KR101019132B1 - Heat treatment apparatus - Google Patents

Abstract

The present invention is, for example, a heat treatment apparatus used in the technical field for calcining color filters. It aims to provide a solution to the problem.

The amount of hot air adjusting means 19 for adjusting the amount of hot air to increase near the furnace inlet is provided. The air volume adjusting means 19 includes a jet plate 21 provided on one end side of the heat treatment chamber R and a suction plate 22 provided on the other end side. Since a predetermined gap S is provided between the jet plate 21 and the inner surface of the furnace wall 1a on the furnace inlet side, the opening ratio near the furnace inlet part 4 of the jet plate 21 is larger than the other parts. And a predetermined gap S is provided between the suction plate 22 and the inner surface of the furnace wall 1a on the furnace inlet side, so that the opening ratio near the furnace inlet portion 4 of the suction plate 22 is different. Becomes larger.

Description

Heat treatment device {HEAT TREATMENT APPARATUS}

1 is a horizontal cross-sectional view of a heat treatment apparatus according to the present invention.

2 is a vertical sectional view of a heat treatment apparatus according to the present invention.

<Explanation of symbols for main parts of drawing>

1: no

2: hot air supply means

4: furnace entrance

5: opening and closing shutter

5b: wind tunnel

19: air volume adjusting means

21: squirting board

22: suction plate

24: wind tunnel

P: Object to be processed

R: heat treatment chamber

S: gap

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus for heating or baking a liquid crystal glass substrate, a film formed on the surface thereof, and more particularly, to a heat treatment apparatus of a type called a hot air circulation oven.

A furnace having a heat treatment chamber provided therein, an opening / closing shutter provided at a furnace entrance portion for carrying in and out of work, and hot air supply means for supplying hot air parallel to the furnace inlet portion facing from one end side of the heat treatment chamber to the other end side; The heat treatment apparatus is known conventionally. Patent Document 1 discloses providing a flow rate adjusting means consisting of a jet plate and a suction plate, and simultaneously forming suction holes having different diameter dimensions in the jet plate and the suction plate.

[Patent Document 1]

Japanese Patent Laid-Open No. 2000-104924

In this type of heat treatment apparatus, since a large amount of heat dissipation occurs at the automatic opening and closing shutter side of the furnace inlet, there is a problem that the temperature near the opening and closing shutter is lower than that of other parts of the workpiece processing space in the furnace. In order to solve this problem, a means such as increasing the whole furnace or adding an auxiliary heater near the furnace inlet portion is required, and the disadvantages include the increase in the size of the heat treatment apparatus and the high cost of the heating equipment. Also in the said patent document 1, the structure of the air volume adjustment means did not consider the characteristic of the furnace entrance part vicinity, and there existed a similar problem.

Moreover, this heat treatment apparatus may be used in processes, such as baking of a liquid crystal glass substrate, and in this case, it is a problem to prevent the contamination by the sublimation which generate | occur | produced in the furnace out of a furnace.

SUMMARY OF THE INVENTION An object of the present invention is to provide a heat treatment apparatus that solves the problem of temperature drop in the vicinity of a furnace inlet without involving disadvantages such as an increase in the size of the heat treatment apparatus and a high cost of the heating equipment.

The heat treatment apparatus according to the present invention provides a hot air supply for supplying hot air parallel to a furnace in which a heat treatment chamber is provided, an opening / closing shutter provided at a furnace inlet for carrying in and out of a workpiece, and a furnace inlet portion facing from one end of the heat treatment chamber to the other end side. A heat treatment apparatus provided with means, characterized by further comprising air volume adjusting means for adjusting the amount of hot air in the vicinity of the furnace inlet.

This heat treatment apparatus is suitably used as a clean oven, and the furnace is usually adjusted to negative pressure. The opening / closing shutter is, for example, an automatic type formed by arranging a plurality of vertical plate-shaped members moving freely up and down freely. In this case, in the heat treatment chamber, a plurality of plate-like objects are horizontally spaced up and down. A fixed workpiece loading support having a plurality of workpiece loading positions to be stacked is provided. The opening and closing shutter may be a manual type attached to the furnace wall by a hinge.

The hot wind supply means is composed of a heating heater, a circulation fan, and the like, and supplies hot air flowing in the horizontal direction to the heat treatment chamber, and circulates the hot air after passing through the heat treatment chamber through the heating heater and the circulation fan.

According to the heat treatment apparatus of the present invention, since the amount of hot air is adjusted so as to increase in the vicinity of the furnace inlet, it is possible to reduce the influence of the temperature drop near the furnace inlet, even though a large amount of heat dissipation occurs in the opening and closing shutter side. The effective heating volume in the furnace can be largely secured. In addition, since the hot air flow is biased toward the opening and closing shutter side, an effect similar to that of the air curtain can be obtained, and as a result, the pollution of the outside air due to the opening and closing of the opening and closing shutter can be reduced, thereby reducing the influence of the temperature drop near the furnace entrance. You can. In addition, since the atmosphere inside the furnace can be prevented from leaking out by the opening and closing of the opening / closing shutter, the sublimation generated in the furnace can be prevented from leaking out of the furnace.

The air flow rate adjusting means includes a jet plate provided on one end side of the heat treatment chamber and a suction plate provided on the other end side, and the opening ratio of the jet plate near the furnace inlet is 80 to 100%, except for the vicinity of the furnace inlet. It is preferable that the opening ratio of is 20 to 60%, the opening ratio of the suction plate in the vicinity of the furnace inlet part is 80 to 100%, and the opening ratio of the portion excluding the vicinity of the furnace inlet part is 6 to 18%. The jet plate and the suction plate are provided with a plurality of through-holes for passage of hot air, and the opening ratio of the jet plate is (total sum of the areas of the through holes provided in the jet plate) / (surface area of the jet plate) × 100, The opening ratio is obtained by (sum of the total area of the through holes provided in the suction plate) / (surface area of the suction plate) × 100. When the opening ratio near the furnace inlet part of the jet plate is less than 80%, the above-described effects cannot be sufficiently obtained. If the opening ratio of the portion except the vicinity of the furnace inlet of the jet plate is less than 20%, hot air is not sufficiently supplied to the heat treatment chamber. Moreover, when the opening ratio of the part except the furnace entrance part vicinity of a jet plate is larger than 60%, the above-mentioned effect cannot fully be acquired. In addition, when the opening ratio near the furnace inlet part of the suction plate is smaller than 80%, the above-described effects cannot be sufficiently obtained. If the opening ratio of the portion except the vicinity of the furnace inlet portion of the suction plate is less than 6%, the flow of hot air in the heat treatment chamber is deteriorated. When the opening ratio of the portion except the vicinity of the furnace inlet portion of the suction plate is larger than 18%, the above-described effects cannot be sufficiently obtained.

The ejection plate and the suction plate are provided with through holes at a predetermined size and a predetermined pitch. The pitch and the size of each through hole may or may not be constant. The vicinity of the furnace entrance means, for example, about 1/8 of the distance (depth) from the inner surface of the furnace wall with the furnace entrance to the innermost part of the heat treatment chamber, but this distance is not limited to this, but is 1/10 to 1 of the depth. / 6 can be changed as appropriate. An opening ratio of 100% near the furnace inlet means that there is no jet plate and suction plate at this position.

In a more specific configuration of the air volume adjusting means, for example, a predetermined gap is provided between the jet plate and the furnace wall inner surface on the furnace inlet side, so that the opening ratio near the furnace inlet part of the jet plate becomes 100%. Since a predetermined gap is provided between the furnace wall inner surface on the inlet side, the opening ratio near the furnace inlet portion of the suction plate is 100%.

Moreover, in the heat processing apparatus of this invention, the wind tunnel which moves a hot air along the furnace inner surface of an opening / closing shutter may be provided in the furnace inside of an opening / closing shutter. The wind tunnel can be obtained by, for example, joining a hollow shaped material having a rectangular cross section to the furnace inner surface of the open / close shutter. By doing in this way, an air curtain effect becomes large and the above-mentioned effect can be heightened further.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment which applied this invention to the clean oven used at a color filter baking process is described with reference to drawings. In the following description, the left and right of FIG. 1 will be referred to as left and right, the lower side of FIG. 1 and the left side of FIG. 2 will be referred to as the front, the upper side of FIG. 1 and the right side of FIG. 2 as the rear, and the upper and lower sides of FIG. do.

The heat treatment apparatus includes a furnace 1 disposed on a base B and provided with a heat treatment chamber R therein, and hot air supply means disposed on the right side of the furnace 1 to supply hot air into the furnace 1 ( 2) and a workpiece loading support 3 having a plurality of workpiece loading positions in which a plurality of plate-shaped workpieces P are stacked in a horizontal state at intervals vertically and vertically in the heat treatment chamber R, and a heat treatment. The automatic opening / closing shutter 5 provided in the furnace inlet part 4 formed in the front wall 1a of the furnace 1 so that the chamber R may communicate with the outside of the furnace 1, and the amount of hot air is the furnace inlet part 4 ) Is provided with an air volume adjusting means 19 for adjusting to increase in the vicinity.

The hot air supply means 2 is installed in the rear part of the right side wall 1b and is installed in the middle of the heater 15 for heating the circulating air, and is circulated from the rear to the front in the middle of the right side wall 1b and the heat treatment chamber R. Between a guide wall 16 for guiding air, a circulation fan 17 provided at the front of the right side wall 1b, and for circulating air from the front side to the left side, between the heat treatment chamber R and the guide wall 16; It is provided with a filter 18 is installed to remove the solid foreign matter from the circulating air flowing into the heat treatment chamber (R).

The heat treatment chamber R has an upper side by a horizontal plate 20, a right side by a vertical blower plate 21, a left side by a vertical suction plate 22, and a rear side by a vertical rear closing plate 23. Surrounded by. The jet plate 21 and the suction plate 22 are provided with a plurality of through-holes 21a and 22a for passing through the hot air so as to have a predetermined opening ratio. In the heat treatment chamber R, hot air flows from right to left, and these hot air flows between the left wall 1c of the furnace 1 and the suction plate 22 and the rear wall of the rear closure plate 23 and the furnace 1 ( It flows between 1d) and returns to the right side in the furnace 1, ie, the installation point of the hot air supply means 2. As a result, the lower side is made to have a predetermined temperature than the horizontal plate 20 in the heat treatment chamber R, and the object P in the furnace 1 is heated.

The width in the horizontal direction of the furnace inlet portion 4 is wider than the width of the object P, and the upper edge of the furnace inlet portion 4 is larger than the uppermost object P loaded on the support 3. On the upper side, the lower edge part of the furnace inlet part 4 is comprised so that it may be located below the lowest to-be-processed object P mounted in the support stand 3.

The opening-closing shutter 5 is formed by arranging a plurality of vertical plate-like structural members 5a vertically moving up and down, respectively. Moreover, when each structural member 5a is in the basic position which is the lowest position which each structural member 5a can take, the furnace inlet part 4 is fully closed. The structural member 5a is arrange | positioned so that it may not directly contact the furnace 1, respectively. Between the edge part of the furnace inlet part 4 and the structural member 5a, the short cylindrical cylinder 14 made from polytetrafluoroethylene is arrange | positioned, for example. In addition, a gap is provided between the seal 14 and the structural member 5a.

And the structural member 5a is provided so that it may move freely up and down as described below. On the left side of the furnace entrance part 4 on the outer surface of the front wall 1a of the furnace 1, the guide member 6 of the rectangular cross section which extends up and down is fixed. On the other hand, at a position corresponding to the guide member 6 on the rear surface of the constituent member 5a, a member 7 having a substantially concave cross section is fixed to the rear side of the furnace inlet portion, and the concave member 7 is a guide member. It is fitted so that it can slide freely up and down with respect to (6). Moreover, the groove | channel-shaped cross-section member 10 extended up and down and opened to the right side of the furnace entrance part 4 from the outer surface of the front wall 1a of the furnace 1 is the attachment member 9 of an L-shaped cross section. It is fixed through. On the other hand, a roller 8 that rotates about a horizontal axis extending in the left and right direction is attached to the right edge of the constituent member 5a, and the roller 8 is freely inserted into the groove of the groove-shaped member 10. Put in.

The horizontal cylinder-shaped air cylinder attachment member 13 protruding forward is fixed to the front left upper part of each structural member 5a, respectively. Moreover, the air cylinder attachment member 11 which has the horizontal plate-shaped part which protruded above the upper surface of the said air cylinder attachment member 13 is being fixed to the base B. As shown in FIG. And the air cylinder 12 is fixed to the upper surface of each attachment member 13 except the uppermost structural member 5a, and the upper surface of the horizontal portion of the attachment member 11 fixed to the base B. The rod of the cylinder extends upward, and the upper end of the rod is fixed to the lower surface of the attachment member 13 located above each air cylinder 12. And the rod of one air cylinder 12 raises | strengths and the structure located above the structural member 5a fixed to the rod of this air cylinder 12 via the attachment member 13, and this structural member 5a. The member 5a and the air cylinder 12 located above the air cylinder 12 with the rod raised are made to move integrally.

The air volume adjusting means 19 includes the jet plate 21 and the suction plate 22 surrounding the heat treatment chamber R. In this embodiment, the front end of the jet plate 21 and the suction plate 22 A predetermined gap S is provided between the inner surface of the front wall 1a of the furnace 1. As a result, the opening ratio in the vicinity of the furnace inlet portion of the jet plate 21 and the suction plate 22 is 100%. About the opening ratio of the jet plate 21 and the suction plate 22 other than the furnace entrance part, the jet plate 21 is about 40%, and the suction plate 22 is about 12%. The predetermined gap S, i.e., the distance between the front end of the blower plate 21 and the suction plate 22 and the inner surface of the front wall 1a of the furnace 1 is equal to that of the rear closure plate 23 and the furnace 1; It is about 1/8 of the distance (depth of the heat processing chamber R) with the inner surface of the front wall 1a. In addition, each numerical value illustrated above is for adjusting so that the quantity of hot air may increase in the vicinity of a furnace entrance part, It can change in various ways in the range which achieves the objective.

Inside the respective constituent members 5a of the open / close shutter 5, a hollow shaped member 5b having a vertically long rectangular cross section whose height is equal to that of the constituent member 5a is joined, and this hollow shaped member 5b The inside is a hot air passage, that is, a wind tunnel 24. By this wind tunnel 24, hot air advances in a horizontal direction along the inner surface of the opening-closing shutter 5.

According to the heat treatment apparatus, the hot air circulated by the hot air supply means 2 is supplied into the heat treatment chamber R through the filter 18. The cleaned hot air travels in the heat treatment chamber R from the jet plate 21 toward the suction plate 22, that is, in the direction indicated by the thin arrow S1. At this time, since the opening ratio in the vicinity of the furnace inlet part of the blower plate 21 and the suction plate 22 is 100%, the front end of the blower plate 21 and the suction plate 22 and the opening-closing shutter 5 are Also, hot air flows from the right side to the left side, and a large amount of hot air indicated by the thick arrow S2 flows in the vicinity of the furnace inlet part 4. The hot air also flows through the wind tunnel 24 formed along the inner surface of the open / close shutter 5 in the direction indicated by the thin arrow S3. In this way, the amount of hot air is adjusted to increase in the vicinity of the furnace inlet part 4, and although a large amount of heat dissipation occurs in the opening / closing shutter 5 side, it is possible to reduce the influence of the temperature drop in the vicinity of the furnace inlet part 4. The effective heating volume in the furnace 1 can be largely secured. In addition, by the large amount of hot air (S2) and the hot air (S3) in the wind tunnel 24, the same effect as the air curtain can be obtained, and the contamination of the outside air due to the opening and closing of the opening and closing shutter 5 is prevented as the furnace inlet ( 4) The influence of temperature drop in the vicinity can be reduced. In addition, since the outflow of the furnace atmosphere due to the opening and closing of the open / close shutter 5 can be prevented, it is also possible to prevent the sublimation generated in the furnace from leaking out of the furnace.

In fact, when comparing the glass substrate temperature distribution obtained by the heat treatment apparatus of the present invention with that obtained by the conventional apparatus, the temperature drop caused by opening and closing the shutter is at most about 3.5 deg. C in the conventional apparatus, and at the time of temperature stability by "shutter closing" The fluctuation | variation of the glass substrate temperature of was about 6.8 degreeC. On the other hand, in the heat treatment apparatus of this invention, the temperature fall according to shutter opening and closing is at most about 2.4 degreeC, and the fluctuation | variation of the glass substrate temperature at the time of temperature stability by "shutter closing" is about 3 degreeC, and the simple structure has very big effect What was obtained was confirmed.

Moreover, in the said embodiment, the opening-closing shutter 5 is formed by arranging the several vertical plate-shaped structural members 5a which move freely up and down freely, and each structural member 5a is formed by the air cylinder 12. As shown in FIG. Although it is an automatic type which moves up and down, the structure of an opening-closing shutter is not limited to this, The present invention is an automatic or manual type when it becomes a problem to prevent the temperature fall resulting from many heat radiation generate | occur | producing in a furnace entrance part. Regardless, the present invention can be applied to a heat treatment apparatus using various types of shutters.

When the heat treatment apparatus according to the present invention is used, the amount of hot air is adjusted so as to increase in the vicinity of the furnace inlet, without the disadvantages such as the increase in the size of the heat treatment apparatus and the high cost of the heating equipment. Since the influence of the degradation can be reduced, and the hot air flow biased toward the opening / closing shutter side can be produced, the same effect as the air curtain can be obtained, and as a result, the pollution of the outside air due to the opening / closing of the opening / closing shutter can be reduced. The influence of the temperature fall of the vicinity can be reduced. It is also possible to prevent the sublimation generated in the furnace from leaking out of the furnace.

Claims (5)

A furnace provided with a heat treatment chamber having a workpiece loading support having a plurality of workpiece loading positions on which a plurality of plate-like workpieces are stacked in a horizontal state; An opening / closing shutter installed at a furnace entrance for carrying in and out of a workpiece, Hot air supply means for supplying hot air parallel to the furnace inlet portion from one end side of the heat treatment chamber to the other end side and circulating the hot air after passing through the heat treatment chamber. A heat treatment apparatus comprising a, further comprising air volume adjusting means for adjusting the amount of hot air to increase in the vicinity of the furnace inlet, The air volume adjusting means includes a jet plate provided at one end side of the heat treatment chamber and a suction plate provided at the other end side, the opening ratio of which is near the furnace inlet part of the jet plate is 80 to 100% and the furnace inlet part of the jet plate is near. Heat treatment apparatus characterized in that the opening ratio of the portion excluding 20% to 20%. The heat treatment apparatus according to claim 1, wherein the opening ratio of the suction plate in the vicinity of the furnace inlet is 80 to 100%, and the opening ratio of the portion of the suction plate except for the vicinity of the furnace inlet is 6 to 18%. 3. A predetermined gap is provided between the jet plate and the furnace wall inner surface at the furnace inlet side, so that an opening ratio near the furnace inlet portion of the jet plate is 100%, and the suction plate and the furnace at the furnace inlet side are formed. The heat treatment apparatus in which the opening ratio near the furnace entrance part of a suction plate becomes 100% by providing a predetermined clearance gap with the wall inner surface. The heat treatment apparatus according to any one of claims 1 to 3, wherein a wind tunnel for moving hot air along the inner surface of the open / close shutter is provided inside the open / close shutter. delete

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