JP7259776B2 - Drying equipment and drying method - Google Patents

Drying equipment and drying method Download PDF

Info

Publication number
JP7259776B2
JP7259776B2 JP2020014813A JP2020014813A JP7259776B2 JP 7259776 B2 JP7259776 B2 JP 7259776B2 JP 2020014813 A JP2020014813 A JP 2020014813A JP 2020014813 A JP2020014813 A JP 2020014813A JP 7259776 B2 JP7259776 B2 JP 7259776B2
Authority
JP
Japan
Prior art keywords
drying
hot air
drying chamber
work
setter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020014813A
Other languages
Japanese (ja)
Other versions
JP2021121770A (en
Inventor
康浩 小野
圭 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2020014813A priority Critical patent/JP7259776B2/en
Publication of JP2021121770A publication Critical patent/JP2021121770A/en
Application granted granted Critical
Publication of JP7259776B2 publication Critical patent/JP7259776B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Landscapes

  • Drying Of Solid Materials (AREA)

Description

本発明は、所定部位にスラリー膜が塗布されたワークをセッターに支持して熱風により乾燥させる乾燥装置および乾燥方法に関する。 TECHNICAL FIELD The present invention relates to a drying apparatus and a drying method for supporting a workpiece coated with a slurry film on a predetermined portion by a setter and drying the workpiece with hot air.

この種のワークとして、内燃機関の燃焼制御等に用いられるガスセンサ素子が知られている。ガスセンサ素子は、内部に基準ガス室を有する筒形の固体電解質体と、固体解質体の内側表面および外側表面に形成された内側電極および外側電極と、外側電極を被覆する多孔質層とからなっている。 A known example of this type of work is a gas sensor element used for combustion control of an internal combustion engine. The gas sensor element comprises a cylindrical solid electrolyte body having a reference gas chamber therein, inner and outer electrodes formed on the inner and outer surfaces of the solid electrolyte body, and a porous layer covering the outer electrode. It's becoming

ガスセンサ素子を製造する際には、固体電解質体をディップ槽内のスラリーに浸漬し、ガスセンサ素子の所定部位にスラリーを塗布し、その直後にガスセンサ素子を乾燥装置に搬入し、乾燥炉内で熱風によりスラリー膜を乾燥させたのち、焼成して多孔質層を形成する。 When manufacturing the gas sensor element, the solid electrolyte body is immersed in the slurry in the dip bath, the slurry is applied to a predetermined portion of the gas sensor element, and immediately after that, the gas sensor element is carried into a drying device, and heated in a drying furnace. After the slurry film is dried, it is fired to form a porous layer.

従来の乾燥装置として、特許文献1には、塗布液が充填されたタンクの上方に乾燥炉を配置し、1つの試料を塗布液に浸漬した直後に乾燥炉内に引き上げて乾燥する装置が記載されている。特許文献2には、やはり1つのガスセンサ素子を縦にして保持部に収容し、複数の保持部をコンベアで乾燥炉内に搬入する装置が記載されている。 As a conventional drying device, Patent Document 1 describes a device in which a drying furnace is arranged above a tank filled with a coating liquid, and one sample is pulled up into the drying furnace immediately after being immersed in the coating liquid and dried. It is Patent Literature 2 also describes an apparatus in which one gas sensor element is vertically accommodated in a holding portion, and a plurality of holding portions are carried into a drying furnace by a conveyor.

また、処理効率を高めるために、複数のガスセンサ素子を陶磁器製のセッターに支持し、セッターをパレットの上に載せ、複数のパレットをコンベアで乾燥炉内に順次搬入し、乾燥炉を通過中のパレットに熱風を当て、パレットに支持された複数のガスセンサ素子を一斉に乾燥させる通過式の乾燥装置も知られている。 In addition, in order to improve processing efficiency, a plurality of gas sensor elements are supported by a setter made of ceramics, the setter is placed on a pallet, and the plurality of pallets are successively conveyed into the drying furnace by a conveyor. There is also known a pass-through drying apparatus that blows hot air onto a pallet to simultaneously dry a plurality of gas sensor elements supported by the pallet.

特開2006-116427号公報JP 2006-116427 A 特開2018-54547号公報JP 2018-54547 A

ところが、従来の通過式の乾燥装置は、多数のガスセンサ素子を効率よく処理できる反面、入口および出口が開いた乾燥炉を通過中のワークに熱風を当てるため、ワークへの伝熱効率が悪く、高温の熱源を必要とする。このため、乾燥炉から出た熱風が設備内に籠り、乾燥装置周辺の環境に悪影響を及ぼす問題があるうえ、装置全体が大型化するという問題点があった。 However, while the conventional pass-through dryer can efficiently process a large number of gas sensor elements, it blows hot air onto the workpieces passing through the drying furnace with open inlets and outlets. of heat source. As a result, the hot air emitted from the drying furnace is trapped inside the equipment, adversely affecting the environment around the drying apparatus, and the overall size of the apparatus is increased.

そこで、1バッチ分のワークをセッターに支持して乾燥炉に入れ、乾燥炉の扉を閉じて熱風を当て、乾燥後に扉を開いてワークを取り出すバッチ式の乾燥方法が考えられる。バッチ式によれば、通過式と比較し、炉内温度を一定に管理しやすく、塗布後のスラリー膜を均一に乾燥させる用途に好適であるうえ、ワークの多数個取りのニーズにも対応しやすく、スタンドアローン設備にも自動化設備にも適用が容易である。 Therefore, a batch drying method is conceivable, in which one batch of works is supported by a setter and placed in a drying furnace, the door of the drying furnace is closed and hot air is applied, and after drying, the door is opened and the works are taken out. Compared to the passing type, the batch type makes it easier to keep the furnace temperature constant, making it suitable for uniform drying of the slurry film after application. It is easy to use and can be easily applied to both stand-alone and automated equipment.

しかし、複数のワークをセッターと一緒に乾燥炉内に搬入するので、乾燥炉の容積が大きくなる。このため、扉を開いたときに大量の熱風が炉外に逃げ出し、炉内温度が早期に低下し、再び所要温度まで昇温させるために、多くの時間を要し、処理効率が悪いという問題がある。そのうえ、乾燥炉内で加熱される部材にワークのみならずセッターも含まれるため、1バッチ分の熱マス量が大きくなり、タクトタイムが延びるという問題点がある。 However, since a plurality of works are carried into the drying furnace together with the setter, the volume of the drying furnace becomes large. As a result, when the door is opened, a large amount of hot air escapes to the outside of the furnace, causing the temperature inside the furnace to drop quickly. There is Moreover, since the members to be heated in the drying furnace include not only the workpiece but also the setter, there is a problem that the amount of heat mass for one batch increases and the tact time is extended.

本発明は上記問題点に鑑みてなされたものであり、その目的は、セッター上に支持された複数のワークを乾燥炉内で熱風により効率よく乾燥する乾燥装置および乾燥方法を提供することにある。 The present invention has been made in view of the above problems, and its object is to provide a drying apparatus and a drying method for efficiently drying a plurality of works supported on a setter in a drying furnace with hot air. .

上記課題を解決するために、本発明の乾燥装置(10)は、所定部位にスラリー膜(3)が塗布された複数のワーク(1)を支持するセッター(4)と、ワーク出入口(28)および乾燥室(25)が形成された乾燥炉(11)と、ワーク出入口を開閉可能に覆う扉部材(23)と、扉部材がワーク出入口を閉じているときに、乾燥室内に熱風を送風する送風機構(13)と、を備える。そして、セッターは扉部材に取り付けられ、扉部材は、ワーク出入口を閉じたときに、セッターを乾燥室外に位置させた状態で、ワークの所定部位を乾燥室内に配置するように構成されている。乾燥炉は、扉部材がワーク出入口を開いたときに、扉部材に代わってワーク出入口を閉じるシャッタ(30)を備えている。 In order to solve the above problems, the drying apparatus (10) of the present invention includes a setter (4) for supporting a plurality of works (1) coated with a slurry film (3) at predetermined portions, and a work entrance (28). and a drying furnace (11) formed with a drying chamber (25), a door member (23) for opening and closing the entrance and exit of the workpiece, and blowing hot air into the drying chamber when the door member closes the entrance and exit of the workpiece. and a blower mechanism (13). The setter is attached to a door member, and the door member is configured to place a predetermined portion of the work inside the drying chamber while the setter is positioned outside the drying chamber when the entrance of the work is closed. The drying furnace is provided with a shutter (30) for closing the work entrance instead of the door member when the door member opens the work entrance.

本発明の乾燥方法は、所定部位にスラリー膜(3)が塗布された複数のワーク(1)をセッター(4)に支持するステップ(S1)と、シャッタを開き、乾燥炉(11)のワーク出入口(28)を開放するステップ(S3)と、セッターが取り付けられた扉部材(23)を閉じ、ワーク出入口(28)を閉鎖し、ワークを乾燥炉の乾燥室(25)内に搬入するステップ(S4)と、熱風を乾燥室内に通過させ、熱風によりワークの所定部位を所定時間乾燥させるステップ(S5)と、所定時間が経過した後に扉部材を開いて、ワークを乾燥室から搬出するステップ(S6)と、シャッタを閉じ、ワーク出入口を閉鎖するステップ(S7)と、ワークをセッターから取り出すステップ(S8)と、を備える。そして、ワークを乾燥室に搬入するステップでは、セッターを乾燥室外に位置させた状態で、ワークの所定部位を乾燥室内に配置する。 The drying method of the present invention comprises a step (S1) of supporting a plurality of works (1) coated with a slurry film (3) on predetermined portions on a setter (4); A step (S3) of opening the doorway (28), a step of closing the door member (23) to which the setter is attached, closing the work doorway (28), and carrying the work into the drying chamber (25) of the drying furnace. (S4), a step of passing hot air through the drying chamber to dry a predetermined portion of the work by the hot air for a predetermined time (S5), and a step of opening the door member after the predetermined time has passed and carrying the work out of the drying chamber. (S6), a step (S7) of closing the shutter to close the workpiece entrance, and a step (S8) of removing the workpiece from the setter. Then, in the step of carrying the work into the drying chamber, a predetermined portion of the work is placed inside the drying chamber while the setter is positioned outside the drying chamber.

本発明の乾燥装置および乾燥方法によれば、扉部材が乾燥炉のワーク出入口を閉じたときに、セッターが乾燥室外に位置し、ワークの所定部位のみが乾燥室内に配置されるので、ワークの所定部位に塗布されたスラリー膜を熱風によって効率よく乾燥させることができる。 According to the drying apparatus and drying method of the present invention, when the door member closes the work entrance of the drying furnace, the setter is positioned outside the drying chamber, and only a predetermined portion of the work is placed inside the drying chamber. A slurry film applied to a predetermined portion can be efficiently dried with hot air.

本発明による一実施形態の乾燥装置を示す概略図である。1 is a schematic diagram showing a drying apparatus of one embodiment according to the present invention; FIG. (a)はスラリー膜が塗布されたガスセンサ素子を示す断面図、(b)は含水状態を示すガスセンサ素子の一部拡大図である。(a) is a cross-sectional view showing a gas sensor element coated with a slurry film, and (b) is a partially enlarged view of the gas sensor element showing a water-containing state. (a)はセッターの平面図、(b)はセッターの断面図である。(a) is a plan view of the setter, and (b) is a sectional view of the setter. 乾燥装置各部の全体的な配置を示す斜視図である。It is a perspective view which shows the whole arrangement|positioning of each part of drying apparatus. 図4のV矢視図である。5 is a view in the direction of arrow V in FIG. 4; FIG. 図4のVI矢視図である。5 is a view in the direction of arrow VI in FIG. 4; FIG. 扉部材がワーク出入口を開いたときの乾燥炉を示す断面図である。FIG. 4 is a cross-sectional view showing the drying furnace when the door member opens the workpiece entrance; 扉部材がワーク出入口を閉じたときの乾燥炉を示す断面図である。FIG. 4 is a cross-sectional view showing the drying furnace when the door member closes the work entrance; 整流部材を示す図8のIX-IX線断面図である。FIG. 9 is a cross-sectional view taken along the line IX-IX in FIG. 8 showing the rectifying member; ガスセンサ素子の乾燥方法を示すフローチャートである。4 is a flow chart showing a method for drying a gas sensor element; 本発明の他の実施形態を示す乾燥炉の断面図である。FIG. 4 is a cross-sectional view of a drying oven showing another embodiment of the present invention; 本発明の他の実施形態を示す整流部材の断面図である。FIG. 5 is a cross-sectional view of a straightening member showing another embodiment of the present invention; (a),(b)は本発明の他の実施形態において断熱材の作用を示す説明図である。(a), (b) is explanatory drawing which shows the effect|action of the heat insulating material in other embodiment of this invention.

<一実施形態>
以下、本発明の一実施形態を図面に基づいて説明する。
図1に示すように、本実施形態の乾燥装置10は、ガスセンサ素子1を乾燥する乾燥炉11と、乾燥炉11にガスセンサ素子1を搬入出するローダ12と、乾燥炉11に熱風HWを送風する送風機構13とを備えている。送風機構13は、ブロア14、ヒータ15および循環配管16を含み、ブロア14からの送風をヒータ15で加熱し、乾燥炉11内に通過させたのち、循環配管16を介してブロア14に還流させるように構成されている。
<One embodiment>
An embodiment of the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the drying apparatus 10 of the present embodiment includes a drying furnace 11 for drying the gas sensor element 1, a loader 12 for carrying the gas sensor element 1 into and out of the drying furnace 11, and blowing hot air HW to the drying furnace 11. A blower mechanism 13 is provided. The blower mechanism 13 includes a blower 14, a heater 15, and a circulation pipe 16. Air blown from the blower 14 is heated by the heater 15, passed through the drying furnace 11, and then returned to the blower 14 via the circulation pipe 16. is configured as

ワークとしてのガスセンサ素子1は、図2(a)に示すように、一端が閉じた筒形の固体電解質体2をディップ槽(図示略)内のスラリーSに浸漬する工程(ディップ工程)で、ガスセンサ素子1の外側表面の所定部位(図中鎖線で示す範囲)にスラリー膜3が塗布される。図2(b)に示すように、浸漬直後の固体電解質体2には水分Wが含まれているため、ディップ工程に続く乾燥工程では、熱風HWをスラリー膜3に当て、スラリー膜3を乾燥させると同時に、固体電解質体2の内部から水分Wを蒸発させ、所定質量のガスセンサ素子1を製作する。 As shown in FIG. 2(a), the gas sensor element 1 as a workpiece is immersed in slurry S in a dip bath (not shown) in a step (dipping step) in which a cylindrical solid electrolyte body 2 closed at one end is dipped. A slurry film 3 is applied to a predetermined portion of the outer surface of the gas sensor element 1 (the range indicated by the dashed line in the figure). As shown in FIG. 2B, since the solid electrolyte body 2 immediately after the immersion contains water W, in the drying process following the dipping process, hot air HW is applied to the slurry film 3 to dry the slurry film 3. At the same time, the moisture W is evaporated from the inside of the solid electrolyte body 2 to manufacture the gas sensor element 1 of a predetermined mass.

図3(a),(b)に示すように、乾燥装置10は、複数のガスセンサ素子1をバッチ処理するために陶磁器製のセッター4を使用する。セッター4には、複数の支持孔5が等間隔で縦横に並べて形成され、各支持孔5にガスセンサ素子1の基部101が挿入される。スラリー膜3の塗布範囲に相当するガスセンサ素子1の脚部102は、支持孔5の外に露出し、乾燥炉11内で熱風HWに晒される。なお、1バッチ分のガスセンサ素子1の数は、図1または図3に示す本数に限定されず、任意に増減することができる。 As shown in FIGS. 3(a) and 3(b), the drying device 10 uses a ceramic setter 4 to process a plurality of gas sensor elements 1 in batches. A plurality of support holes 5 are formed in the setter 4 so as to be arranged vertically and horizontally at regular intervals, and the base portion 101 of the gas sensor element 1 is inserted into each of the support holes 5 . A leg portion 102 of the gas sensor element 1 corresponding to the application range of the slurry film 3 is exposed outside the support hole 5 and exposed to the hot air HW inside the drying furnace 11 . The number of gas sensor elements 1 for one batch is not limited to the number shown in FIG. 1 or 3, and can be arbitrarily increased or decreased.

図4、図5、図6に示すように、乾燥炉11は架台18の上に設置され、架台18の下側にローダ12が水平駆動部19によりレール20に沿って往復動可能に設けられている。ローダ12は、昇降板21と、その垂直駆動部22とを備え、昇降板21の上に扉部材23が取り付けられている。セッター4は扉部材23の上に載置され、ローダ12が乾燥炉11の真下の乾燥位置(図5の鎖線位置)で扉部材23を昇降し、セッター4に支持されたガスセンサ素子1を乾燥炉11の内外に搬入出する。 As shown in FIGS. 4, 5, and 6, the drying furnace 11 is installed on a frame 18, and a loader 12 is provided below the frame 18 so as to be reciprocatable along rails 20 by a horizontal drive unit 19. ing. The loader 12 includes a lift plate 21 and a vertical drive portion 22 thereof, and a door member 23 is attached on the lift plate 21 . The setter 4 is placed on the door member 23, and the loader 12 moves up and down the door member 23 at the drying position (the chain line position in FIG. 5) directly below the drying furnace 11 to dry the gas sensor element 1 supported by the setter 4. It is carried in and out of the furnace 11 .

図7に示すように、乾燥炉11の本体110は四角箱形の中空状に形成され、その中空部が、ガスセンサ素子1を乾燥する乾燥室25となっている。乾燥炉11の上蓋26には、乾燥室25の容積を縮小するための凹所27が形成されている。上蓋26の下面には、乾燥室25の余剰空間を埋める断熱材24が設けられている。一方、乾燥炉11の下面にはワーク出入口28が形成され、ローダ12によって扉部材23がワーク出入口28を開く開放位置と、ワーク出入口28を閉じる閉鎖位置とに昇降される。 As shown in FIG. 7, the main body 110 of the drying furnace 11 is formed in a hollow rectangular box shape, and the hollow portion serves as a drying chamber 25 for drying the gas sensor element 1 . A recess 27 for reducing the volume of the drying chamber 25 is formed in the upper lid 26 of the drying oven 11 . A heat insulating material 24 is provided on the lower surface of the upper lid 26 to fill the excess space of the drying chamber 25 . On the other hand, a work entrance 28 is formed on the lower surface of the drying furnace 11 , and the door member 23 is moved up and down by the loader 12 between an open position for opening the work entrance 28 and a closed position for closing the work entrance 28 .

図8に示すように、扉部材23が閉鎖位置に上昇したときには、扉部材23の周壁の上端面が乾燥炉11の本体110の下面に密着した状態でワーク出入口28を密閉する。このとき、セッター4は、その上面が乾燥室25の底面と略同じ高さに位置し、上面を除く他の部分が乾燥室25の外に位置する。そして、ガスセンサ素子1は、スラリー膜3が塗布された所定部位、つまり脚部102のみが乾燥室25内に露出している。この状態で乾燥室25の容積が最小となるように、断熱材24の厚さが設定されている。 As shown in FIG. 8, when the door member 23 is raised to the closed position, the upper end surface of the peripheral wall of the door member 23 is in close contact with the lower surface of the body 110 of the drying oven 11 to close the work entrance 28. At this time, the upper surface of the setter 4 is positioned at substantially the same height as the bottom surface of the drying chamber 25 , and the rest of the setter 4 except for the upper surface is positioned outside the drying chamber 25 . The gas sensor element 1 is exposed to the inside of the drying chamber 25 only at a predetermined portion where the slurry film 3 is applied, that is, only the leg portion 102 . The thickness of the heat insulating material 24 is set so that the volume of the drying chamber 25 is minimized in this state.

ワーク出入口28の下側にはガイド29が設けられている。ガイド29には、シャッタ30がワーク出入口28をスライド可能に支持され、シリンダ31(図6参照)によって水平方向に駆動される。シャッタ30は、扉部材23が開放位置に下降した直後に、その扉部材23に代わってワーク出入口28を塞ぎ、扉部材23が閉鎖位置に上昇する直前に、ワーク出入口28を開放する。したがって、ガスセンサ素子1の搬入出に際して、乾燥室25が長時間開放したままの状態に放置されるおそれがない。 A guide 29 is provided below the work inlet/outlet 28 . A shutter 30 is supported by the guide 29 so as to be slidable in the work inlet/outlet 28, and driven horizontally by a cylinder 31 (see FIG. 6). The shutter 30 closes the work entrance 28 instead of the door member 23 immediately after the door member 23 descends to the open position, and opens the work entrance 28 immediately before the door member 23 rises to the closed position. Therefore, when the gas sensor element 1 is carried in and out, there is no possibility that the drying chamber 25 is left open for a long time.

乾燥炉11の一端部には熱風入口33が形成され、反対側の端部に熱風出口34が形成されている。熱風入口33の近傍には、入口側整流部材35と調整板36とが設けられ、入口側整流部材35によって熱風HWが乾燥室25の幅方向に分散され、調整板36により熱風HWの流入速度が調整される。熱風出口34の近傍には、乾燥室25内の熱風HWを集めて循環配管16に導く出口側整流部材37と、熱風HWの流出速度を調整する調整板38とが設けられている。なお、入口側整流部材35には、熱風HWの温度を測定する温度センサ39(図6参照)が設置されている。 A hot air inlet 33 is formed at one end of the drying furnace 11, and a hot air outlet 34 is formed at the opposite end. In the vicinity of the hot-air inlet 33, an inlet-side straightening member 35 and an adjustment plate 36 are provided. is adjusted. In the vicinity of the hot air outlet 34, there are provided an outlet-side rectifying member 37 that collects the hot air HW in the drying chamber 25 and guides it to the circulation pipe 16, and an adjustment plate 38 that adjusts the outflow speed of the hot air HW. A temperature sensor 39 (see FIG. 6) for measuring the temperature of the hot air HW is installed in the inlet-side straightening member 35 .

図9(a),(b)に示すように、入口側整流部材35の内側には、複数の整流板41が箒状に並設されている。各整流板41は、ロッド42により略等間隔をあけて互いに平行に並んだ状態に保持され、乾燥室25内に流入した熱風HWをセッター4上の複数列のガスセンサ素子1に均等に分配して送風方向に流通させる。調整板36は、乾燥炉11の内壁板43に沿って乾燥室25の全幅に広がり、調節具44で調整板36の高さを調節することにより、複数の風路に分配された熱風量を各部均等に調整できるようになっている。出口側整流部材37および調整板38も、入口側のそれらと同様に構成されている。 As shown in FIGS. 9A and 9B, inside the inlet-side straightening member 35, a plurality of straightening vanes 41 are arranged in a broom shape. The rectifying plates 41 are held parallel to each other at substantially equal intervals by rods 42, and distribute the hot air HW flowing into the drying chamber 25 evenly to the plurality of rows of gas sensor elements 1 on the setter 4. to circulate in the air blowing direction. The adjustment plate 36 spreads over the entire width of the drying chamber 25 along the inner wall plate 43 of the drying furnace 11, and by adjusting the height of the adjustment plate 36 with the adjuster 44, the amount of hot air distributed to the plurality of air passages is adjusted. Each part can be adjusted equally. The outlet-side rectifying member 37 and the adjustment plate 38 are also constructed in the same manner as those on the inlet side.

次に、ガスセンサ素子1の乾燥方法を図10に従って説明する。この実施形態では、ガスセンサ素子1の製作時間を短縮するために、乾燥工程がディップ工程の直後に開始される。まず、ローダ12の待機位置(図5の実線位置)において、スラリー膜3が塗布された複数のガスセンサ素子1がセッター4に支持される(S1)。次に、ローダ12が待機位置から乾燥位置(図5の鎖線位置)まで前進し、セッター4を乾燥炉11の真下に配置する(S2)。 Next, a drying method for the gas sensor element 1 will be described with reference to FIG. In this embodiment, the drying process is started immediately after the dipping process in order to shorten the manufacturing time of the gas sensor element 1 . First, at the standby position (solid line position in FIG. 5) of the loader 12, a plurality of gas sensor elements 1 coated with the slurry film 3 are supported by the setter 4 (S1). Next, the loader 12 advances from the standby position to the drying position (position indicated by the dashed line in FIG. 5), and the setter 4 is placed directly below the drying oven 11 (S2).

次いで、シャッタ30が開き、乾燥炉11のワーク出入口28を開放する(S3)。続いて、ローダ12が昇降板21により扉部材23を上昇し、扉部材23でワーク出入口28を閉じ、ガスセンサ素子1を乾燥室25内に搬入する(S4)。このとき、セッター4は乾燥室25の外に位置し、乾燥室25の底面を塞ぎ、ガスセンサ素子1の脚部102のみが乾燥室25内に配置される(図8参照)。この状態で、ブロア14が予め定められた所定時間駆動され、熱風HWが入口側整流部材35を通って乾燥室25内に供給され、熱風HWによって複数のガスセンサ素子1のスラリー膜3が一斉に乾燥される(S5)。 Next, the shutter 30 is opened to open the workpiece entrance 28 of the drying furnace 11 (S3). Subsequently, the loader 12 raises the door member 23 by the lifting plate 21, closes the work entrance 28 with the door member 23, and carries the gas sensor element 1 into the drying chamber 25 (S4). At this time, the setter 4 is positioned outside the drying chamber 25 and closes the bottom surface of the drying chamber 25, so that only the legs 102 of the gas sensor element 1 are arranged inside the drying chamber 25 (see FIG. 8). In this state, the blower 14 is driven for a predetermined time, the hot air HW is supplied into the drying chamber 25 through the inlet-side rectifying member 35, and the slurry films 3 of the plurality of gas sensor elements 1 are simultaneously blown by the hot air HW. It is dried (S5).

そして、乾燥室25内に分散した熱風HWは、出口側整流部材37により集められ、乾燥室25から循環配管16に排出され、排気が循環配管16を通ってブロア14に還流し、温度センサ39の検出温度に従ってヒータ15により再加熱される。所定の乾燥時間が満了すると、ブロア14が停止し、扉部材23が閉鎖位置から開放位置に下降し、ワーク出入口28を開いてガスセンサ素子1を乾燥室25から搬出する(S6)。その直後に、シャッタ30が閉じ、扉部材23に代わってワーク出入口28を密閉する(S7)。その後、ローダ12が乾燥位置から待機位置に戻り、そこで乾燥後のガスセンサ素子1がセッター4から取り出される(S8)。 The hot air HW dispersed in the drying chamber 25 is collected by the outlet-side rectifying member 37 and discharged from the drying chamber 25 to the circulation pipe 16. is reheated by the heater 15 according to the detected temperature. When the predetermined drying time expires, the blower 14 is stopped, the door member 23 is lowered from the closed position to the open position, the work entrance 28 is opened, and the gas sensor element 1 is carried out of the drying chamber 25 (S6). Immediately after that, the shutter 30 is closed to close the workpiece entrance 28 in place of the door member 23 (S7). Thereafter, the loader 12 returns from the drying position to the standby position, where the gas sensor element 1 after drying is taken out from the setter 4 (S8).

したがって、この実施形態の乾燥装置10によれば、次のような作用効果が得られる
(a)乾燥中は、セッター4が乾燥室25の外に位置し、ガスセンサ素子1の脚部102のみが乾燥室25内に配置されているので、乾燥室25内における1バッチ分の熱マス量を減少させ、ガスセンサ素子1の所定部位に塗布されたスラリー膜3を短時間に乾燥することができる。
(b)また、乾燥炉11が中空箱形に形成され、その上部に凹所27が設けられ、乾燥室25の余剰空間が断熱材24で埋められているため、乾燥室25の空間部を必要最小限にして熱効率を高めることもできる。
Therefore, according to the drying device 10 of this embodiment, the following effects can be obtained: (a) During drying, the setter 4 is positioned outside the drying chamber 25, and only the leg portions 102 of the gas sensor element 1 are Since it is arranged in the drying chamber 25, the amount of heat mass for one batch in the drying chamber 25 can be reduced, and the slurry film 3 applied to a predetermined portion of the gas sensor element 1 can be dried in a short time.
(b) Since the drying oven 11 is formed in a hollow box shape, a recess 27 is provided in the upper part thereof, and the surplus space of the drying chamber 25 is filled with a heat insulating material 24, the space of the drying chamber 25 is It is also possible to improve the thermal efficiency by minimizing it.

(c)ガスセンサ素子1を搬出する際には、扉部材23がワーク出入口28を開くと、その直後にシャッタ30が閉じ、乾燥室25を密閉する。また、ガスセンサ素子1を搬入する際には、扉部材23が乾燥室25を閉じる直前に、シャッタ30が乾燥室25を開放する。このため、乾燥室25が開いている時間を短くし、室温を一定に維持することができる。
(d)扉部材23が昇降板21に取り付けられてローダ12に常設されているので、セッター4を別の場所に運搬することなく、ローダ12の待機位置でガスセンサ素子1をセッター4に着脱でき、ワーク交換に要する時間を短縮することができる。
(c) When the gas sensor element 1 is carried out, the door member 23 opens the work entrance 28, and immediately after that, the shutter 30 is closed to seal the drying chamber 25. As shown in FIG. When the gas sensor element 1 is carried in, the shutter 30 opens the drying chamber 25 just before the door member 23 closes the drying chamber 25 . Therefore, the time during which the drying chamber 25 is open can be shortened, and the room temperature can be kept constant.
(d) Since the door member 23 is attached to the elevating plate 21 and permanently attached to the loader 12, the gas sensor element 1 can be attached to and detached from the setter 4 at the standby position of the loader 12 without having to transport the setter 4 to another location. , the time required for workpiece replacement can be shortened.

(e)入口側および出口側の整流部材35,37が乾燥室25に直列に接続されているので、乾燥室25内における熱風HWの流れに乱れが生じにくい。
(f)入口および出口側の整流部材35,37に複数の整流板41が箒状に並設されているので、熱風HWがガスセンサ素子1の配列方向に整然と流れ、複数のガスセンサ素子1に均等に当る。
(g)このため、スラリー膜3の乾燥状態にバラツキが生じにくいうえ、ガスセンサ素子1の内部もまんべんなく加熱されるため、水分を完全に除去し、乾燥後の質量測定値を安定させ、不良品の発生を抑えることができる。
(e) Since the rectifying members 35 and 37 on the inlet side and the outlet side are connected in series with the drying chamber 25, the flow of the hot air HW in the drying chamber 25 is less likely to be disturbed.
(f) Since a plurality of rectifying plates 41 are arranged side by side in a broom shape on the rectifying members 35 and 37 on the inlet and outlet sides, the hot air HW flows orderly in the arrangement direction of the gas sensor elements 1 and evenly spreads over the plurality of gas sensor elements 1 . hit.
(g) Therefore, the dried state of the slurry film 3 is less likely to vary, and the inside of the gas sensor element 1 is evenly heated. can suppress the occurrence of

(h)調整板36,38によって熱風入口33および熱風出口34の開口面積を調整することで、乾燥室25を通過する熱風の流速が変化するため、ディップ工程におけるスラリーSの状態に合わせて乾燥時間を容易に加減することができる。
(i)送風機構13は、ブロア14とヒータ15とが乾燥炉11の熱風入口33に近接するように構成されているので、周辺環境への放熱量が減少する。
(j)乾燥炉11の熱風出口34からの排気が循環配管16でブロア14の吸入口に還流するため、乾燥炉11の排熱をリサイクル循環させ、乾燥室25の昇温時間を短縮できる。
(h) By adjusting the opening areas of the hot air inlet 33 and the hot air outlet 34 with the adjustment plates 36 and 38, the flow velocity of the hot air passing through the drying chamber 25 is changed, so that drying is performed according to the state of the slurry S in the dipping step. You can easily adjust the time.
(i) Since the blower mechanism 13 is constructed such that the blower 14 and the heater 15 are close to the hot air inlet 33 of the drying furnace 11, the amount of heat radiation to the surrounding environment is reduced.
(j) Since the exhaust air from the hot air outlet 34 of the drying furnace 11 is circulated through the circulation pipe 16 to the inlet of the blower 14, the exhaust heat of the drying furnace 11 can be recycled and the heating time of the drying chamber 25 can be shortened.

<他の実施形態>
本発明は、上記実施形態に限定されるものではなく、以下に例示するように、発明の趣旨を逸脱しない範囲で各部の形状や構成を適宜に変更して実施することも可能である。
<Other embodiments>
The present invention is not limited to the above-described embodiments, and as exemplified below, the shape and configuration of each part can be changed as appropriate without departing from the scope of the invention.

(1)図11に示す実施形態では、乾燥炉11のワーク出入口28が遮蔽板46で乾燥室25側から覆われ、遮蔽板46に複数の透孔47が形成されている。そして、扉部材23がワーク出入口28を閉じたときに、ガスセンサ素子1の脚部102が透孔47に挿入され、脚部102のみが乾燥室25内に露出した状態で、スラリー膜3が乾燥される。扉部材23が開いたときには、シャッタ30が閉じるまでの期間中、遮蔽板46がワーク出入口28を覆い、乾燥室25内への冷気の侵入を抑制するようになっている。 (1) In the embodiment shown in FIG. 11, the workpiece entrance 28 of the drying furnace 11 is covered with a shielding plate 46 from the drying chamber 25 side, and the shielding plate 46 is formed with a plurality of through holes 47 . When the door member 23 closes the workpiece entrance 28, the leg portion 102 of the gas sensor element 1 is inserted into the through hole 47, and the slurry film 3 is dried with only the leg portion 102 exposed in the drying chamber 25. be done. When the door member 23 is opened, the shielding plate 46 covers the workpiece entrance 28 until the shutter 30 is closed to prevent cold air from entering the drying chamber 25 .

(2)図12に示す実施形態では、入口側および出口側の整流部材35(入口側のみ図示)に箒状の整流板41により複数の風路(熱風通路)が形成されるとともに、熱風入口33の大きさを調整する調整板361~366が風路毎に分割して形成されている。したがって、各調整板361~366を個別に位置調整することにより、熱風入口33および熱風出口34を通過する熱風の流速を風路毎に細かく調整することができる。 (2) In the embodiment shown in FIG. 12, a plurality of air passages (hot air passages) are formed by broom-shaped straightening vanes 41 in the straightening members 35 on the inlet side and the outlet side (only the inlet side is shown). Adjusting plates 361 to 366 for adjusting the size of 33 are formed separately for each air passage. Therefore, by individually adjusting the positions of the adjustment plates 361 to 366, the flow velocity of the hot air passing through the hot air inlet 33 and the hot air outlet 34 can be finely adjusted for each air path.

(3)図13に示す実施形態では、乾燥室25内の断熱材24にガスセンサ素子1の配列形態に倣った形状の凹凸部241が設けられている。凹凸部241を設けることによって、断熱材24が隣接する脚部102と脚部102との余剰空隙部を埋め、熱風HWをスラリー膜3の全周に行き渡らせることができる。これにより、スラリー膜3およびガスセンサ素子1の内部に含まれる水分を短時間に排除し、乾燥効率を高めることができる。 (3) In the embodiment shown in FIG. 13, the heat insulating material 24 in the drying chamber 25 is provided with an uneven portion 241 having a shape following the arrangement of the gas sensor elements 1 . By providing the uneven portion 241 , the heat insulating material 24 fills the excess gap between the adjacent leg portions 102 to allow the hot air HW to spread over the entire circumference of the slurry film 3 . As a result, moisture contained in the interior of the slurry film 3 and the gas sensor element 1 can be removed in a short period of time, and the drying efficiency can be enhanced.

(4)上記各実施形態では、ワークとしてガスセンサ素子1を例示したが、他の実施形態において、所定部位にスラリー膜が塗布された各種のワークに本発明の乾燥装置および乾燥方法を適用することも可能である。 (4) In each of the above embodiments, the gas sensor element 1 was used as an example of a workpiece, but in other embodiments, the drying apparatus and drying method of the present invention can be applied to various workpieces having a slurry film applied to a predetermined portion. is also possible.

1・・・ガスセンサ素子(ワーク)、3・・・スラリー膜、4・・・セッター、
10・・・乾燥装置、11・・・乾燥炉、13・・・送風機構、23・・・扉部材、
25・・・乾燥室、28・・・ワーク出入口、30・・・シャッタ。
DESCRIPTION OF SYMBOLS 1... Gas sensor element (work), 3... Slurry film, 4... Setter,
DESCRIPTION OF SYMBOLS 10... Drying apparatus, 11... Drying furnace, 13... Ventilation mechanism, 23... Door member,
25... Drying chamber, 28... Work entrance, 30... Shutter.

Claims (6)

所定部位にスラリー膜(3)が塗布された複数のワーク(1)を支持するセッター(4)と、
ワーク出入口(28)および乾燥室(25)が形成された乾燥炉(11)と、
前記ワーク出入口を開閉可能に覆う扉部材(23)と、
前記扉部材が前記ワーク出入口を閉じているときに、前記乾燥室内に熱風(HW)を送風する送風機構(13)と、を備え、
前記セッターは前記扉部材に取り付けられ、前記扉部材は、前記ワーク出入口を閉じたときに、前記セッターを前記乾燥室外に位置させた状態で、前記ワークの前記所定部位を前記乾燥室内に配置するように構成され
前記乾燥炉は、前記扉部材が前記ワーク出入口を開いたときに、前記扉部材に代わって前記ワーク出入口を閉じるシャッタ(30)を備えている乾燥装置(10)。
a setter (4) for supporting a plurality of works (1) coated with a slurry film (3) at predetermined sites;
a drying furnace (11) having a workpiece entrance (28) and a drying chamber (25);
a door member (23) that openably and closably covers the work entrance;
a blowing mechanism (13) for blowing hot air (HW) into the drying chamber when the door member closes the work entrance;
The setter is attached to the door member, and the door member arranges the predetermined portion of the work inside the drying chamber while the setter is positioned outside the drying chamber when the work entrance is closed. configured as
The drying apparatus (10) comprises a shutter (30) that closes the work entrance instead of the door member when the door member opens the work entrance.
前記乾燥炉は、前記ワーク出入口を前記乾燥室側から遮蔽する遮蔽板(46)を備え、前記遮蔽板に、前記ワークの前記所定部位が挿脱される複数の透孔(47)が形成されている請求項1に記載の乾燥装置。 The drying oven includes a shielding plate (46) that shields the work inlet/outlet from the drying chamber side, and the shielding plate is formed with a plurality of through holes (47) through which the predetermined portions of the work are inserted and removed. The drying apparatus of claim 1, wherein the 前記送風機構は、熱風を送風するブロア(14)と、熱風を加熱するヒータ(15)と、熱風を前記乾燥室に通過させて前記ブロアに還流させる循環配管(16)とを含む請求項1または2に記載の乾燥装置。 2. The blowing mechanism includes a blower (14) for blowing hot air, a heater (15) for heating the hot air, and a circulation pipe (16) for passing the hot air through the drying chamber and returning it to the blower. Or the drying apparatus according to 2 . 前記乾燥炉の熱風入口(33)に、熱風を分散させて前記乾燥室に供給する入口側整流部材(35)が設けられ、
前記乾燥炉の熱風出口(34)に、熱風を集めて前記乾燥室から排出する出口側整流部材(37)が設けられ、
前記入口側整流部材および前記排気側整流部材に、互いに平行な複数の整流板(41)が熱風の送風方向に延びるように設けられている請求項1~の何れか一項に記載の乾燥装置。
An inlet-side straightening member (35) for dispersing hot air and supplying it to the drying chamber is provided at the hot air inlet (33) of the drying furnace,
An outlet-side straightening member (37) for collecting hot air and discharging it from the drying chamber is provided at the hot air outlet (34) of the drying furnace,
The dryer according to any one of claims 1 to 3 , wherein a plurality of parallel straightening vanes (41) are provided in the inlet side straightening member and the exhaust side straightening member so as to extend in the blowing direction of the hot air. Device.
前記乾燥炉に、前記熱風入口および前記熱風出口の開口面積をそれぞれ別個に調整する調整板(36,38)が設けられている請求項に記載の乾燥装置。 5. The drying apparatus according to claim 4 , wherein the drying furnace is provided with adjustment plates (36, 38) for separately adjusting opening areas of the hot air inlet and the hot air outlet. 所定部位にスラリー膜(3)が塗布された複数のワーク(1)をセッター(4)に支持するステップ(S1)と、
シャッタ(30)を開き、乾燥炉(11)のワーク出入口(28)を開放するステップ(S3)と、
前記セッターが取り付けられた扉部材(23)を閉じ、前記ワーク出入口(28)を閉鎖して、前記セッターを前記乾燥炉の乾燥室(25)内に搬入するステップ(S4)と、
熱風を前記乾燥室内に通過させ、前記ワークの前記所定部位を所定時間乾燥させるステップ(S5)と、
前記所定時間が経過した後に前記扉部材を開いて、前記セッターを前記乾燥室から搬出するステップ(S6)と、
前記シャッタを閉じ、前記ワーク出入口を閉鎖するステップ(S7)と、
前記ワークを前記セッターから取り出すステップ(S8)と、を備え、
前記ワークを前記乾燥室に搬入するステップにおいて、前記セッターを前記乾燥室外に位置させた状態で、前記ワークの前記所定部位を前記乾燥室内に配置する乾燥方法。
A step (S1) of supporting a plurality of works (1) coated with a slurry film (3) on predetermined portions on a setter (4);
A step (S3) of opening the shutter (30) to open the work entrance (28) of the drying furnace (11);
a step (S4) of closing the door member (23) to which the setter is attached, closing the work entrance (28), and carrying the setter into the drying chamber (25) of the drying oven;
a step of passing hot air through the drying chamber to dry the predetermined portion of the work for a predetermined time (S5);
a step (S6) of opening the door member after the lapse of the predetermined time and carrying out the setter from the drying chamber;
a step of closing the shutter to close the work entrance (S7);
A step (S8) of taking out the work from the setter,
A drying method, wherein, in the step of carrying the work into the drying chamber, the predetermined portion of the work is arranged in the drying chamber while the setter is positioned outside the drying chamber.
JP2020014813A 2020-01-31 2020-01-31 Drying equipment and drying method Active JP7259776B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020014813A JP7259776B2 (en) 2020-01-31 2020-01-31 Drying equipment and drying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020014813A JP7259776B2 (en) 2020-01-31 2020-01-31 Drying equipment and drying method

Publications (2)

Publication Number Publication Date
JP2021121770A JP2021121770A (en) 2021-08-26
JP7259776B2 true JP7259776B2 (en) 2023-04-18

Family

ID=77364852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020014813A Active JP7259776B2 (en) 2020-01-31 2020-01-31 Drying equipment and drying method

Country Status (1)

Country Link
JP (1) JP7259776B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115371370B (en) * 2022-08-12 2023-07-21 浙江日鼎涂装科技有限公司 Coating drying chamber capable of drying workpieces at multiple angles

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016183820A (en) 2015-03-26 2016-10-20 日本碍子株式会社 Drying method, manufacturing method of ceramic component, and drying system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102763A (en) * 1988-10-11 1990-04-16 Koishiro Tokei Seisakusho:Kk Dryer having floor plate movable up and down
JPH05268828A (en) * 1992-03-26 1993-10-19 Kubota Corp Air conditioning treating equipment
JP3602921B2 (en) * 1996-08-01 2004-12-15 秀利 大川 Hollow wood drying equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016183820A (en) 2015-03-26 2016-10-20 日本碍子株式会社 Drying method, manufacturing method of ceramic component, and drying system

Also Published As

Publication number Publication date
JP2021121770A (en) 2021-08-26

Similar Documents

Publication Publication Date Title
KR101106887B1 (en) Method and device for thermally treating substrates
US5431700A (en) Vertical multi-process bake/chill apparatus
US5430271A (en) Method of heat treating a substrate with standby and treatment time periods
KR101088541B1 (en) Heating apparatus and coating,developing apparatus
JP7259776B2 (en) Drying equipment and drying method
CN111554571B (en) Substrate processing apparatus and substrate processing method
JP3910054B2 (en) Substrate processing equipment
KR100755428B1 (en) Heating furnace
KR102401231B1 (en) Infrared baking device and electronic component baking method using same
JP3855127B2 (en) Heat treatment equipment
JP3683788B2 (en) Heat treatment apparatus cooling method and heat treatment apparatus
KR102172513B1 (en) Substrate baking apparatus
KR102427045B1 (en) Method and apparatus for heat processing of substrate, substrate processing apparatus
KR102037915B1 (en) Apparatus for treating substrate
JP2021110582A (en) Dip device
KR100558606B1 (en) Fume eliminating apparatus for LCD glass oven chamber
CN117346518A (en) Horizontal furnace and silicon wafer heat treatment method
JPS5937678Y2 (en) Vertical heating furnace
KR200183538Y1 (en) Bake unit for semiconductor wafer
KR100687844B1 (en) Apparatus for baking seal and short material
JP2723132B2 (en) Heat treatment furnace
KR20210000955A (en) Substrate baking apparatus
KR200177581Y1 (en) Hard baking apparatus
JPS5943331A (en) Composite cycle tester
RU72883U1 (en) DEVICE FOR POLYMERIZATION OF POWDER COATINGS

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220413

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230221

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230227

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230307

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230320

R151 Written notification of patent or utility model registration

Ref document number: 7259776

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151