KR100755428B1 - Heating furnace - Google Patents

Abstract

An air stream circulating structure of a heating furnace which improves insulating and thermal insulation properties of the chamber, minimizes thermal deformation of a treatment object during a temperature increasing operation of the heating furnace, and easily performs repairing and checking of appliances in the heating furnace by uniformly circulating hot air supplied into a chamber in vertical and horizontal directions is provided. A heating furnace(100) comprises: a chamber(120) which is positioned in a body(110), in which a plurality of racks are installed, and which has openings(122,123) formed in front and rear portions thereof; a shutter(130) which closes the front opening of the chamber, and on which a gateway is formed as a passage for withdrawing a treatment object; a rear door(140) installed in the rear opening of the chamber; a plurality of heaters(150) horizontally disposed on an upper portion of one side of the heating furnace to supply heated air into the chamber; a plurality of blowing fans disposed below the heaters to induce a flow of air into the chamber by the rotary power of a drive motor; filters(170) disposed between the blowing fans and the chamber to filter alien substances contained in air to be blown to the chamber; perforated plates(180) which are laterally disposed at both sides of the chamber, and in which a plurality of holes are formed to adjust a flowing amount of air passing through the filters; an air supply port flowing an external air into the chamber to maintain an air pressure in the chamber; and an air exhaust port as a passage exhausting air inside the chamber to the outside to maintain the air pressure in the chamber.

Description

Heating Furnace

1 is a cross-sectional view of a heat treatment apparatus according to the prior art,

2 is a longitudinal sectional view of a heat treatment apparatus according to the prior art,

3 is a schematic perspective view of a heating furnace according to the present invention;

4 is a cross-sectional view of a heating furnace according to the present invention;

5 is a longitudinal sectional view of a heating furnace according to the present invention;

Figure 6 is a side view showing the appearance of the blowing fan and the driving motor which is the main part of the present invention,

7 is a front view of a cooling fan which is a main part of the present invention;

8 is a plan view showing the appearance of the perforated plate that is the main part of the present invention,

FIG. 9 is an enlarged perspective view of portion A of FIG. 4 and illustrates a state of a wind direction control plate and a protrusion which are main parts of the present invention.

-Explanation of symbols for the main parts of the drawings-

100: heating furnace 110: main body

120: chamber 121: rack

122,123: opening 130: shutter

140: rear door 150: heater

160: blower fan 161: drive motor

162: rotating shaft 163: cooling fan

164: sealing material 165: induction pipe

170: filter 180: punched plate

181: hole 190: air supply

195 exhaust port 200 shielding plate

210: wind direction control plate 220: protrusion

230: intermediate plate 240: finish plate

The present invention relates to a heating furnace for heating a to-be-processed object such as an LCD glass substrate, and more particularly, to uniformly circulate hot air supplied to the chamber in up, down, left and right directions to improve insulation and thermal insulation of the chamber, and The present invention relates to an airflow circulation structure of a furnace that minimizes heat deformation of an object to be processed during an elevated temperature operation of the furnace and facilitates maintenance and inspection of equipment inside the furnace.

Korean Patent Application No. 2003-13651 discloses a technology relating to a heat treatment apparatus.

Looking at this in more detail, as shown in Figures 1 and 2, the heat treatment apparatus is disposed on the base (B) and the furnace (1) is provided with a heat treatment chamber (R) therein, the right side of the furnace (1) The plurality of workpieces disposed in the furnace 1 to supply hot air into the furnace 1 and in which the plurality of plate-like workpieces P are stacked in a horizontal state at intervals up and down in the heat treatment chamber R. Automatic opening / closing provided in the furnace inlet part 4 formed in the front wall 1a of the furnace 1 so that the to-be-processed object loading support 3 which has a loading position and the heat processing chamber R and the exterior of the furnace 1 may communicate. The shutter 5 and the air volume adjusting means 19 for adjusting the amount of hot air to increase in the vicinity of the furnace inlet 4 are provided.

The hot air supply means 2 is installed in the rear part of the right side wall 1b and is installed in the middle of the heater 15 for heating the circulating air, and is circulated from the rear to the front in the middle of the right side wall 1b and the heat treatment chamber R. Between a guide wall 16 for guiding air, a circulation fan 17 provided at the front of the right side wall 1b, and for circulating air from the front side to the left side, between the heat treatment chamber R and the guide wall 16; It is provided with a filter 18 is installed to remove the solid foreign matter from the circulating air flowing into the heat treatment chamber (R).

The heat treatment chamber R has an upper side by a horizontal plate 20, a right side by a vertical blower plate 21, a left side by a vertical suction plate 22, and a rear side by a vertical rear closing plate 23. Surrounded by. The jet plate 21 and the suction plate 22 are provided with a plurality of through-holes 21a and 22a for passing through the hot air so as to have a predetermined opening ratio. In the heat treatment chamber R, hot air flows from right to left, and these hot air flows between the left wall 1c of the furnace 1 and the suction plate 22 and the rear wall of the rear closure plate 23 and the furnace 1 ( It flows between 1d) and returns to the right side in the furnace 1, ie, the installation point of the hot air supply means 2. As a result, the lower side is made to have a predetermined temperature than the horizontal plate 20 in the heat treatment chamber R, and the object P in the furnace 1 is heated.

The width in the left and right direction of the furnace inlet part 4 is wider than the width of the object P, and the upper edge of the furnace inlet part 4 is larger than the uppermost object P loaded on the support 3. On the upper side, the lower edge portion of the furnace inlet portion 4 is located below the lowest to-be-processed object P loaded on the support 3, and the opening-closing shutters 5 are each freely moving up and down freely. Vertical plate-like structural members 5a are arranged vertically.

The horizontal cylinder-shaped air cylinder attachment member 13 protruding forward is fixed to the front left upper part of each structural member 5a, respectively. Moreover, the air cylinder attachment member 11 which has the horizontal plate-shaped part which protruded above the upper surface of the said air cylinder attachment member 13 is being fixed to the base B. As shown in FIG. And the air cylinder 12 is fixed to the upper surface of each attachment member 13 except the uppermost structural member 5a, and the upper surface of the horizontal portion of the attachment member 11 fixed to the base B. The rod of the cylinder 12 extends upward, and the upper end of this rod is fixed to the lower surface of the attachment member 13 located above each air cylinder 12.

And the rod of one air cylinder 12 raises | strengths and the structure located above the structural member 5a fixed to the rod of this air cylinder 12 via the attachment member 13, and this structural member 5a. The member 5a and the air cylinder 12 located above the air cylinder 12 with the rod raised are made to move integrally.

The air volume adjusting means 19 includes the jet plate 21 and the suction plate 22 surrounding the heat treatment chamber R. In this embodiment, the front end of the jet plate 21 and the suction plate 22 A predetermined gap S is provided between the inner surface of the front wall 1a of the furnace 1.

Inside the respective constituent members 5a of the open / close shutter 5, a hollow shaped member 5b having a vertically long rectangular cross section whose height is equal to that of the constituent member 5a is joined, and this hollow shaped member 5b The inside is a hot air passage, that is, a wind tunnel 24. By this wind tunnel 24, hot air advances in a horizontal direction along the inner surface of the opening-closing shutter 5.

According to the conventional heat treatment apparatus described above, the hot air circulated by the hot air supply means 2 is supplied into the heat treatment chamber R through the filter 18. The cleaned hot air travels in the heat treatment chamber R from the jet plate 21 toward the suction plate 22, that is, in the direction indicated by the thin arrow S1. At this time, since the opening ratio in the vicinity of the furnace inlet part of the blower plate 21 and the suction plate 22 is 100%, the front end of the blower plate 21 and the suction plate 22 and the opening-closing shutter 5 are Also, hot air flows from the right side to the left side, and a large amount of hot air indicated by the thick arrow S2 flows in the vicinity of the furnace inlet part 4. The hot air also flows through the wind tunnel 24 formed along the inner surface of the open / close shutter 5 in the direction indicated by the thin arrow S3.

However, the conventional heat treatment apparatus has a problem that it is difficult to manufacture the workpiece P having a uniform quality because the wind pressure in the heat treatment chamber R, that is, the air flow flow is different, and the apparatus is complicated.

Accordingly, the present invention has been created to solve the above problems, to uniformly circulate the hot air supplied to the chamber in the vertical, horizontal direction to improve the thermal insulation and thermal insulation of the chamber, the heat of the workpiece during the heating operation of the heating furnace The aim is to provide an air circulation structure of the furnace that minimizes deformation and facilitates maintenance and inspection of the equipment inside the furnace.

The present invention for achieving the above object is a heating furnace for heating the object to be processed in the interior of the main body, which is located in the main body, a plurality of racks in which the to-be-processed object is installed therein, Chambers each having an opening formed at a rear side thereof; A shutter that closes the opening in front of the chamber and has an entrance, which is a passage through which the object is withdrawn; A rear door installed to open and close at an opening at the rear of the chamber; A plurality of heaters arranged in a horizontal direction on one side of the heating furnace to provide heat into the chamber; A plurality of blowing fans disposed under the heater and inducing air flow into the chamber by the rotational force of the driving motor; A filter disposed between the blower fan and the chamber and filtering foreign matter contained in the air blown toward the chamber; A perforated plate disposed at both sides in the width direction of the chamber and having a plurality of holes formed therein to adjust the flow amount of air passing through the filter; An air supply port that is a passage for introducing external air into the chamber to maintain a wind pressure inside the chamber; And an exhaust port, which is a passage for discharging air inside the chamber to the outside to maintain the wind pressure inside the chamber, wherein the air heated by the heater passes through the filter and the perforated plate by the blowing pressure of the blowing fan. It provides a heating furnace characterized by having an air flow circulation structure that is uniformly blown up, down, left and right of the circulating to the heater.

According to the present invention, the blowing fan and the heater are spaced apart from the heater by a predetermined interval, and both sides are opened in the longitudinal direction of the chamber to induce left and right distribution of the air flow heated by the heater. It is characterized by including a shielding plate.

In addition, according to the present invention, at the corners of the main body in which the heater and the blower fan is installed, the wind direction control plate curved inward to naturally guide the flow direction of the air is provided.

And according to the present invention, the surface of the wind direction control plate is characterized in that a plurality of protrusions are formed to guide the flow of air to blow air toward the center of the filter.

In addition, according to the invention, it characterized in that the intermediate plate is installed in the longitudinal direction between the shielding plate and the filter to partition the flow of air blown toward the filter.

And according to the invention, the rear door is characterized in that the two-door door to be opened and closed on both sides.

In addition, according to the present invention, the blowing fan is characterized in that the centrifugal fan.

According to the present invention, a cooling fan for blowing air toward the drive motor is installed on the rotation shaft of the drive motor.

In addition, according to the present invention, the rack is characterized in that it has a predetermined inclination to rise upward toward the shutter in the longitudinal direction.

And according to the invention, the number of holes is formed in the center of the perforated plate compared to the edge of the perforated plate.

In addition, according to the present invention, the workpiece is characterized in that the glass substrate for LCD.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

3 is a schematic perspective view of a heating furnace according to the present invention, FIG. 4 is a cross-sectional view of the heating furnace according to the present invention, FIG. 5 is a longitudinal sectional view of the heating furnace according to the present invention, and FIG. 6 is a main part of the present invention. 7 is a front view of a cooling fan which is a main part of the present invention, FIG. 8 is a plan view showing a state of a perforated plate that is a main part of the present invention, and FIG. 9 is part A of FIG. As an enlarged perspective view, it is a view showing a state of the wind direction control plate and the protrusions of the present invention.

3 to 5, the heating furnace 100 according to the present invention is a device for heating or firing an object to be processed, such as a glass substrate for liquid crystal display (LCD), the main body 110, the chamber 120, a shutter 130, a rear door 140, a heater 150, a blowing fan 160, a filter 170, a perforation plate 180, an air supply port 190, and an exhaust port 195.

The chamber 120 is a space in which the workpiece is substantially heat treated, and is located in the main body 110, and a plurality of racks 121 are installed therein, and the openings are provided at the front and rear, respectively. (122, 123) are formed.

Here, the rack 121 is vertically spaced at equal intervals, the rack 121 is inclined to rise upward toward the shutter 130 to be described later in the longitudinal direction has a predetermined inclination. This is to compensate for the rack 121 sagging downward by the load while the workpiece is loaded.

In addition, the shutter 130 closes the opening 122 in front of the chamber 120, and an entrance, which is a passage through which the object is to be withdrawn, is formed.

In addition, the rear door 140 is installed to be opened and closed in the opening 123 behind the chamber 120 so that the worker can access the inside of the heating furnace 100, according to an embodiment of the present invention The rear door 140 may be formed of a double door to open to both sides.

In addition, a plurality of heaters 150 are disposed in a horizontal direction on one side of the heating furnace 100 to provide heat into the chamber 120 through an electrical heating operation.

In addition, as shown in FIGS. 6 and 7, the blower fan 160 is symmetrically disposed under the heater 150, and is moved into the chamber 120 by the rotational force of the driving motor 161. Inducing the flow of air, according to a preferred embodiment of the present invention, the blowing fan 160 may be made of a centrifugal fan, such as a sirocco fan, and in front of the blowing fan 160 to smooth the streamline of the incoming air Induction pipe 165 may be further included to prevent pressure loss and increase the inlet efficiency.

In addition, a cooling fan 163 may be installed on the rotation shaft 162 of the driving motor 161 to blow air to the driving motor 161 to prevent overheating of the driving motor 161, and the rotation shaft 162. The sealing material 164 may be applied to the thermal cutoff.

In addition, the filter 170 is disposed between the blowing fan 160 and the chamber 120, and performs a function of filtering foreign matter contained in the air blown toward the chamber 120. The filter 170 ) Is preferably a high temperature filter capable of withstanding high temperatures of 200 ° C or higher.

In addition, the perforated plate 180 is disposed on both sides in the width direction of the chamber 120 (with the chamber 120 interposed therebetween), and a plurality of holes 181 to adjust the flow amount of air passing through the filter 170. In the center of the perforated plate 180, a larger number of holes 181 are formed in the center of the perforated plate 180 than the edge of the perforated plate 180, and the perforated plate 180 forms a unit. A plurality of connections may be used, as shown in FIG. 8, each of the perforated plates 180 may be configured to be convexly curved outward to adjust the flow direction of air discharged from the hole 181. have.

In addition, the air supply unit 190 may be positioned above the heater 150 as a passage for introducing external air into the chamber 120 to maintain a wind pressure in the chamber 120. The exhaust port 195 may be located under the heater 150 as a passage for discharging air in the chamber 120 to the outside in order to maintain the wind pressure in the chamber 120.

In addition, as shown in Figure 5, the end of the air supply 190 toward the chamber 120 is preferably bent in the downward direction of the chamber 120 to have a '┏' shape, which is the chamber 120 It is for preventing the vortex from being formed in the upper portion of the chamber 120 while directly meeting the air circulating inside and the outside air introduced through the air supply port 190.

Meanwhile, according to the present invention, as shown in FIG. 4, the blower fan 160 and the heater 150 are spaced apart from the heater 150 by a predetermined interval, and the air flow heated by the heater 150 is divided. In order to induce left and right distribution, a shielding plate 200 having both sides opened in the longitudinal direction of the chamber 120 is provided.

Meanwhile, according to the present invention, an intermediate plate 230 is installed in the longitudinal direction between the shielding plate 200 and the filter 170 to partition the flow of air blown toward the filter 170, and the chamber 120. End cover 240 is provided to ensure a flow path of air while wrapping.

And according to the present invention, as shown in Figure 9, at the corners of the main body 110, the heater 150 and the blowing fan 160 is installed, the wind direction is concave curved inwardly so as to naturally guide the direction of the air blown The control plate 210 is provided.

Here, a plurality of protrusions 220 are formed on the surface of the wind direction control plate 210, and the protrusions 220 are alternately formed when viewed in a lateral direction. The air flows along the wind direction control plate 210. It serves to direct toward the center of the filter 170 or the chamber 120.

Hereinafter, the operation of the present invention will be described in detail.

According to the present invention, as shown in FIGS. 4 and 5, while the blowing pressure is generated by the operation of the blowing fan 160, the air heated by the heater 150 is opened in the shielding plate 200. The filter 170 is directed to the filter 170, that is, the heated air is divided into both sides from the top of the heating furnace 100, and the filter 170 is uniformly arranged in the left and right and up and down directions with the intermediate plate 230 interposed therebetween. Blows towards

In other words, the air of the upper part of the heating furnace 100 heated by the blowing pressure of the blowing fan 160 is supplied toward the filter 170 while descending to the lower part of the heating furnace 100.

In this process, the air is directed toward the center of the filter 170 or the chamber 120 by the wind direction control plate 210 and the protrusion 220 installed at the corner of the main body 110, and the wind direction control plate 210 and the protrusion ( 220) the air is hydrodynamically stable and can ensure a smooth flow.

Thereafter, the air in which the foreign matter is filtered while passing through the filter 170 passes through the perforated plate 180 and is supplied into the chamber 120. In this case, the perforated plate 180 has more holes 181 formed at the center thereof. Therefore, more air flows in the center of the perforated plate 180 than the edges (both sides) of the perforated plate 180. This is to compensate for the more blowing pressure on both sides of the structure of the heating furnace 100.

In this process, the object to be processed is uniformly heated or fired by air (hot air) uniformly blown up, down, left, and right of the chamber 120.

Thereafter, the air in the chamber 120 is repeatedly circulated toward the heater 150 along the flow path of the air formed by the closing plate 240 via the other perforated plate 180.

In this process, about 10% of the circulating air is discharged to the outside through the exhaust port 195 to remove the fume generated in the chamber 120, and about 90% of the air continues to circulate. In this case, the insufficient air is replenished by sucking external air through the air supply unit 190.

On the other hand, while the rotating shaft 162 of the drive motor 161 is rotated while the cooling fan 163 installed on the rotating shaft 162 rotates to blow air toward the drive motor 161 to drive the drive motor 161. Since the cooling is possible, overheating of the driving motor 161 is prevented.

In addition, the operator can access the inside of the heating furnace 100 through the rear door 140 to facilitate the maintenance and repair of the heating furnace 100.

As described above, according to the present invention, since the hot air supplied to the chamber is uniformly supplied in the up, down, left and right directions, the inside of the heating furnace is continuously circulated, so that the heat insulation and the thermal insulation of the chamber are improved, thereby avoiding the heating operation of the heating furnace. The thermal deformation of the treatment can be minimized, and also there is an effect that the maintenance and inspection of the equipment inside the furnace can be easily performed.

Although the present invention has been illustrated and described with respect to specific preferred embodiments, the present invention is not limited to the above-described embodiments, and a person having ordinary skill in the art to which the present invention pertains should be described in the following claims. Various changes may be made without departing from the spirit of the technical idea of the present invention.

Claims (11)

As a heating furnace for heating the object to be processed inside the main body, A chamber located in the main body, in which a plurality of racks in which the object is to be loaded is installed, and an opening is formed in front and rear, respectively; A shutter that closes the opening in front of the chamber and has an entrance, which is a passage through which the object is withdrawn; A rear door installed to open and close at an opening at the rear of the chamber; A plurality of heaters arranged in a horizontal direction on one side of the heating furnace to provide heat into the chamber; A plurality of blowing fans disposed under the heater and inducing air flow into the chamber by the rotational force of the driving motor; A filter disposed between the blower fan and the chamber and filtering foreign matter contained in the air blown toward the chamber; A perforated plate disposed at both sides in the width direction of the chamber and provided with a plurality of holes to adjust the flow amount of air passing through the filter, the hole having a larger number of holes than the edges; An air supply port that is a passage for introducing external air into the chamber to maintain a wind pressure inside the chamber; And Including the exhaust port which is a passage for discharging the air in the chamber to the outside to maintain the wind pressure inside the chamber, the air heated by the heater is passed through the filter and the perforated plate by the blowing pressure of the blowing fan of the chamber And an air flow circulation structure which is uniformly blown up, down, left and right, and then circulated toward the heater. The method of claim 1, The blower fan and the heater is spaced apart from the heater by a predetermined interval, and the shielding plate having both sides opened in the longitudinal direction of the chamber to induce left and right distribution of the air flow heated by the heater. Furnace characterized by the above. The method of claim 1, The heating furnace, characterized in that provided in the corner of the main body in which the heater and the blowing fan is installed, the wind direction control plate curved inward to naturally guide the flow direction of air. The method of claim 3, The heating furnace, characterized in that a plurality of projections are formed on the surface of the wind direction control plate to guide the flow of air to blow air toward the center of the filter. The method of claim 1, And an intermediate plate in the longitudinal direction between the shielding plate and the filter to partition the flow of air blown toward the filter. The method of claim 1, The rear door is a heating furnace, characterized in that the door to be opened and closed on both sides. The method of claim 1, The blowing fan is a heating furnace, characterized in that the centrifugal fan. The method of claim 1, The heating furnace, characterized in that the cooling fan for blowing air toward the drive motor is installed on the rotation shaft of the drive motor. The method of claim 1, And the rack has a predetermined inclination to ascend upwards toward the shutter in its longitudinal direction. delete The method of claim 1, The heating target is characterized in that the glass substrate for the LCD.

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