JP2009192314A - Testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a testing device capable of exposing the whole of a workpiece fed into a testing vessel to a gas of constant temperature/constant humidity, and capable of uniformizing a temperature distribution and a humidity distribution in the testing vessel. <P>SOLUTION: A testing chamber 2 is partitioned into the testing vessel 5 and a gas supply vessel 6 by a partitioning wall 4. The partitioning wall 4 is formed with a gas diffusing port 17 for supplying the gas of constant temperature or/and constant humidity to the testing vessel 5, and gas suction ports 18, 19 for sucking the gas from the testing vessel 5. The testing vessel 5 is arranged with the first and second gas feedback ducts 21, 22 having tip openings 21a, 22a arranged in the vicinity of a front wall 9 inner than horizontal guide rails 12, 13, and having rear end openings connected to the gas suction ports 18, 19. Consequently, the gas supplied from the gas diffusing port 17 is fed back after passed through the horizontal guide rails 12, 13 to reach the vicinity of the front wall 9. The whole of the workpiece is thereby exposed to the gas, on the horizontal guide rails 12, 13. The temperature distribution and the humidity distribution are also uniformized in the testing vessel 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a test apparatus that performs a test such as energization by causing a workpiece put in a test chamber to reach a predetermined temperature state. More specifically, the present invention relates to a test apparatus having a configuration in which a test chamber is partitioned into a test tank for testing a workpiece and a gas supply tank for supplying a gas for controlling the temperature and humidity of the test tank to the test tank.

  The test apparatus performs a test such as energization after putting a workpiece into a test chamber covered with a heat insulating material and reaching a predetermined temperature state. The test chamber is partitioned by a partition wall into a test tank for testing the workpiece and a gas supply tank for supplying a constant temperature or humidity gas for controlling the temperature and humidity of the test tank to the test tank. . In the test tank, there is formed a work placement portion for placing the work, and in the gas supply tank, a heat exchanger such as a heater or an evaporator of a refrigeration cycle and a heat exchanger are used. A blower fan for circulating a gas adjusted to the temperature and humidity in the test chamber is arranged. The partition wall is formed with a gas outlet for blowing gas from the gas supply tank into the test tank and a gas inlet for sucking gas from the test tank into the gas supply tank.

When the blower fan is driven, the gas adjusted to a predetermined temperature and humidity is blown from the gas outlet to the workpiece arranged in the workpiece arrangement portion in the test tank. The gas blown into the test tank is sucked from the gas suction port and returns to the heat exchanger again. Such a test apparatus is described in Patent Document 1.
JP-A-9-197000

  In the test apparatus as described above, since the gas blowing port and the gas suction port are formed on the same side with respect to the work placement portion in the test tank, the gas blowing port is adjusted to a predetermined temperature and humidity. A part of the blown-out gas returns to the gas suction port without circulating in the test tank.

  For this reason, for example, when a plurality of workpieces are arranged in the workpiece placement unit in a state where they are arranged in a horizontal direction and a vertical direction using a rack, some of the workpieces arranged at positions far from the partition wall are There is a problem that it cannot be sufficiently exposed to the gas, and it takes time for some of the workpieces to reach a predetermined temperature state.

  Moreover, since the gas adjusted to predetermined temperature and humidity does not spread to every corner in a test tank, there exists a problem that the temperature distribution and humidity distribution of a test tank are not uniform. If the temperature distribution is not uniform, there is a difference in the temperature around the plurality of works arranged in the rack, so that all the works cannot be uniformly brought into a predetermined temperature state. For this reason, there is a problem that even if some workpieces have reached a predetermined temperature state, all the workpieces must remain in the test tank for a long time until they reach a predetermined temperature state. is there. In addition, if the humidity distribution is not uniform, there is a difference in the humidity around the plurality of works arranged in the rack, and there is a problem that the test cannot be performed on each work under a predetermined humidity condition.

  In view of such a point, the problem of the present invention is that a gas adjusted to a predetermined temperature and humidity can be sufficiently applied to a workpiece put in the test tank, and the temperature distribution and humidity distribution in the test tank can be applied. It is an object of the present invention to provide a test apparatus in which is uniform.

In order to solve the above problems, the test apparatus of the present invention provides:
A test room,
A partition wall that divides the inside of the test chamber into a test tank that performs a test on a workpiece, and a gas supply tank that supplies constant temperature or / and humidity gas to the test tank;
A gas outlet formed in the partition wall for supplying a constant temperature or / and a constant humidity gas from the gas supply tank to the test tank;
It has a gas recirculation duct for recirculating the gas in the test tank to the gas supply tank, and the end opening of the gas recirculation duct for sucking in the gas in the test tank is put into the test tank It is characterized in that it is arranged at a part opposite to the partition wall with a work placement part on which the placed work is placed.

  The present invention comprises a gas recirculation duct for recirculating the gas supplied into the test tank from the gas outlet formed in the partition wall to the gas supply tank. The work placement portion is sandwiched and placed on the opposite side of the partition wall. As a result, the constant temperature and / or constant humidity gas adjusted to a predetermined temperature and humidity is supplied from the gas outlet and then reaches the part on the opposite side of the partition wall across the workpiece placement part. Can be sufficiently exposed to constant temperature and / or humidity gas. Moreover, since gas spreads to the site | part far from a workpiece | work arrangement | positioning part, the temperature distribution and humidity distribution in a test tank are equalized. Therefore, for example, even when a plurality of workpieces are placed in a test tank in a state where they are arranged in a horizontal direction and a vertical direction using a rack, all the workpieces are sufficiently exposed to constant temperature and / or humidity gas. Can do. Further, since there is no difference in the temperature around the workpieces arranged in the rack, all the workpieces can be made to reach a predetermined temperature state uniformly. As a result, it is possible to shorten the time until all the workpieces reach the predetermined temperature state. Furthermore, since there is no difference in the humidity around the workpieces arranged in the rack, it is possible to test each workpiece under a predetermined humidity condition.

  In the present invention, in order to return the gas supplied from the gas outlet into the test tank to the gas supply tank via the gas reflux duct, the gas in the test tank is returned to the gas supply tank. The gas inlet has a gas inlet formed in the partition wall, and the gas outlet and the gas inlet communicate the gas supply tank with the test chamber that is airtightly partitioned by the partition wall. It is desirable that a rear end opening of the gas recirculation duct is connected to the gas suction port.

  In the present invention, it is desirable that the front end opening of the gas recirculation duct is located in the vicinity of the opposing wall of the test chamber facing the partition wall with the work placement portion interposed therebetween. In this way, the gas can be spread to every corner of the test chamber, which is suitable for making the temperature distribution and humidity distribution in the test chamber uniform.

  In the present invention, the gas recirculation duct includes a first gas recirculation duct and a second gas recirculation duct, and a rear end opening of the first gas recirculation duct is connected as the gas suction port. At least one first gas suction port and at least one second gas suction port to which a rear end opening of the second gas reflux duct is connected. It is desirable that the front end opening and the front end opening of the second gas recirculation duct are located apart from each other with the work placement portion interposed therebetween.

  In this case, the first gas recirculation duct is formed along the ceiling surface of the test tank, the tip opening is located in the vicinity of the ceiling surface, and the second gas recirculation duct is It is formed along the bottom surface of the test tank, the tip opening is located in the vicinity of the bottom surface, the first gas suction port is formed in the vicinity of the ceiling surface of the partition wall, and the second gas Preferably, the suction port is formed in the vicinity of the bottom surface of the partition wall, and the gas blowing port is formed between the first gas suction port and the second gas suction port of the partition wall. . If it does in this way, after the gas blown in in the test tank passes through a work arrangement part, it will recirculate to a gas supply tank from the up-and-down direction both sides of a work arrangement part. As a result, since the gas can be spread to every corner in the vertical direction in the test tank, the vertical temperature distribution and humidity distribution in the test tank can be made uniform.

  In this case, in order to easily configure the first gas recirculation duct and the second gas recirculation duct, the first gas recirculation duct has a first interval parallel to the ceiling surface and the ceiling surface. The second gas recirculation duct is formed between the bottom surface and a second horizontal partition plate disposed at a second interval in parallel with the bottom surface. It is desirable that the workpiece placement portion is located between the first horizontal partition plate and the second horizontal partition plate.

  Also, the flow rate of the gas recirculated through the first gas recirculation duct along the ceiling surface is the same as the flow rate of the gas recirculated through the second gas recirculation duct along the bottom surface, In order to make the upper and lower temperature distribution and humidity distribution uniform, the first interval and the second interval are substantially the same, and approximately 1 / the interval between the first horizontal partition plate and the second horizontal partition plate. 2 is desirable.

  Here, in order to recirculate the gas blown into the test tank from both sides in the lateral direction across the work arrangement part, the first gas recirculation duct is arranged in the horizontal direction of the test tank. Between the one inner wall and the other inner wall of the test chamber facing each other, the tip opening being located in the vicinity of the one inner wall, and the second The gas reflux duct is formed along the other inner wall of the test tank, the tip opening is located in the vicinity of the other inner wall, and the first gas suction port is the one of the partition walls. The second gas suction port is formed in the vicinity of the inner wall, the second gas suction port is formed in the vicinity of the other inner wall of the partition wall, and the gas blowout ports are the first gas suction port and the second gas in the partition wall. Formed between the inlet and It is desirable to have. In this way, since the gas blown into the test tank can be spread to every corner in the horizontal direction in the test tank, the lateral temperature distribution and humidity distribution in the test tank can be made uniform. it can.

  In this case, in order to simply configure the first gas recirculation duct and the second gas recirculation duct, the first gas recirculation duct includes the one inner wall and the one inner wall with the first gap. The second gas recirculation duct is arranged in parallel with the other inner wall and the other inner wall at a second interval. Preferably, the workpiece placement portion is located between the first vertical partition plate and the second vertical cut plate.

  Further, the flow rate of the gas recirculated through the first gas recirculation duct along one inner wall and the flow rate of the gas recirculated through the second gas recirculation duct along the other inner wall were set to be the same. In order to make the temperature distribution and humidity distribution in the horizontal direction in the tank uniform, the first interval and the second interval are substantially the same, and the first vertical cut plate and the second vertical partition plate It is desirable that the distance is approximately ½ of the distance between.

  In the present invention, a blower fan, a first heat exchanger, and a second heat exchanger are arranged in the gas supply tank, and the blower fan is in a state where the gas blowing side faces the gas blowing port. The first heat exchanger is disposed on a gas suction path from the first gas suction port toward the gas suction side of the blower fan, and the second heat exchanger is disposed on the second gas. It is desirable to arrange on the gas suction path from the suction port toward the gas suction side of the blower fan. In this way, since a wide passage for gas suction can be secured in the vertical direction or the horizontal direction of the blower fan, the suction resistance is reduced, and the air volume of the blower fan can be increased.

  According to the present invention, the constant temperature and / or humidity gas supplied from the gas outlet formed in the partition wall to the test tank reaches the part on the opposite side of the partition wall across the workpiece placement portion, and then recirculates. Therefore, the work placed in the work placement section can be sufficiently exposed to constant temperature and / or humidity gas. Moreover, since gas spreads to the site | part far from a workpiece | work arrangement | positioning part, the temperature distribution and humidity distribution in a test tank are equalized. Therefore, for example, even when a plurality of workpieces are placed in a test tank in a state where they are arranged in a horizontal direction and a vertical direction using a rack, all the workpieces are sufficiently exposed to constant temperature and / or humidity gas. Can do. Further, since there is no difference in the temperature around the workpieces arranged in the rack, all the workpieces can be made to reach a predetermined temperature state uniformly. As a result, it is possible to shorten the time until all the workpieces reach the predetermined temperature state. Furthermore, since there is no difference in the humidity around the workpieces arranged in the rack, it is possible to test each workpiece under a predetermined humidity condition.

  Hereinafter, embodiments of a test apparatus to which the present invention is applied will be described with reference to the drawings. FIG. 1 is an external perspective view of a test apparatus to which the present invention is applied. 2A is a view of the AA cross section of FIG. 1 as viewed from above, FIG. 2B is a view of the BB cross section of FIG. 1 as viewed from above, and FIG. It is the figure which looked at CC cross section of FIG. 1 from the top.

  As shown in FIG. 1, the test apparatus 1 according to the present embodiment has a rectangular parallelepiped shape, and includes a test chamber 2 covered with a heat insulating material and a machine chamber 3 positioned below the test chamber 2. . The inside of the test chamber 2 is hermetically partitioned in front and rear by a partition wall 4, the front side is a test tank 5 that performs an environmental test on the workpiece, and the rear side is a constant temperature or / or humidity that controls the temperature and humidity of the test tank 5. The gas supply tank 6 supplies the constant humidity gas to the test tank 5. One end wall 7 on the left side of the test tank 5 is provided with a carry-in port 7a for carrying a work into the test tank 5, and the other end wall 8 on the right side carries out the work from the test tank 5. A carry-out port 8a is provided. Two opening / closing doors 10 made of a heat insulating material are attached to a front wall (opposing wall) 9 facing the partition wall 4 of the test tank 5. In the machine room 3, when controlling the temperature of the test tank 5 to low temperature, the compressor of a refrigerating cycle, a condenser, etc. are arrange | positioned.

  As shown in FIG. 2, a pair of horizontal guide rails (work placement portions) 12 and 13 for transporting a pallet 11 on which a workpiece is placed from the carry-in port 7a toward the carry-out port 8a are arranged in the test tank 5. Has been. While the work is placed on the pallet 11, the horizontal guide rails 12 and 13 are intermittently conveyed at a constant pitch by a pallet conveying mechanism (not shown). Further, while being transported on the horizontal guide rails 12, 13, it is brought to a predetermined temperature state and energized while being placed on the pallet 11 by a test device (not shown) arranged in the test tank 5. The test is conducted. Alternatively, after being brought to a predetermined temperature state, it is unloaded from the test tank 5 and put into a test apparatus (not shown) to conduct a test such as energization.

  In the gas supply tank 6, a plurality of upper and lower pairs of first heaters 14 (1) to (3) and second heaters 15 (1) to (3) and the first and second heaters 14 ( A plurality of blower fans 16 (1) to (3) for circulating the gas heated to a predetermined high temperature by 1) to (3) and 15 (1) to (3) in the test chamber 2 are arranged. Yes. In the partition wall 4, a plurality of gas outlets 17 (1) to (3) for blowing gas into the test tank 5 and a plurality of upper and lower pairs of first gas inlets for sucking gas from the test tank 5 18 (1) to (3) and second gas suction ports 19 (1) to (3) are formed, and the test tank 5 and the gas supply tank 6 communicate with each other through these openings. In addition, although this example is provided with the heater in order to control the temperature of the test tank 5 to high temperature, when controlling to low temperature or adjusting the humidity of the test tank 5, these 1st and 1st Instead of the two heaters 14 (1) to (3) and 15 (1) to (3), an evaporator of a refrigeration cycle is arranged.

  As shown in FIG. 2 (b), the plurality of gas outlets 17 (1) to (3) are arranged horizontally in the direction along the horizontal guide rails 12, 13 at the central portion in the vertical direction of the partition wall 4. Has been. Moreover, the lower end edge of each gas blowing port 17 (1)-(3) exists in the same height position as the upper surface of the horizontal guide rails 12 and 13. FIG. The blower fans 16 (1) to (3) are attached to the gas outlets 17 (1) to (3) with their gas outlets facing the gas outlets 17 (1) to (3).

  The plurality of first gas suction ports 18 (1) to (3) are formed in the vicinity of the ceiling surface 5 a of the test tank 5 in the partition wall 4. The plurality of second gas suction ports 19 (1) to (3) are formed in the vicinity of the bottom surface 5 b of the test tank 5 in the partition wall 4. Accordingly, the first gas suction ports 18 (1) to (3) and the second gas suction ports 19 (1) to (3) are formed above and below the respective gas outlets 17 (1) to (3), respectively. Yes.

  The first heaters 14 (1) to (3) and the second heaters 15 (1) to (3) are nichrome heaters. The first heaters 14 (1) to (3) are arranged along the lower edges of the first gas suction ports 18 (1) to (3), respectively. The second heaters 15 (1) to (3) are disposed along the upper edge of each of the second gas suction ports 19 (1) to (3), respectively. Accordingly, the first heaters 14 (1) to (3) are arranged on the gas suction path from the first gas suction ports 18 (1) to (3) toward the gas suction side of the blower fans 16 (1) to (3). The second heaters 15 (1) to (3) are arranged from the second gas suction ports 19 (1) to (3) to the gas suction side of the blower fans 16 (1) to (3). It is arranged on the suction path.

  A pair of these first and second heaters 14 (1) to (3) and 15 (1) to (3) disposed at a position closest to one end wall 7 where the carry-in port 7 a is formed. The first and second heaters 14 (1) and 15 (1) of the second and second heaters 14 (2), 15 (2) and 14 (3), 15 (3) In comparison, heat exchange is performed with a large capacity.

  Here, in the test tank 5, a first gas recirculation duct 21 for guiding the gas in the test tank 5 to the first gas suction ports 18 (1) to (3), and the gas in the test tank 5. The second gas recirculation duct 22 is arranged to guide the gas to the second gas suction ports 19 (1) to 19 (3).

  That is, between the area | region in which each gas blowing port 17 (1)-(3) of the partition wall 4 is formed, and the area in which each 1st gas suction inlet 18 (1)-(3) is formed. Is arranged with a first horizontal partition plate 23 extending in parallel with the ceiling surface 5a of the test tank 5 toward the test tank 5 side at a first interval L1, and an upper surface of the first horizontal partition plate 23. The first gas recirculation duct 21 is constituted by the ceiling surface 5a of the test tank 5 and the inner wall surface portion of one end wall 7 and the inner wall surface portion of the other end wall 8 sandwiched between them. ing. The front end of the first horizontal partition plate 23 extends to a portion on the opposite side to the partition wall 4 with the horizontal guide rails 12 and 13 interposed therebetween. Therefore, the front end opening 21 a of the first gas recirculation duct 21 is located in the vicinity of the ceiling surface 5 a in the vicinity of the facing wall 9. The rear end opening 21b of the first gas recirculation duct 21 is connected to the first gas suction ports 18 (1) to (3).

  Moreover, between the area | region in which each gas blower outlet 17 (1)-(3) of the partition wall 4 is formed, and the area | region in which each 2nd gas suction inlet 19 (1)-(3) is formed. Is arranged with a second horizontal partition plate 24 extending in parallel with the bottom surface 5b of the test bath 5 toward the test bath 5 side at a second interval 2, and the lower surface of the second horizontal partition plate 24 and The second gas recirculation duct 22 is constituted by the bottom surface 5b of the test tank 5 and the inner wall surface portion of one end wall 7 and the inner wall surface portion of the other end wall 8 sandwiched therebetween. . The distal end of the second horizontal partition plate 24 extends to a portion on the opposite side of the partition wall 4 with the horizontal guide rails 12 and 13 interposed therebetween. Therefore, the front end opening 22a of the second gas recirculation duct 22 is located in the vicinity of the bottom surface 5b in the vicinity of the front wall 9. The rear end opening 22b of the second gas recirculation duct 22 is connected to the second gas suction ports 19 (1) to (3).

  Here, the first interval L1 between the first horizontal partition plate 23 and the ceiling surface 5a and the second interval L2 between the second horizontal partition plate 24 and the bottom surface 5b are substantially the same interval, and these intervals are These are approximately ½ of the distance L3 between the first horizontal partition plate 23 and the second horizontal partition plate 24, respectively. Constant temperature blown into the test chamber 5 from the gas outlets 17 (1) to (3) of the partition plate 4 by setting the first interval L1 and the second interval L2 to be approximately ½ of the interval L3. After passing the gas on the pair of horizontal guide rails 12 and 13, the gas is almost equally divided into the first gas recirculation duct 21 and the second gas recirculation duct 22 without resistance, and the first gas suction port 18 (1 ) To (3) and the second gas suction ports 19 (1) to (3) to the gas supply tank 6. When the flow rate of the gas returning from the first gas suction ports 18 (1) to (3) and the second gas suction ports 19 (1) to (3) to the gas supply tank 6 becomes substantially equal, the first heating is performed. The work amounts of the containers 14 (1) to (3) and the second heaters 15 (1) to (3) are almost equalized, and stable control is performed.

(Gas circulation path in the test chamber)
FIG. 3 is a schematic longitudinal sectional view schematically showing a gas circulation path in the test chamber 2. In FIG. 3, a plurality of workpieces 30 are placed on the pallet 11 in a state of being arranged in the horizontal direction and the vertical direction using a rack 31 and are put into the test tank 5.

  When the test apparatus 1 is operated, the gas heated to a predetermined temperature by the first and second heaters 14 (1) to (3) and 15 (1) to (3) of the gas supply tank 6 is sent to each air blower. The gas is supplied to the test chamber 5 from the gas outlets 17 (1) to (3) by the fans 16 (1) to (3).

  The gas flows along the surfaces of the pair of horizontal guide rails 12 and 13 and hits a plurality of workpieces 30 conveyed on the pair of horizontal guide rails 12 and 13. Thereafter, the gas flows back through the first gas recirculation duct 21 formed along the ceiling surface 5a of the test tank 5, and enters the gas supply tank 6 from the first gas suction ports 18 (1) to (3). Return. Moreover, it recirculates through the 2nd gas recirculation | reflux duct 22 formed along the bottom face 5b of the test tank 5, and returns to the gas supply tank 6 from the 2nd gas suction inlets 19 (1)-(3).

  Here, since the front end openings 21a and 22a of the first and second gas recirculation ducts 21 and 22 are located closer to the front wall 9 than the pair of horizontal guide rails 12 and 13, each gas outlet The gas supplied from 17 (1) to (3) always reaches a portion near the front wall 9. As a result, all of the plurality of workpieces 30 placed in the test tank 5 can be exposed to gas. Further, since the gas can reach the vicinity of the ceiling surface 5a and the vicinity of the bottom surface 5b in the vicinity of the front wall 9, the temperature distribution in the test tank 5 can be made uniform. As a result, there is no difference in the ambient temperature between the workpieces 30 arranged in the rack 31, so that all the workpieces 30 can be made to reach a predetermined temperature state uniformly. Accordingly, it is possible to shorten the time until all the workpieces 30 reach the predetermined temperature state.

  Further, the first interval L1 between the first horizontal partition plate 23 and the ceiling surface 5a and the second interval L2 between the second horizontal partition plate 24 and the bottom surface 5b are the same, and these intervals are respectively the first horizontal partition. Since it is half of the distance L3 between the plate 23 and the second horizontal partition plate 24, the flow rate of the gas recirculated through the first gas recirculation duct 21 and the gas supply tank 6 through the second gas recirculation duct 22 The flow rate of the refluxing gas can be made the same. As a result, the upper and lower temperature distribution in the test tank 5 can be made uniform. Moreover, since the passage for gas suction is widely ensured in the up-down direction of each ventilation fan 16 (1)-(3), a suction resistance becomes low and the air volume of each ventilation fan 16 (1)-(3) is reduced. Can be raised. Furthermore, the flow rate of the gas returning from the first gas suction ports 18 (1) to (3) and the second gas suction ports 19 (1) to (3) to the gas supply tank 6 becomes substantially equal, The work of the first heaters 14 (1) to (3) and the second heaters 15 (1) to (3) is also almost equalized, and stable control is performed.

(Temperature distribution in the test chamber)
It will be described that the temperature distribution in the test tank 5 of this example is uniform as compared with the conventional case. FIG. 4A is a schematic cross-sectional view showing a conventional test apparatus as a conventional example, and FIG. 4B is a schematic vertical cross-sectional view thereof. These figures correspond to FIG. 2A and FIG. 2B showing the test apparatus 1 of this example.

  As shown in FIGS. 4A and 4B, the test apparatus 1 </ b> A includes gas blowing ports 41 (1) to (3) and gas suction ports 42 (1) and (2) in the vertical direction of the partition wall 4. Are formed alternately along the pair of horizontal guide rails 12 and 13. Also, blower fans 43 (1) to (3) are attached to the gas outlets 41 (1) to (3), and heaters 44 (1) and (2) are attached to the gas inlet 42. ing. Accordingly, the blower fans 43 (1) to (3) and the heaters 44 (1) and (2) are also alternately arranged along the pair of horizontal guide rails 12 and 13. A configuration corresponding to the first gas recirculation duct 21 and the second gas recirculation duct 22 is not provided. Since the test apparatus 1A of the conventional example has the same configuration as the test apparatus 1 of the present example, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

  FIG. 5A is a schematic longitudinal sectional view for explaining a portion where the temperature in the test tank 5 of the test apparatus 1 of this example is examined, and FIG. 5B is a test tank of the conventional test apparatus 1A. It is a schematic longitudinal cross-sectional view for demonstrating the site | part which investigated the temperature in 5. FIG. As shown in FIGS. 5 (a) and 5 (b), in this example and the conventional example, there are nine sites where the temperature in the test tank 5 was measured. The test tank 5 is divided into an upper part, a central part in the vertical direction, and a lower part, and further, a part near the front wall 9, a substantially central part in the width direction of the pair of horizontal rails, and the partition wall 4. Divided into parts. From the upper part 1 near the front wall 9 to the lower part 9 near the partition wall 4, the temperature of each part is examined every 2 minutes.

  FIG. 6 is a graph showing the temperature distribution in the test tank 5 of this example. FIG. 7 is a graph showing the temperature distribution in the test tank 5 of the conventional example. As shown in FIG. 6, in the test apparatus 1 of this example, the temperature distribution in the test tank 5 is ± 0.5 ° C. On the other hand, as shown in FIG. 7, the temperature distribution in the test tank 5 of the conventional test apparatus 1A is ± 1.5 ° C. In the conventional example and the present example, the temperature distribution is 0.5 to 0.18 in standard deviation, which is improved to about 1/3.

  In particular, in the test apparatus 1 of this example, the 1st to 3rd parts close to the front wall 9 rise to substantially the same temperature as the 8th part close to the partition wall 4. On the other hand, in the test apparatus 1A of the conventional example, it can be seen that the temperatures of the first to third portions close to the front wall 9 are lower than the temperatures of the seventh to ninth portions close to the partition wall 4.

(Other embodiments)
In the above example, the work placement unit includes a pair of horizontal guide rails 12 and 13 that transport the pallet 11 loaded with the work 30 loaded from the carry-in port 7a toward the carry-out port 8a. It is good also as a workpiece mounting base which mounts a workpiece | work on an upper surface. In this case, the carry-in port 7 a and the carry-out port 8 a are not necessary, and the work 30 can be configured to be taken in and out of the open / close door 10.

  Further, in the case of a test apparatus that does not require the carry-in port 7a and the carry-out port 8a, the first gas recirculation duct and the second gas recirculation duct are mounted on the workpiece as shown in a schematic longitudinal sectional view in FIG. It can arrange | position in the position away in the horizontal direction on both sides of the mounting base. Since the test apparatus 1B shown in FIG. 8 corresponding to FIG. 2 (b) has the same configuration as the test apparatus 1, the corresponding parts are denoted by the same reference numerals, Description is omitted.

  In the test apparatus 1 </ b> B, the gas outlet 51 is formed in the central portion of the partition wall 4 in the left-right direction. The first gas suction port 52 and the second gas suction port 53 are formed on both sides in the left-right direction across the gas blowing port 51. The blower fan 54 is attached so as to face the gas blowing port 51, and the first heater 55 is disposed on the gas suction path from the first gas suction port 52 toward the gas suction side of the blower fan 54. The second heater 56 is disposed on the gas suction path from the second gas suction port 53 toward the gas suction side of the blower fan 54.

  A first vertical partition plate 57 extending in parallel with one end wall 7 from the partition wall 4 to the vicinity of the front wall 9 is disposed between the gas outlet 51 and the first gas inlet 52. A first gas recirculation duct 58 is formed between the one vertical partition plate 57 and the one end wall 7. As a result, the front end opening of the first gas recirculation duct 58 for sucking the gas in the test tank 5 is located in the vicinity of the inner wall portion of the one end wall 7 and in the vicinity of the front wall 9. . Similarly, a second vertical partition plate 59 extending in parallel with the other end wall 8 from the partition wall 4 to the vicinity of the front wall 9 is disposed between the gas blowing port 51 and the second gas suction port 53. A second gas recirculation duct 60 is formed between the two vertical partition plates 59 and the other end wall 8. As a result, the front end opening of the second gas recirculation duct 60 for sucking the gas in the test tank 5 is located in the vicinity of the inner wall portion of the other end wall 8 and in the vicinity of the front wall 9. . The work placing table 61 is located between the first vertical partition plate 57 and the second vertical partition plate 59. Further, the upper surface 61 a of the workpiece mounting table 61 is at the same height as the lower end edge of the gas outlet 51.

  Even if comprised in this way, the gas blown out from the gas blowing port 51 reaches the vicinity of the front wall 9 after passing through the workpiece mounting table 61 along the upper surface 61a. Therefore, the work placed on the work placing table 61 can be sufficiently exposed to the gas. Moreover, since gas spreads to the part far from the partition wall 4, the temperature distribution in the test tank 5 becomes uniform. Further, since the gas that has reached the vicinity of the front wall 9 flows back along the left and right end walls 7 and the other end wall 8 in the test chamber 5, the temperature distribution in the lateral direction in the test chamber 5 is made uniform. Suitable for doing.

  Also in this case, the interval between the first vertical partition plate 57 and the one end wall 7 and the interval between the second vertical partition plate 59 and the other end wall 8 are substantially the same interval, and these intervals are: The distance between the first vertical partition plate 57 and the second vertical partition plate 59 can be set to approximately ½. In this way, the constant temperature gas blown into the test tank 5 from the gas outlet 51 of the partition plate 4 passes through the workpiece mounting table 61 along the upper surface 61a, and then the first gas recirculation duct 58 and The second gas recirculation duct 60 is divided almost evenly without resistance, and recirculates from the first gas suction port 52 and the second gas suction port 53 to the gas supply tank 6. Since the flow rate of the gas recirculated from the first gas suction port 52 and the second gas suction port 53 to the gas supply tank 6 becomes substantially equal, the work of the first heater 55 and the second heater 56 is also almost equal. And stable control is performed.

  Further, in the test apparatus 1C shown in FIG. 9 corresponding to FIG. 2 (b), in the test apparatus 1B, the third gas reflux duct 71 along the ceiling surface 5a and the first gas passage along the bottom surface 5b. A four-gas reflux duct 72 is provided. Further, the third gas suction port 73 and the fourth gas suction port 74 are formed on both upper and lower sides of the gas blowing port 51 in the partition wall 4, and the third heater 75 is connected to the gas of the blower fan 54 from the third gas suction port 73. It arrange | positions on the gas suction path which goes to the suction side, and arrange | positions the 4th heater 76 on the gas suction path which goes to the gas suction side of the ventilation fan 54 from the 4th gas suction port 74. FIG. If it does in this way, after the gas supplied in the test tank 5 from the gas blower outlet 51 will pass the surface of the workpiece mounting base 61 and arrived at the vicinity of the front wall 9, the ceiling surface 5a of a test tank, bottom face 5 b, reflux along one end wall 7 and the other end wall 8. Therefore, it is suitable for making the temperature distribution in the vertical and horizontal directions in the test tank 5 uniform.

  In each of the above examples, a gas recirculation duct for recirculating the gas in the test tank 5 to the gas supply tank 6 is configured in the test tank 5, but for inhaling the gas in the test tank 5. If the front end opening of the gas recirculation duct is disposed at a position opposite to the partition wall 4 with the work arrangement portion interposed therebetween, and the rear end opening of the gas recirculation duct is communicated with the gas supply tank 6, The main body portion of the duct can be configured to bypass the outside of the test tank 5.

  In the above example, a heater is disposed as a heat exchanger in the gas supply tank 6, but an evaporator or a humidifier is disposed together with or in place of the heater, and the test tank 5. It is also possible to supply constant-humidity air with adjusted humidity.

  Even in this case, the constant-humidity gas supplied to the test tank from the gas outlet formed in the partition wall reaches the part on the opposite side of the partition wall across the work placement part, so it is placed in the work placement part. The exposed workpiece can be sufficiently exposed to a constant humidity gas. Moreover, since gas spreads to the site | part far from a workpiece | work arrangement | positioning part, the humidity distribution in a test tank is equalized. Therefore, for example, even when a plurality of workpieces are placed in the test tank in a state where they are arranged in a horizontal direction and a vertical direction using a rack, all the workpieces can be sufficiently exposed to the high-humidity gas. In addition, since there is no difference in the humidity around the workpieces arranged in the rack, it is possible to test each workpiece under a predetermined humidity condition.

1 is an external perspective view of a test apparatus to which the present invention is applied. (A) is the figure which looked at the AA cross section of FIG. 1 from the top, (b) is the figure which looked at the BB cross section of FIG. 1, and (c) is CC of FIG. It is the figure which looked at the cross section from the top. It is the schematic longitudinal cross-sectional view which showed typically the gas circulation path in a test chamber. (A) is a general | schematic cross-sectional view which shows the testing apparatus of a prior art example, (b) is the schematic longitudinal cross-sectional view. (A) is a schematic longitudinal cross-sectional view for demonstrating the site | part which investigated the temperature in the test tank of the test apparatus of this example, (b) is the site | part which investigated the temperature in the test tank of the test apparatus of a prior art example It is a schematic longitudinal cross-sectional view for demonstrating. It is a graph which shows the temperature distribution in the test tank of this example. It is a graph which shows the temperature distribution in the test tank of a prior art example. It is a schematic longitudinal cross-sectional view of another test apparatus to which this invention is applied. It is a schematic longitudinal cross-sectional view of another test apparatus to which this invention is applied.

Explanation of symbols

1, 1A, 1B Test apparatus 2 Test chamber 3 Machine room 4 Partition wall 5 Test tank 6 Gas supply tank 7 One end wall 8 The other end wall 9 Front wall (opposite wall)
DESCRIPTION OF SYMBOLS 10 Opening and closing lid 11 Pallet 12, 13 Horizontal guide rails 14 (1)-(3), 55 1st heater 15 (1)-(3), 56 2nd heater 16 (1)-(3), 54 ventilation Fans 17 (1) to (3), 51 Gas outlets 18 (1) to (3), 52 First gas inlets 19 (1) to (3), 53 Second gas inlets 21, 58 First gas Reflux ducts 22, 60 Second gas reflux duct 23 First horizontal partition plate 24 Second horizontal partition plate 30 Work 31 Rack 57 First vertical partition plate 59 Second vertical partition plate 71 Third gas reflux duct 72 Fourth Gas recirculation duct 73 Third gas suction port 74 Fourth gas suction port 75 Third heater 76 Fourth heater

Claims (11)

A test room,
A partition wall that divides the inside of the test chamber into a test tank that performs a test on a workpiece, and a gas supply tank that supplies constant temperature or / and constant humidity gas to the test tank;
A gas outlet formed in the partition wall for supplying a constant temperature or / and a constant humidity gas from the gas supply tank to the test tank;
A gas reflux duct for refluxing the gas in the test tank to the gas supply tank;
The end opening of the gas recirculation duct for sucking in the gas in the test tank is disposed at a part opposite to the partition wall with a work placement part where the work put in the test tank is placed. A test apparatus characterized by comprising: The test apparatus according to claim 1,
In order to recirculate the gas in the test tank to the gas supply tank, it has a gas suction port formed in the partition wall;
The gas outlet and the gas inlet communicate the gas supply tank with the test tank that is airtightly partitioned by the partition wall;
A test apparatus, wherein a rear end opening of the gas recirculation duct is connected to the gas suction port. The test apparatus according to claim 2,
The test apparatus according to claim 1, wherein a front end opening of the gas recirculation duct is located in the vicinity of an opposing wall of the test tank facing the partition wall with the work placement portion interposed therebetween. The test apparatus according to claim 2 or 3,
The gas reflux duct includes a first gas reflux duct and a second gas reflux duct,
As the gas suction port, at least one first gas suction port to which a rear end opening of the first gas reflux duct is connected and at least one of which a rear end opening of the second gas reflux duct is connected. Two second gas inlets,
The test apparatus according to claim 1, wherein a front end opening of the first gas recirculation duct and a front end opening of the second gas recirculation duct are located apart from each other with the work placement portion interposed therebetween. The test apparatus according to claim 4,
The first gas recirculation duct is formed along the ceiling surface of the test tank, and the tip opening is located in the vicinity of the ceiling surface,
The second gas recirculation duct is formed along the bottom surface of the test tank, and the tip opening is located in the vicinity of the bottom surface,
The first gas suction port is formed in the vicinity of the ceiling surface of the partition wall,
The second gas suction port is formed in the vicinity of the bottom surface of the partition wall,
The test apparatus, wherein the gas outlet is formed between the first gas inlet and the second gas inlet of the partition wall. The test apparatus according to claim 5, wherein
The first gas reflux duct is formed between the ceiling surface and a first horizontal partition plate arranged at a first interval in parallel with the ceiling surface,
The second gas reflux duct is formed between the bottom surface and a second horizontal partition plate arranged at a second interval in parallel with the bottom surface,
The test apparatus, wherein the work placement unit is located between the first horizontal partition plate and the second horizontal partition plate. The test apparatus according to claim 6, wherein
The test apparatus characterized in that the first interval and the second interval are substantially the same, and are approximately ½ of the interval between the first horizontal partition plate and the second horizontal partition plate. The test apparatus according to claim 4,
The first gas recirculation duct is formed along one inner wall of the test tank and the other inner wall of the test tank facing each other across the workpiece placement portion in the lateral direction of the test tank. The tip opening is located in the vicinity of the one inner wall,
The second gas recirculation duct is formed along the other inner wall of the test tank, and the tip opening is located in the vicinity of the other inner wall.
The first gas suction port is formed in the vicinity of the one inner wall of the partition wall,
The second gas suction port is formed in the vicinity of the other inner wall of the partition wall,
The test apparatus, wherein the gas outlet is formed between the first gas inlet and the second gas inlet of the partition wall. The test apparatus according to claim 8, wherein
The first gas reflux duct is formed between the one inner wall and the first vertical cut plate disposed in parallel with the one inner wall at a first interval,
The second gas reflux duct is formed between the other inner wall and a second vertical partition plate arranged in parallel with the other inner wall at a second interval,
The test apparatus, wherein the work placement unit is located between the first vertical partition plate and the second vertical cut plate. The test apparatus according to claim 9, wherein
The test apparatus characterized in that the first interval and the second interval are substantially the same, and are approximately ½ of the interval between the first vertical cut plate and the second vertical partition plate. The test apparatus according to any one of claims 5 to 10,
In the gas supply tank, a blower fan, a first heat exchanger and a second heat exchanger are arranged,
The blower fan is disposed in a state where the gas blowing side faces the gas blowing port,
The first heat exchanger is disposed on a gas suction path from the first gas suction port toward the gas suction side of the blower fan,
The test apparatus, wherein the second heat exchanger is disposed on a gas suction path from the second gas suction port toward a gas suction side of the blower fan.

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