CN100439845C - Thermal treatment apparatus - Google Patents
Thermal treatment apparatus Download PDFInfo
- Publication number
- CN100439845C CN100439845C CNB031051499A CN03105149A CN100439845C CN 100439845 C CN100439845 C CN 100439845C CN B031051499 A CNB031051499 A CN B031051499A CN 03105149 A CN03105149 A CN 03105149A CN 100439845 C CN100439845 C CN 100439845C
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- Prior art keywords
- fire door
- door portion
- plate
- opening ratio
- intake panel
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Abstract
The present invention relates to a thermal treatment apparatus used in the technical field of baking optical filters, which does not have the defects of high cost, etc. existing in large scale or heating equipment accompanied with the thermal treatment apparatus and solves the problem of temperature reduction at the vicinity part of a furnace mouth part. The apparatus has a wind amount adjusting mechanism (19) capable of increasing the hot wind amount near the furnace mouth by adjustment. The wind amount adjusting mechanism (19) has an outward blowing plate (21) arranged on one end side of a thermal treatment chamber (R), and a sucking plate (22) arranged on the other end of the thermal treatment chamber. A specified gap (S) is formed between the outward blowing plate (21) and the inner surface of a furnace wall (1a) on the side of the furnace mouth, and thus, the aperture ratio of the vicinity of the furnace mouth part (4) of the outward blowing plate (21) is enlarged than that of other parts. A specified gap (S) is formed between the sucking plate (22) and the inner surface of the furnace wall (1a) on the side of the furnace mouth, and thus, the aperture ratio of the vicinity of the furnace mouth part (4) of the sucking plate (22) is larger than that of other parts.
Description
Technical field
The present invention relates to heat or fire liquid crystal with glass substrate or the annealing device of formed film etc. in its surface, particularly, relate to the annealing device of the type that is called the heated air circulation type stove.
Background technology
Had by known annealing device: stove always, open and close fire door and warm-air supply mechanism, wherein, stove portion within it is provided with thermal chamber, open and close fire door and be located at workpiece and move into the fire door portion that takes out of usefulness, warm-air supply mechanism is one distolateral to another distolateral supply hot blast parallel with fire door portion from thermal chamber.Open to disclose in 2000-104924 number the Japanese patent gazette spy and be provided with by blowing out the air quantity guiding mechanism that plate and intake panel are formed, and formation has the situation in the attraction hole of different diameter dimensions on plate and the intake panel blowing out.
In such annealing device, because the heat radiation of automatic shutter fire door one side of fire door portion is a lot, so part is compared the such problem of temperature step-down with other parts that the workpiece in the stove is handled the space near existing the switching fire door.For head it off, be necessary to strengthen whole stove, or near fire door portion, set up measures such as auxiliary heater, be accompanied by the maximization of annealing device or the drawbacks such as expensiveization of firing equipment.Even above-mentioned Japanese patent gazette spy opens the annealing device in 2000-104924 number, the formation of its air quantity guiding mechanism is not considered near the characteristic the fire door portion yet, exists same problem.
In addition, this annealing device is used for liquid crystal sometimes with operations such as firing of glass substrate, and in this occasion, the sublimate that prevents from stove to be taken place flows out to and causes outside the stove to pollute and become problem.
Summary of the invention
The object of the present invention is to provide a kind of maximization of annealing device or drawbacks such as expensiveization of firing equipment of not being accompanied by, eliminate near the annealing device of the problem of the temperature reduction partly of fire door portion.
According to annealing device of the present invention, have: stove, open and close fire door and warm-air supply mechanism, wherein, stove portion within it is provided with thermal chamber, open and close fire door and be located at workpiece and move into the fire door portion that takes out of usefulness, warm-air supply mechanism is one distolateral to another distolateral supply hot blast parallel with fire door portion from thermal chamber, and it is characterized in that: the amount that also has hot blast is adjusted to the air quantity guiding mechanism that increases near fire door portion.
This annealing device is as cleaning stove user best, being adjusted to negative pressure in the stove usually.Open and close fire door and for example be taken as the self-action person who freely a plurality of vertical tabular member of formation of moving up and down is arranged above and below and forms, in this occasion, in thermal chamber, be provided with the fixed object being treated that has a plurality of object being treated placement locations and place the support platform, place at this object being treated and support that place with level a plurality of tabular object being treated upper and lower settings compartment of terrain on platform.Open and close fire door and also can be taken as the hand that is installed on the furnace wall via hinge.
Warm-air supply mechanism is made up of heater, circulating fan etc., the hot blast that heat treated chamber supply level direction flows, and make by the hot blast behind the thermal chamber via heater and circulating fan circulation.
If use annealing device of the present invention, then since the amount of hot blast be adjusted near fire door portion and increase, although so the heat radiation of switching fire door one side is a lot, also can alleviate the influence that near the temperature of fire door portion reduces, can fully guarantee the effective heating volume in the stove.In addition, because the hot blast that causes deflection to open and close fire door one side flows, so can obtain the effect same with gas curtain, the result can reduce and follows being involved in of the ambient atmos that opens and closes door opening and closing, can alleviate the influence that near the temperature the fire door portion reduces.And, because can also prevent to follow the outflow of furnace atmosphere outside stove that opens and closes door opening and closing, so can also prevent the outflow of sublimate outside stove that in stove, take place.
The air quantity guiding mechanism has and is located at thermal chamber one distolateral blowing out plate and be located at another distolateral intake panel of thermal chamber, near the opening ratio of fire door portion that preferably blows out plate is 80～100%, except near the opening ratio of the part the fire door portion is 20～60%, near the fire door portion of intake panel opening ratio is 80～100%, except near the opening ratio of the part the fire door portion is 6～18%.Blowing out on plate and the intake panel, be provided with a plurality of hot blasts by using through hole, the opening ratio that blows out plate is taken as (the area summation that is located at the through hole that blows out on the plate)/(blowing out the surface area of plate) * 100, and the opening ratio of intake panel is taken as (the area summation that is located at the through hole on the intake panel)/(surface area of intake panel) * 100.If blow out near the opening ratio of the fire door portion of plate less than 80%, then can not fully obtain above-mentioned each effect.If blow out plate except near the opening ratio of the part the fire door portion less than 20%, then hot blast is fully supplied with the heat treated chamber.In addition, if blow out plate except near the opening ratio of the part the fire door portion greater than 60%, then can not fully obtain above-mentioned each effect.In addition, if near the opening ratio the fire door portion of intake panel then can not fully obtain above-mentioned each effect less than 80%.If intake panel except near the opening ratio of the part the fire door portion less than 6%, the then mobile deterioration of the hot blast in the thermal chamber.If intake panel except near the opening ratio of the part the fire door portion greater than 18%, then can not fully obtain above-mentioned each effect.
Be provided with through hole blowing out on plate and the intake panel with the size of regulation and the spacing of regulation.The size of spacing and each through hole can be certain, can not be certain also.Though be meant near the so-called fire door portion the deep from the inner surface of the furnace wall at fire door portion place to thermal chamber distance (depth) about 1/8, this distance is not limited thereto, can be in about 1/10～1/6 suitably changes of depth.Near the opening ratio of so-called fire door portion is 100%, means on this position, does not exist to blow out plate and intake panel.
The more specific formation of air quantity guiding mechanism, for example between the furnace wall inner surface that blows out plate and fire door side, be provided with predetermined gap, near the opening ratio of fire door portion that blows out plate whereby becomes 100%, be provided with predetermined gap between the furnace wall inner surface of intake panel and fire door side, near the opening ratio the fire door portion of intake panel becomes 100% whereby.
In annealing device of the present invention, and then, in the stove inboard that opens and closes fire door, be provided with the wind-tunnel that hot blast is moved along the stove inner surface that opens and closes fire door.Wind-tunnel can obtain by for example the square hollow of section being connected in the stove inner surface that opens and closes fire door.So, the gas curtain effect increases, and above-mentioned each effect further improves.
Description of drawings
Fig. 1 is the horizontal sectional view of annealing device of the present invention.
Fig. 2 is the vertical sectional drawing of annealing device of the present invention.
The specific embodiment
Below, with reference to accompanying drawing, the embodiment that the present invention is applied to employed cleaning stove in the colour filter ablating work procedure describes.In the following description, about calling about Fig. 1, before the left side of following and Fig. 2 of Fig. 1 called, Fig. 1 go up and after the right side of Fig. 2 calls, about the calling up and down of Fig. 2.
Annealing device has: stove 1, warm-air supply mechanism 2, object being treated is placed and is supported platform 3, automatic shutter fire door 5 and air quantity guiding mechanism 19, wherein, stove 1 is configured in and is provided with thermal chamber R on the basic B and in inside, warm-air supply mechanism 2 is configured in the right-hand of stove 1 and supplies with hot blast in stove 1, object being treated is placed and is supported that platform 3 has a plurality of object being treated placement locations in thermal chamber R, tabular object being treated P upper and lower settings compartment of terrain is placed with level on this object being treated placement location, automatic shutter fire door 5 is located at the fire door portion 4 on the antetheca 1a that is formed at stove 1, be communicated with outside thermal chamber R and the stove 1, air quantity guiding mechanism 19 is adjusted to the amount of hot blast near fire door portion 4 and increases.
Warm-air supply mechanism 2 comprises: heater 15, guide wall 16, circulating fan 17 and filter 18, wherein, heater 15 is located at right wall 1b rear portion and heat cycles air, guide wall 16 be located between right wall 1b and the thermal chamber R and from the rear boot cycle air forwards, circulating fan 17 be located at right wall 1b anterior and in the past the direction left send circulating air, filter 18 is located between thermal chamber R and the guide wall 16 and from the circulating air of inflow thermal chamber R and removes solid foreign materials.
Thermal chamber R top is by level board 20, right-handly blows out plate 21 by vertical shape, and left is by vertical shape intake panel 22, and the rear is surrounded by vertical shape rear closure plate 23.Be provided with a plurality of hot blasts by with through hole 21a, 22a with blowing out the opening ratio that becomes regulation on plate 21 and the intake panel 22.In thermal chamber R, hot blast flows from the right left, turns back to interior right-hand of stove 1 between the left wall 1c that these hot blasts flow through stove 1 and the intake panel 22 and between the rear wall 1d of rear closure plate 23 and stove 1, and promptly hot blast feed mechanism 2 is provided with the position.Whereby, the below of the level board 20 in the thermal chamber R becomes the temperature of regulation, and the object being treated P in the stove 1 is heated.
The width of the left and right directions of fire door portion 4 is wideer than the width of object being treated P, and the upper limb of fire door portion 4 is positioned at the top of supporting the uppermost object being treated P that placed on the platform 3, and the lower edge of fire door portion 4 is positioned at the below of supporting the nethermost object being treated P that placed on the platform 3.
Opening and closing fire door 5 is arranged above and below freely a plurality of vertical tabular member of formation 5a of moving up and down respectively and forms.Moreover, fire door portion 4 full cut-offs when each member of formation 5a is in the home position of the lower position that can occupy as each member of formation 5a.Member of formation 5a is configured to directly not be contacted with stove 1 respectively.Between fire door portion 4 edges and member of formation 5a, disposing for example short square tube shape seal 14 of polytetrafluoroethylene (PTFE) system.And then, between seal 14 and member of formation 5a, reserve at interval.
And member of formation 5a moves up and down as described below and is being provided with freely.The square ways 6 of section that extends is up and down being fixed in left side in the fire door portion 4 of the antetheca 1a of stove 1 outer surface.On the other hand, place, the rear surface of member of formation 5a with ways 6 corresponding positions on, fixing roughly female member 7 of section rear fire door portion, 7 pairs of ways 6 of this female member slide up and down freely and are cooperating.In addition, the right side in the fire door portion 4 of the antetheca 1a of stove 1 outer surface is being fixed via the installation component 9 of section L font and to be extended up and down and to the section channel member 10 of left opening.On the other hand, the roller 8 of the horizontal rotational shaft of extending around left and right directions is installed on the right border of member of formation 5a, these roller 8 rotations are matched with the groove of channel member 10 freely.
Fixing respectively at the front surface upper left quarter of each member of formation 5a becomes the forwards outstanding tabular cylinder installation component 13 of level.In addition, on basic B, fixing the cylinder installation component 11 of the horizontal plate portion that projects upwards from basic upper surface.And, except the upper surface of each installation component 13 of uppermost member of formation 5a be fixed on the upper surface of horizontal component of installation component 11 of basic B, piston rod is being fixed cylinder 12 up, and the lower surface of the installation component 13 that is positioned at each cylinder 12 top is fixed in the upper end of this piston rod.And, the rising of the piston rod by a cylinder 12, be fixed in via installation component 13 this cylinder 12 piston rod member of formation 5a and be positioned at member of formation 5a above this member of formation 5a, and the top cylinder 12 that is positioned at the cylinder 12 that piston rod rises integrally moves.
Air quantity guiding mechanism 19 has above-mentioned plate 21 and the intake panel 22 of blowing out round thermal chamber R, in the present embodiment, is provided with predetermined gap S between the antetheca 1a of front end that blows out plate 21 and intake panel 22 and stove 1 inner surface.Whereby, near the opening ratio that blows out the fire door portion of plate 21 and intake panel 22 becomes 100%.About near the opening ratio beyond the fire door portion that blows out plate 21 and intake panel 22, blow out plate 21 and be taken as approximately 40%, intake panel 22 is taken as about 12%.The distance that the gap S of afore mentioned rules promptly blows out the antetheca 1a inner surface of the front end of plate 21 and intake panel 22 and stove 1 be taken as rear closure plate 23 and the antetheca 1a inner surface of stove 1 distance (depth of thermal chamber R) about 1/8.Moreover above-mentioned for example each numerical value of expression is that the amount with hot blast is adjusted near fire door portion and increases usefulness, and all changes are possible in the scope that realizes its purpose.
In the inboard of each the member of formation 5a that opens and closes fire door 5, connecting the square hollow 5b of section lengthwise of the height that highly equals member of formation 5a, it is wind-tunnel 24 that this hollow 5b inside becomes the hot blast path.Hot blast is advanced along opening and closing fire door 5 inner surface horizontal directions by means of this wind-tunnel 24.
If use above-mentioned annealing device, then the hot blast by 2 circulations of warm-air supply mechanism supplies in the thermal chamber R by filter 18.From blowing out plate 21 to intake panel 22, advance by the direction shown in the promptly thin arrow S1 in thermal chamber R for the hot blast that has purified.At this moment, be taken as 100% because blow out near the opening ratio of fire door portion of plate 21 and intake panel 22, so hot blast also flows from the right left between front end that blows out plate 21 and intake panel 22 and switching fire door 5, become the hot blast that the volume shown in the thick arrow S2 is arranged and flow near fire door portion 4.Hot blast also flows through along the formed wind-tunnel 24 of inner surface that opens and closes fire door 5 along the direction shown in the thin arrow S 3.So, the amount of hot blast is adjusted near fire door portion 4 and increases, although the heat radiation of switching fire door 5 one sides is a lot, also can alleviate the influence that near fire door portion 4 temperature reduce, and fully guarantees the effective heating volume in the stove 1.In addition, can obtain the effect same, open and close being involved in of ambient atmos that fire door 5 opens and closes, also can alleviate the influence that near the temperature the fire door portion 4 reduce by preventing to follow with gas curtain by means of hot blast S3 in the hot blast S2 of volume and the wind-tunnel.And, open and close flowing out of furnace atmosphere that fire door 5 opens and closes because can also prevent to follow to the outside, flow out outside stove so can also prevent the sublimate that in stove, takes place.
In fact, if resulting glass substrate Temperature Distribution in annealing device of the present invention and resulting comparing in existing apparatus, then in conventional device, temperature that door opening and closing causes reduces maximum and is about 3.5 ℃, and the inequality of the glass substrate temperature when " fire door is closed " and temperature stabilization is about 6.8 ℃.In contrast, in annealing device of the present invention, temperature that door opening and closing causes reduces maximum and is about 2.4 ℃, and the inequality of the temperature of the glass substrate when " fire door is closed " and temperature stabilization is about 3 ℃, can confirm to obtain great effect with simple formation.
Moreover, though in the above-described embodiment, open and close fire door 5 be taken as freely a plurality of vertical tabular member of formation 5a of moving up and down is arranged above and below and form and each member of formation 5a by the self-action person of cylinder about in the of 12, but the formation that opens and closes fire door is not limited thereto, preventing that the heat radiation with fire door portion from much causing temperature to be reduced to the occasion of problem, no matter self-action or hand, the present invention is applicable to the annealing device that uses various types of fire doors.
Claims (4)
1. annealing device, have: stove, open and close fire door and warm-air supply mechanism, wherein, stove portion within it is provided with thermal chamber, the switching fire door is located at workpiece and moves into the fire door portion that takes out of usefulness, warm-air supply mechanism is one distolateral to another distolateral supply hot blast parallel with fire door portion from thermal chamber, it is characterized in that: the amount that also has hot blast is adjusted to the air quantity guiding mechanism that increases near fire door portion, this air quantity guiding mechanism has and is located at thermal chamber one distolateral blowing out plate and be located at another distolateral intake panel of thermal chamber, be provided with a plurality of hot blasts on plate and the intake panel by using through hole blowing out
When the opening ratio that blows out plate is, be arranged on the area summation of the through hole that blows out on the plate/blow out surface area * 100% of plate, the opening ratio of intake panel is, is arranged on surface area * 100% o'clock of the area summation/intake panel of the through hole on the intake panel,
Near the opening ratio that blows out the fire door portion of plate is 80～100%, except near the opening ratio of the part the fire door portion is 20～60%.
2. the annealing device of claim 1, wherein near the opening ratio the fire door portion of intake panel is 80～100%, except near the opening ratio of the part the fire door portion is 6～18%.
3. the annealing device of claim 2, wherein between the furnace wall inner surface that blows out plate and fire door side, be provided with predetermined gap, near the opening ratio of fire door portion that blows out plate whereby is 100%, be provided with predetermined gap between the furnace wall inner surface of intake panel and fire door side, near the opening ratio the fire door portion of intake panel is 100% whereby.
4. the annealing device of claim 1 to 3 wherein in the stove inboard that opens and closes fire door, is provided with the wind-tunnel that hot blast is moved along the stove inner surface that opens and closes fire door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031051499A CN100439845C (en) | 2003-03-04 | 2003-03-04 | Thermal treatment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031051499A CN100439845C (en) | 2003-03-04 | 2003-03-04 | Thermal treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1527015A CN1527015A (en) | 2004-09-08 |
| CN100439845C true CN100439845C (en) | 2008-12-03 |
Family
ID=34282532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031051499A Expired - Lifetime CN100439845C (en) | 2003-03-04 | 2003-03-04 | Thermal treatment apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100439845C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012078048A (en) * | 2010-10-05 | 2012-04-19 | Koyo Thermo System Kk | Heat treatment device |
| JP2012084805A (en) * | 2010-10-14 | 2012-04-26 | Koyo Thermo System Kk | Heat treatment equipment |
| MX2012013290A (en) * | 2012-02-08 | 2013-10-08 | Shoei Mfg Co Ltd | Heat treatment furnace. |
| JP7261573B2 (en) | 2018-12-13 | 2023-04-20 | 株式会社ジェイテクトサーモシステム | Heat treatment equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428711U (en) * | 1987-08-14 | 1989-02-20 | ||
| JPH1163838A (en) * | 1997-08-19 | 1999-03-05 | Tabai Espec Corp | Hybrid heat treatment apparatus |
| JPH11125490A (en) * | 1997-10-21 | 1999-05-11 | Tabai Espec Corp | Heat treatment system |
| JP2000104924A (en) * | 1998-07-29 | 2000-04-11 | Kyudensha:Kk | Convection oven |
| JP2001012870A (en) * | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | Batch type oven |
| JP2002195762A (en) * | 2000-12-20 | 2002-07-10 | Koyo Thermo System Kk | Heat treatment apparatus |
-
2003
- 2003-03-04 CN CNB031051499A patent/CN100439845C/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428711U (en) * | 1987-08-14 | 1989-02-20 | ||
| JPH1163838A (en) * | 1997-08-19 | 1999-03-05 | Tabai Espec Corp | Hybrid heat treatment apparatus |
| JPH11125490A (en) * | 1997-10-21 | 1999-05-11 | Tabai Espec Corp | Heat treatment system |
| JP2000104924A (en) * | 1998-07-29 | 2000-04-11 | Kyudensha:Kk | Convection oven |
| JP2001012870A (en) * | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | Batch type oven |
| JP2002195762A (en) * | 2000-12-20 | 2002-07-10 | Koyo Thermo System Kk | Heat treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1527015A (en) | 2004-09-08 |
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Granted publication date: 20081203 |
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| CX01 | Expiry of patent term |