JP2019152407A5 - - Google Patents

Description

In the heat treatment apparatus 1 of the present embodiment, five sets of heat treatment modules 6a, 6b, 6c, 6d and 6e are combined to form a main body. The heat treatment module 6 itself is one unitized component, and the heat treatment module 6 also functions as an environment forming unit.
The door module 8 is connected to the front end portions of the heat treatment modules 6a to 6e in the combined state. The door module 8 is one in which the door 23 and an elevating means (not shown) for elevating the door are integrated.
Also in the thermal process module 6 the rear end of a through 6e of the combined state, the back wall member 3 is provided. The back wall member 3 is a heat insulating wall.

On the contrary, like the heat treatment apparatus 80 shown in FIG. 12, the air blow of one air conditioner 81 is branched by the duct 82, and the air whose temperature is adjusted by the air conditioner 81 is supplied to the air outlets 30L and 30R, and the air inlet is supplied. Air discharged from 31L and 31R may be collected by the collecting duct 83 and returned to the air conditioning unit 81.
In the heat treatment apparatus 80 shown in FIG. 12, the air conditioning unit 81 and the heating chamber 15 are separated from each other, and the two are connected by ducts 82 and 83.
In the above-described embodiment and its modified example, the hot air blows on the upper surface and the lower surface of the object to be processed 50 in opposite directions, and the air flows up and down the heating chamber (processing space, arrangement space) 15 in opposite directions.

Claims (10)

Has between distribution置空the article Ru is installed in an environment forming apparatus air outlet for introducing the air with temperature adjusted to the arrangement space is opened,
Before Symbol air outlet is provided with multiple,
At least one of the previous SL air outlet is a wall different from the wall surface of the other of the at least one air outlet is provided, and height and said other of the at least one air outlet is installed An environment forming apparatus, which is provided at different heights . Before the Kisora air outlet, environmental forming apparatus according to claim 1, characterized in that there is in the positional relationship of the substantially diagonal. The arrangement space has a front wall partially or wholly formed by a door, a rear wall facing the front wall, a top wall, a bottom wall, and left and right side walls,
The environment forming apparatus according to claim 1, wherein the left and right side walls have a positional relationship of facing each other, and the air outlets are provided on the left and right side walls, respectively. An air conditioner having an air conditioner with a built-in air conditioner, air that has passed through the air conditioner is introduced into the arrangement space from the air outlet.
The arrangement space has an air suction port communicating with the air conditioning unit and returning air in the arrangement space to the air conditioning unit,
4. The air outlet and the air inlet, wherein one of the openings is open above the center height of the arrangement space, and the other is open below the center height of the arrangement space. 4. The environment forming device according to any one of 3.   A plurality of air conditioners having built-in air conditioners are provided, and the air outlets are provided corresponding to the air conditioners, and air that has passed through each air conditioner is introduced into the arrangement space from the corresponding air outlet. The environment forming apparatus according to claim 1, wherein: Either before Symbol conditioning unit environment forming apparatus according to claim 5, characterized in that it is independent of the other of said air-conditioning unit.   The environment forming apparatus according to any one of claims 1 to 6, further comprising a plurality of blowers, wherein the blowers blow air from the air outlet.   The constituent member includes a plurality of unitized parts, and the unitized parts include a plurality of environment forming units each including a space forming unit forming a part of the arrangement space, and the plurality of environment forming units include The environment forming apparatus according to any one of claims 1 to 7, wherein a part or all of the arrangement space is formed by being combined. An environment forming unit that forms an environment forming device in combination with another member,
A space forming part surrounded by a plurality of wall surfaces ,
The temperature and / or humidity-conditioned air having a plurality of air outlets for introducing into said space forming part,
It is at least one of the previous SL air outlet, a wall surface that different from the wall at least one other air outlet is provided, and, high above the other at least one air outlet is installed environment forming unit, characterized in that provided differ in height is. In a heat treatment apparatus having a processing space in which an object to be processed is installed, and an air outlet opening for introducing temperature-controlled air into the processing space,
The processing space is covered with a plurality of wall surfaces, has a plurality of the air outlet,
At least one of the previous SL air outlet is a wall different from the wall surface of the other of the at least one air outlet is provided, and height and said other of the at least one air outlet is installed heat treatment apparatus, characterized by being et provided at different heights.