201017069 六、發明說明： 【發明所屬之技術領域】 本發明係關於藉在爐體内部循環的熱風而對配置於爐體 内部的工件（WQrk)予以加熱所構成之熱風循環式的熱處理 裝置。 【先前技術】 熱處理裝置的-種係熱風循環式之熱處理裝置。熱風循環 式之”.、處理裝置’通常係藉由循環風扇（circulating fan) 而產生循環空氣’並藉加熱器（heater )將此循環空氣加熱而 發生循％熱風，再藉由所發生之循環熱風使爐體的内部之工 件加熱。又，此種熱風循環式之熱處理裝置，為了均勻加熱 工件對熱風的循環路徑之設計被施以各種各樣的創意。 但是’即使熱風之循環路徑被作適切構造的情形，但仍有 自爐口侧因放熱之原因而在爐體内部中其爐口附近之溫度 比其他的區域為低’而在爐體内部發生溫度差之問題。 因此，在先前技術中，存在有一種藉使設在熱處理室的兩 側知之喷出板及吸入板的爐口部附近之開口比率作成較 高，另一方面使爐口部附近以外的開口比率作成較低，而使 在爐口部附近熱風的量變成較多之熱處理裝置（例如，參照 日本專利特開2004-251534號公報）。又，根據該—技術， 其可減輕自擋門（shutter)的放熱所起因而爐口部附近之溫 度降低的影響。 098127679 4 201017069 在上述專利文獻1之技術中，擋門開閉時為了防止進入至 爐體内部的外氣到達工件，則必須充分增加爐口部附近熱風 之量。但是，為了增加熱風之量則必須強力的加熱器或強力 的循環風扇’而其有除了零件成本增高外也有使得消耗電力 變大之不適當問題。 【發明内容】 本發明之目的為提供一種以簡單的構成而可在擋門開閉 ❹時防止進入至爐體内部的外氣到達工件，而藉由抑制外氣的 進入使爐内溫度降低，其可使爐内之溫度差消除而可呈均勻 的熱處理裝置。 本發明之熱處理裝置係利用在爐體内部循環之熱風而對 上下多段被支持於爐體内部的熱處理部之板狀工件予以加 熱的熱處理裝置。此—熱處理裝置，其具備：循環風扇、加 熱器、擋門、流路形成構件、和導引構件。 ❿ #環風扇被構成在爐體_可發生循環錢。加熱器被構 成可對爐體内部的循環空氣加熱。 擋門具有可互相離開或接觸之複數個擋片的構造。檔門被 構成為，藉由使相鄰之2個擋片離開或接觸，在被設於爐體 侧面占據可存取各段工件的爐口一部分的區域，而可選擇 I·生地開閉對應於存取工件之一個以上的段在水平方向呈長 形狀的區域。 流路形成構件，各別被至少安裝在複數個擋片之一部分。 098127679 5 201017069 流路形成構件，雖然各被安裝在複數個則 ㈣賴構造上之理由’即使因在—部分有不 :之情形下仍可實施本發明。又 和擒片的爐體内部相對向之背面而在水平 ，= 上方開放之循環空氣的牧尸 L . 开^成 咖 處’使循環空氣的路徑構成 在上方開放之理由，相為考慮外氣比龍的 二 足者。 爐内後會下降，而外氣在到達工件前係可補 導引構件係將以循環風扇所發生之循環线 述流路形成構件所形成之路徑的-端側。藉由料構件2 用’自魏風扇來的熱闕流路形成構件而被導 之循環空氣的路徑。 王所形成 在該構成中’沿著擋片的背面水平流動之熱風的流路 被設在各擋片的背面側 各[Technical Field] The present invention relates to a hot air circulation type heat treatment apparatus which heats a workpiece (WQrk) disposed inside a furnace body by hot air circulating inside the furnace body. [Prior Art] A heat treatment device for a heat treatment apparatus of a type of hot air circulation type. The hot air circulation type "., the processing device" usually generates circulating air by a circulating fan and heats the circulating air by a heater to generate a % hot air, and the cycle occurs. The hot air heats the workpiece inside the furnace. Moreover, this hot air circulation type heat treatment device is applied with various ideas for the uniform heating of the workpiece to the design of the circulation path of the hot air. However, even the hot air circulation path is made. In the case of a suitable configuration, there is still a problem that a temperature difference is generated inside the furnace body from the vicinity of the furnace mouth due to heat release from the furnace side due to heat generation. Therefore, in the previous case In the art, there is a case where the opening ratio in the vicinity of the mouth portion of the discharge plate and the suction plate provided on both sides of the heat treatment chamber is made higher, and on the other hand, the opening ratio other than the vicinity of the furnace mouth portion is made lower. In addition, a heat treatment device in which the amount of hot air is increased in the vicinity of the mouth portion is obtained (for example, refer to Japanese Laid-Open Patent Publication No. 2004-251534). This can reduce the influence of the temperature rise of the vicinity of the mouth portion due to the heat release from the shutter. 098127679 4 201017069 In the technique of Patent Document 1, the outside air is prevented from entering the inside of the furnace body when the door is opened and closed. When reaching the workpiece, the amount of hot air near the mouth of the furnace must be increased. However, in order to increase the amount of hot air, a strong heater or a powerful circulating fan must be used, and in addition to the increase in the cost of parts, the power consumption is increased. [Disclosure] SUMMARY OF THE INVENTION An object of the present invention is to provide a simple configuration that prevents external air entering the inside of a furnace from reaching a workpiece when the door is opened and closed, and suppressing the entry of outside air to cause temperature in the furnace. The heat treatment device of the present invention can reduce the temperature difference in the furnace to form a uniform heat treatment device. The heat treatment device of the present invention utilizes hot air circulating inside the furnace body to support the plate-like workpiece of the heat treatment portion supported in the upper and lower portions of the furnace body. a heat treatment device to be heated. The heat treatment device includes: a circulation fan, a heater, a door, and a flow path forming member And the guiding member. ❿ #环风机 is formed in the furnace body_recyclable money can be generated. The heater is configured to heat the circulating air inside the furnace body. The blocking door has a configuration in which a plurality of flaps can be separated or contacted from each other. The shutter is configured to be opened or closed by two adjacent flaps, and is disposed on a side of the furnace body that occupies a portion of the mouth of the workpiece that can access each of the segments, and can be selected to correspond to One or more segments that access the workpiece are elongated in the horizontal direction. The flow path forming members are each mounted at least in one of the plurality of flaps. 098127679 5 201017069 The flow path forming members are each installed in a plurality of Then (4) the structural reason for 'the invention can be carried out even if there is no part: the part is opposite to the inside of the furnace body, and the back side of the furnace body is horizontal, = the open air of the corpse L. Open the door to the coffee shop to make the path of the circulating air open at the top, and consider the two-legged person who considers the external gas than the dragon. The inside of the furnace is lowered, and the external air is replenishable before reaching the workpiece. The guiding member is the end side of the path formed by the flow path forming member by the circulation of the circulating fan. The path of the circulating air is guided by the material member 2 by the hot turbulent flow path forming member from the Wei fan. In this configuration, the flow path of the hot air flowing horizontally along the back surface of the flap is provided on the back side of each of the flaps.
How)的埶門的#面侧設有側流 …、二軋幕（h〇t air curtain)。而且，山 於藉由流_錢件财定贼的流路，因此 = =路形成構件内的熱風之流速。又，由於流路形二 ，，、，上方開放之循環空氣的路徑，因此，在流路形 則㈣捕=降之冷氣。又，其可快速地使捕捉之冷 路仏内的循％空氣之流動而送出至熱處理部外。 因此’在存取工件時即使冷的外氣進入爐内之情 於此外氣被吸“在流路形成構件内流動的熱風之中，因 098127679 201017069 此’其可防止此外氣到^件上。而且，由於其可局部择 加流路形成構件_熱風之流速，因此，料必置換更強力曰 之 的加熱器或循環風扇而村在爐σ部附近充分增加熱風 速度。 結果，外部之冷空氣被吸入至爐内，而升溫中及升溫 後的工件之溫度其一部分降假 m凡了 低，因此可抑制玻璃（glass)基 板全體的溫度分佈紊亂之不適當情开^。 又’流路形成構件係在循環空氣之路㈣底部朝向爐體内 侧形成下降之傾斜部，如此騎。其理由雜誘人至流_ 成構件内的冷氣可自流路形成構件溢散以外，亦即其财 會逸至熱處理部内。藉由採用此—構成，則由於__成 構件所形成之循環空氣的路徑變為更深，因此，其可防止一 旦收入在流路形成構件内的冷氣溢散。 又其如更具有可使朝向流路形成構件之循環空氣的風速 可實施調整成比朝向熱處理部之循環空氣的風速更大之風 速調整構件，如此為佳。風速調整構件之例，可舉出藉由開 口比率而調整喷出侧的風量之喷出板，或者藉開口比率而調 整吸入侧的吸入量之吸入板。藉由採用此一構成時，則可容 易局部增加流路形成構件内之熱風的流速。 根據本發明，以簡單的構成在擋門開閉時可防止進入至爐 體内部的外氣到達工件，而藉抑制因外氣進入而減低溫度， 則可使爐内之溫度差成為均勻。 098127679 201017069 【實施方式】 圖1表示本發明之實施形態的熱風循環式之熱處理裝置 10的概略圖。熱處理裝置10具備有：爐體u，其具有可將 工件之玻璃基板16疊層收容在互相設有間隙的熱處理部 12。熱處理部12如箭頭β〇所示之方向使熱風流動，藉此一 熱風而使玻璃基板16加熱。 在爐體11之下側被配置可控制熱處理部12的動作之控制 部（未圖示）。在熱處理裝置10之爐體u的爐口，被設置 對熱處理部12在存取玻璃基板16時可開閉之擋門14。 如圖2所示，擋門14係由複數個檔片141〜146所構成。 複數個擋片141〜146之各者，在垂直方向延伸的軸上可於 上下方向移動而被支撐，而其被構成各可互相獨立升降。 又，在擋片142〜145的背面，被安裝沿著擋門14的背面 而畫定在水平流動之熱風的流路之流路形成構件2〇。又， 在熱處理部12之上面及底面’設有平行於擋門14且水平方 向配置之遮風板18及19。 圖3表不流路形成構件20之概略圖。以下，對擋片142 〜14 5以代表性說明被安裝在擋片丨4 5背面之流路形成構件 20而關於女裝在擋片142〜144背面的流路形成構件2〇， 由於其構成均相同而省略其說明。 流路形成構件2〇具有：使金屬板變形加工成所希望形狀 之薄金屬板202;及’在擋片145連結薄金屬板202的上部， 098127679 201017069 =時居用以補強流路形成構件2〇之2根支架(⑻一 薄金屬板202之素材，例如可舉出不_ (咖仙ss)，俱 並不受限於此。 如圖4A及圖4B所示，薄金屬板2〇2係由：被固著在擔片 145之固著部2〇3 ;及，晝定循環熱風之路徑的底面之底部 _ 204 ;及’自底部垂直起立畫定循環熱風之路徑的側面 之侧壁部206 ;如此所構成。 ❿®著部203係藉由小螺釘（vis)等而被心在構成擔片 145之框架構件上。在底部設有朝向爐體^内侧形成 下降狀之傾斜部。設置此傾斜部之理由係，藉由在循環熱風 之路徑上設有深的凹陷部分時，則較不會有外氣越過側壁部 206而進入熱處理部12如此所生之不合宜之處^則壁部2〇6 亦具有可防止外氣進入熱處理部12之遮風板的功能。 如上述，藉在擋片145安裝薄金屬板202時，則可在播片 β 145的背面、底部204及侧壁部206所圍繞而剖面看呈υ字 狀的上方形成開放的風洞。 圖5Α及圖5Β表示在爐體11之内部中熱風的循環路押之 一例。圖5Α係熱處理裝置1〇之側視圖，圖5Β係熱處理農 置10之俯視圖。熱處理裝置10具備.在爐體11内部可發 生循環空氣之複數個循環風扇32 ;及，可使爐體丨丨内部的 循環空氣加熱之複數個加熱器35。 自循環風扇32被喷出之熱風，係通過過濾器（filter) 098127679 9 201017069 34 (例如’ HEPA過濾器）被導入至熱處理部12，再從熱處 理部12經由上部及下部的循環路徑而返回循環風屬32之配 置位置。又，如圖5B所示，自循環風扇32被噴出之熱風的 一部分通過過濾器34後，藉由設於垂直方向之導引板 而被導引至流路形成構件20的一端部。又，在流路形成構 件20之吸入侧的端部附近，設有在上下方向延伸之遮風板 36。藉由遮風板36、遮風板丨8及遮風板19則流路形成構 件20與吸入口之間的間隙被堵塞，而可增加以流路形成構 ❹ 件20畫定熱風的循環路徑之吸入量。 又，如圖6所示，在爐體11的内部設有喷出板42及吸入 板40。噴出板42被構成爐口部附近的開口比率較大（例如， 80〜100% )’而除了爐口部附近之部分其開口比率較小（例 如，20〜60%)。同樣地，吸入板4〇也被構成爐口部附近的 開口比率較大（例如，80〜100%)，而除了爐口部附近之部 分其開口比率較小（例如，6〜18%)。開口比率可藉調整形 ❹ 成於噴出板42及吸入板4〇的貫通孔之大小或數量而調整。 在本實施形態中’於流路形成構件2〇所畫定之熱風的循環 路徑之上游及下游並未配置噴出板42及吸入板4〇(開口比 率100% )。又，在此處所表示之開口比率其僅為一例而已， 而其如採·用以外的構成亦可。 又，在吸入侧之爐内中央部被設有遮風板44，而藉由該 遮風板44其可塞住喷出板42之開口率較小區域的上下之吸 098127679 10 201017069 入部。設置賴板44的理㈣，用來使祕形成構件2〇 附近的吸人量比爐體u之其他部位的吸人量更多。 错由採用以上之構成時，則可局部地增加以流路形成構件 20所晝疋之熱風的循環路役之風速。又，當擋門14開放時 即使外氣進入，所進入之外氣在到達玻璃基板16之前可用 流路形成構件20而容易地捕捉。 圖7A及圖7B表示擋門14開放之狀態。如圖7a所示當 ❹使擋片145及146降下而開放播門14之一部分時外氣; 進入爐體11的内部。由於此外氣比爐體11之内部的空氣溫 度更低’因此，進入爐體u時其一面下降而進入。結果’皿 進入爐體11的外氣’其被流路形成構件20之側壁部2〇6 所阻塞（blGd〇 ’而可被流路形成構件2()所畫定之熱風的 循環路徑内被捕捉。又，如圖7β所示，和熱風—起被吸入 至吸入側其被當作循環空氣的一部分而被回收。 ⑩-如上’減在擋Η 14背面形成流通之熱·環路徑，其 藉由局部增加該熱風循環路㈣風速，則即使外氣進入爐體 .11的㈣時’進人爐體11内部之大致所有的外氣會被熱風 路徑所捕捉。因此，其大致不會發生有進人至爐體u内部 之冷外氣到達玻璃基板16 #之不適切之處。結果，其可減 少玻璃基板16的溫度分佈之不均勻（variati〇n)。 上述實施形態之說明，其所有之點均為例示性者，且並非 限制性者。本發明之範圍並非上述實施形態，其係藉由申請 098127679 11 201017069 專利範圍來表示。又，本發明之範圍意圖包含和申請專利範 圍均等的意思及範圍内之所有的變更。 【圖式簡單說明】 圖1表示本發明之實施形態的熱處理裝置之概略圖。 圖2表示熱處理裝置之擋門的概略構成圖。 圖3表示流路形成構件之概略構成圖。 圖4A及圖4B表不流路形成構件之概略構成圖。 圖5A及圖5B表示熱處理裝置之熱風的循環狀態之圖。 圖6表示熱處理裝置之熱風的循環狀態之圖。 圖7A及圖7B表示外氣在流路形成構件被捕捉之狀態的 圖。 【主要元件符號說明 ] 10 熱處理裝置 11 爐體 12 熱處理部 14 擋門 16 玻璃基板 18 、 19 、 36 、 44 遮風板 20 流路形成構件 22 支架 32 循環風扇 34 過濾器 098127679 12 201017069 35 加熱器 38 導引板 40 吸入板 42 喷出板 141-146 擋片 202 薄金屬板 203 固著部 φ 204 底部 206 側壁部 參 098127679 13How) The side of the door is provided with side flow ... and two curtains (h〇t air curtain). Moreover, the mountain uses the flow _ money to determine the flow path of the thief, so = = the flow rate of the hot air in the path forming member. Further, since the flow path shape is two, , and the path of the circulating air that is open above, the flow path shape (four) captures and cools down the air. Further, it can quickly send out the flow of the % air in the captured cold runner to the outside of the heat treatment portion. Therefore, even if cold outside air enters the furnace when accessing the workpiece, the external gas is sucked "in the hot air flowing in the flow path forming member, which prevents the additional gas from being supplied to the workpiece." Moreover, since it can locally select the flow path forming member_the flow rate of the hot air, the material must be replaced with a more powerful heater or circulating fan, and the village sufficiently increases the hot air speed near the σ portion of the furnace. As a result, the external cold air When it is sucked into the furnace, the temperature of the workpiece after the temperature rise and the temperature rise is low, so that the temperature distribution of the entire glass substrate can be suppressed from being unsuitable. The component is formed at the bottom of the circulating air path (4) toward the inner side of the furnace body to form a descending inclined portion, so that the reason is that the air is trapped into the flow _ the cold air in the component can be overflowed from the flow path forming member, that is, its accounting In the heat treatment portion, by adopting this configuration, since the path of the circulating air formed by the __ member becomes deeper, it can prevent cold air which is once collected in the flow path forming member. Further, it is preferable that the wind speed of the circulating air that can be directed toward the flow path forming member can be adjusted to be higher than the wind speed of the circulating air toward the heat treatment portion, which is preferable. A discharge plate that adjusts the air volume on the discharge side by the opening ratio or a suction plate that adjusts the suction amount on the suction side by the opening ratio can be used. When this configuration is adopted, the flow path formation can be easily locally increased. The flow rate of the hot air in the member. According to the present invention, the external air entering the inside of the furnace body can be prevented from reaching the workpiece when the door is opened and closed, and the temperature can be reduced by the entry of the outside air. [Embodiment] Fig. 1 is a schematic view showing a hot air circulation type heat treatment apparatus 10 according to an embodiment of the present invention. The heat treatment apparatus 10 is provided with a furnace body u having a glass substrate 16 capable of holding a workpiece. The laminate is housed in the heat treatment portion 12 having a gap therebetween. The heat treatment portion 12 causes hot air to flow in a direction indicated by an arrow β〇, thereby making the glass a hot air. The substrate 16 is heated. A control unit (not shown) that can control the operation of the heat treatment unit 12 is disposed on the lower side of the furnace body 11. The furnace mouth of the furnace body u of the heat treatment apparatus 10 is provided for access to the heat treatment unit 12. The glass door 16 can open and close the door 14. As shown in Fig. 2, the door 14 is composed of a plurality of pieces 141 to 146. Each of the plurality of blocks 141 to 146 is vertically extending on the axis. They can be supported in the vertical direction and supported, and they can be independently raised and lowered independently of each other. Further, on the back surface of the shutters 142 to 145, the flow path of the hot air flowing horizontally along the back surface of the shutter 14 is attached. The flow path forming member 2 is further provided with windshields 18 and 19 disposed in the horizontal direction parallel to the shutter 14 on the upper surface and the bottom surface of the heat treatment portion 12. Fig. 3 shows a schematic view of the flow path forming member 20. Hereinafter, the flaps 142 to 14 5 are typically used to describe the flow path forming members 20 attached to the back surface of the flaps 45, and the flow path forming members 2 on the back surfaces of the flaps 142 to 144, due to their constitution. The description is omitted and the description is omitted. The flow path forming member 2A has a thin metal plate 202 that deforms the metal plate into a desired shape; and 'the upper portion of the thin metal plate 202 is joined to the blocking piece 145, and 098127679 201017069 = is used to reinforce the flow path forming member 2 The two brackets of the cymbal ((8) the material of the thin metal plate 202, for example, may not be _ _ s ss), are not limited thereto. As shown in FIG. 4A and FIG. 4B, the thin metal plate 2 〇 2 The structure is: fixed to the fixing portion 2〇3 of the support sheet 145; and, the bottom portion _204 of the path of the circulating hot air; and the side wall of the side of the path of the circulating hot air standing upright from the bottom The portion 203 is formed by a screw (vis) or the like on the frame member constituting the support piece 145. The bottom portion is provided with an inclined portion that forms a downward shape toward the inside of the furnace body. The reason why the inclined portion is provided is that when a deep recessed portion is provided in the path of the circulating hot air, there is less inconvenience that the outside air passes through the side wall portion 206 and enters the heat-treated portion 12. The wall portion 2〇6 also has a function of preventing outside air from entering the wind shield of the heat treatment portion 12. As described above, when the thin metal plate 202 is attached to the flap 145, an open wind tunnel can be formed on the back surface of the broadcast sheet β 145, the bottom portion 204, and the side wall portion 206 so as to have a U-shaped cross section. Fig. 5A shows an example of the circulation of hot air in the inside of the furnace body 11. Fig. 5 is a side view of the tantalum heat treatment apparatus 1A, and Fig. 5 is a plan view of the heat treatment apparatus 10. The heat treatment apparatus 10 is provided inside the furnace body 11. a plurality of circulating fans 32 that generate circulating air; and a plurality of heaters 35 that can heat the circulating air inside the furnace body. The hot air that is ejected from the circulating fan 32 passes through a filter 098127679 9 201017069 34 (for example, the 'HEPA filter') is introduced into the heat treatment unit 12, and is returned from the heat treatment unit 12 to the arrangement position of the circulation wind 32 via the circulation paths of the upper portion and the lower portion. Further, as shown in Fig. 5B, the self-circulating fan 32 is A part of the hot air that has been ejected passes through the filter 34, and is guided to the one end portion of the flow path forming member 20 by the guide plate provided in the vertical direction. Further, near the end on the suction side of the flow path forming member 20. ,Assume The windshield 36 extending in the up-and-down direction. The gap between the flow path forming member 20 and the suction port is blocked by the windshield 36, the windshield 8 and the windshield 19, and the flow path can be increased. The structure 20 draws the suction amount of the circulation path of the hot air. Further, as shown in Fig. 6, the discharge plate 42 and the suction plate 40 are provided inside the furnace body 11. The discharge plate 42 is formed as an opening near the mouth portion. The ratio is large (for example, 80 to 100%)' and the opening ratio is small (for example, 20 to 60%) except for the portion near the mouth portion. Similarly, the suction plate 4〇 is also formed as an opening near the mouth portion. The ratio is large (for example, 80 to 100%), and the opening ratio is small (for example, 6 to 18%) except for the portion near the mouth portion. The opening ratio can be adjusted by adjusting the size or the number of through holes formed in the discharge plate 42 and the suction plate 4A. In the present embodiment, the discharge plate 42 and the suction plate 4 (the opening ratio of 100%) are not disposed upstream and downstream of the circulation path of the hot air drawn by the flow path forming member 2'. Further, the opening ratio shown here is only an example, and it may be configured other than the use. Further, a windshield 44 is provided in the center portion of the furnace on the suction side, and the windshield 44 can block the upper and lower suction portions of the discharge plate 42 at a lower opening ratio in the region of 098127679 10 201017069. The reason (4) of the baffle plate 44 is set so that the suction amount in the vicinity of the secret forming member 2〇 is larger than that in the other portions of the furnace body u. When the above configuration is adopted, the wind speed of the circulation of the hot air by the flow path forming member 20 can be locally increased. Further, when the shutter 14 is opened, even if the outside air enters, the incoming outside air can be easily caught by the flow path forming member 20 before reaching the glass substrate 16. 7A and 7B show a state in which the shutter 14 is opened. As shown in Fig. 7a, when the flaps 145 and 146 are lowered to open a portion of the play gate 14, the outside air enters the inside of the furnace body 11. Since the outside air is lower in temperature than the inside of the furnace body 11, it enters the furnace body u as it descends and enters. As a result, the 'outer air entering the furnace body 11' is blocked by the side wall portion 2〇6 of the flow path forming member 20 (blGd〇' and can be caught in the circulation path of the hot air drawn by the flow path forming member 2() Further, as shown in Fig. 7β, the hot air is sucked up to the suction side and is recovered as part of the circulating air. 10- As shown above, the heat is generated on the back side of the dam 14 and the loop path is formed. By locally increasing the wind speed of the hot air circulation path (4), even if the outside air enters the (4) of the furnace body, substantially all of the outside air entering the inside of the furnace body 11 is captured by the hot air path. Therefore, it does not substantially occur. The cold outside air entering the inside of the furnace body u reaches the unsuitable point of the glass substrate 16#. As a result, it can reduce the unevenness of the temperature distribution of the glass substrate 16. The description of the above embodiment, all of which The scope of the present invention is not limited to the above-described embodiments, and is expressed by the scope of the patent application 098127679 11 201017069. Further, the scope of the present invention is intended to include the same as the scope of the patent application. meaning BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a heat treatment apparatus according to an embodiment of the present invention. Fig. 2 is a view showing a schematic configuration of a door of a heat treatment apparatus. Fig. 3 is a view showing a flow path forming member. Fig. 4A and Fig. 4B are diagrams showing a schematic configuration of a flow path forming member. Fig. 5A and Fig. 5B are views showing a state of circulation of hot air in the heat treatment apparatus. Fig. 6 is a view showing a state of circulation of hot air in the heat treatment apparatus. 7A and 7B are diagrams showing a state in which the outside air is captured by the flow path forming member. [Description of Main Element Symbols] 10 Heat Treatment Apparatus 11 Furnace Body 12 Heat Treatment Section 14 Gate 16 Glass Substrate 18, 19, 36, 44 Windshield 20 Flow path forming member 22 Bracket 32 Circulating fan 34 Filter 098127679 12 201017069 35 Heater 38 Guide plate 40 Suction plate 42 Ejection plate 141-146 Baffle 202 Thin metal plate 203 Fixing portion φ 204 Bottom portion 206 Side wall portion 098127679 13