JP5136543B2 - heating furnace - Google Patents

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JP5136543B2
JP5136543B2 JP2009274570A JP2009274570A JP5136543B2 JP 5136543 B2 JP5136543 B2 JP 5136543B2 JP 2009274570 A JP2009274570 A JP 2009274570A JP 2009274570 A JP2009274570 A JP 2009274570A JP 5136543 B2 JP5136543 B2 JP 5136543B2
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heat treatment
hot air
mesh material
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JP2011117652A (en
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英昭 渡辺
勝美 秋本
壮宏 神谷
卓雄 潟保
武 伊藤
幹夫 大森
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TDK Corp
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Description

本発明は、複数段の熱処理空間を有する熱処理室を備えた加熱炉に関するものである。   The present invention relates to a heating furnace provided with a heat treatment chamber having a plurality of stages of heat treatment spaces.

従来、このような分野の技術として、下記特許文献1に記載の加熱炉が知られている。この加熱炉は、複数の被加熱物を上下方向に間隔をあけて多段に熱処理室に収容し、熱風循環流路で発生させた熱風を熱処理室に循環させて被加熱物を熱処理するものである。熱風を熱処理室に導入するための通気孔の近傍には、傾きが調整可能な風向調整板が複数設けられており、この風向調整板が熱風の風向を調整することで、熱処理室内の温度分布の均一化を図ることが提案されている。   Conventionally, a heating furnace described in Patent Document 1 below is known as a technique in such a field. This heating furnace accommodates a plurality of objects to be heated in multiple stages in the heat treatment chamber at intervals in the vertical direction, and heats the object to be heated by circulating the hot air generated in the hot air circulation channel to the heat treatment chamber. is there. In the vicinity of the ventilation holes for introducing hot air into the heat treatment chamber, there are a plurality of wind direction adjustment plates that can adjust the inclination, and this wind direction adjustment plate adjusts the air direction of the hot air to adjust the temperature distribution in the heat treatment chamber. It has been proposed to achieve uniformization.

特許3644849号公報Japanese Patent No. 3644849

しかしながら、特許文献1の加熱炉では、上下に配列された通気孔それぞれに対応させて風向調整板を配置し、多段の各被加熱物の温度分布バラツキを抑制しようとしているが、そのバラツキの抑制は十分とは言えない。従って、例えば、この構成の加熱炉をセラミック成形体の脱脂処理に適用した場合、多段に配列された各セラミック成形体の脱脂状態に差異が生じるおそれがあり、脱脂処理後におけるセラミック成形体の焼成時には、クラックや変形に代表される不良が発生するおそれがある。   However, in the heating furnace of Patent Document 1, an airflow direction adjusting plate is arranged corresponding to each of the vent holes arranged in the upper and lower directions to suppress the temperature distribution variation of each multi-stage object to be heated. Is not enough. Therefore, for example, when the heating furnace having this configuration is applied to the degreasing treatment of the ceramic molded body, there is a possibility that a difference occurs in the degreasing state of each ceramic molded body arranged in multiple stages, and the ceramic molded body is fired after the degreasing treatment. Sometimes, there is a risk that defects typified by cracks and deformation occur.

そこで、本発明は、熱処理室内の各段の熱処理空間における温度分布を均一化する加熱炉を提供することを目的とする。   Therefore, an object of the present invention is to provide a heating furnace that makes the temperature distribution in the heat treatment space of each stage in the heat treatment chamber uniform.

本発明の加熱炉は、 ヒータとブロアとで発生させた熱風を循環流通させる熱風循環流路と、鉛直方向から見てヒータ又はブロアと少なくとも一部が重なる位置に配置され、水平な仕切壁で仕切られ形成され被加熱物をそれぞれ収納する複数段の熱処理空間を有し、熱風循環流路の熱風を各段の熱処理空間に分岐させて通過させる熱処理室と、を備え、各段の熱処理空間の上流側には、ヒータからの距離が大きいほど上流側に長く突出する湾曲形状の熱損失調整板と、熱処理空間に導入される熱風を順に通過させる上流側の第1のメッシュ材及び下流側の第2のメッシュ材と、が設けられており、各段の第1のメッシュ材は、鉛直方向から見て互いに同じ位置に配置されており、各段の第2のメッシュ材は、段ごとに、熱風の進行方向に位置調整が可能であることを特徴とする。

The heating furnace of the present invention is arranged at a position where at least a part of the hot air circulating flow path for circulating hot air generated by the heater and the blower and at least a part of the heater or the blower is viewed from the vertical direction, and a horizontal partition wall. partitioned formed has a heat treatment space in a plurality of stages you accommodating the article to be heated, respectively, and a heat treatment chamber for passing the hot air hot air circulation passage is branched into the heat treatment space of each stage, a heat treatment of each stage On the upstream side of the space, a curved heat loss adjusting plate that protrudes longer toward the upstream side as the distance from the heater is larger, a first mesh material on the upstream side that sequentially passes the hot air introduced into the heat treatment space, and the downstream side A second mesh material on each side, the first mesh materials on each step are arranged at the same position as viewed from the vertical direction, and the second mesh material on each step Every time, adjust the position in the direction of hot air It is characterized by being adjustable .

また、この場合、熱損失調整板と、第1及び第2のメッシュ材とは、ステンレス製であることが好ましい。保温性の高い(熱伝導の悪い)ステンレスで、熱分布補償部材としての熱損失調整板と、第1及び第2のメッシュ材と、を構成することにより、外乱が生じても熱分布補償部材が急激に温度変化せず、熱処理室内における一定の温度分布を維持し易い。
In this case, the heat loss adjustment plate, the first and second mesh material is preferably made of stainless steel. The heat distribution compensation member is made of stainless steel having high heat retention (poor heat conduction), the heat loss adjusting plate as the heat distribution compensation member, and the first and second mesh materials , even if disturbance occurs. However, the temperature does not change abruptly and it is easy to maintain a constant temperature distribution in the heat treatment chamber.

また、第1のメッシュ材は熱損失調整板よりも下流側で熱処理空間よりも上流側に位置し、熱処理空間に導入される前の熱風を通過させ、第2のメッシュ材は、第1のメッシュ材よりも下流側で熱処理空間よりも上流側に位置し、第1のメッシュ材を通過した熱風を通過させ、第1のメッシュ材と第2のメッシュ材との間には、熱処理空間の水平方向の熱分布を調整する熱分布調整板が設けられていることとしてもよい。
Further, the first mesh material is located downstream of the heat loss adjusting plate and upstream of the heat treatment space, and passes the hot air before being introduced into the heat treatment space, and the second mesh material is Located downstream of the mesh material and upstream of the heat treatment space, the hot air that has passed through the first mesh material is allowed to pass between the first mesh material and the second mesh material. A heat distribution adjusting plate for adjusting the heat distribution in the horizontal direction may be provided.

また、各段の第1及び第2のメッシュ材は、段ごとに、開口率が異なることが好ましい。第1及び第2のメッシュ材の開口率を各熱処理空間ごとに調整することで、段ごとの温度分布をより精密に調整することができる。   Moreover, it is preferable that the aperture ratios of the first and second mesh members of each step differ for each step. By adjusting the aperture ratios of the first and second mesh materials for each heat treatment space, the temperature distribution for each stage can be adjusted more precisely.

本発明の加熱炉によれば、熱処理室内の各段の熱処理空間における温度分布を均一化することができる。   According to the heating furnace of the present invention, the temperature distribution in the heat treatment space at each stage in the heat treatment chamber can be made uniform.

本発明の加熱炉の一実施形態を一部破断して示す正面図である。It is a front view which shows partially broken one Embodiment of the heating furnace of this invention. 図1の加熱炉のII-II線に沿った水平断面図である。It is a horizontal sectional view along the II-II line of the heating furnace of FIG.

以下、図面を参照しつつ本発明に係る加熱炉の好適な実施形態について詳細に説明する。図1及び図2に示す加熱炉1は、セラミック電子部品の製造工程において、焼成処理前のセラミック成形体を加熱して脱脂処理を行う脱脂炉として用いられる。なお、以下で加熱炉1の各部の位置関係を説明する際に「前」、「後」なる語を用いる場合があるが、この場合、図1における左を「前」とし、右を「後」とする。   Hereinafter, preferred embodiments of a heating furnace according to the present invention will be described in detail with reference to the drawings. A heating furnace 1 shown in FIGS. 1 and 2 is used as a degreasing furnace for performing a degreasing process by heating a ceramic molded body before a firing process in a manufacturing process of a ceramic electronic component. In the following description, the terms “front” and “rear” may be used in explaining the positional relationship between the respective parts of the heating furnace 1. In this case, the left in FIG. 1 is “front” and the right is “rear”. "

加熱炉1は、断熱壁で囲まれセラミック成形体のワークWを収納する熱処理室10と、熱風を発生させるヒータ21及びブロア23と、発生した熱風を熱処理室10内に供給する熱風循環流路30と、を備えている。熱処理室10内には熱風循環流路30からの熱風が後方から前方に向かって吹き抜けるようになっており、熱処理室10内のワークWは、熱風に晒されることにより、加熱され脱脂処理される。この脱脂処理によって、焼成処理に先立って、セラミック成形体中の樹脂成分(バインダ)が除去される。   The heating furnace 1 includes a heat treatment chamber 10 that is surrounded by a heat insulating wall and accommodates a workpiece W of a ceramic molded body, a heater 21 and a blower 23 that generate hot air, and a hot air circulation channel that supplies the generated hot air into the heat treatment chamber 10. 30. Hot air from the hot air circulation channel 30 blows through the heat treatment chamber 10 from the rear to the front, and the workpiece W in the heat treatment chamber 10 is heated and degreased by being exposed to the hot air. . By this degreasing treatment, the resin component (binder) in the ceramic molded body is removed prior to the firing treatment.

熱処理室10は、複数の水平な仕切壁11で仕切られており、熱処理室10内には、鉛直方向に重なる複数段(ここでは、5段とする)の熱処理空間13a〜13eが形成されている。仕切壁11はステンレス製の板であり、上面にワークWを載置することができる。このように、各段の熱処理空間13a〜13eに、それぞれワークWを収納可能とすることで、熱処理室10にワークWを効率的に収納し、加熱炉1における処理効率向上が図られている。   The heat treatment chamber 10 is partitioned by a plurality of horizontal partition walls 11, and in the heat treatment chamber 10, multiple stages (here, five stages) of heat treatment spaces 13 a to 13 e overlapping in the vertical direction are formed. Yes. The partition wall 11 is a stainless steel plate, and can place the workpiece W on the upper surface. In this way, by allowing the workpieces W to be stored in the respective heat treatment spaces 13a to 13e, the workpiece W can be efficiently stored in the heat treatment chamber 10, and the processing efficiency in the heating furnace 1 can be improved. .

熱風循環流路30は、熱処理室10から前方に排出された熱風を下向きに送る下降流路31と、下降流路31からの熱風を更に水平に後方に送る水平流路33と、水平流路33からの熱風を更に上向きに送り熱処理室10に再び導入する上昇流路35と、を備えている。水平流路33上には、熱風の発生源としてヒータ21及びブロア23が設置されている。ヒータ21及びブロア23は熱処理室10の下方に位置しており、上から見てヒータ21及びブロア23の輪郭がすべて熱処理室10に重なるように配置されている。このような熱風循環流路30によって、矢印Aで示す熱風の循環が発生し、熱処理室10内に熱風を循環させることができる。前述のように、熱処理室10は5段の熱処理空間13a〜13eに分かれているので、上昇流路35からの熱風は、各段の熱処理空間13a〜13eに分岐して流動し、再度合流して下降流路31に排出される。   The hot air circulation flow path 30 includes a downward flow path 31 for sending the hot air discharged forward from the heat treatment chamber 10 downward, a horizontal flow path 33 for sending the hot air from the downward flow path 31 further horizontally, and a horizontal flow path. And an ascending flow path 35 for sending hot air from 33 further upward and reintroducing it into the heat treatment chamber 10. On the horizontal flow path 33, the heater 21 and the blower 23 are installed as a source of hot air. The heater 21 and the blower 23 are located below the heat treatment chamber 10, and are arranged so that the outlines of the heater 21 and the blower 23 overlap with the heat treatment chamber 10 as viewed from above. By such a hot air circulation flow path 30, a hot air circulation indicated by an arrow A is generated, and the hot air can be circulated in the heat treatment chamber 10. As described above, since the heat treatment chamber 10 is divided into five stages of heat treatment spaces 13a to 13e, the hot air from the ascending flow path 35 branches and flows into the heat treatment spaces 13a to 13e of the respective stages and merges again. And discharged to the descending flow path 31.

一般に、セラミック成形体のワークWには、樹脂成分が含まれており、加熱炉1では、ワークW中の樹脂成分が長時間をかけて徐々に除去されていく。樹脂成分の除去速度は、熱風としてワークWに接触する雰囲気ガスの温度、風量、及び雰囲気ガス中の樹脂濃度、に依存する。ここで、熱処理室10内の各位置ごとに、雰囲気ガスの温度、風量、及び樹脂濃度のバラツキがある場合、熱処理室10の各位置に配置されたワークWごとに樹脂の除去速度がバラつくことになる。例えば、樹脂の除去速度が速すぎる場合、ワークWにクラックが発生するおそれがある。また、樹脂の除去速度が遅すぎる場合には、処理終了後もワークWに樹脂成分が残存してしまう。従って、熱処理室10内のすべてのワークWについてムラなく良好な脱脂を行うためには、熱処理室10内の温度分布、風量分布、樹脂濃度分布のバラツキを小さくすることが必要である。   In general, the workpiece W of the ceramic molded body contains a resin component, and in the heating furnace 1, the resin component in the workpiece W is gradually removed over a long period of time. The removal rate of the resin component depends on the temperature of the atmospheric gas contacting the workpiece W as hot air, the air volume, and the resin concentration in the atmospheric gas. Here, when there are variations in the temperature of the atmospheric gas, the air volume, and the resin concentration for each position in the heat treatment chamber 10, the resin removal speed varies for each workpiece W arranged in each position in the heat treatment chamber 10. It will be. For example, if the resin removal rate is too fast, the workpiece W may crack. If the resin removal rate is too slow, the resin component remains on the workpiece W even after the processing is completed. Therefore, in order to perform uniform degreasing without unevenness for all the workpieces W in the heat treatment chamber 10, it is necessary to reduce variations in the temperature distribution, air volume distribution, and resin concentration distribution in the heat treatment chamber 10.

そこで、加熱炉1は、5段の熱処理空間13a〜13eにそれぞれ対応するステンレス製の熱損失調整板51a〜51eを備えている。このうち、熱損失調整板51b〜51eは、それぞれ、対応する熱処理空間13b〜13eの後方(熱風の上流側)に設けられている。各熱処理空間13b〜13eを区画する上壁をなす仕切壁11の後端に、各熱損失調整板51b〜51eが固定されており、各熱損失調整板51b〜51eは、それぞれ、上昇流路35内に突出するように後方に延びている。そして、熱損失調整板51b〜51eは、先端が下方に向くように湾曲している。このような湾曲形状により、各熱損失調整板51b〜51eは、上昇流路35の鉛直方向の熱風をそれぞれ案内して水平方向の熱風とし、各々の熱処理空間13b〜13eに熱風を円滑に導き入れる。なお、熱損失調整板15aは、熱処理室10の上壁面に固定されているが、他の熱損失調整板51b〜51eと同様の構成により、熱処理空間13aに熱風を円滑に導き入れる。   Therefore, the heating furnace 1 includes stainless steel heat loss adjusting plates 51a to 51e corresponding to the five stages of heat treatment spaces 13a to 13e, respectively. Among these, the heat loss adjusting plates 51b to 51e are respectively provided behind the corresponding heat treatment spaces 13b to 13e (upstream side of hot air). The heat loss adjustment plates 51b to 51e are fixed to the rear end of the partition wall 11 that forms the upper wall that partitions the heat treatment spaces 13b to 13e, and the heat loss adjustment plates 51b to 51e are respectively ascending flow paths. It extends rearward so as to protrude into 35. The heat loss adjusting plates 51b to 51e are curved so that the tips are directed downward. Due to such a curved shape, each heat loss adjusting plate 51b to 51e guides the hot air in the vertical direction of the ascending flow path 35 into a horizontal hot air, and smoothly guides the hot air to each heat treatment space 13b to 13e. Put in. Although the heat loss adjusting plate 15a is fixed to the upper wall surface of the heat treatment chamber 10, hot air is smoothly introduced into the heat treatment space 13a with the same configuration as the other heat loss adjusting plates 51b to 51e.

熱損失調整板51a〜51eにおける、熱風上流側に突出する長さは、熱損失調整板51a,51b,51c,51d,51eの順に長い。すなわち、各熱損失調整板51a〜51eの長さは、上に位置するものほど長くなっており、更に換言すれば、ヒータ21からの距離が大きくなるほど、熱損失調整板51a〜51eが長くなっている。熱損失調整板51a〜51eの幅及び厚さは、すべて同じである。   The length of the heat loss adjusting plates 51a to 51e protruding upstream of the hot air is longer in the order of the heat loss adjusting plates 51a, 51b, 51c, 51d, and 51e. That is, the lengths of the heat loss adjustment plates 51a to 51e are longer as they are positioned above. In other words, the heat loss adjustment plates 51a to 51e are longer as the distance from the heater 21 is larger. ing. The heat loss adjusting plates 51a to 51e all have the same width and thickness.

更に、各熱処理空間13a〜13eにおいては、熱風の導入口を塞ぐように二重に重ねて配置された2枚のメッシュ材が設けられている。このうち上流側のメッシュ材を第1メッシュ材53とし、下流側のメッシュ材を第2メッシュ材55とする。第1メッシュ材53と第2メッシュ材55とは、ワークWの載置位置と熱損失調整板51a〜51eとの間に位置している。第1メッシュ材53と第2メッシュ材55とは、所定の開口率(約60%程度)を有するステンレス製の金網状の部材であり、各熱処理空間13a〜13eに導入される熱風は、第1メッシュ材53と第2メッシュ材55とを順に通過する。各段の第1メッシュ材53は、上から見てすべて同じ位置に配置されている。これに対して、各段の第2メッシュ材55は、下段にいくほど徐々に前方にずれるように配置されている。また、各段の第2メッシュ材55は、例えばネジ止め等により着脱自在に仕切壁11に取り付けられる構成により、前後方向に位置調整が可能である。各段の第1及び第2メッシュ材53,55の開口率は、段ごとに調整され互いに異なっている。   Furthermore, in each heat processing space 13a-13e, the two mesh materials arrange | positioned doubly so that the inlet of a hot air may be plugged are provided. Of these, the upstream mesh material is the first mesh material 53, and the downstream mesh material is the second mesh material 55. The 1st mesh material 53 and the 2nd mesh material 55 are located between the mounting position of the workpiece | work W, and the heat loss adjustment plates 51a-51e. The first mesh material 53 and the second mesh material 55 are stainless steel wire mesh members having a predetermined opening ratio (about 60%), and the hot air introduced into the heat treatment spaces 13a to 13e is the first The first mesh material 53 and the second mesh material 55 are sequentially passed. The first mesh members 53 at each stage are all arranged at the same position as viewed from above. On the other hand, the second mesh material 55 at each stage is arranged so as to gradually shift forward as it goes down. Further, the second mesh material 55 of each step can be adjusted in the front-rear direction by a configuration that is detachably attached to the partition wall 11 by, for example, screwing or the like. The opening ratios of the first and second mesh members 53 and 55 in each step are adjusted for each step and are different from each other.

更に、各熱処理空間13a〜13eにおいては、第1メッシュ材53と第2メッシュ材55との間の空間に、複数枚(ここでは、6枚とする)のステンレス製の熱分布調整板57が設けられている。熱分布調整板57は、仕切壁11の上面(或いは熱処理室10の底壁面)に設けられており、図1における奥行き方向に水平に配列されている。熱分布調整板57は、上方から見てやや傾斜することで、ワークWの設置位置における熱風の流動に影響を与える。すなわち、熱分布調整板57は、上方からみて中央付近の熱風を外側に導くように傾斜している。この構成により、各熱処理空間13a〜13eにおいては、熱風に直交する面内における風量のバラツキが低減される。   Furthermore, in each of the heat treatment spaces 13a to 13e, a plurality of (here, six) stainless steel heat distribution adjusting plates 57 are provided in the space between the first mesh material 53 and the second mesh material 55. Is provided. The heat distribution adjusting plate 57 is provided on the upper surface of the partition wall 11 (or the bottom wall surface of the heat treatment chamber 10), and is arranged horizontally in the depth direction in FIG. The heat distribution adjusting plate 57 is slightly inclined when viewed from above, thereby affecting the flow of hot air at the position where the workpiece W is installed. That is, the heat distribution adjusting plate 57 is inclined so as to guide the hot air near the center to the outside as viewed from above. With this configuration, in each of the heat treatment spaces 13a to 13e, variation in the air volume in a plane orthogonal to the hot air is reduced.

続いて、上述の構成に基づく加熱炉1の作用効果について説明する。   Then, the effect of the heating furnace 1 based on the above-mentioned structure is demonstrated.

この加熱炉1では、熱処理室10とヒータ21及びブロア23とが上下の位置関係で配置されているので、装置のコンパクト化及び設置面積の低減が図り易い。その一方、このような配置に起因して、上昇流路35からの上向きの熱風を、熱処理室10に水平に案内して導入する必要がある。そして、各段の熱処理空間13a〜13eは、ヒータ21からの距離が互いに異なり、ヒータから各段の熱処理空間13a〜13eに到達するまでの熱風の流路長は、熱処理空間13a,13b,13c,13d,13eの順に長く、その結果、ヒータからの熱風の熱損失もこの順に大きい。従って、各段の熱処理空間同士で温度分布にバラツキが発生し易い。   In this heating furnace 1, since the heat treatment chamber 10, the heater 21, and the blower 23 are arranged in a vertical positional relationship, it is easy to make the apparatus compact and reduce the installation area. On the other hand, due to such an arrangement, it is necessary to guide the upward hot air from the ascending flow path 35 into the heat treatment chamber 10 while being guided horizontally. The heat treatment spaces 13a to 13e of each stage have different distances from the heater 21, and the flow length of hot air from the heater to the heat treatment spaces 13a to 13e of each stage is the heat treatment spaces 13a, 13b, and 13c. , 13d, and 13e in this order, and as a result, the heat loss of the hot air from the heater is also in this order. Therefore, the temperature distribution is likely to vary between the heat treatment spaces at each stage.

そこで、この加熱炉1では、前述のとおり、各熱処理空間13a〜13eに対応させて、上流側に突出する熱損失調整板51a〜51eが設けられている。各熱損失調整板51a〜51eは蓄熱材として機能し、ヒータ21からの流路長が長いほど熱損失調整板51a〜51eが長く設定されており熱容量が大きくなる。従って、各段の熱処理空間13a〜13eには、熱風の熱損失量が大きいほど、大きい熱量量の熱損失調整板51a〜51eに接触した熱風が導入されることになる。例えば、一番上の熱処理空間13aに導入される熱風は、ヒータ21からの流路長が長いことから、熱損失も大きい。この熱風が、熱容量が大きい熱損失調整板51aに接触し、温度が補われた状態で熱処理空間13aに熱風が導入される。このように、各段ごとに長さを変え熱量量を変えた熱損失調整板51a〜51eによって、各段の熱処理空間13a〜13eに導入される熱風の温度が均一化され、熱処理空間13a〜13eごとの温度分布が均一化される。   Therefore, in the heating furnace 1, as described above, the heat loss adjusting plates 51a to 51e protruding upstream are provided in correspondence with the heat treatment spaces 13a to 13e. Each of the heat loss adjustment plates 51a to 51e functions as a heat storage material. The longer the flow path length from the heater 21, the longer the heat loss adjustment plates 51a to 51e are set and the heat capacity increases. Therefore, the larger the amount of heat loss of hot air, the larger the amount of heat that is in contact with the heat loss adjusting plates 51a to 51e is introduced into the heat treatment spaces 13a to 13e of each stage. For example, the hot air introduced into the uppermost heat treatment space 13a has a large heat loss because the flow path length from the heater 21 is long. The hot air comes into contact with the heat loss adjusting plate 51a having a large heat capacity, and the hot air is introduced into the heat treatment space 13a in a state where the temperature is compensated. As described above, the heat loss adjusting plates 51a to 51e having different lengths and different amounts of heat for the respective stages make the temperature of the hot air introduced into the heat treatment spaces 13a to 13e of the respective stages uniform, and the heat treatment spaces 13a to 13e. The temperature distribution for each 13e is made uniform.

また、第1メッシュ材53は、通過する熱風の分布を分散させることにより、結果として温度分布を等しくする。また、第1メッシュ材53の通過後にも残存する水平方向の温度バラツキは、蓄熱材として機能する熱分布調整板57によって補償されるので、熱処理空間13a〜13eにおける水平方向の温度分布が均一化される。また、第2メッシュ材55は熱処理空間13a〜13eからの輻射熱が熱分布調整板57に直接影響を与えることを抑制し、且つ輻射熱を第2メッシュ材55の面内で分散させる。これにより、熱分布調整板57の温度が急激に変化することなく安定し、第2メッシュ材55を通過した熱風における、流れに直交する断面の温度分布が均一化される。   Moreover, the 1st mesh material 53 makes temperature distribution equal as a result by disperse | distributing distribution of the hot air to pass. Further, the horizontal temperature variation remaining after passing through the first mesh material 53 is compensated by the heat distribution adjusting plate 57 functioning as a heat storage material, so that the horizontal temperature distribution in the heat treatment spaces 13a to 13e is made uniform. Is done. Further, the second mesh material 55 suppresses the direct influence of the radiant heat from the heat treatment spaces 13 a to 13 e on the heat distribution adjusting plate 57 and disperses the radiant heat within the surface of the second mesh material 55. Thereby, the temperature of the heat distribution adjusting plate 57 is stabilized without suddenly changing, and the temperature distribution of the cross section perpendicular to the flow in the hot air that has passed through the second mesh material 55 is made uniform.

また、熱損失調整板51a〜51eと、第1及び第2メッシュ材53,55と、熱分布調整板57とは、ステンレス製である。このように、保温性の高い(熱伝導の悪い)ステンレスで、熱分布補償部材としての熱損失調整板51a〜51eと、第1及び第2メッシュ材53,55と、熱分布調整板57とを構成することにより、外乱が生じてもこれらの熱分布補償部材が急激に温度変化せず、熱処理室10内における一定の温度分布を維持し易い。   The heat loss adjusting plates 51a to 51e, the first and second mesh members 53 and 55, and the heat distribution adjusting plate 57 are made of stainless steel. As described above, the heat loss adjusting plates 51a to 51e as the heat distribution compensating members, the first and second mesh members 53 and 55, and the heat distribution adjusting plate 57 are made of stainless steel having high heat retention (poor heat conduction). Thus, even if a disturbance occurs, these heat distribution compensating members do not change in temperature rapidly, and it is easy to maintain a constant temperature distribution in the heat treatment chamber 10.

また、各段の第1メッシュ材53は、上から見て同じ位置に配置されるので、各熱処理空間13a〜13eにほぼ同じ条件で熱風を導入させ、第2メッシュ材55を位置調整することにより、各熱処理空間13a〜13eからの輻射熱にバラツキが生じても第2メッシュ材55に対する影響を、各段の熱処理空間13a〜13e同士で共通に揃えることができる。   In addition, since the first mesh material 53 at each stage is disposed at the same position when viewed from above, the position of the second mesh material 55 is adjusted by introducing hot air into each of the heat treatment spaces 13a to 13e under substantially the same conditions. Thus, even if the radiant heat from each of the heat treatment spaces 13a to 13e varies, the influence on the second mesh material 55 can be made common in the heat treatment spaces 13a to 13e of each stage.

また、各段の第1及び第2メッシュ材53,55の開口率は、段ごとに調整され互いに異なっている。このように、第1及び第2メッシュ材53,55の開口率を各段ごとに調整することで、各段の熱処理空間13a〜13eごとの温度分布をより精密に調整することができる。   Moreover, the aperture ratios of the first and second mesh members 53 and 55 at each stage are adjusted for each stage and are different from each other. Thus, by adjusting the aperture ratio of the first and second mesh members 53 and 55 for each stage, the temperature distribution for each heat treatment space 13a to 13e of each stage can be adjusted more precisely.

以上のように、加熱炉1によれば、熱処理室10の各段及び各位置の温度分布が均一化され、熱処理室10内において各段の各位置に配置されたワークWの脱脂状態のバラツキを小さくすることができる。   As described above, according to the heating furnace 1, the temperature distribution of each stage and each position of the heat treatment chamber 10 is made uniform, and the variation in the degreasing state of the workpieces W arranged at each position of each stage in the heat treatment chamber 10 is achieved. Can be reduced.

1…加熱炉、10…熱処理室、11…仕切壁、13a〜13e…熱処理空間、21…ヒータ、23…ブロア、30…熱風循環流路、51a〜51e…熱損失調整板、53…第1メッシュ材、55…第2メッシュ材、57…熱分布調整板。
DESCRIPTION OF SYMBOLS 1 ... Heating furnace, 10 ... Heat treatment chamber, 11 ... Partition wall, 13a-13e ... Heat treatment space, 21 ... Heater, 23 ... Blower, 30 ... Hot air circulation flow path, 51a-51e ... Heat loss adjustment plate, 53 ... 1st Mesh material, 55 ... second mesh material, 57 ... heat distribution adjusting plate.

Claims (4)

ヒータとブロアとで発生させた熱風を循環流通させる熱風循環流路と、
鉛直方向から見て前記ヒータ又は前記ブロアと少なくとも一部が重なる位置に配置され、水平な仕切壁で仕切られ形成され被加熱物をそれぞれ収納する複数段の熱処理空間を有し、前記熱風循環流路の熱風を各段の前記熱処理空間に分岐させて通過させる熱処理室と、を備え、
各段の前記熱処理空間の上流側には、
前記ヒータからの距離が大きいほど上流側に長く突出する湾曲形状の熱損失調整板と、
前記熱処理空間に導入される前記熱風を順に通過させる上流側の第1のメッシュ材及び下流側の第2のメッシュ材と、が設けられており、
各段の前記第1のメッシュ材は、鉛直方向から見て互いに同じ位置に配置されており、
各段の前記第2のメッシュ材は、段ごとに、前記熱風の進行方向に位置調整が可能であることを特徴とする加熱炉。
A hot air circulation passage for circulating the hot air generated by the heater and the blower;
Vertically from seeing disposed on at least partially overlap position and the heater or the blower has a heat treatment space in a plurality of stages you accommodating formed partitioned by a horizontal partition wall object to be heated, respectively, the hot air circulation A heat treatment chamber for branching and passing the hot air of the flow path to the heat treatment space of each stage, and
On the upstream side of the heat treatment space of each stage,
A curved heat loss adjustment plate that protrudes longer toward the upstream side as the distance from the heater increases,
An upstream first mesh material and a downstream second mesh material that sequentially pass the hot air introduced into the heat treatment space are provided, and
The first mesh members of each stage are arranged at the same position as seen from the vertical direction,
The heating furnace characterized in that the position of the second mesh material of each stage can be adjusted for each stage in the traveling direction of the hot air .
前記熱損失調整板と、前記第1及び第2のメッシュ材とは、ステンレス製であることを特徴とする請求項1に記載の加熱炉。 The heating furnace according to claim 1, wherein the heat loss adjusting plate and the first and second mesh members are made of stainless steel. 前記第1のメッシュ材は前記熱損失調整板よりも下流側で前記熱処理空間よりも上流側に位置し、前記熱処理空間に導入される前の前記熱風を通過させ、
前記第2のメッシュ材は、前記第1 のメッシュ材よりも下流側で前記熱処理空間よりも上流側に位置し、前記第1のメッシュ材を通過した前記熱風を通過させ、
前記第1のメッシュ材と前記第2のメッシュ材との間には、前記熱処理空間の水平方向の熱分布を調整する熱分布調整板が設けられていることを特徴とする請求項1又は2に記載の加熱炉。
The first mesh material is located on the downstream side of the heat loss adjusting plate and upstream of the heat treatment space, and passes the hot air before being introduced into the heat treatment space,
The second mesh material is located downstream of the first mesh material and upstream of the heat treatment space, and allows the hot air that has passed through the first mesh material to pass through.
The heat distribution adjusting plate for adjusting the heat distribution in the horizontal direction of the heat treatment space is provided between the first mesh material and the second mesh material. The heating furnace described in 1.
各段の前記第1及び第2のメッシュ材は、段ごとに、開口率が異なることを特徴とする請求項1〜3の何れか1項に記載の加熱炉。
The heating furnace according to any one of claims 1 to 3, wherein the first and second mesh members of each stage have different opening ratios for each stage.
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