JP5538740B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus configured to heat a workpiece with circulating hot air.

  Among heat treatment apparatuses that perform heat treatment on a work, there is a hot air circulation type heating apparatus configured to heat the work with hot air circulated inside the furnace body. In such a hot air circulation type heat treatment apparatus, there may be a problem that temperature distribution occurs on the windward and leeward side of the workpiece and the temperature decreases on the leeward side of the workpiece. Since such a problem becomes more serious as the workpiece becomes larger, various countermeasures have been conventionally taken against such a problem.

  For example, in the prior art, when a flat work is subjected to forced convection heating, the partition plate is inclined so that the space between the leeward side and the partition plate is narrower than the windward side. There is a technique for increasing the flow rate of hot air on the leeward side from the upper side and thereby uniformly heating the workpiece (see, for example, Patent Document 1).

  There is also a technique for uniformly heating a workpiece by reversing the direction in which hot air flows in order to switch between a windward side and a leeward side when forcing convection heating of a flat workpiece (see, for example, Patent Document 2). ).

Japanese Patent Laid-Open No. 11-118356 JP-A-8-261647

  In the technique according to Patent Document 1 described above, since the partition plate that changes the hot air flow velocity is arranged to be inclined, the work installation location increases in the height direction, and as a result, the work throughput is reduced. There is an inconvenience.

  Moreover, in the technique which concerns on the above-mentioned patent document 2, since the advancing direction of the circulating hot air is reversed, the filter itself becomes a dust generation source due to an abrupt change in the amount of air passing through the filter. As a result, the furnace Cleanliness inside the body may be reduced. Further, when the traveling direction of the circulating hot air is reversed, there is a possibility that dust or the like collected by the filter may be detached from the filter and float inside the furnace body.

  An object of the present invention is to uniformly form a large flat plate-like workpiece with a simple configuration without expanding the heat treatment space required for processing the workpiece per unit number of sheets and maintaining the cleanness inside the furnace body. It is providing the heat processing apparatus which can be heated.

  The heat treatment apparatus according to the present invention is configured to heat a plate-shaped workpiece with circulating hot air. This heat treatment apparatus includes a furnace body, a circulation fan, a heater, a heat resistant filter, and hot air rectifying means.

  The furnace body has a work support portion for supporting the work inside. The circulation fan is arranged on each of the first side surface side and the second side surface side in the furnace body, and is configured to generate circulating hot air. The heater is disposed on each of the first side surface side and the second side surface side in the furnace body, and is configured to heat the circulating hot air. The heat-resistant filter is arranged on each of the first side surface side and the second side surface side in the furnace body, and is configured to clean the circulating hot air. These circulation fans, heaters, and heat-resistant filters are preferably arranged symmetrically in the width direction of the furnace body.

  The hot air rectifying means is disposed between the heat-resistant filter and the work, and has an air volume of hot air supplied to the work from the first side surface side and an air volume of hot air supplied to the work from the second side surface side. Each is configured to adjust. Specifically, the hot air rectification means increases the air volume of the hot air supplied from the first side surface to the work on the upper surface of the work, more than the air volume of the hot air supplied from the second side surface to the work. On the other hand, on the lower surface of the same workpiece, the amount of hot air supplied from the second side surface to the workpiece is set to be larger than the amount of hot air supplied from the first side surface to the workpiece. As a representative example of the hot air rectifying means, there are hot air adjusting plates respectively arranged on the first side surface side and the second side surface side.

  In this configuration, since the air volume of the hot air supplied to the workpiece from the first side surface is creatively devised so as not to be the same as the air volume of the hot air supplied to the workpiece from the second side surface, The hot air supplied from the left and right is pressed against each other at the center in the width direction of the workpiece, so that there is no problem that an environment in which the hot air does not flow easily is formed in the center. For this reason, it is prevented that temperature falls in the center part of the width direction of a workpiece | work.

  Further, on the upper surface and the lower surface of the workpiece, the magnitude relationship between the amount of hot air supplied to the workpiece from the first side surface and the amount of hot air supplied to the workpiece from the second side surface is reversed. There is no difference in temperature between the left and right sides of the workpiece.

  Moreover, since the moving direction of the hot air passing through the heat resistant filter does not reverse, dust generation is unlikely to occur in the heat resistant filter. Furthermore, since it is not necessary to change the structure of the work support part that supports the work, the space required to process the work per unit number of sheets is not expanded.

  And when loading a workpiece | work in multistage form, the magnitude relationship between the air volume of the hot air supplied to a workpiece | work from the 1st side surface side and the air volume of the hot air supplied to a workpiece | work from the 2nd side surface side for every stage. By reversing, it is possible to prevent the temperature difference between the left and right from occurring even when workpieces are stacked in multiple stages.

  According to the present invention, a large flat plate-like workpiece can be uniformly formed with a simple configuration without expanding the heat treatment space required for processing the workpiece per unit number of sheets and maintaining the cleanliness inside the furnace body. It becomes possible to heat.

It is a figure which shows the outline of the heat processing apparatus which concerns on embodiment of this invention. It is a block diagram which shows the outline of a heat processing apparatus. It is a figure which shows the structure of a hot air baffle plate. It is a figure which shows the effect | action of a hot air baffle plate. It is a figure which shows the distribution | circulation state of a hot air. It is a figure which shows the outline of the heat processing apparatus which concerns on other embodiment of this invention. It is a figure which shows the example which controls the distribution | circulation state of a hot air.

  A basic configuration of a heat treatment apparatus 10 according to an embodiment of the present invention will be described with reference to FIGS. 1 (A) and 1 (B). The heat treatment apparatus 10 is a hot air circulation type clean oven, and is configured to heat the flat plate-shaped workpiece 18 carried into the furnace body 12 with the circulating hot air.

  Inside the furnace body 12, a plurality of rack members 28 configured to support the workpiece 18 in a multistage manner are provided. On the front surface of the furnace body 12, a door 26 configured to open and close when a work is carried in and out is provided. The door 26 is configured by a plurality of shutters arranged in the vertical direction, and is configured such that only the shutter corresponding to the stage assigned to the workpiece 18 to be carried in or out is opened and closed.

  A plurality of heaters 20, a plurality of circulation fans 22, and a plurality of ducts 24 are provided on the back side of the furnace body 12. The heater 20, the circulation fan 22, and the duct 24 are arranged on both sides of the central portion in the width direction of the furnace body 12 (the left-right direction in FIGS. 1A and 1B). The heater 20 is configured to heat hot air circulating inside the furnace body 12. The circulation fan 22 is configured to generate circulating air inside the furnace body 12, and is configured to suck in hot air that has passed through the heater 20 and send it out to the duct 24. In this embodiment, a sirocco fan is used as the circulation fan 22, but other types of fans may be used.

  A plurality of heat-resistant filters 14 are provided at both ends (both side surfaces) in the width direction of the furnace body 12. The heat-resistant filter 14 is configured to clean the hot air blown to the workpiece 18 by collecting fine particles contained in the hot air that has passed through the duct 24. An example of the heat resistant filter 14 is a HEPA filter, but is not necessarily limited thereto.

  Between the heat-resistant filter 14 and the rack member 28, a plurality of hot air rectifying plates 16 configured to adjust the circulation path of hot air are disposed. As shown in FIGS. 1A and 1B, the hot air rectifying plate 16 is arranged at a position corresponding to the arrangement position of the heat-resistant filter 14. The configuration and operation of the hot air rectifying plate 16 will be described later.

  As shown in FIG. 2, the heat treatment apparatus 10 includes a CPU 50. The CPU 50 includes a ROM 52, a RAM 54, a sensor unit 56, an I / F unit 58, a fan driving unit 60, a heater driving unit 62, and a door driving unit 64. Etc. are connected. The ROM 52 stores a plurality of programs necessary for the operation of the CPU 50. The RAM 54 is a volatile memory for the CPU 50 to temporarily record data. The sensor unit 56 is constituted by a plurality of instruments for collecting information such as the temperature and pressure inside the furnace body 12. The I / F unit 58 has a function of communicating with an external device. The fan driving unit 60 is configured to drive each of the plurality of circulation fans 22 based on a signal from the CPU 50. The heater driving unit 62 is configured to drive each of the plurality of heaters 20 based on a signal from the CPU 50. Based on a signal from the CPU 50, the door driving unit 64 is configured to perform an opening / closing operation of each of the plurality of shutters of the door 26.

  Next, the configuration of the hot air rectifying plate 16 will be described with reference to FIGS. 3 (A) and 3 (B). The hot air rectifying plate 16 is provided to adjust the air volume of hot air supplied to each stage of the work by dispersing and collecting hot air. The hot air rectifying plate 16 is configured to connect the upper guide portion 161 and the lower guide portion 163 having slopes that function as guide surfaces for guiding the hot air in an oblique direction, and the upper guide portion 161 and the lower guide portion 163. Connecting portion 165. Each of the upper guide portion 161 and the lower guide portion 163 is provided with a plurality of through holes 162 through which hot air can pass. As illustrated in FIG. 3B, the connecting portion 165 is configured to be fixed to a frame 164 provided at a predetermined position of the furnace body 12 through a fastening member such as a screw 166.

  As shown in FIG. 4, the end portion of the upper guide portion 161 of the hot air rectifying plate 16 is disposed at substantially the same height as the position where the workpiece 18 is disposed, and the end portion of the lower guide portion 163 of the hot air rectifying plate 16. Are arranged at almost the same height as the arrangement position of the work 18 one step below the work 18. Furthermore, although the hot air rectifying plate 16 is disposed on both the left and right sides of the workpiece 18, the hot air rectifying plate 16 disposed on the left side and the hot air rectifying plate 16 disposed on the right side are arranged one step in the height direction. They are arranged at different positions.

  In the above configuration, most of the hot air hitting the hot air rectifying plate 16 travels along the slopes of the upper guide portion 161 and the lower guide portion 163, while a part of the hot air hitting the hot air rectifying plate 16 is a through hole 162. Proceed through the road. For this reason, while the air volume of the hot air supplied to the upper surface of the workpiece 18 disposed at a height corresponding to the end of the upper guide portion 161 is increased, the air volume of the hot air supplied to the lower surface of the workpiece 18 is small. Become. Further, while the amount of hot air supplied to the lower surface of the workpiece disposed at a height corresponding to the end of the lower guide portion 163 increases, the amount of hot air supplied to the upper surface of the workpiece 18 decreases. . Since the right and left hot air rectifying plates 16 are arranged so as to be shifted from each other by one stage, the amount of hot air supplied from the left is reduced in the stage where the amount of hot air supplied from the right is large, and At the stage where the amount of hot air supplied from the right is small, the amount of hot air supplied from the left increases.

  As shown in FIG. 5 (A), when the amount of hot air supplied from the left side is large and the amount of hot air supplied from the right side is small, the hot air supplied from the left passes through the central portion of the workpiece 18 in the width direction. Pass through and reach the right side of the workpiece 18. On the other hand, as shown in FIG. 5B, when the amount of hot air supplied from the right side is large and the amount of hot air supplied from the left side is small, the hot air supplied from the right side is in the width direction of the workpiece 18. Pass through the center and reach the left side of the workpiece 18. For this reason, the hot air from the left and right sides of the work 18 are pressed against each other at the center in the width direction of the work 18 as when the hot air having the same strength is supplied from the left and right. The occurrence of defects is prevented. For this reason, the generation | occurrence | production of the malfunction that the temperature of the center part of the width direction of the workpiece | work 18 falls is prevented. In addition, when strong hot air is supplied from the left side on the upper surface of the work 18, strong hot air is supplied from the right side on the lower surface of the same work 18, so that there is no temperature difference between the right and left of the work 18. . For example, in the case of this embodiment, although the heating set temperature of the workpiece 18 is set to 230 degrees, a favorable result is obtained that there is no variation of plus or minus 3 degrees or more in the entire area of the workpiece 18. .

  Further, since the amount of hot air passing through the heat-resistant filter 14 is not changed, the cleanliness inside the furnace body 12 is not reduced by dust generation from the heat-resistant filter 14. Since the configuration of the rack member 28 that supports the work 18 is not changed, the space necessary for arranging the work 18 per unit number of sheets is not expanded.

  FIG. 6 schematically shows a heat treatment apparatus 102 according to another embodiment of the present invention. Since the basic configuration of the heat treatment apparatus 102 is the same as that of the above-described heat treatment apparatus 10, the description thereof is omitted. The heat treatment apparatus 102 is different from the heat treatment apparatus 10 in that it does not include the hot air rectifying plate 16 described above.

  Normally, when hot air having the same strength is supplied from the left and right sides of the work 18 without using the hot air rectifying plate 16 described above, a low temperature area 70 where the temperature is lower than the other parts is provided at the center of the work 18. May occur.

  For this reason, in the heat treatment apparatus 102, the CPU 50 controls the fan drive unit 60 to change the strength of hot air from the left and right with time.

  In this embodiment, the hot air from the left is gradually weakened while the hot air from the right is gradually strengthened, and then, as shown in FIG. 7A, strong hot air is supplied from the right for a predetermined time. Subsequently, the intensity of hot air from the left and right is gradually made the same, and thereafter, hot air having the same intensity is supplied from the left and right as shown in FIG. Subsequently, the hot air from the right is gradually weakened while the hot air from the left is gradually strengthened, and then the strong hot air is supplied from the left as shown in FIG.

  In the heat treatment apparatus 102, every time a predetermined time elapses so as not to cause an abrupt change in air volume, FIG. 7 (A) → FIG. 7 (B) → FIG. 7 (C) → FIG. 7 (B) → FIG. The state is gradually changed from A) to FIG. 7B to FIG. 7C.

  According to the above embodiment, the occurrence of a problem that the hot air hardly flows into the central portion of the workpiece 18 as in the case where hot air having the same strength is supplied from the left and right is prevented. The occurrence of problems such as a decrease in temperature is prevented. Moreover, since the strength relationship between the hot air from the left and right is reversed every predetermined time, there is no temperature difference between the left and right of the workpiece 18.

  Further, there is no sudden change in the amount of hot air passing through the heat-resistant filter 14, and the moving direction of the hot air passing through the heat-resistant filter 14 does not change. It is possible to maintain the cleanliness inside the body 12.

  Here, an example in which the hot air strength relationship from the left and right is intermittently changed has been described, but the hot air strength relationship from the left and right may be continuously changed. For example, the voltage applied to the left and right circulation fans 22 may be intermittently subjected to tilt output control (ramping), or may be continuously changed by continuously performing tilt output control (ramping). Anyway.

  Furthermore, it is possible not only to control the voltage applied to the left and right circulation fans 22 to increase or decrease linearly with the passage of time, but also to change these voltages so as to draw a sine wave. In any case, when the voltage applied to one of the left and right circulation fans 22 is increased, the voltage applied to the other is weakened. Conversely, when the voltage applied to one is weakened, the voltage applied to the other is decreased. It is important to reverse the strength of the hot air from the left and right as it strengthens. It is also important to avoid changing the voltage applied to the left and right circulation fans 22 in steps.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

10-heat treatment apparatus 12-furnace body 14-heat-resistant filter 16-hot air rectifying plate 18-work 20-heater heater 22-circulation fan 28-rack member

Claims (2)

A heat treatment apparatus configured to heat a flat workpiece by circulating hot air,
A furnace body having a workpiece support portion for supporting the workpiece;
A plurality of circulation fans arranged on each of the first side surface side and the second side surface side of the furnace body and configured to generate the circulation hot air;
A plurality of heaters arranged on each of the first side surface side and the second side surface side in the furnace body and configured to heat the circulating hot air;
A heat-resistant filter for cleaning the circulating hot air, disposed on each of the first side surface and the second side surface of the furnace body;
Arranged between the heat-resistant filter and the workpiece, and adjusts the amount of hot air supplied to the workpiece from the first side surface and the amount of hot air supplied to the workpiece from the second side surface, respectively. Hot air rectifying means configured to:
With
While the hot air rectifying means increases the air volume of the hot air supplied to the work from the first side surface on the upper surface of the work, the air flow is larger than the air volume of the hot air supplied from the second side surface to the work. In the lower surface of the same workpiece, heat treatment is configured such that the amount of hot air supplied from the second side surface to the workpiece is larger than the amount of hot air supplied from the first side surface to the workpiece. apparatus. The work support part is a rack member that can support the work in multiple stages,
The hot air rectifying means is
An upper guide portion having an inclined surface as a guide surface, the end portion of which is disposed at a height corresponding to the first workpiece, and guides hot air to the upper surface of the first workpiece;
A lower side having an inclined surface as a guide surface, the end of which is arranged at a height corresponding to a second workpiece arranged one step below the first workpiece, and guides hot air to the lower surface of the second workpiece. A hot air adjusting plate that has at least a guide portion and is arranged on each of the first side surface side and the second side surface side,
The upper guide portion and the lower guide portion each have a through hole that guides a part of hot air between the first workpiece and the second workpiece,
The hot air adjusting plate arranged on the first side surface side and the hot air adjusting plate arranged on the second side surface side are arranged at positions shifted by one step in the height direction. Heat treatment equipment.

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