JP5562548B2 - Heat treatment equipment - Google Patents

Heat treatment equipment Download PDF

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JP5562548B2
JP5562548B2 JP2008281054A JP2008281054A JP5562548B2 JP 5562548 B2 JP5562548 B2 JP 5562548B2 JP 2008281054 A JP2008281054 A JP 2008281054A JP 2008281054 A JP2008281054 A JP 2008281054A JP 5562548 B2 JP5562548 B2 JP 5562548B2
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forming member
flow path
path forming
shutter
heat treatment
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JP2010107137A (en
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隆司 井津
翁堂 藤田
周秀 藤山
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Koyo Thermo Systems Co Ltd
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Koyo Thermo Systems Co Ltd
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Priority to TW098127679A priority patent/TWI463100B/en
Priority to KR1020090100362A priority patent/KR101594054B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F27D2007/045—Fans

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Furnace Details (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Liquid Crystal (AREA)

Description

本発明は、炉体の内部を循環させた熱風によって炉体内部に配置されたワークを加熱するように構成された熱風循環式の熱処理装置に関する。   The present invention relates to a hot air circulation type heat treatment apparatus configured to heat a work disposed inside a furnace body by hot air circulated inside the furnace body.

熱処理装置の１つの種類として熱風循環式の熱処理装置がある。熱風循環式の熱処理装置は、通常、循環ファンによって循環空気を生成し、この循環空気をヒータによって加熱することによって循環熱風を発生させ、発生した循環熱風によって炉体の内部のワークを加熱するように構成される。そして、このような熱風循環式の熱処理装置では、ワークを均一に加熱するために熱風の循環経路の設計に様々な創意工夫がなされてきた。   One type of heat treatment apparatus is a hot air circulation type heat treatment apparatus. A hot air circulation type heat treatment apparatus usually generates circulating air by a circulating fan, generates circulating hot air by heating the circulating air with a heater, and heats the work inside the furnace body by the generated circulating hot air. Configured. In such a hot air circulation type heat treatment apparatus, various ingenuities have been made in designing the hot air circulation path in order to uniformly heat the workpiece.

ところが、熱風の循環経路が適切に構築されている場合であっても、炉口側からの放熱が原因で炉体内部における炉口近傍の温度が他の領域よりも低くなり、炉体内部に温度差が発生するという問題が生じることがあった。   However, even when the hot air circulation path is properly constructed, the temperature near the furnace port in the furnace body is lower than in other areas due to heat dissipation from the furnace port side, and the inside of the furnace body There may be a problem that a temperature difference occurs.

そこで、従来技術の中には、熱処理室の両側端に設けられた吹き出し板および吸い込み板の炉口部近傍の開口比率を高くする一方で、炉口部近傍以外の開口比率を低くすることによって、熱風の量が炉口部近傍で多くなるようにする熱処置装置が存在する（例えば、特許文献１参照）。そして、この技術によれば、シャッタからの放熱に起因する炉口部近傍の温度低下の影響を軽減することができる、とされている。
特開２００４−２５１５３４号公報 Therefore, in the prior art, by increasing the opening ratio in the vicinity of the furnace port portion of the blowing plate and the suction plate provided at both ends of the heat treatment chamber, while reducing the opening ratio other than in the vicinity of the furnace port portion. There is a heat treatment device that increases the amount of hot air in the vicinity of the furnace port (see, for example, Patent Document 1). And according to this technique, it is supposed that the influence of the temperature fall near the furnace port part resulting from the heat radiation from the shutter can be reduced.
JP 2004-251534 A

上述の特許文献１に係る技術において、シャッタ開閉時に炉体の内部に進入した外気がワークまで到達することを防止するためには、炉口部近傍での熱風の量を十分に増加させる必要がある。ところが、熱風の量を増加させるためには強力なヒータや強力な循環ファンが必要となるため、部品コストが高くなる上に消費電力が大きくなるといった不都合が生じ得る。   In the technique according to Patent Document 1 described above, it is necessary to sufficiently increase the amount of hot air in the vicinity of the furnace port portion in order to prevent outside air that has entered the interior of the furnace body from reaching the workpiece when the shutter is opened and closed. is there. However, in order to increase the amount of hot air, a powerful heater and a powerful circulation fan are required, which may cause inconveniences such as an increase in parts cost and power consumption.

この発明の目的は、シャッタの開閉時に炉体の内部に進入した外気がワークに届くことを簡易な構成にて防止し、外気の進入による炉内温度の低下を抑えることにより、炉内の温度差をなくして均一にすることが可能な熱処理装置を提供することである。   The object of the present invention is to prevent the outside air that has entered the inside of the furnace body from reaching the workpiece when the shutter is opened and closed with a simple configuration, and to suppress a decrease in the temperature in the furnace due to the entry of outside air. An object of the present invention is to provide a heat treatment apparatus that can eliminate the difference and make it uniform.

本願発明に係る熱処理装置は、炉体の内部を循環させた熱風によって炉体内部の熱処理部に上下に多段に支持された板状ワークを加熱するように構成された熱処理装置である。この熱処理装置は、循環ファン、ヒータ、シャッタ、流路形成部材、および案内部材を備える。   The heat treatment apparatus according to the present invention is a heat treatment apparatus configured to heat plate-like workpieces supported in multiple stages in the heat treatment part inside the furnace body by hot air circulated inside the furnace body. The heat treatment apparatus includes a circulation fan, a heater, a shutter, a flow path forming member, and a guide member.

循環ファンは、炉体の内部に循環空気を発生させるように構成される。ヒータは、炉体の内部の循環空気を加熱するように構成される。   The circulation fan is configured to generate circulation air inside the furnace body. The heater is configured to heat the circulating air inside the furnace body.

シャッタは、互いに離間または接触可能に構成された複数のシャッタ片を備える。シャッタは、隣り合う２つのシャッタ片を離間または接触させることにより、炉体の一側面に設けられ各段のワークの出し入れを可能にする炉口の一部を占める領域であって、出し入れされるワークの一以上の段に対応づけられる水平方向に長い形状の領域を選択的に開閉するように構成される。   The shutter includes a plurality of shutter pieces configured to be separated from or in contact with each other. The shutter is an area that occupies a part of the furnace port that is provided on one side of the furnace body and allows the work of each stage to be taken in and out by separating or contacting two adjacent shutter pieces. A horizontally long region corresponding to one or more stages of the workpiece is selectively opened and closed.

流路形成部材は、複数のシャッタ片の少なくとも一部にそれぞれ取り付けられる。流路形成部材は、複数のシャッタ片のすべてにそれぞれ取り付けられることが好ましいが、炉体の構造上の理由で一部に流路形成部材を取り付けられないシャッタ片が生じる場合であっても本発明を実施することは可能である。また、流路形成部材は、シャッタ片の炉体内部に対向する裏面に沿って水平方向に流れ、かつ、上方に開放した循環空気の経路を形成するように構成される。ここで、循環空気の経路を上方に開放させる理由は、外気は炉体の内部の空気に比較して温度が低いので炉に進入した後に降下することを考慮し、外気がワークに到達する前にそれを補足可能とするためである。   The flow path forming member is attached to at least a part of the plurality of shutter pieces. The flow path forming member is preferably attached to all of the plurality of shutter pieces, but even if there is a shutter piece in which the flow path forming member cannot be attached in part due to the structure of the furnace body. It is possible to carry out the invention. Further, the flow path forming member is configured to flow in the horizontal direction along the back surface facing the inside of the furnace body of the shutter piece and to form a path of circulating air opened upward. Here, the reason for opening the path of the circulating air upward is that the outside air has a lower temperature than the air inside the furnace body, so that it falls after entering the furnace, before the outside air reaches the workpiece. This is to make it possible to supplement it.

案内部材は、循環ファンで発生した循環空気を前記流路形成部材によって形成される経路の一端側に案内する。案内部材の作用により、循環ファンからの熱風が流路形成部材によって形成される循環空気の経路に導かれる。   The guide member guides the circulating air generated by the circulation fan to one end side of the path formed by the flow path forming member. By the action of the guide member, hot air from the circulation fan is guided to the circulation air path formed by the flow path forming member.

この構成においては、シャッタ片の裏面に沿って水平に流れる熱風の流路が、各シャッタ片の裏面側にそれぞれ構築される。つまり、シャッタの裏面側にサイドフローの熱風カーテンが構築される。しかも、流路形成部材によって熱風の流路が画定されているため、流路形成部材内の熱風の流速を局所的に増加させることが可能となる。さらに、流路形成部材が上方に開放した循環空気の経路を形成するため、降下する冷気を流路形成部材内に捕捉し易い。そして、捕捉した冷気を経路内の循環空気の流れに乗せてすばやく熱処理部外に運び去ることができる。   In this configuration, a flow path of hot air that flows horizontally along the back surface of the shutter piece is constructed on the back surface side of each shutter piece. That is, a side flow hot air curtain is constructed on the back side of the shutter. In addition, since the flow path of the hot air is defined by the flow path forming member, the flow rate of the hot air in the flow path forming member can be locally increased. Furthermore, since the flow path forming member forms a path of circulating air opened upward, it is easy to capture the descending cold air in the flow path forming member. Then, the captured cold air can be quickly carried out of the heat treatment section on the circulating air flow in the path.

このため、ワークの出し入れ時に冷たい外気が炉内に進入した場合であっても、この外気が流路形成部材内を流れる熱風の中に吸収されるため、この外気がワークに到達することを防止することが可能になる。しかも、流路形成部材内の熱風の流速を局所的に増加させることが可能であるため、ヒータや循環ファンをより強力なものに置き換えなくても炉口部近傍での熱風の速度を十分に増加させることができる。   For this reason, even when cold outside air enters the furnace when the workpiece is taken in and out, this outside air is absorbed in the hot air flowing in the flow path forming member, so that this outside air is prevented from reaching the workpiece. It becomes possible to do. In addition, since the flow rate of the hot air in the flow path forming member can be locally increased, the speed of the hot air in the vicinity of the furnace opening can be sufficiently increased without replacing the heater or the circulation fan with a more powerful one. Can be increased.

その結果、外部の冷たい空気が炉内に吸い込まれ、昇温中および昇温完了後のワークの温度が一部下がることにより、ガラス基板全体の温度分布が乱れるといった不具合の発生を抑制することができる。   As a result, external cold air is sucked into the furnace, and the temperature of the workpiece during temperature rise and after temperature rise is partially reduced, thereby suppressing the occurrence of problems such as disturbing the temperature distribution of the entire glass substrate. it can.

さらに、流路形成部材は、循環空気の経路の底部に炉体の内側に向かって下がるような傾斜部が形成されるように構成されることが好ましい。その理由は、流路形成部材内に誘い込まれた冷気が流路形成部材から溢れてその外、即ち、熱処理部内に逃げにくくなるからである。この構成を採用することにより、流路形成部材によって形成される循環空気の経路がより深くなるため、一旦流路形成部材内に収まった冷気が溢れることを防止できる。   Furthermore, it is preferable that the flow path forming member is configured such that an inclined portion that falls toward the inside of the furnace body is formed at the bottom of the path of the circulating air. The reason is that the cold air drawn into the flow path forming member overflows from the flow path forming member and is difficult to escape to the outside, that is, the heat treatment portion. By adopting this configuration, since the path of the circulating air formed by the flow path forming member becomes deeper, it is possible to prevent the cold air once stored in the flow path forming member from overflowing.

流路形成部材に向かう循環空気の風速が、熱処理部に向かう循環空気の風速よりも大きくなるように風速調整を行うための風速調整部材をさらに備えることが好ましい。風速調整部材の例として、吹き出し側の風量を開口比率によって調整する吹き出し板や、吸い込み側の吸い込み量を開口比率によって調整する吸い込み板が挙げられる。このような構成を用いることにより、流路形成部材内の熱風の流速を局所的に増加させ易くなる。   It is preferable to further include a wind speed adjusting member for adjusting the wind speed so that the wind speed of the circulating air toward the flow path forming member is larger than the wind speed of the circulating air toward the heat treatment section. Examples of the wind speed adjusting member include a blowing plate that adjusts the air volume on the blowing side based on the opening ratio, and a suction plate that adjusts the suction amount on the suction side using the opening ratio. By using such a configuration, it becomes easy to locally increase the flow velocity of the hot air in the flow path forming member.

本発明によれば、シャッタの開閉時に炉体の内部に進入した外気がワークに届くことを簡易な構成にて防止し、外気の進入による温度低下を抑えることにより、炉内の温度差をなくして均一にすることが可能になる。   According to the present invention, it is possible to prevent the outside air that has entered the inside of the furnace body from reaching the workpiece when the shutter is opened and closed with a simple configuration, and to suppress the temperature drop due to the entry of outside air, thereby eliminating the temperature difference in the furnace. And uniform.

図１は、本発明の実施形態に係る熱風循環式の熱処理装置１０の概略を示す図である。熱処理装置１０は、ワークとしてのガラス基板１６を互いに間隙を設けて積層して収容することが可能な熱処理部１２を有する炉体１１を備える。熱処理部１２では、矢印６０で示す方向に熱風を流しており、この熱風によってガラス基板１６を加熱する。   FIG. 1 is a diagram showing an outline of a hot air circulation type heat treatment apparatus 10 according to an embodiment of the present invention. The heat treatment apparatus 10 includes a furnace body 11 having a heat treatment section 12 capable of accommodating a glass substrate 16 as a workpiece with a gap provided between each other. In the heat treatment part 12, hot air flows in the direction indicated by the arrow 60, and the glass substrate 16 is heated by this hot air.

炉体１１の下側には熱処理部１２の動作を制御するように構成された制御部（図示せず）が配置される。熱処理装置１０の炉体１１の炉口には、熱処理部１２に対してガラス基板１６を出し入れする際に開閉するように構成されたシャッタ１４が設けられる。   A control unit (not shown) configured to control the operation of the heat treatment unit 12 is disposed below the furnace body 11. The furnace opening of the furnace body 11 of the heat treatment apparatus 10 is provided with a shutter 14 configured to open and close when the glass substrate 16 is taken in and out of the heat treatment unit 12.

図２に示すように、シャッタ１４は、複数のシャッタ片１４１〜１４６から構成されている。複数のシャッタ片１４１〜１４６のそれぞれは、垂直方向に伸びる軸に上下方向に移動可能に支持されており、それぞれが互いに独立して昇降するように構成されている。   As illustrated in FIG. 2, the shutter 14 includes a plurality of shutter pieces 141 to 146. Each of the plurality of shutter pieces 141 to 146 is supported by an axis extending in the vertical direction so as to be movable in the vertical direction, and is configured to move up and down independently of each other.

さらに、シャッタ片１４２〜１４５の裏面には、シャッタ１４の裏面に沿って水平に流れる熱風の流路を画定する流路形成部材２０が取り付けられる。また、熱処理部１２の上面および底面には、シャッタ１４に平行でかつ水平方向に配置された遮風板１８および１９が設けられる。   Further, a flow path forming member 20 that defines a flow path of hot air flowing horizontally along the back surface of the shutter 14 is attached to the back surfaces of the shutter pieces 142 to 145. In addition, wind shielding plates 18 and 19 are provided on the top and bottom surfaces of the heat treatment section 12 in parallel with the shutter 14 and in the horizontal direction.

図３は、流路形成部材２０の概略を示す図である。以下、シャッタ片１４２〜１４５を代表してシャッタ片１４５の裏面に取り付けられた流路形成部材２０について説明し、シャッタ片１４２〜１４４の裏面に取り付けられた流路形成部材２０については、その構成が同一であるため説明を省略する。   FIG. 3 is a diagram showing an outline of the flow path forming member 20. Hereinafter, the flow path forming member 20 attached to the back surface of the shutter piece 145 on behalf of the shutter pieces 142 to 145 will be described, and the flow path forming member 20 attached to the back surface of the shutter pieces 142 to 144 will be described. Since these are the same, the description is omitted.

流路形成部材２０は、金属の板を変形させて所望の形状に加工してなる板金２０２と、板金２０２の上部をシャッタ片１４５に連結するとともに流路形成部材２０を補強するための２本のブラケット２２とを備える。板金２０２の素材としては、例えばステンレス板が挙げられるが、これに限定されるものではない。   The flow path forming member 20 includes a sheet metal 202 formed by deforming a metal plate and processing it into a desired shape, and two pipes for connecting the upper portion of the sheet metal 202 to the shutter piece 145 and reinforcing the flow path forming member 20. The bracket 22 is provided. Examples of the material of the sheet metal 202 include, but are not limited to, a stainless steel plate.

図４（Ａ）および図４（Ｂ）に示すように、板金２０２は、シャッタ片１４５に固着された固着部２０３、循環熱風の経路の底面を画定する底部２０４、および底部２０４から垂直に立ち上がって循環熱風の経路の側面を画定する側壁部２０６から構成される。   As shown in FIGS. 4A and 4B, the sheet metal 202 rises vertically from the fixing portion 203 fixed to the shutter piece 145, the bottom portion 204 defining the bottom surface of the circulating hot air path, and the bottom portion 204. The side wall portion 206 defines the side surface of the circulating hot air path.

固着部２０３は、シャッタ片１４５を構成するフレーム部材にビス留め等によって固定される。底部２０４には、炉体１１の内側に向かって下がるように形成された傾斜部が設けられる。この傾斜部を設ける理由は、循環熱風の経路に深く窪んだ部分を設けることにより、外気が側壁部２０６を乗り越えて熱処理部１２に入るという不都合が発生しにくくなるからである。側壁部２０６は、外気が熱処理部１２に進入することを防止する遮風板としても機能する。   The fixing portion 203 is fixed to a frame member constituting the shutter piece 145 by screwing or the like. The bottom portion 204 is provided with an inclined portion formed so as to descend toward the inside of the furnace body 11. The reason for providing the inclined portion is that by providing a deeply recessed portion in the path of the circulating hot air, it is difficult to cause inconvenience that the outside air gets over the side wall portion 206 and enters the heat treatment portion 12. The side wall portion 206 also functions as a wind shield that prevents outside air from entering the heat treatment portion 12.

上述のように、シャッタ片１４５に板金２０２を取り付けることにより、シャッタ片１４５の裏面、底部２０４、および側壁部２０６に囲まれる断面視Ｕ字状の上方に開放した風洞が形成される。   As described above, by attaching the sheet metal 202 to the shutter piece 145, a wind tunnel opened upward in a U-shape in cross section surrounded by the back surface, the bottom portion 204, and the side wall portion 206 of the shutter piece 145 is formed.

図５（Ａ）および図５（Ｂ）は、炉体１１の内部における熱風の循環経路の一例を示すものである。図５（Ａ）は、熱処理装置１０の側面図であり、図５（Ｂ）は、熱処理装置１０の平面図である。熱処理装置１０は、炉体１１の内部に循環空気を発生させるように構成された複数の循環ファン３２、および炉体１１の内部の循環空気を加熱するように構成された複数のヒータ３５を備える。   FIGS. 5A and 5B show an example of a hot air circulation path inside the furnace body 11. FIG. 5A is a side view of the heat treatment apparatus 10, and FIG. 5B is a plan view of the heat treatment apparatus 10. The heat treatment apparatus 10 includes a plurality of circulation fans 32 configured to generate circulating air inside the furnace body 11 and a plurality of heaters 35 configured to heat the circulating air inside the furnace body 11. .

循環ファン３２から吹き出された熱風は、フィルタ３４（例えば、ＨＥＰＡフィルタ）を通過して熱処理部１２に導かれ、熱処理部１２から上部および下部の循環経路を経由して循環ファン３２の配置位置まで帰還する。さらに、図５（Ｂ）に示すように、循環ファン３２から吹き出された熱風の一部は、フィルタ３４を通過した後に、垂直方向に設置された案内板３８によって流路形成部材２０の一端部に案内される。また、流路形成部材２０の吸い込み側の端部近傍には、上下方向に伸びる遮風板３６が設けられる。遮風板３６、遮風板１８、および遮風板１９によって、流路形成部材２０と吸い込み口との隙間を塞ぎ、流路形成部材２０にて画定される熱風の循環経路の吸い込み量の増加を図っている。   Hot air blown out from the circulation fan 32 passes through a filter 34 (for example, a HEPA filter) and is guided to the heat treatment unit 12, and reaches the position of the circulation fan 32 via the upper and lower circulation paths from the heat treatment unit 12. Return. Further, as shown in FIG. 5 (B), a part of the hot air blown out from the circulation fan 32 passes through the filter 34, and then is guided to one end of the flow path forming member 20 by the guide plate 38 installed in the vertical direction. Be guided to. Further, a wind shielding plate 36 extending in the vertical direction is provided in the vicinity of the suction side end of the flow path forming member 20. The wind shield plate 36, the wind shield plate 18 and the wind shield plate 19 close the gap between the flow path forming member 20 and the suction port, and increase the amount of suction of the hot air circulation path defined by the flow path forming member 20. I am trying.

さらに、図６に示すように、炉体１１の内部には、吹き出し板４２および吸い込み板４０が設けられる。吹き出し板４２は、炉口部近傍の開口比率が大きく（例えば、８０〜１００％）、炉口部近傍を除いた部分の開口比率が小さく（例えば、２０〜６０％）なるように構成される。同様に、吸い込み板４０についても、炉口部近傍の開口比率が大きく（例えば、８０〜１００％）、炉口部近傍を除いた部分の開口比率が小さく（例えば、６〜１８％）になるように構成される。開口比率は、吹き出し板４２および吸い込み板４０に形成される貫通孔の大きさや数を調整することにより調整される。本実施形態では、流路形成部材２０にて画定される熱風の循環経路の上流および下流には、吹き出し板４２および吸い込み板４０を配置しないようにしている（開口比率１００％）。ただし、ここで示した開口比率は単なる一例に過ぎず、これ以外の構成を採用することも可能である。   Further, as shown in FIG. 6, a blowing plate 42 and a suction plate 40 are provided inside the furnace body 11. The blowing plate 42 is configured such that the opening ratio in the vicinity of the furnace port portion is large (for example, 80 to 100%) and the opening ratio in the portion excluding the vicinity of the furnace port portion is small (for example, 20 to 60%). . Similarly, also for the suction plate 40, the opening ratio in the vicinity of the furnace opening is large (for example, 80 to 100%), and the opening ratio in the portion excluding the vicinity of the furnace opening is small (for example, 6 to 18%). Configured as follows. The opening ratio is adjusted by adjusting the size and number of through holes formed in the blowing plate 42 and the suction plate 40. In the present embodiment, the blowing plate 42 and the suction plate 40 are not arranged upstream and downstream of the hot air circulation path defined by the flow path forming member 20 (opening ratio 100%). However, the aperture ratio shown here is merely an example, and other configurations can be employed.

さらに、吸い込み側の炉内中央部には遮風板４４が配置されており、吹き出し板４２の開口率が小さい領域の上下の吸い込み部を遮風板４４によって塞ぐようにしている。遮風板４４を設ける理由は、流路形成部材２０近傍の吸い込み量を炉体１１の他の箇所の吸い込み量より増加させるためである。   Further, a wind shield plate 44 is disposed in the central portion of the furnace on the suction side so that the upper and lower suction portions in the region where the aperture ratio of the blowout plate 42 is small are blocked by the wind shield plate 44. The reason for providing the wind shielding plate 44 is to increase the suction amount in the vicinity of the flow path forming member 20 more than the suction amount in other portions of the furnace body 11.

以上の構成を採用することにより、流路形成部材２０にて画定される熱風の循環経路の風速を局所的に増加させることが可能となる。そして、シャッタ１４が開放した時に外気が進入しても、進入した外気をガラス基板１６に届く前に流路形成部材２０にて捕捉し易くなる。   By adopting the above configuration, it is possible to locally increase the wind speed of the hot air circulation path defined by the flow path forming member 20. Even if outside air enters when the shutter 14 is opened, the entering outside air is easily captured by the flow path forming member 20 before reaching the glass substrate 16.

図７（Ａ）および図７（Ｂ）は、シャッタ１４を開放した状態を示している。図７（Ａ）に示すように、シャッタ片１４５および１４６を降下させてシャッタ１４の一部を開放すると、外気が炉体１１の内部に進入しようとする。この外気は炉体１１の内部の空気に比較して温度が低いため、炉体１１に進入する際には降下しながら進入することになる。その結果、炉体１１に進入した外気は、流路形成部材２０の側壁部２０６にてブロックされ、流路形成部材２０にて画定される熱風の循環経路内に捕捉される。そして、図７（Ｂ）に示すように、熱風とともに吸い込み側に吸い込まれて循環空気の一部として回収される。   7A and 7B show a state where the shutter 14 is opened. As shown in FIG. 7A, when the shutter pieces 145 and 146 are lowered and a part of the shutter 14 is opened, outside air tends to enter the inside of the furnace body 11. Since this outside air has a lower temperature than the air inside the furnace body 11, it enters while descending when entering the furnace body 11. As a result, the outside air that has entered the furnace body 11 is blocked by the side wall portion 206 of the flow path forming member 20, and is captured in the hot air circulation path defined by the flow path forming member 20. Then, as shown in FIG. 7B, it is sucked into the suction side together with hot air and collected as part of the circulating air.

以上のように、シャッタ１４の裏面に熱風が通る熱風循環経路を形成し、その熱風循環経路の風速を局所的に上げることにより、外気が炉体１１の内部に進入した場合であっても、炉体１１の内部に進入したほぼすべての外気が熱風経路に捕捉される。このため、炉体１１の内部に進入した冷たい外気がガラス基板１６まで届くという不都合はほとんど発生しなくなる。この結果、ガラス基板１６の温度分布のバラツキを減少させることが可能になる。   As described above, even if the outside air enters the interior of the furnace body 11 by forming a hot air circulation path through which hot air passes through the back surface of the shutter 14 and locally increasing the wind speed of the hot air circulation path, Almost all the outside air that has entered the interior of the furnace body 11 is trapped in the hot air path. For this reason, the inconvenience that the cold outside air that has entered the inside of the furnace body 11 reaches the glass substrate 16 hardly occurs. As a result, it is possible to reduce variations in the temperature distribution of the glass substrate 16.

上述の実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

本発明の実施形態に係る熱処理装置の概略を示す図である。It is a figure which shows the outline of the heat processing apparatus which concerns on embodiment of this invention. 熱処理装置のシャッタの概略構成を示す図である。It is a figure which shows schematic structure of the shutter of heat processing apparatus. 流路形成部材の概略構成を示す図である。It is a figure which shows schematic structure of a flow-path formation member. 流路形成部材の概略構成を示す図である。It is a figure which shows schematic structure of a flow-path formation member. 熱処理装置における熱風の循環状態を示す図である。It is a figure which shows the circulation state of the hot air in a heat processing apparatus. 熱処理装置における熱風の循環状態を示す図である。It is a figure which shows the circulation state of the hot air in a heat processing apparatus. 外気が流路形成部材内に捕捉される状態を示す図である。It is a figure which shows the state in which external air is capture | acquired in a flow-path formation member.

符号の説明Explanation of symbols

１０−熱処理装置
１１−炉体
１２−熱処理部
１４−シャッタ
１６−ガラス基板
２０−流路形成部材
２２−ブラケット
３４−フィルタ 10-heat treatment apparatus 11-furnace body 12-heat treatment part 14-shutter 16-glass substrate 20-flow path forming member 22-bracket 34-filter

Claims (3)

炉体の内部を循環させた熱風によって炉体内部の熱処理部に上下に多段に支持された板状ワークを加熱するように構成された熱処理装置であって、
前記炉体の内部に循環空気を発生させるように構成された循環ファンと、
前記炉体の内部の循環空気を加熱するように構成されたヒータと、
複数のシャッタ片を備え、隣り合う２つのシャッタ片を離間または接触させることにより、前記炉体の一側面に設けられ各段のワークの出し入れを可能にする炉口の一部を占める領域であって、出し入れされるワークの一以上の段に対応づけられる水平方向に長い形状の領域を選択的に開閉するように構成されたシャッタと、
前記複数のシャッタ片の少なくとも一部にそれぞれ取り付けられた流路形成部材であって、前記シャッタ片の炉体内部に対向する裏面に沿って水平方向に流れる循環空気の経路を形成するための流路形成部材と、
前記循環ファンで発生した循環空気を前記流路形成部材によって形成される前記経路の一端側に案内するように構成された案内部材と、
を備え、
前記流路形成部材が、前記シャッタ片の裏面に対して前記シャッタ片の水平方向の両端部にわたって対向する側壁部と、前記シャッタ片の水平方向の両端部にわたって前記シャッタ片の下部と前記側壁部の下部とを繋ぐ底部と、を備え、
前記流路形成部材は、前記シャッタ片の水平方向の両端部にわたって前記側壁部の上部と前記シャッタ片の上部との間が断面視して開いた形状であり、
上下に隣接するシャッタ片同士が接触したときに、上方のシャッタ片に取り付けられた前記流路形成部材の底部が、下方のシャッタ片に取り付けられた前記流路形成部材による循環空気の経路の上面を形成し、
上下に隣接するシャッタ片同士が離間したときに、下方のシャッタ片に取り付けられた前記流路形成部材による循環空気の経路が上方に開放するように構成された、
熱処理装置。 A heat treatment apparatus configured to heat a plate-like workpiece supported in multiple stages in the heat treatment part inside the furnace body by hot air circulated inside the furnace body,
A circulation fan configured to generate circulating air inside the furnace body;
A heater configured to heat the circulating air inside the furnace body;
This is an area that includes a plurality of shutter pieces and occupies a part of the furnace opening that is provided on one side of the furnace body and allows loading and unloading of each stage of work by separating or contacting two adjacent shutter pieces. A shutter configured to selectively open and close a horizontally long region associated with one or more stages of a workpiece to be taken in and out,
A flow path forming member attached to at least a part of each of the plurality of shutter pieces, and a flow for forming a path of circulating air flowing in a horizontal direction along a back surface of the shutter piece facing the furnace body. A path forming member;
A guide member configured to guide the circulating air generated by the circulation fan to one end side of the path formed by the flow path forming member;
With
The flow path forming member is opposed to the back surface of the shutter piece over both ends in the horizontal direction of the shutter piece, and the lower portion of the shutter piece and the side wall portion over both ends in the horizontal direction of the shutter piece. A bottom part connecting the lower part of the
The flow path forming member has a shape in which the space between the upper part of the side wall part and the upper part of the shutter piece is opened in cross-section across both ends in the horizontal direction of the shutter piece,
When the upper and lower adjacent shutter pieces come into contact with each other, the bottom of the flow path forming member attached to the upper shutter piece is the upper surface of the circulating air path by the flow path forming member attached to the lower shutter piece. Form the
When the vertically adjacent shutter pieces are separated from each other, the path of the circulating air by the flow path forming member attached to the lower shutter piece is configured to open upward.
Heat treatment equipment. 前記流路形成部材は、前記循環空気の経路の底部に炉体の内側に向かって下がる傾斜部が形成されるように構成された
請求項１に記載の熱処理装置。 The heat treatment apparatus according to claim 1, wherein the flow path forming member is configured such that an inclined portion that falls toward the inside of the furnace body is formed at a bottom portion of the path of the circulating air. 前記流路形成部材に向かう循環空気の風速が、前記熱処理部に向かう循環空気の風速よりも大きくなるように風速調整を行うための風速調整部材をさらに備えた請求項１または２に記載の熱処理装置。   The heat treatment according to claim 1, further comprising a wind speed adjusting member for adjusting a wind speed so that a wind speed of the circulating air toward the flow path forming member is larger than a wind speed of the circulating air toward the heat treatment section. apparatus.
JP2008281054A 2008-10-31 2008-10-31 Heat treatment equipment Expired - Fee Related JP5562548B2 (en)

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