not limited to this.

  In the heating device 10, the exhaust pipe 19 that is an exhaust path is provided on the back wall 11 a of the external furnace body 11, so that the gap S between the front surface of the magazine housing chamber 13 and the auxiliary door body 16 is moved out of the magazine housing chamber 13. The gas that has flowed out passes through the gap between the top plate 20, the bottom plate 21 and the heating side wall 12 and the external furnace body 11, flows into the back side of the gas heating device 30, and then is discharged from the exhaust pipe 19. Become. Accordingly, the gas supplied from the gas heating device 30 to the magazine housing chamber 13 circulates thoroughly inside and outside the magazine housing chamber 13 and then is exhausted from the exhaust pipe 19, thereby further improving the uniformity of temperature distribution. Can be made.

  After the heat treatment is completed, the inside of the magazine housing chamber 13 can be cooled by stopping the heat generation of the plate heater 14 h of the gas heating device 30 and supplying the gas to the magazine housing chamber 13 through the air supply pipe 18. . Accordingly, the object to be heated (the lead frame 25 in the magazine 23) can be rapidly cooled or the cooling time can be arbitrarily set as necessary. For this reason, the efficiency of the work process can be achieved by diversifying the cooling process or shortening the cooling time.

  As described above, the structure, function, and the like of the heating device 10 configured using the gas heating device 30 have been described, but this is an example, and the use of the gas heating device of the present invention is not limited thereto. It can be widely used in industrial fields that require heated gas. In addition, if a cooling means is provided instead of the heat generating means constituting the gas heating device of the present invention, it can be used as a gas cooling device.

  The gas heating device of the present invention can be widely used in industrial fields in which a heat treatment is performed using a heated gas, such as a heat treatment step or various heating steps of a metal material or a synthetic resin material.

It is a perspective view which shows the gas heating apparatus which is embodiment of this invention. It is a front view of the gas heating apparatus shown in FIG. It is sectional drawing in the AA of FIG. It is sectional drawing in the BB line of FIG. It is sectional drawing in CC line of FIG. It is a front view which shows the heating apparatus using the gas heating apparatus shown in FIG. It is a top view of the heating apparatus shown in FIG. It is a side view of the heating apparatus shown in FIG. It is a partially notched front view of the heating apparatus shown in FIG. FIG. 7 is a partially omitted cross-sectional view taken along line DD in FIG. 6. It is a front view of the gas heating apparatus vicinity which comprises the heating apparatus shown in FIG. It is sectional drawing in the EE line | wire of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Heating device 11 External furnace body 11a Back wall 11b Bottom wall 11c Side wall 11d Top wall 12 Heating side wall 12h, 14h Plate heater 13 Magazine storage chamber 14a Front wall body 14b Intermediate wall body 14c Back wall body 14d Gas inlet 14x Through-hole 14y Gas outlet 15 Door body 15a Hinge 15b Lock mechanism 16 Auxiliary door body 16a Stay 17 Support leg 18 Air supply pipe 19 Exhaust pipe 20 Top plate 21 Bottom plate 22 Spacer 23 Magazine 23a Horizontal groove part 24 Support members 24a, 24b Support part 25 Lead frame 26 Spacer 27 First gas diffusion chamber 28 Second gas diffusion chamber S Gap

Claims (5)

  A gas diffusion chamber for diffusing the gas flowing in from at least one gas inlet, a heating means attached outside the wall constituting the gas diffusion chamber for raising the temperature of the gas in the gas diffusion chamber, and the gas A gas heating device comprising: a plurality of gas outlets that discharge gas in the diffusion chamber.   The gas heating device according to claim 1, wherein the heat generating means is attached around the gas inlet.   The back wall body having at least one gas inlet and the front wall body having a plurality of gas outlets are arranged with a gap, and the gas diffusion chamber is formed by closing an outer peripheral portion of the gap. The gas heating apparatus according to 1 or 2.   The gas heating device according to any one of claims 1 to 3, wherein an intermediate wall body having a plurality of through holes is provided between the gas inlet and the gas outlet in the gas diffusion chamber.   The gas heating device according to claim 4, wherein the number of air outlets of the front wall body is larger than the number of through holes of the intermediate wall body.

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