JP2019152407A - Environment formation device, environment formation unit and thermal treatment device - Google Patents

Abstract

To provide a thermal treatment device and an environment formation device with little temperature dispersion in a treatment space, and relatively easy in maintenance.SOLUTION: A thermal treatment device 1 has one or multiple heating chambers (treatment spaces) 15 for setting a treating object, and air blow-out ports 30L, 30R opened for introducing temperature-adjusted air into the treatment spaces. The air blow-out ports 30L, 30R for introducing air into the same treatment space are provided at multiple portions, and the air blow-out ports 30L, 30R include the air blow-out ports on different wall faces 27, 28 and having different setting heights.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a heat treatment apparatus for heat treating an object to be treated with hot air or the like. The present invention also relates to an environment forming apparatus that forms a desired environment therein, like an environment test apparatus, and a unit that constitutes the environment forming apparatus.

Patent Documents 1 and 2 disclose heat treatment apparatuses that heat treat glass substrates and the like. The heat treatment apparatus disclosed in Patent Document 1 is a flat panel display (FPD: Flat Panel Display) such as a liquid crystal display (LCD), a plasma display (PDP), an organic EL display, or the like. Used for production.
The heat treatment apparatus disclosed in Patent Document 1 has only one processing space inside, and heats the workpiece by supplying hot air to the processing space.
In the heat treatment apparatus disclosed in Patent Document 1, an air blowing port is provided on the right side surface among six surfaces surrounding the processing space, and hot air is supplied to the processing space only from the right side surface.

JP 2010-133666 A

  The heat treatment apparatus disclosed in Patent Document 1 uses a flat plate like a glass substrate as an object to be processed. In the heat treatment apparatus disclosed in Patent Document 1, a plate-like heat treatment product is installed in a horizontal posture in a processing space, and hot air is supplied from the air outlet to the processing space to heat the object to be processed.

  However, in the heat treatment apparatus disclosed in Patent Document 1, since hot air is supplied from only one side to the processing space, there may be a temperature variation in the processing space.

  An object of the present invention is to provide a heat treatment apparatus and an environment forming apparatus with little temperature variation in the processing space, paying attention to the above-mentioned points of the prior art.

  An aspect for solving the above-described problem is an environment forming apparatus having one or a plurality of arrangement spaces in which articles are installed and having an air outlet opening for introducing temperature-controlled air into the arrangement space. The air blowing ports for introducing air into the same arrangement space are provided at a plurality of locations, and the air blowing ports include different wall surfaces and different installed heights. It is an environment forming device.

  The environment forming apparatus of this aspect has a small temperature variation in the arrangement space and can maintain the temperature of the object to be processed evenly.

  It is desirable that any of the plurality of air outlets has a substantially diagonal positional relationship.

  In each of the above-described aspects, the arrangement space includes a front wall partly or entirely constituted by a door, a back wall facing the front wall, a top wall, a bottom wall, and left and right side walls, It is desirable that the left and right side walls are in a facing positional relationship, and the air outlets are provided on the left and right side walls, respectively.

  In each of the above-described aspects, the air-conditioning unit has a built-in air-conditioning device, and air that has passed through the air-conditioning unit is introduced into the arrangement space from the air outlet, and the air-conditioning unit is provided in the arrangement space. There is an air suction port that communicates with the air in the arrangement space to return the air in the arrangement space to the air conditioning unit, and one of the air blowing port and the air suction port opens above the center height of the arrangement space, and the other is the It is desirable to open below the center height of the arrangement space.

  In each of the above-described aspects, the air-conditioning unit has a plurality of air-conditioning units, and there is the air outlet corresponding to each air-conditioning unit, and the arrangement from the air outlet corresponding to the air that has passed through each air-conditioning unit It is desirable to be introduced into the space.

  In each of the above-described aspects, it is desirable that a plurality of air-conditioning units including air-conditioning equipment are provided, and any one of the air-conditioning units is independent from the other air-conditioning units.

  In each of the above-described aspects, it is desirable to have a plurality of blowers and blow out air from the air blowing port by the blowers.

  In each aspect described above, a plurality of unitized parts are included in the constituent members, and the unitized parts include a plurality of environment forming units including a space forming part that constitutes a part of the arrangement space, It is desirable that a plurality of environment forming units are combined to form part or all of the arrangement space.

  Another aspect that solves the same problem is an environment forming unit that constitutes the environment forming apparatus in combination with other members, and has a space forming portion surrounded by a plurality of wall surfaces, and has a temperature and / or temperature. Air outlets for introducing air with adjusted humidity are provided at a plurality of locations, and the air outlets are located on different wall surfaces and have different installed heights. It is an environmental formation unit.

  An invention relating to a heat treatment apparatus includes a treatment space in which an object to be treated is installed, and the treatment space includes a plurality of wall surfaces in which an air blowing port for introducing temperature-controlled air is opened in the treatment space. The air outlet includes a plurality of air outlets, the air outlets having different wall surfaces and different heights.

The heat treatment apparatus of the present invention has the effect that the temperature variation in the treatment space is small and the object to be treated can be uniformly heat treated.
In addition, the environment forming apparatus of the present invention has an effect that the temperature variation in the arrangement space is small.
The environment forming unit of the present invention has an effect that the compatibility of parts is high when manufacturing the environment forming apparatus.

It is a perspective view of the heat processing apparatus (environment formation apparatus) of embodiment of this invention. It is AA sectional drawing of the heat processing apparatus shown in FIG. (A) is BB sectional drawing of the heat processing apparatus shown in FIG. 1, (b) is CC sectional drawing of the heat processing apparatus shown in FIG. It is a BB cross-sectional perspective view of the heat processing apparatus shown in FIG. It is CC sectional perspective view of the heat processing apparatus shown in FIG. It is a disassembled perspective view which shows the state which divided | segmented the heat processing apparatus shown in FIG. 1 into the heat processing module. It is a disassembled perspective view which shows the state which divided | segmented the heat processing module shown in FIG. 6 into the right-and-left air conditioning unit and the center processing chamber unit. (A) is a front view of the left air-conditioning unit shown in FIG. 7, and (b) is a side sectional view thereof. (A) is a front view of the right air-conditioning unit shown in FIG. 7, and (b) is a side sectional view thereof. (A) (b) (c) is sectional drawing of the heat processing apparatus of other embodiment of this invention, and shows the modification of the layout of an air blowing outlet and an air suction inlet. It is sectional drawing of the heat processing apparatus of further another embodiment of this invention, and shows the modification of the layout of an air blowing outlet and an air suction inlet. It is sectional drawing of the heat processing apparatus of further another embodiment of this invention.

Embodiments of the present invention will be further described below.
The heat treatment apparatus (environment forming apparatus) 1 of the present embodiment includes five sets of heat treatment modules 6a to 6e, a door module 8, and a back wall member 3 as will be described later.
Further, the heat treatment module (environment forming unit) 6 described above is a combination of one processing chamber unit 10, a left air conditioning unit 12, and a right air conditioning unit 13 as shown in FIG.
FIG. 1 shows the heat treatment apparatus 1 in a state in which the units 10, 12, and 13 are combined and the door module 8 and the back wall member 3 are combined with the heat treatment module 6.

The general shape of the heat treatment apparatus 1 is a rectangular parallelepiped having a lower height than the planar shape as shown in FIG.
The internal structure of the heat treatment apparatus 1 is as shown in FIGS.
The heat treatment apparatus 1 is entirely covered with a heat insulating wall 20 as shown in FIG. As shown in FIGS. 2 and 3, the heat treatment apparatus 1 has a heating chamber 15 in the center and air-conditioning units 16 and 17 on the left and right sides thereof. Note that the heating chamber 15 is a processing space in which an object to be processed is installed, and can also be said to be an arrangement space in which articles are placed.
A heating chamber (processing space, arrangement space) 15 is shown in FIG. The space surrounded by the top wall 25, the bottom wall 26, and the left and right side walls 27, 28.

In the present embodiment, there are air conditioning units 16 and 17 on the left and right sides of the heating chamber (processing space, arrangement space) 15, and the left and right side walls 27 and 28 of the heating chamber 15 are the boundaries between the air conditioning units 16 and 17 and the heating chamber 15. It is a wall.
In the side walls 27 and 28, air blowing ports 30L and 30R and air suction ports 31L and 31R are opened, and the space between the heating chamber 15 and the air conditioning units 16 and 17 is the air blowing ports 30L and 30R and the air suction ports 31L, It communicates with 31R.

In the air conditioning units 16 and 17, there is an air conditioning ventilation path 33 that communicates with the heating chamber 15 in an annular manner through the air blowing ports 30L and 30R and the air suction ports 31L and 31R as shown in FIG. An air conditioner 35 and a blower 36 are arranged in the air conditioning ventilation path 33. The air conditioner 35 is specifically a heating device 40 and a cooling device 41.
The heating device 40 is an electric heater. The cooling device 41 is a heat exchanger for cooling, and allows room temperature water to pass therethrough.

  In the heat treatment apparatus 1 of the present embodiment, the air conditioning units 16 and 17 are provided on the left and right sides of the heating chamber 15 as described above. However, although the devices (blower 36, heating device 40, and cooling device 41) contained in the left and right air conditioning units 16 and 17 are the same, the left air conditioning unit 16 and the right air conditioning unit 17 include these built-in devices. And the positions of the air outlet 30 and the air inlet 31 are upside down.

That is, in the air conditioning unit 16 on the left side, as shown in FIGS. 3B and 5, a large number of air suction ports 31 </ b> L are provided at the lower portion, and a large number of air blowing ports 30 </ b> L are opened at the upper portion.
The air suction port 31L and the air blowing port 30L are all connected by an air conditioning ventilation path 33, and are arranged in the order of the cooling device 41, the heating device 40, and the blower 36 from the air suction port 31L side. As shown in FIG. 2, a temperature sensor 43 is provided on the discharge side of the blower 36.

  In the air conditioning unit 16 on the left side, air in the heating chamber 15 is sucked from the lower air suction port 31L, passes through the cooling device 41 and the heating device 40 in order, reaches the blower 36, and from the air blowing port 30L that opens to the upper part. The temperature-controlled air is blown into the heating chamber 15.

On the other hand, in the right air-conditioning unit 17, as shown in FIGS. 3A and 4, there are a large number of air inlets 31R in the upper part and a large number of air outlets 30R in the lower part.
As shown in FIG. 2, the air inlet 31R and the air outlet 30R are all connected by an air conditioning ventilation path 33. From the air inlet 31R side, the cooling device 41, the heating device 40, and the blower 36 are arranged in this order. Yes. A temperature sensor 43 is provided on the discharge side of the blower 36.
In the right air-conditioning unit 17, air in the heating chamber 15 is sucked from the upper air suction port 31R, passes through the cooling device 41 and the heating device 40 in order, reaches the blower 36, and from the air blowing port 30R that opens to the lower part. The temperature-controlled air is blown into the heating chamber 15.

In the present embodiment, in the left air conditioning unit 16, the air outlet 30L and the air inlet 31L have different heights, the air outlet 30L is on the upper side, and the air inlet 31L is on the lower side.
In the right air-conditioning unit 17, the height of the air outlet 30R and the air inlet 31R is upside down with respect to the left air-conditioning unit 16, the air outlet 30R is below, and the air inlet 31R is on the top.
In the left air conditioning unit 16, there is an air suction port 31 </ b> L below the center of the heating chamber 15, and an air outlet 30 </ b> L above the center. In the air conditioning unit 17 on the right side, there is an air inlet 31R above the center of the heating chamber 15 and an air outlet 30R below the center.

In the present embodiment, there is an air outlet 30L at the upper part of the left side wall 27 of the heating chamber 15, and there is an air outlet 30R at the lower part of the opposite right side wall 28. Therefore, in each of the heat treatment modules 6a to 6e, the air outlet It can be said that the mouths 30L and 30R are in a substantially diagonal positional relationship.
In the present embodiment, the air suction port 31L is provided at the lower portion of the left side wall 27 of the heating chamber 15, and the air suction port 31R is provided at the upper portion of the opposite right side wall 28. The heat treatment modules 6a to 6e have a substantially diagonal positional relationship.
In the present embodiment, in each of the heat treatment modules 6a to 6e, the straight line connecting the left and right air blowing ports 30L and 30R intersects with the straight line connecting the left and right air suction ports 31L and 31R, and the left and right air blowing ports 30L and 30R The left and right air suction ports 31L and 31R are in a positional relationship.

Assuming that the flat plate-like object 50 is arranged in the heating chamber 15 in a substantially horizontal posture as shown in FIG. 2, the flow of air inside is as shown by the arrows in FIG.
In the lower part of the object to be processed 50, the temperature-controlled air is blown into the heating chamber 15 from the air outlet 30 </ b> R provided in the lower part of the right air-conditioning unit 17 and flows under the object to be processed 50. Part of the air blows against the lower surface of the workpiece 50 and heats the lower portion of the workpiece 50.
Air flowing through the lower part of the workpiece 50 is sucked into the air conditioning unit 16 from an air suction port 31L provided on the lower side of the left air conditioning unit 16, and the temperature of the air is adjusted by the air conditioning device 35 so as to open the upper part. It is blown into the heating chamber 15 from the mouth 30L.

The air blown into the heating chamber 15 from the upper air outlet 30 </ b> L by the left air conditioning unit 16 flows through the upper portion of the workpiece 50. A part of the blown air collides with the upper surface of the workpiece 50 and heats the upper portion of the workpiece 50.
Air flowing through the upper portion of the workpiece 50 is sucked into the air conditioning unit 17 from an air suction port 31R provided on the upper side of the right air conditioning unit 17, and the temperature of the air is adjusted by the air conditioner 35 so as to open to the lower part. It is blown into the heating chamber 15 from the mouth 30R.

As described above, since the workpiece 50 is exposed to the air whose temperature is adjusted on the upper surface side and the lower surface side, each part of the workpiece 50 is heated evenly, and the temperature distribution of each part of the workpiece 50 is uniform. It is. Moreover, in the heat processing apparatus 1 of this embodiment, since the direction which hot air blows on the upper surface and lower surface of the to-be-processed object 50 turns into an opposing direction, the to-be-processed object 50 can be heated efficiently.
In order to facilitate understanding, a plate-like object is illustrated as the object to be processed 50, and the flow of the wind above and below the object to be processed 50 has been described. However, the shape of the object to be processed 50 is any shape. Even if there is no workpiece 50 in the heating chamber 15, the flow of the internal wind is substantially the same as described above.

In the present embodiment, the air conditioning units 16 and 17 are not only divided into left and right, but are also divided into a plurality in the longitudinal direction, and are independent of each other.
Specifically, as shown in FIGS. 3B and 5, the left air-conditioning unit 16 has a five-divided configuration from the left first air-conditioning unit 16a to the left fifth air-conditioning unit 16e. Yes.
Similarly, as shown in FIGS. 3A and 4, the right air-conditioning unit 17 has a five-divided configuration of the right first air-conditioning unit 17a to the right fifth air-conditioning unit 17e, and is independent of each other.
That is, a total of ten air conditioning units 16a, 16b, 16c, 16d and 16e arranged on the left side and air conditioning units 17a, 17b, 17c, 17d and 17e arranged on the right side are independent temperature control devices. Therefore, the internal air conditioner 35 is controlled so that the temperature of the air discharged from the air outlets 30L and 30R matches the set temperature. Each of the air conditioning units 16a, 16b, 16c, 16d, 16e, 17a, 17b, 17c, 17d, and 17e has a control device individually, and each air conditioning device 35 is controlled by each control device.

When actually used, the set temperatures of all the air conditioning units 16 and 17 are often set to be the same.
In general, when a workpiece having a large area is heated, a part where the temperature is difficult to rise or a part where the temperature is too high is formed.
Even in the case of heating an object to be processed having a large area using the heat treatment apparatus 1 of the present embodiment, a part where the temperature is difficult to rise or a part that rises excessively occurs, but in the present embodiment, along the side of the object 50 to be processed. The air conditioning units 16a to 16e and 17a to 17e are separately controlled, and the temperature of each of the air conditioning units 16 and 17 is adjusted independently. Is increased to strongly heat the part. In addition, the air conditioning units 16 and 17 in the vicinity of the portion where the temperature is excessively increased, the output of the heating device 40 is reduced and the temperature rise is suppressed.
Therefore, each part of the to-be-processed object 50 is heated more uniformly, and the temperature distribution of each part of the to-be-processed object 50 becomes more uniform.

  Next, the heat treatment module (environment forming unit) 6, the door module 8 and the back wall member 3 constituting the heat treatment apparatus 1 will be described. The processing chamber unit 10, the left air conditioning unit 12 and the right air conditioning unit 13 constituting the heat treatment module 6 will be described.

In the heat treatment apparatus 1 of the present embodiment, a main body is configured by combining five sets of heat treatment modules 6a, 6b, 6c, 6d, and 6e. The heat treatment module 6 itself is a unitized part, and the heat treatment module 6 also functions as an environment forming unit.
The door module 8 is connected to the front end portions of the heat treatment modules 6a to 6e in the combined state. The door module 8 is one in which a door 23 and lifting means (not shown) for lifting the door are integrated.
A back wall member 3 is provided at the rear end of the heat treatment modules 6 to 6e in a combined state. The back wall member 3 is a heat insulating wall.

As described above, the heat treatment module 6 includes the processing chamber unit 10, the left air conditioning unit 12 and the right air conditioning unit 13.
The left air conditioning unit 12 has a heat insulating box 51 whose one surface is open as shown in FIG. A side wall constituting plate 52 constituting the side wall 27 is attached to the opening surface of the heat insulating box 51. As described above, the air blowing port 30L is provided at the upper portion of the side wall constituting plate 52 (side wall 27), and the air suction port 31L is provided at the lower portion.

The air inlet 31L and the air outlet 30L are connected by an air conditioning ventilation path 33. In the present embodiment, the left air conditioning unit 12 incorporates two fans 36 a and 36 b in the air conditioning ventilation path 33. The two fans are arranged in parallel as shown in FIG.
In the left air conditioning unit 12, a cooling device 41, a heating device 40, and blowers 36a and 36b are arranged in this order from the side of the air suction port 31L provided in the lower part. And the temperature sensor 43 is provided in the discharge side of the air blowers 36a and 36b.

  In the right air conditioning unit 13, the positions of the air conditioner 35, the fans 36a and 36b, the air outlet 30R, and the air suction port 31R are upside down with respect to the left air conditioning unit 12 described above.

That is, the right air conditioning unit 13 also has a heat insulating box 51 as shown in FIG. 9, and a side wall constituting plate 53 constituting the side wall 28 is attached to the opening surface of the heat insulating box 51. As described above, the air blowing port 30R is provided at the lower part of the side wall constituting plate 53 (side wall 28), and the air suction port 31R is provided at the upper part.
The air inlet 31R and the air outlet 30R are connected by an air conditioning ventilation path 33. Also in the right air-conditioning unit 13, a cooling device 41, a heating device 40, and blowers 36a and 36b are arranged in order from the air suction port 31R provided at the top. A temperature sensor 43 is provided on the discharge side of the blower 36.

The processing chamber unit 10 has a frame shape as shown in FIG. 7, and a heat insulating wall is provided on the top surface 61 and the bottom surface 68. The interior of the processing chamber unit 10 is hollow and communicates with both the X direction and the Y direction in FIG.
That is, the processing chamber unit 10 has a front side opening 60 and a back side opening 62. There are also side openings 63 and 65 on the side surfaces.
The heat treatment module 6 has a left air conditioning unit 12 and a right air conditioning unit 13 attached to the side surface of the processing chamber unit 10.

When the heat treatment module 6 is viewed as one environment forming unit, a space forming portion 45 constituting a part of the heating chamber 15 is provided at the center thereof.
The space forming portion 45 is a portion surrounded by the top surface 61 of the processing chamber unit 10, the bottom surface 68, the side wall constituting plate 52 of the left air conditioning unit 12, and the side wall constituting plate 53 of the right air conditioning unit 13.

  Five sets of heat treatment modules 6a, 6b, 6c, 6d, and 6e are combined to form a main body, and the door module 8 and the back wall member 3 are attached to make the heat treatment apparatus 1.

The heat treatment apparatus 1 of the present embodiment includes a plurality of blowers 36a and 36b. More specifically, two blowers 36 are mounted on one air conditioning ventilation path 33. Since the heat treatment apparatus 1 has ten air conditioning ventilation paths 33 as a whole, the heat treatment apparatus 1 is equipped with a total of 20 fans 36.
Therefore, the blower 36 can be replaced while the heat treatment apparatus 1 is in operation, and the blower 36 can be easily repaired.

In the embodiment described above, the air outlet 30 and the air inlet 31 are both provided on the left and right side walls 27 and 28 of the heating chamber 15. This layout is recommended in terms of easy unitization of the air conditioning units 16 and 17, but the present invention is not limited to this configuration.
For example, as shown in FIG. 10A, the air outlet 30 and the air inlet 31 may be provided on the top wall 25 and the bottom wall 26 of the heating chamber 15. Further, as shown in FIG. 10B, the air outlet 30 and the air inlet 31 may be provided at the corner of the heating chamber 15. Further, as shown in FIG. 10C, one air outlet 30 and air inlet 31 may be provided on the side wall 27 of the heating chamber 15, and the other may be provided on another part.
It is arbitrary whether the air outlet 30 and the air inlet 31 are attached to any part.

In addition, as shown in FIG. 11, air may be blown into the heating chamber 15 from a wide range.
In the heat treatment apparatus 70 shown in FIG. 11, there are partition walls 71 and 72 installed on the top and bottom surfaces of the heating chamber 15 by opening a ventilation space from the heat insulating wall 20, and a plurality of openings are formed in the partition walls 71 and 72. The air outlet 30 is provided.
In the heat treatment apparatus 70 shown in FIG. 11, an air suction port 31 is provided at a corner portion of the heating chamber 15.
In the heat treatment apparatus 70 shown in FIG. 11, the temperature sensor 43 is in the heating chamber 15 surrounded by the partition walls 71 and 72 and the left and right side walls 27 and 28, and is separated from the outer heat insulating wall 20. The detected temperature 43 is hardly affected by the surface temperature of the heat insulating wall 20.

The heat treatment apparatus 1 described above is constituted by a plurality of heat treatment modules 6, and the heat treatment module 6 is further constituted by one processing chamber unit 10, a left air conditioning unit 12 and a right air conditioning unit 13.
The heat treatment apparatus 1 according to the present embodiment uses a lot of unitized parts that are unitized in this way. The configuration of the present embodiment is recommended because it allows parts to be shared when the heat treatment apparatuses 1 having different sizes are manufactured. According to the present embodiment, it is possible to manufacture heat treatment apparatuses 1 having different sizes only by changing the number of heat treatment modules 6 to be connected.
However, the present invention is not limited to this configuration, and each member may be inseparably integrated.

In the heat treatment apparatus 1 described above, five air outlets 30 and five air inlets 31 are provided on the left and right, respectively, but these numbers are arbitrary and are not limited. One air outlet 30 and one air inlet 31 may be provided on each side.
Further, the number of air outlets 30 and the number of air inlets 31 may be different.
In the above-described embodiment, the heights and sizes of the plurality of air outlets 30 provided on one side wall are all the same. Similarly, the height and size of a plurality of air suction ports 31 provided on one side wall side are also aligned. However, the height and size of the air outlet 30 and the like may be uneven.
In addition, with respect to one inner surface of the heating chamber (processing space, arrangement space) 15, the air outlet 30 arranged in a certain region is on the upper side, the air suction port 31 is on the lower side, and the other certain region is air The vertical relationship between the air outlet 30 and the air inlet 31 may be reversed.

One of the air outlet 30 and the air inlet 31 is opened above the center height of the heating chamber (processing space, arrangement space) 15 and the other is opened below the center height of the heating chamber 15. Although desirable, this configuration is not essential, and both may be open above or below the center height of the heating chamber 15.
However, it is desirable that the air blowing port 30 and the air suction port 31 are disposed above and below the workpiece 50.
That is, it is desirable that one of the air outlet 30 and the air inlet 31 is opened above the workpiece 50 and the other is opened below the workpiece 50.

In the embodiment described above, it has a plurality of air conditioning units 16a, 16b, 16c, 16d, 16e, 17a, 17b, 17c, 17d, and 17e, and any of the air conditioning units is independently controlled individually. A plurality of air conditioning units may be controlled as a group. Moreover, you may control all the air-conditioning parts with one control apparatus.
Moreover, the air flow may be different for each air conditioning unit.

On the contrary, like the heat treatment apparatus 80 shown in FIG. 12, the air blown from one air conditioning unit 81 is branched by a duct 82, and the air whose temperature is adjusted by the air conditioning unit 81 is supplied to the air outlets 30L and 30R. The air discharged from 31L and 31R may be collected by the collecting duct 83 and returned to the air conditioning unit 81.
In the heat treatment apparatus 80 shown in FIG. 12, the air conditioning unit 81 and the test chamber 15 are separated, and both are connected by ducts 82 and 83.
In the embodiment described above and the modification thereof, the direction in which hot air is blown between the upper surface and the lower surface of the workpiece 50 is the opposite direction, and the wind flows in the opposite direction above and below the heating chamber (processing space, arrangement space) 15.

  In the embodiment described above, there is only one processing space in which an object to be processed is installed, but a plurality of processing spaces may be provided.

  In the embodiment described above, a flat object is exemplified as the object to be processed 50, but the present invention does not matter the shape of the object to be processed 50. The heat treatment apparatus 1 of the present invention has a small temperature variation in the heating chamber (processing space, arrangement space) 15, so that the surface temperature can be made uniform regardless of the shape of the object to be processed.

  In the embodiment described above, a plurality of heat treatment modules 6 are combined to form one heating chamber 15, but the heating chamber 15 may be configured with only one heat treatment module 6. When this configuration is adopted, the door module 8 is attached to one surface of one heat treatment module 6 and the back wall member 3 is attached to the other surface.

In the embodiment described above, the heat treatment module 6 has one air conditioning unit attached to each side of the processing chamber unit 10, but a plurality of air conditioning units may be attached to the side surface of the processing chamber unit 10.
That is, the air conditioning unit 16 or the air conditioning unit 17 attached to the processing chamber unit 10 may be configured by a plurality of air conditioning units.

  In the embodiment described above, the heat treatment module (environment forming unit) 6 is a combination of one processing chamber unit 10, the left air conditioning unit 12, and the right air conditioning unit 13 as shown in FIG. In this configuration, the environment forming unit is further finely divided into units, and the parts have high compatibility. However, they may be manufactured inseparably.

In the above, this invention was demonstrated taking the heat processing apparatus 1 as an example. The heat treatment apparatus 1 creates a high temperature environment inside, and can be said to be an environment forming apparatus in a broad sense.
Although the present invention has been described by taking the heat treatment apparatus 1 as an example, the technical idea of the present invention is not limited to the heat treatment apparatus 1, but also in an environmental test apparatus or other environment forming apparatus for creating a desired environment. Can be applied.

1, 70, 80 Heat treatment apparatus 6 Heat treatment module (environment formation unit)
10 Processing chamber unit 12 Left air conditioning unit 13 Right air conditioning unit 15 Heating chamber (processing space, arrangement space)
16, 17 Air conditioning unit 21 Front wall 22 Back wall 23 Door 25 Top wall 26 Bottom wall 27, 28 Side walls 30L, 30R Air outlet 31L, 30R Air inlet 35 Air conditioner 36 Blower 40 Heating device 45 Space forming unit 50 Processed object

Claims (10)

In an environment forming apparatus having one or a plurality of arrangement spaces in which articles are installed, and an air outlet opening for introducing temperature-controlled air into the arrangement space,
The air outlets for introducing air into the same arrangement space are provided at a plurality of locations, and the air outlets include different wall surfaces and different installed heights. Environment forming device.   The environment forming apparatus according to claim 1, wherein any of the plurality of air outlets has a substantially diagonal positional relationship. The arrangement space has a front wall partly or entirely constituted by a door, a back wall facing the front wall, a top wall, a bottom wall, and left and right side walls,
The environment forming apparatus according to claim 1, wherein the left and right side walls are in an opposing positional relationship, and the air outlets are provided on the left and right side walls, respectively. It has an air conditioning unit with built-in air conditioning equipment, and the air that has passed through the air conditioning unit is introduced into the arrangement space from the air outlet,
The arrangement space has an air suction port that communicates with the air conditioning unit and returns the air in the arrangement space to the air conditioning unit,
The one of the air blowing port and the air suction port is opened above the center height of the arrangement space, and the other is opened below the center height of the arrangement space. 4. The environment forming apparatus according to any one of 3.   There are a plurality of air conditioning units with built-in air conditioning equipment, the air outlets correspond to each air conditioning unit, and the air that has passed through each air conditioning unit is introduced into the arrangement space from the corresponding air outlets The environment forming apparatus according to claim 1, wherein:   6. The environment forming apparatus according to claim 1, wherein the environment forming apparatus includes a plurality of air conditioning units each including an air conditioning device, and any one of the air conditioning units is independent of the other air conditioning units.   The environment forming apparatus according to any one of claims 1 to 6, wherein a plurality of blowers are provided, and air is blown out from the air blowing port by the blowers.   A plurality of unitized parts are included in the constituent members, and the unitized parts include a plurality of environment forming units including a space forming part that constitutes a part of the arrangement space, and the environment forming units include a plurality of units. The environment forming apparatus according to claim 1, wherein a part or all of the arrangement space is formed by being combined. An environment forming unit that constitutes an environment forming apparatus in combination with other members,
A plurality of air outlets for introducing air having a temperature and / or humidity adjusted, the air outlets being on different wall surfaces; An environment forming unit characterized in that it includes ones with different installed heights. In a heat treatment apparatus having a processing space in which an object to be processed is installed and having an air outlet opening for introducing temperature-controlled air into the processing space,
The processing space is covered with a plurality of wall surfaces, has a plurality of the air outlets, and the air outlets include different wall surfaces and different installed heights. Heat treatment equipment.

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