TWI507651B - Heat treatment apparatus - Google Patents
Heat treatment apparatus Download PDFInfo
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- TWI507651B TWI507651B TW099106574A TW99106574A TWI507651B TW I507651 B TWI507651 B TW I507651B TW 099106574 A TW099106574 A TW 099106574A TW 99106574 A TW99106574 A TW 99106574A TW I507651 B TWI507651 B TW I507651B
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
- F27D2007/045—Fans
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D2099/0085—Accessories
- F27D2099/0086—Filters, e.g. for molten metals
Description
本發明係關於一種利用循環熱風加熱工件(workpiece)的熱處理裝置。The present invention relates to a heat treatment apparatus for heating a workpiece by circulating hot air.
在對工件進行熱處理的熱處理裝置中，具有熱風循環方式的加熱裝置，該熱風循環方式的加熱裝置，係利用在爐體內部循環的熱風加熱工件。在這種熱風循環方式的熱處理裝置中，有時會產生工件的上風和下風溫度分佈不均、在工件的下風溫度降低的不利情況。工件越大，這種不利情況就越嚴重，對於這種不利情況，以往有各種應對辦法。In the heat treatment apparatus that heat-treats the workpiece, there is a heating device of a hot air circulation type, and the heating device of the hot air circulation type heats the workpiece by hot air circulating inside the furnace body. In such a hot air circulation type heat treatment apparatus, there is a case where the upwind and downwind temperature distribution of the workpiece is uneven and the downwind temperature of the workpiece is lowered. The larger the workpiece, the more serious the disadvantage. For this unfavorable situation, there have been various countermeasures in the past.
例如，習知技術中存在如下技術，即，在對平板狀的工件進行強制對流加熱時，傾斜配置隔板，使得下風一側與隔板的間隔比上風一側與隔板的間隔窄，從而使下風一側的熱風流速大於上風一側的熱風流速，由此對工件進行均勻加熱(例如參照日本專利特開平11－118356號公報)。For example, in the prior art, there is a technique in which a partition plate is disposed obliquely when forced convection heating is performed on a flat workpiece, so that the interval between the leeward side and the partition is narrower than the interval between the upper side and the partition. In order to make the hot air flow rate on the leeward side larger than the hot air flow rate on the windward side, the workpiece is uniformly heated (for example, refer to Japanese Laid-Open Patent Publication No. Hei 11-118356).
此外，還存在有這樣的技術，即，在對平板狀工件進行強制對流加熱時，通過將熱風的流動方向反轉，切換上風一側和下風一側，從而對工件進行均勻加熱(例如參照日本專利特開平8－261647號公報)。Further, there is a technique in which, when forced convection heating is performed on the flat workpiece, the workpiece is uniformly heated by inverting the flow direction of the hot air to switch the windward side and the leeward side (for example) Japanese Patent Laid-Open No. Hei 8-261647).
在上述的日本專利特開平11－118356號公報的技術中，由於傾斜配置可改變熱風流速的隔板，所以工件設置場所在高度方向上增大，其結果導致工件的處理量減少。In the technique of the above-mentioned Japanese Patent Publication No. Hei 11-118356, since the partition plate which can change the flow rate of the hot air is inclined, the workpiece installation place is increased in the height direction, and as a result, the amount of processing of the workpiece is reduced.
此外，在上述的日本專利特開平8－261647號公報的技術中，由於使循環熱風的行進方向反轉，所以因經過過濾器的風量急劇改變，造成過濾器本身成為灰塵源，其結果導致爐體內部的潔淨(clean)度降低。此外，在使循環熱風的行進方向反轉時，被收集至過濾器(filter)的塵埃等會有脫離過濾器而在爐體內部漂浮之虞。In the technique of the above-mentioned Japanese Patent Publication No. Hei 8-261647, since the traveling direction of the circulating hot air is reversed, the amount of air passing through the filter is abruptly changed, causing the filter itself to become a dust source, and as a result, the furnace is caused. The cleanliness inside the body is reduced. Further, when the traveling direction of the circulating hot air is reversed, the dust collected in the filter or the like may leave the filter and float inside the furnace body.
本發明的目的是提供一種熱處理裝置，該熱處理裝置，不擴大處理每單位個數的工件所需要的熱處理空間，此外能夠保持爐體內部的潔淨度，並且能夠利用簡單的結構均勻加熱大型的平板狀工件。An object of the present invention is to provide a heat treatment apparatus which does not enlarge a heat treatment space required for processing a workpiece per unit number, and which can maintain the cleanliness inside the furnace body, and can uniformly heat a large flat plate with a simple structure. Shaped workpiece.
本發明的熱處理裝置，係利用循環熱風加熱平板狀工件。該熱處理裝置包括爐體、循環風扇、加熱器、耐熱過濾器以及熱風整流手段。In the heat treatment apparatus of the present invention, the flat workpiece is heated by circulating hot air. The heat treatment apparatus includes a furnace body, a circulation fan, a heater, a heat resistant filter, and a hot air rectifying means.
爐體，在內部具有支承工件的工件支承部。循環風扇，分別配置在爐體的第一側面一側和第二側面一側，並且產生循環熱風。加熱器，分別配置在爐體的第一側面一側和第二側面一側，並且加熱循環熱風。耐熱過濾器，分別配置在爐體的第一側面一側和第二側面一側，用於清潔循環熱風。該等循環風扇、加熱器、耐熱過濾器，最好是左右對稱地配置成在爐體的寬度方向。The furnace body has a workpiece support portion that supports the workpiece inside. The circulation fans are respectively disposed on one side of the first side and the side of the second side of the furnace body, and generate circulating hot air. The heaters are respectively disposed on one side of the first side and the side of the second side of the furnace body, and heat the circulating hot air. The heat-resistant filter is disposed on one side of the first side and the side of the second side of the furnace body, respectively, for cleaning the circulating hot air. Preferably, the circulating fan, the heater, and the heat-resistant filter are disposed symmetrically in the width direction of the furnace body.
熱風整流手段，係配置在耐熱過濾器與工件之間，並且分別調整從第一側面一側供給至工件的熱風風量、和從第二側面一側供給至工件的熱風風量。具體地說，熱風整流手段，係在工件的上面，使從第一側面一側供給至工件的熱風風量，大於從第二側面一側供給至工件的熱風風量，另一方面，在相同工件的下面，使從第二側面一側供給至工件的熱風風量，大於從第一側面一側供給至工件的熱風風量。作為熱風整流手段的典型例子，可以例舉分別配置在第一側面一側和第二側面一側的熱風調整板。The hot air rectifying means is disposed between the heat resistant filter and the workpiece, and separately adjusts the amount of hot air supplied to the workpiece from the first side surface side and the amount of hot air supplied to the workpiece from the second side surface side. Specifically, the hot air rectifying means is disposed on the upper surface of the workpiece such that the amount of hot air supplied to the workpiece from the first side is larger than the amount of hot air supplied to the workpiece from the second side, and on the other hand, the same workpiece Next, the amount of hot air supplied to the workpiece from the second side surface side is made larger than the amount of hot air supplied to the workpiece from the first side surface side. As a typical example of the hot air rectifying means, a hot air adjusting plate which is disposed on the first side surface side and the second side surface side, respectively, may be exemplified.
在上述結構中，由於致力於創造，使從第一側面一側供給至工件的熱風風量與從第二側面一側供給至工件的熱風風量不同，所以從左右提供的熱風不會在工件的寬度方向中央部相互擠壓，造成在中央部形成熱風難以流動的環境這種不利情況。因此，能夠防止在工件的寬度方向的中央部溫度降低。In the above configuration, since the amount of hot air supplied to the workpiece from the first side surface is different from the amount of hot air supplied from the second side to the workpiece, the hot air supplied from the left and right is not in the width of the workpiece. The central portion of the direction is pressed against each other, causing an unfavorable situation in which an environment in which hot air is difficult to flow is formed in the center portion. Therefore, it is possible to prevent the temperature in the central portion in the width direction of the workpiece from decreasing.
此外，在工件的上面和下面，由於從第一側面一側供給至工件的熱風風量和從第二側面一側供給至工件的熱風風量的大小關係反轉，所以在工件上左右也不會產生溫差。Further, on the upper and lower sides of the workpiece, since the amount of hot air supplied to the workpiece from the first side surface side and the amount of hot air supplied from the second side surface to the workpiece are reversed, the left and right sides of the workpiece are not generated. Temperature difference.
此外，由於不使通過耐熱過濾器的熱風移動方向反轉，所以對於耐熱過濾器而言難以產生灰塵。此外，由於沒有必要改變用以支承工件之工件支承部的結構，所以用以處理每單位個數的工件所需要的空間也不會擴大。Further, since the moving direction of the hot air passing through the heat-resistant filter is not reversed, it is difficult for the heat-resistant filter to generate dust. Further, since it is not necessary to change the structure of the workpiece supporting portion for supporting the workpiece, the space required for processing the workpiece per unit number does not increase.
而且，在把工件裝載成多層的情況下，通過在每層使從第一側面一側供給至工件的熱風風量與從第二側面一側供給至工件的熱風風量的大小關係反轉，即使在把工件裝載成多層的情況下，也可以防止產生左右的溫差。Further, in the case where the workpiece is loaded into a plurality of layers, the relationship between the amount of hot air supplied to the workpiece from the first side surface side and the amount of hot air supplied to the workpiece from the second side surface is reversed in each layer, even in the case of When the workpiece is loaded into a plurality of layers, it is also possible to prevent the temperature difference between the left and right.
依據本發明，不須擴大處理每單位個數的工件所需要的熱處理空間，此外，可保持爐體內部的潔淨度，並能夠用簡單的結構對大型的平板狀工件進行均勻加熱。According to the present invention, it is not necessary to enlarge the heat treatment space required for processing the workpiece per unit number, and in addition, the cleanness inside the furnace body can be maintained, and the large flat plate-shaped workpiece can be uniformly heated with a simple structure.
用圖1A和圖1B，對本發明實施形態的熱處理裝置10基本結構進行說明。熱處理裝置10是熱風循環式的潔淨爐(clean oven)，其構造係利用循環熱風，加熱搬入爐體12的平板狀工件18。The basic structure of the heat treatment apparatus 10 according to the embodiment of the present invention will be described with reference to Figs. 1A and 1B. The heat treatment apparatus 10 is a hot air circulation type clean oven whose structure is heated by a circulating hot air to heat the flat workpiece 18 that is carried into the furnace body 12.
在爐體12的內部設置複數框架構件28，該框架構件28把工件18支承成多層。在爐體12的前面設置有門26，以在搬入和搬出工件時打開或關閉該門26。門26由在上下方向排列的複數擋板(shutter)所構成，且為僅可打開或關閉與分配給欲搬入或搬出的工件18的層所對應的擋板。A plurality of frame members 28 are provided inside the furnace body 12, and the frame members 28 support the workpieces 18 in a plurality of layers. A door 26 is provided in front of the furnace body 12 to open or close the door 26 when loading and unloading the workpiece. The door 26 is composed of a plurality of shutters arranged in the vertical direction, and is a shutter that can open or close only the layer that is assigned to the workpiece 18 to be loaded or unloaded.
在爐體12的背面一側設置有複數加熱器20、複數循環風扇22以及複數通風道(duct)24。加熱器20、循環風扇22和通風道24，係夾住爐體12寬度方向(圖1A和圖1B中的左右方向)的中央部而配置於兩側。加熱器20係構成可加熱在爐體12內部循環的熱風。循環風扇22在爐體12內部產生循環風，吸入通過加熱器20的熱風，並向通風道24送出。在該實施形態中，使用西洛克風扇(sirocco fan)作為循環風扇22，但也可以使用其他種類的風扇。On the back side of the furnace body 12, a plurality of heaters 20, a plurality of circulating fans 22, and a plurality of ducts 24 are provided. The heater 20, the circulation fan 22, and the air passage 24 are disposed on both sides of the center portion of the furnace body 12 in the width direction (the horizontal direction in FIGS. 1A and 1B). The heater 20 constitutes hot air that can be circulated inside the furnace body 12. The circulation fan 22 generates circulating air inside the furnace body 12, sucks in hot air passing through the heater 20, and sends it to the air passage 24. In this embodiment, a sirocco fan is used as the circulation fan 22, but other types of fans may be used.
在爐體12的寬度方向上的兩端部(兩側面一側)，設置有複數耐熱過濾器14。耐熱過濾器14通過收集經過通風道24的熱風中所含有的微粒子，以將吹附於工件18的熱風清淨化。此外，作為耐熱過濾器14的例子，可以例舉的有HEPA過濾器，但不限於HEPA過濾器。A plurality of heat-resistant filters 14 are provided at both end portions (on both side surfaces) in the width direction of the furnace body 12. The heat-resistant filter 14 collects the fine particles contained in the hot air passing through the air passage 24 to purify the hot air blown to the workpiece 18. Further, as an example of the heat-resistant filter 14, a HEPA filter may be exemplified, but it is not limited to a HEPA filter.
在耐熱過濾器14和框架構件28之間，配置複數熱風整流板16，以調整熱風的循環路徑。如圖1A和圖1B所示，熱風整流板16配置在與耐熱過濾器14的配置位置對應的位置上。關於熱風整流板16的結構和作用等將在後面敍述。Between the heat-resistant filter 14 and the frame member 28, a plurality of hot air rectifying plates 16 are disposed to adjust the circulation path of the hot air. As shown in FIGS. 1A and 1B, the hot air rectifying plate 16 is disposed at a position corresponding to the arrangement position of the heat resistant filter 14. The structure, action, and the like of the hot air rectifying plate 16 will be described later.
如圖2所示，熱處理裝置10具有CPU50，在該CPU50上連接有ROM52、RAM54、感測器單元56、I/F部(輸入/輸出部)58、風扇驅動部60、加熱器驅動部62以及門驅動部64等。ROM52儲存有CPU50的動作所需要的複數程式。RAM54是用於CPU50臨時儲存資料的揮發性記憶體。感測器單元56由用以收集爐體12內部的溫度和壓力等資訊的複數計量儀器所構成。I/F部58具有與外部設備通信的功能。風扇驅動部60，係根據來自CPU50的信號，分別驅動複數循環風扇22。加熱器驅動部62，係根據來自CPU50的信號，分別驅動複數加熱器20。門驅動部64，係根據來自CPU50的信號，分別使門26的複數擋板進行打開或關閉的動作。As shown in FIG. 2, the heat treatment apparatus 10 has a CPU 50 to which a ROM 52, a RAM 54, a sensor unit 56, an I/F section (input/output section) 58, a fan drive section 60, and a heater drive section 62 are connected. And the door drive unit 64 and the like. The ROM 52 stores a plurality of programs required for the operation of the CPU 50. The RAM 54 is a volatile memory for the CPU 50 to temporarily store data. The sensor unit 56 is composed of a plurality of measuring instruments for collecting information such as temperature and pressure inside the furnace body 12. The I/F section 58 has a function of communicating with an external device. The fan drive unit 60 drives the plurality of circulating fans 22 in accordance with signals from the CPU 50. The heater driving unit 62 drives the plurality of heaters 20 based on signals from the CPU 50. The door drive unit 64 performs an operation of opening or closing the plurality of shutters of the door 26 in accordance with a signal from the CPU 50.
接著，使用圖3A和圖3B，對熱風整流板16的結構進行說明。設置熱風整流板16，是為了通過使熱風分散和集中，來調整供給至各層的各個工件的熱風風量。熱風整流板16包括：上側引導部161和下側引導部163，該上側引導部161和下側引導部163具有作為可將熱風引導至傾斜方向的引導面作用的斜面；以及連接部165，該連接部165連接上側引導部161和下側引導部163。在上側引導部161和下側引導部163，分別設置可通過熱風的複數貫通孔162。如圖3B所示，連接部165通過螺釘166等連接構件，固定安裝在框架164上，框架164設置在爐體12的規定位置上。Next, the structure of the hot air rectifying plate 16 will be described using FIG. 3A and FIG. 3B. The hot air rectifying plate 16 is provided to adjust the amount of hot air supplied to each workpiece of each layer by dispersing and concentrating the hot air. The hot air rectifying plate 16 includes an upper side guide portion 161 and a lower side guide portion 163 having a slope as a guide surface that can guide the hot air to the oblique direction, and a connecting portion 165. The connecting portion 165 connects the upper guiding portion 161 and the lower guiding portion 163. A plurality of through holes 162 through which hot air can pass are provided in the upper guide portion 161 and the lower guide portion 163, respectively. As shown in FIG. 3B, the connecting portion 165 is fixedly attached to the frame 164 by a connecting member such as a screw 166, and the frame 164 is provided at a predetermined position of the furnace body 12.
如圖4所示，熱風整流板16的上側引導部161的端部，配置在與工件18的配置位置大致相同的高度，並且，熱風整流板16的下側引導部163的端部，配置在與該工件18下一層的工件18的配置位置大致相同的高度。此外，熱風整流板16配置在工件18的左右兩側，但是配置在左側的熱風整流板16與配置在右側的熱風整流板16配置成在高度方向上相互錯開一層。As shown in FIG. 4, the end of the upper side guide portion 161 of the hot air rectifying plate 16 is disposed at substantially the same height as the position at which the workpiece 18 is disposed, and the end portion of the lower side guide portion 163 of the hot air rectifying plate 16 is disposed at The height is substantially the same as the position at which the workpiece 18 of the next layer of the workpiece 18 is disposed. Further, the hot air rectifying plates 16 are disposed on the right and left sides of the workpiece 18, but the hot air rectifying plates 16 disposed on the left side and the hot air rectifying plates 16 disposed on the right side are disposed to be shifted from each other in the height direction.
在上述的結構中，碰到熱風整流板16的大部分熱風，會沿上側引導部161和下側引導部163的斜面行進，另一方面，碰到熱風整流板16的一部分熱風通過貫通孔162並前進。因此，供給至配置在與上側引導部161的端部對應高度的工件18上面的熱風風量增加，另一方面，提供至該工件18下面的熱風風量減少。此外，供給至配置在與下側引導部163端部對應高度的工件下面的熱風風量增加，另一方面，供給至該工件18上面的熱風風量減少。而且，由於右側和左側的熱風整流板16相互錯開一層配置，在從右側提供的熱風風量多的層中，從左側提供的熱風風量減少，並且在從右側提供的熱風風量少的層中，從左側提供的熱風風量增加。In the above configuration, most of the hot air that hits the hot air rectifying plate 16 travels along the inclined surfaces of the upper side guide portion 161 and the lower side guide portion 163, and on the other hand, a part of the hot air that hits the hot air rectifying plate 16 passes through the through hole 162. And move forward. Therefore, the amount of hot air supplied to the upper surface of the workpiece 18 disposed at a height corresponding to the end of the upper guide portion 161 is increased, and on the other hand, the amount of hot air supplied to the lower surface of the workpiece 18 is reduced. Further, the amount of hot air supplied to the lower surface of the workpiece disposed at a height corresponding to the end of the lower guide portion 163 is increased, and the amount of hot air supplied to the upper surface of the workpiece 18 is reduced. Moreover, since the hot air rectifying plates 16 on the right side and the left side are shifted from each other in a layer configuration, in the layer having a large amount of hot air flow supplied from the right side, the amount of hot air supplied from the left side is reduced, and in the layer having a small amount of hot air supplied from the right side, The amount of hot air supplied from the left side increases.
如圖5A所示，在從左側提供的熱風風量多、從右側提供的熱風風量少的情況下，從左側提供的熱風，會穿過工件18寬度方向的中央部，並直到達工件18的右側。另一方面，如圖5B所示，在從右側提供的熱風風量多、從左側提供的熱風風量少的情況下，從右側提供的熱風穿過工件18寬度方向的中央部，並直到達工件18的左側。因此，可以防止發生如從左右提供了相同強度的熱風一樣，由於在工件18寬度方向中央部來自左右的熱風相互擠壓，導致工件18中央部分的熱風難以流動的不利情況。因此，可以防止工件18寬度方向的中央部的溫度降低。而且，在工件18的上面從左側提供強的熱風的情況下，由於在相同工件18的下面從右側提供強的熱風，所以不會在工件18的左右產生溫差。例如在該實施形態的情況下，工件18的加熱設定溫度設定為230度，在工件18的整個區域可以得到不會產生正負3度以上偏差的好結果。As shown in FIG. 5A, in the case where the amount of hot air supplied from the left side is large and the amount of hot air supplied from the right side is small, the hot air supplied from the left side passes through the central portion in the width direction of the workpiece 18 until reaching the workpiece 18. Right. On the other hand, as shown in FIG. 5B, in the case where the amount of hot air supplied from the right side is large and the amount of hot air supplied from the left side is small, the hot air supplied from the right side passes through the center portion in the width direction of the workpiece 18, and reaches the workpiece. The left side of 18. Therefore, it is possible to prevent the hot air from the right and left in the central portion in the width direction of the workpiece 18 from being pressed against each other in the center portion in the width direction of the workpiece 18, so that the hot air in the central portion of the workpiece 18 is hard to flow. Therefore, it is possible to prevent the temperature of the central portion of the workpiece 18 in the width direction from decreasing. Further, in the case where strong hot air is supplied from the left side on the upper surface of the workpiece 18, since strong hot air is supplied from the right side under the same workpiece 18, a temperature difference does not occur on the right and left sides of the workpiece 18. For example, in the case of this embodiment, the heating set temperature of the workpiece 18 is set to 230 degrees, and a good result that no deviation of plus or minus three degrees or more is generated in the entire region of the workpiece 18.
此外，由於通過耐熱過濾器14的熱風風量不變化，所以不會因由耐熱過濾器14產生的灰塵導致爐體12內部的潔淨度降低。而且由於未改變支承工件18的框架構件28的結構，因此配置每單位個數的工件18所需要的空間也不會擴大。Further, since the amount of hot air passing through the heat-resistant filter 14 does not change, the cleanliness inside the furnace body 12 is not lowered by the dust generated by the heat-resistant filter 14. Moreover, since the structure of the frame member 28 supporting the workpiece 18 is not changed, the space required to arrange the workpiece 18 per unit number is not enlarged.
圖6表示本發明其他實施形態的熱處理裝置102的概況。由於熱處理裝置102的基本結構與上述的熱處理裝置10相同，所以省略了說明。熱處理裝置102與熱處理裝置10不同的是不具有上述的熱風整流板16。Fig. 6 is a view showing an outline of a heat treatment apparatus 102 according to another embodiment of the present invention. Since the basic configuration of the heat treatment apparatus 102 is the same as that of the above-described heat treatment apparatus 10, the description is omitted. The heat treatment apparatus 102 differs from the heat treatment apparatus 10 in that it does not have the above-described hot air rectifying plate 16.
通常，在不使用上述的熱風整流板16，而是從工件18的左右提供相同強度的熱風的情況下，在工件18的中央部會產生比其他部分的溫度低的低溫區70。In general, when the hot air rectifying plate 16 described above is not used, but hot air of the same strength is supplied from the right and left sides of the workpiece 18, a low temperature region 70 having a lower temperature than the other portions is generated in the central portion of the workpiece 18.
因此，在熱處理裝置102中，通過CPU50控制風扇驅動部60，可與時間同步改變來自左右的熱風的強度。Therefore, in the heat treatment apparatus 102, the fan drive unit 60 is controlled by the CPU 50, and the intensity of the hot air from the right and left can be changed in synchronization with time.
在該實施形態中，逐漸使來自右側的熱風增強，同時使來自左側的熱風減弱，此後，如圖7A所示，僅在規定的時間內，從右側提供強的熱風。接著，逐漸將來自左右的熱風的強度調整至相同，此後，如圖7B所示，僅在規定的時間內，從左右提供相同強度的熱風。接著，逐漸增強來自左側的熱風，同時減弱來自右側的熱風，此後，如圖7C所示，僅在規定的時間內，從左側提供強的熱風。In this embodiment, the hot air from the right side is gradually increased while the hot air from the left side is weakened, and thereafter, as shown in Fig. 7A, strong hot air is supplied from the right side only for a predetermined period of time. Next, the intensity of the hot air from the right and left is gradually adjusted to be the same, and thereafter, as shown in FIG. 7B, the hot air of the same intensity is supplied from the right and left only for a predetermined time. Then, the hot air from the left side is gradually increased while the hot air from the right side is weakened, and thereafter, as shown in Fig. 7C, strong hot air is supplied from the left side only for a prescribed time.
在熱處理裝置102中，以不發生急劇的風量變化的方式，每經過規定的時間，逐漸改變成如圖7A→圖7B→圖7C→圖7B→圖7A→圖7B→圖7C......的狀態。In the heat treatment apparatus 102, in a manner that does not cause a sudden change in the amount of wind, every predetermined period of time is gradually changed to as shown in Fig. 7A → Fig. 7B → Fig. 7C → Fig. 7B → Fig. 7A → Fig. 7B → Fig. 7C. ..status.
按照以上的實施形態，如經常從左右提供相同強度的熱風時一樣，可防止熱風難以在工件18的中央部分流動的不利情況，並且能夠防止工件18的中央部溫度降低的不利情況。而且，由於每隔規定的時間，使來自左右的熱風的強弱關係反轉，所以不會在工件18的左右產生溫差。According to the above embodiment, as in the case where the hot air of the same strength is often supplied from the left and right, the disadvantage that the hot air is hard to flow in the central portion of the workpiece 18 can be prevented, and the disadvantage of the temperature reduction in the central portion of the workpiece 18 can be prevented. Further, since the strength relationship between the hot air from the right and left is reversed every predetermined time, a temperature difference does not occur in the right and left of the workpiece 18.
此外，由於通過耐熱過濾器14的熱風風量不產生急劇變化，而且通過耐熱過濾器14的熱風移動方向也不改變，所以不會從耐熱過濾器14產生灰塵，能夠保持爐體12內部的潔淨度。Further, since the amount of hot air passing through the heat-resistant filter 14 does not change abruptly, and the direction of hot air movement by the heat-resistant filter 14 does not change, dust is not generated from the heat-resistant filter 14, and the cleanliness inside the furnace body 12 can be maintained. .
在此，說明了間歇式地改變來自左右的熱風強弱關係的例子，但也可以連續改變來自左右的熱風的強弱關係。例如，對於施加在左右循環風扇22上的電壓，可以進行間歇式地傾斜輸出控制(斜面控制(ramping control))；此外，也可以通過進行連續地傾斜輸出控制(斜面控制)，改變經常施加電壓。Here, an example in which the relationship between the hot and the hot air from the right and left is intermittently changed is described, but the relationship between the strong and weak hot air from the left and right may be continuously changed. For example, for the voltage applied to the left and right circulation fan 22, intermittently tilting output control (ramping control) can be performed; in addition, it is also possible to change the frequently applied voltage by performing continuous tilt output control (bevel control) .
此外，不僅可以將施加在左右循環風扇22上的電壓與時間經過同步控制成線性地增加或減少，也可以描繪正弦波的方式改變該等電壓。即使任意的情況下，當增強施加在左右循環風扇22中的一個上的電壓時，施加在另一個上的電壓減弱，相反地，在減弱施加在一個風扇上的電壓時，則施加在另一個上的電壓增強，重要的是，經如此地調整，使來自左右的熱風的強弱關係反轉。此外，避免使施加在左右循環風扇22上的電壓發生階梯式變化也是重要的。Further, not only can the voltage applied to the left and right circulation fans 22 be synchronously controlled to linearly increase or decrease with time, but also the voltage can be changed by drawing a sine wave. Even in any case, when the voltage applied to one of the left and right circulation fans 22 is increased, the voltage applied to the other is weakened, and conversely, when the voltage applied to one fan is weakened, the other is applied to the other. The voltage on the rise is important, and it is adjusted so that the strong and weak relationship of the hot air from the left and right is reversed. Further, it is also important to avoid a stepwise change in the voltage applied to the left and right circulation fans 22.
上述實施形態的說明都只是例子，不應該認定為限制的內容。本發明的範圍不是由上述的實施形態而是由申請專利範圍表示。並且，本發明的範圍包括與申請專利範圍等同的內容和在本發明範圍內的所有變更。The description of the above embodiments is merely an example and should not be construed as limiting. The scope of the present invention is not indicated by the above-described embodiments but by the scope of the claims. Further, the scope of the present invention includes the equivalents of the claims and all modifications within the scope of the invention.
10、102．．．熱處理裝置10, 102. . . Heat treatment device
12．．．爐體12. . . Furnace body
14．．．耐熱過濾器14. . . Heat resistant filter
16．．．熱風整流板16. . . Hot air rectifier
18．．．工件18. . . Workpiece
20．．．加熱器20. . . Heater
22．．．循環風扇twenty two. . . Circulating fan
24．．．通風道twenty four. . . Ventilation duct
26．．．門26. . . door
28．．．框架構件28. . . Frame member
50．．．CPU50. . . CPU
52．．．ROM52. . . ROM
54．．．RAM54. . . RAM
56．．．感測器單元56. . . Sensor unit
58．．．I/F部(輸入/輸出部)58. . . I/F section (input/output section)
60．．．風扇驅動部60. . . Fan drive
62．．．加熱器驅動部62. . . Heater drive unit
64．．．門驅動部64. . . Door drive
70．．．低溫區70. . . Low temperature zone
161．．．上側引導部161. . . Upper guide
162．．．貫通孔162. . . Through hole
163．．．下側引導部163. . . Lower side guide
164．．．框架164. . . frame
165．．．連接部165. . . Connection
166．．．螺釘166. . . Screw
圖1A及圖1B，是表示本發明實施形態的熱處理裝置之概略圖。1A and 1B are schematic views showing a heat treatment apparatus according to an embodiment of the present invention.
圖2是表示熱處理裝置概略的方塊圖。Fig. 2 is a block diagram showing an outline of a heat treatment apparatus.
圖3A及圖3B是表示熱風整流板之構造圖。3A and 3B are views showing the structure of a hot air rectifying plate.
圖4是表示熱風整流板作用的圖。Fig. 4 is a view showing the action of the hot air rectifying plate.
圖5A及圖5B是表示熱風的流通狀態的圖。5A and 5B are views showing a flow state of hot air.
圖6是表示本發明其他實施形態的熱處理裝置的概略圖。Fig. 6 is a schematic view showing a heat treatment apparatus according to another embodiment of the present invention.
圖7A至圖7C是表示控制熱風的流通狀態例的圖。7A to 7C are views showing an example of a flow state in which hot air is controlled.
10．．．熱處理裝置10. . . Heat treatment device
12．．．爐體12. . . Furnace body
14．．．耐熱過濾器14. . . Heat resistant filter
16．．．熱風整流板16. . . Hot air rectifier
18．．．工件18. . . Workpiece
20．．．加熱器20. . . Heater
22．．．循環風扇twenty two. . . Circulating fan
24．．．通風道twenty four. . . Ventilation duct
26．．．門26. . . door
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| JP2009065792A JP5538740B2 (en) | 2009-03-18 | 2009-03-18 | Heat treatment equipment |
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| TW201040477A TW201040477A (en) | 2010-11-16 |
| TWI507651B true TWI507651B (en) | 2015-11-11 |
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| TW099106574A TWI507651B (en) | 2009-03-18 | 2010-03-08 | Heat treatment apparatus |
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| JP (1) | JP5538740B2 (en) |
| KR (2) | KR101652431B1 (en) |
| CN (1) | CN101838726A (en) |
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| JP2012084805A (en) * | 2010-10-14 | 2012-04-26 | Koyo Thermo System Kk | Heat treatment equipment |
| CN103575094A (en) * | 2012-07-27 | 2014-02-12 | 苏州工业园区杰士通真空技术有限公司 | Vacuum furnace convection heating device |
| US9073792B2 (en) * | 2012-11-13 | 2015-07-07 | Corning Incorporated | Methods for improved atmosphere control through secondary gas pressure wave firing |
| KR101815237B1 (en) * | 2016-08-11 | 2018-01-05 | 주식회사 화인 코리아 | Heat treatmnet oven for heating cable |
| JP6938402B2 (en) * | 2018-02-22 | 2021-09-22 | 光洋サーモシステム株式会社 | Heat treatment equipment |
| JP6873071B2 (en) * | 2018-03-06 | 2021-05-19 | エスペック株式会社 | Environment forming equipment, environment forming unit and heat treatment equipment |
| CN108507350A (en) * | 2018-03-20 | 2018-09-07 | 佛山市几何陶瓷有限公司 | The uniform kiln of heat in one kind |
| CN108800937A (en) * | 2018-08-24 | 2018-11-13 | 洛阳纳维特炉业有限公司 | A kind of box electric kiln convenient for ash discharge and raising heating rate |
| JP7261573B2 (en) * | 2018-12-13 | 2023-04-20 | 株式会社ジェイテクトサーモシステム | Heat treatment equipment |
| CN110230928A (en) * | 2019-07-05 | 2019-09-13 | 太仓贝斯特机械设备有限公司 | It is a kind of with the rotary storing cage and more stick furnaces that can fill more stick functions |
| CN111455145A (en) * | 2020-05-20 | 2020-07-28 | 吕友飞 | Batch quenching device for hardware fitting production and quenching method thereof |
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|---|---|---|---|---|
| JPH1163838A (en) * | 1997-08-19 | 1999-03-05 | Tabai Espec Corp | Hybrid heat treatment apparatus |
| JP2008241076A (en) * | 2007-03-26 | 2008-10-09 | Ngk Insulators Ltd | Heating method, intermittent feed-type tunnel furnace and batch furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI542849B (en) | 2016-07-21 |
| KR20160048051A (en) | 2016-05-03 |
| JP5538740B2 (en) | 2014-07-02 |
| CN101838726A (en) | 2010-09-22 |
| KR20100105379A (en) | 2010-09-29 |
| TW201534856A (en) | 2015-09-16 |
| JP2010216753A (en) | 2010-09-30 |
| KR101699825B1 (en) | 2017-01-25 |
| TW201040477A (en) | 2010-11-16 |
| KR101652431B1 (en) | 2016-08-30 |
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