200417709 玫、發明說明 ， (發明說明應敘明：發明所屬之技術領域、先前技術、內容、實施方式及圖式簡單說明） 【發明所屬之技術領域】 本發明係有關於一種將液晶用玻璃基板或形成在其表面 ‘ 之膜等進行加熱或燒成之熱處理裝置，特別係有關於一種被 稱之爲熱風循環式爐之形式的熱處理裝置。 【先前技術】 已知係有一種熱處理裝置，爲具備有：爐，係於內部設有 鲁 熱處理室；開閉閘，係被設在工件搬出入用之爐口部；熱風 供給裝置，係將熱風呈平行地由熱處理室之一端側朝向另一 端側而供給至爐口部。在專利文獻1之日本專利特開2 0 0 0 -1〇4 9 24號公報中，係揭示有設置由吹出板及吹入板所形成之 風量調整裝置，同時，在吹出板及吹入板上所形成之吸附孔 爲具有不同之徑値尺寸。 〔發明所欲解決之問題〕 在此種形式之熱處理裝置中，因爐口部之自動開閉閘側之 · 放熱較多，故而在開閉閘附近部分，爲具有溫度較爐內之工 件處理空間的其他部分爲低之問題。爲解決此種問題，係必 須要將爐整體增大、抑或在爐口部附近追加輔助加熱器等手 段’進而伴隨著熱處理裝置之大型化或加熱設備之高成本化 等缺點。即使在上述專利文獻1之日本專利特開2 0 0 0 - 1 〇 4 9 2 4 號公報中，其風量調整裝置之構造亦未考慮爐口附近之特 性，而具有相同之問題。 此外，此種熱處理裝置係具有使用在液晶用玻璃基板之燒 200417709 成等程序中的情況，在此種情況下，用以防止於爐內產生之 昇華物流出至爐外所造成之污染者’係形成爲主要課題。 本發明之目的係爲提供一種熱處理裝置’其係不會伴隨有 熱處理裝置之大型化或加熱設備之高成本化等缺點，而可解 除在爐口附近部份中之溫度降低之問題。 【發明內容】 藉由本發明所達成之熱處理裝置’係具備有：爐，係於內 部設有熱處理室；開閉閘，係被設在工件搬出入用之爐口 部；熱風供給裝置，係將熱風呈平行地由熱處理室之一端側 朝向另一端側而供給至爐口部；其特徵在於：更具備有風量 調整裝置，係將熱風量調整呈在爐口部附近呈較多狀。 此種熱處理裝置係爲一種較佳爲適用於無塵爐（clean oven)中之裝置，一般係將爐內調整呈負壓。開閉閘係例如 爲將上下作動自如狀之多數垂直板狀構成構件形成爲上下 並列狀之自動式之物，在此情況下，於熱處理室內係設有固 定式之被處理物載置支撐台，其係具有將多數板狀被處理物 於上下隔有間隔、且以水平狀態所載置。開閉閘係亦可爲經 由絞鏈而被安裝在爐壁之手動式之物。 熱風供給裝置係被形成爲，由加熱器、循環風扇等所形 成，將水平方向流動之熱風供給至熱處理室的同時，將通過 熱處理室後之熱風經由加熱器及循環風扇而進行循環。 若藉由本發明之熱處理裝置後，係使熱風量在爐口附近調 整呈較多狀，因此即使是開閉閘側之放熱較多，仍可減輕爐 200417709 口部附近之溫度減低的影響，而可確保較大之爐內的有效加 熱容積。此外，藉由製造出靠近於開閉閘側之一方的熱風流 動，而可獲得與氣簾（air curtain)相同之效果，其結果，伴 隨於開閉閘之開閉，而可減少外氣之捲入，且可減輕爐口部 附近之溫度減低之影響。此外，也因爲亦可防止伴隨於開閉 閘之開閉的爐內環境氣體之朝外部流出，而亦可防止在爐內 產生之昇華物朝爐外流出。 風量調整裝置係具備有設在熱處理室之一端側之吹出 板、以及設在其另一端側之吸入板，較佳爲，吹出板之爐口 部附近的開口率係爲8 0〜1 0 0 %，除了爐口部附近之部分的 開口率係爲2 0〜6 0 %，吸入板之爐口部附近的開口率係爲 80〜100%，且除了爐口部附近之部分的開口率係爲6〜18 %。在吹出板及吸入板方面，係設有多數之熱風通過用貫通 孔，吹出板之開口率係以設成（被設於吹出板之貫通孔之面 積總合）/(吹出板之表面面積）X 100而求得，吸入板之開口率 係以設成（被設於吸入板之貫通孔之面積總合）/(吸入板之表 面面積）X 1 0 0而求得。當吹出板之爐口部附近之開口率小於 80%後，將形成爲無法充分地獲得上述之各效果。而當除了 吹出板之爐口部附近之部分的開口率小於2 0 %後，將形成熱 風無法充分地供給至熱處理室。此外，當除了吹出板之爐口 部附近之部分的開口率大於60%後，將形成爲無法充分地獲 得上述之各效果。此外，當吸入板之爐口部附近之開口率小 於8 0 %後，將形成爲無法充分地獲得上述之各效果。而當除 200417709 了吸入板之爐口部附近之部分的開口率小於6後，將造成在 熱處理室內的熱風流動之惡化。當除了吸入板之爐口部附近 之部分的開口率大於1 8 %後，將形成爲無法充分地獲得上述 之各效果。 在吹出板及吸入板上，係以所定之大小及所定之節距設有 貫通孔。節距及各貫通孔之大小係可爲一定狀、亦可爲非一 定狀。所謂的爐口部附近係指，例如，爲由爐口部之一爐壁 內面至熱處理室之最內部爲止的距離（深度）之1/8程度左 φ 右，不過，此種距離並不僅限於此，亦可藉由深度之1/10 〜1 /6左右來作適當地變更。而所謂的爐口部附近之開口率 爲1 〇〇 %，係意味著在該位置上並未存在有吹出板及吸入 板。 風量調整裝置之更爲具體之構造係例如爲，藉由使所定之 間隙設在吹出板與爐口側之爐壁內面之間，而使吹出板之爐 口部附近之開口率設爲1 0 0 %，且藉由使所定之間隙設在吸 入板與爐口側之爐壁內面之間，而使吸入板之爐口部附近之 · 開口率設爲1 0 0 %。 在本發明之熱處理裝置中，更於開閉閘之爐內側上，設有 使熱風沿著開閉閘之爐內面移動之風洞。風洞係爲，例如可 藉由使斷面方形之中空材料接合至開閉閘之爐內面而獲 得。如此，係增大氣簾效果，而可更加提昇上述之各效果。 【實施方式】 以下，參照圖式’針對於將本發明適用在彩色濾光器燒成 -10- 200417709 程序中所使用之無塵爐的實施例來進行說明。在以下之說明 中，係將第1圖之左右稱爲左右，將第1圖之下方及第2圖 之左方稱爲前，將第1圖之上方及第2圖之右方稱爲後，以 及將第2圖之上下稱爲上下者。 熱處理裝置係具備有：爐（1)’係被配置在基座（B)上、且 於內部設有熱處理室（R);熱風供給裝置（2)，係配置在爐（1) 右方、且將熱風供給至爐（1)內；被處理物載置支撐台（3)， 係在熱處理室（R)內，將多數之板狀被處理物（P)於上下隔有 間隔，且具有以水平狀態載置之多數之被處理物載置位置； 自動開閉閘（5 )，係被形成在爐（1 )之前壁（1 a)上，以形成爲 將熱處理室（R)與爐（1)外呈連通狀；風量調整裝置（19)，係 將熱風之量調整呈在爐口部（4)附近呈較多狀。 熱風供給裝置（2)係具有：加熱器（1 5)，係被設在右壁（lb) 後部、且將循環空氣進行加熱；導引壁（1 6)，係將循環空氣 由設在右壁（lb)與熱處理室（R)之間的中間之後方而朝前方 導引；循環風扇（17)，係被設在右壁（lb)前部，且將循環空 氣由前方朝左方送出；過濾器（1 8 )，係去除來自流動在設於 熱處理室（R)與導引壁（16)之間的熱處理室（R)之循環空氣的 固體異物。 熱處理室（R)係爲，上方爲藉由水平板（2〇)所圍繞、右方 爲藉由垂直狀吹出板（2 1)所圍繞、左方爲藉由垂直狀吸入板 (22)所圍繞、後方爲藉由垂直狀後方封閉板（23)所圍繞。在 吹出板（21)及垂直狀吸入板（22)上，以形成爲所定之開口率 200417709 而設有多數之熱風通過用貫通孔（2 1 a) ( 2 2 a)。在熱處理室（R) 內，係使熱風由右方朝左方流動，該等熱風係爲，在爐（1 ) 之左壁（lc)與吸入板（22)之間、以及後方封閉板（23)與爐（1) 之後壁（1 d)之間流動，且返回至爐（1 )內之右方、亦即爲返回 熱風供給裝置（2) 置處。藉此’由熱處理室（R)內之水平板 (2 0 )而使下方形成爲所疋溫度：’以使爐（1 )被處理物（P )被加 熱。 爐口部（4)之左右方向之寬度係形成爲，較被處理物（P)之 寬度爲寬、且爐口部（4)之上緣係呈位於較被載置於支撐台（3) 之最上方之被處理物（P)更爲上方，而爐口部（4)之下緣係呈 位於較被載置於支撐台（3)之最下方之被處理物（P)更爲下 方。 開閉閘（5)係爲，將分別呈上下作動自如狀之多數之垂直 板狀構成構件（5 a)形成爲並列於上下狀。此外，當各構成構 件（5a)取得最下方之位置，且將各構成構件（5a)位於基本位 置上時，便使得爐口部（4)全閉。構成構件（5 a)係分別被配置 呈不至與爐（1)直接接觸狀。在爐口部（4)端緣與構成構件（5a) 之間係配設有例如爲聚四氟乙烯製之短角筒狀密封件 (I4)。再者，在密封件（14)與構成構件（5 a)之間係隔有間隔。 並且，構成構件（5 a)係如下所述，被設置呈上下作動自如 狀。使朝上下延伸之斷面爲方形導引構件（6)，固定於爐（1 ) 之前壁（1 a)外面中之爐口部（4 )之左側上。另一方面，使斷面 後方爐口部略呈凹狀構件（7 )，固定於對應在構成構件（5 a) 200417709 之後面中之導引構件的位置上，且使此種凹狀構件（7)爲對 於導引構件（6)嵌合呈於上下滑動自如狀。此外，在爐（1 )之 前壁（〗a)外面中之爐口部（4)之右側上，爲經由斷面爲L字型 之安裝構件（9)固定有朝上下延伸、且於左方開口之斷面溝 形構件（10)。另一方面，於構成構件（5a)之右緣上，係安裝 有繞朝左右方向延伸之水平軸旋轉之輥輪（8)，且使該輥輪（8) 呈旋轉自如狀地嵌入溝形構件（1 0)之溝中。 在各構成構件（5a)之前面左上部上，係分別固定有突出於 φ 前方之形成爲水平板狀之氣缸安裝構件（1 3)。此外，在基座 (B)上’係固定具有較該上面更爲朝上方突出之水平板狀部 分之氣缸安裝構件（11)。並且，使氣缸（12)以使其軸桿朝上 方延伸狀地，固定在除了最上之構成構件（5 a)以外的各安裝 構件（13)之上面、以及被固定在基座（B)之安裝構件（11)之水 平部分之上面，該軸桿之上端係被固定在位於各氣缸（1 2 )上 方之安裝構件（13)之下面。並且，藉由使1個氣缸（12)之軸 桿上昇，在該氣缸（I2)之軸桿上，將經由安裝構件（13)所固 鲁 定之構成構件（5a)與位於較該構成構件（5 a)更爲上方之構成 構件（5a)、以及位於較軸桿已上昇之氣缸（12)更爲上方之氣 缸（12)，呈一體狀移動。 風量調整裝置（19)係爲，具備有包圍熱處理室（R)之上述 吹出板（2 1 )及吸入板（2 2 )，在該實施例中，在吹出板（2 1 )以 及吸入板（22)之前端與爐（1)之前壁（la.)內面之間係設有所 定之間隙（S)。藉此，吹出板（21)以及吸入板（2 2)之爐口部附 -13- 200417709 近之開口比率係設成1 〇 〇 %。有關於吹出板（2 1 )以及吸入板 (2 2)之爐□部附近以外之開口比率，吹出板（21)係形成爲約 40%，吸入板（22)係形成爲約12%。上述所定間隙（S)、亦 即爲吹出板（21)以及吸入板（22)之前端與爐（1)之前壁（la)內 面之間的距離’係形成爲後方封閉板（23)與爐（1)之前壁（la) 內面之間的距離（熱處理室（R)之深度）之〗/ 8左右。此外，於 上述所例示之各數値，係用以將熱風之量調整呈在爐口部附 近形成爲較多狀’只要是可達成其目的之範圍內係可進行種 春 種變更。 在開閉閘（5 )之各構成構件（5 a)之內側上，係接合有高度爲 等於構成構件（5a)之高度的斷面縱長方形之中空材料（5b)， 該中空材料（5b)內部係形成爲熱風通路、亦即爲形成風洞 (24)。藉由該風洞（24)，熱風係形成爲沿著開閉閘（5)內面而 朝水平方向前進。 藉由上述熱處理裝置後，以熱風供給裝置（2)所進行循環 之熱風，係通過過濾器（18)而被供給至熱處理室（R)內。已被 隹 淨化之熱風係於熱處理室（R)內，由吹出板（21)朝向吸入板 (2 2 )、亦即爲以細箭頭（s 1 )所示之方向前進。此時，吹出板 (21)以及吸入板（2 2)之爐口部附近之開口率係形成爲1〇〇 % ’因此’在吹出板（21)以及吸入板（2 2)之前端與開閉閘（5) 之間，亦使熱風由右方朝向左方流動，在爐口部（4)附近上 則形成爲使大量之熱風以由粗箭頭（S 2)所示來流動。熱風係 爲，在沿著開閉閘（5 )內面所形成之風洞（2 4 )，亦以細箭頭（S 3 ) -14- 200417709 所示之方向流動。如此，熱風之量係被調整呈在爐口部（4) 附近爲呈較多狀，即使是開閉閘（5)側之放熱較多，仍可減 輕爐口部（4)附近之溫度降低之影響，而可確保較大之爐（1 ) * 內之有效加熱容積。此外，藉由大量之熱風（S 2 )及風洞（2 4 ) 內熱風（S3)，係可獲得與氣簾相同之效果，即使進行以防止 伴隨於開閉閘（5)之開閉的外氣捲入，亦可減輕爐口部（4)附 近之溫度降低之影響。並且，亦可防止伴隨於開閉閘（5 )之 開閉的爐內環境氣體之朝外部的流出，因此，亦可防止在爐 φ 內產生之昇華物朝爐外流出。 實際上，將以本發明之熱處理裝置所得之玻璃基板溫度分 布與習知狀態中所得之物進行比較之下，在習知裝置中，以 閘開閉所造成之溫度降低最大約爲3 . 5 t，在「閘-閉」下之 溫度安定時之玻璃基板之不均係約爲6.8 °C。相對於此，在 本發明之熱處理裝置中，以閘開閉所造成之溫度降低最大約 爲2.4°C，在「閘-閉」下之溫度安定時之玻璃基板之不均係 約爲3 °C，因而可確認到係可以簡單之構造來達成極大之效 · 果。 此外，在上述實施例中，開閉閘（5)係呈現出一種自動式 之物，係將上下作動自如之多數的垂直板狀構成構件（5 a)於 上下並列所形成，且使各構成構件（5 a)藉由氣缸（1 2 )而上下 作動’不過’開閉蘭之構造並非僅限定於此，本發明係爲， 在防止起因於爐□部之放熱較多時所造成之溫度降低的問 題時，無關於自動式或手動式，係可適用於使用有各種形式 -15- 200417709 之閘的熱處理裝置。 【圖式簡單說明】 第1圖係藉由本發明所達成之熱處理裝置之水平斷面 圖。 第 2圖係藉由本發明所達成之熱處理裝置之垂直斷面 圖。 【主要部分之代表符號說明】 1 :爐 2 :熱風供給裝置 4 :爐口部 5 :開閉閘 5b :風洞 1 9 :風量調整裝置 2 1 :吹出板 2 2 :吸入板 2 4 :風洞 P :被處理物 R :熱處理室 S :間隙200 417 709 Mei, the invention described, (description of the invention shall explain the: invention of the art, the prior art, the contents of the embodiments and drawings briefly described) BACKGROUND Field of View of the Invention The present invention relates to a liquid crystal glass substrate A heat treatment device for heating or firing, such as a film formed on its surface, is particularly related to a type of heat treatment device called a hot-air circulation type furnace. [Prior art] It is known that there is a heat treatment device. The heat treatment device is provided with: a furnace, which is provided with a Lu heat treatment chamber; an opening and closing gate, which is provided at the mouth of the furnace for moving in and out of the workpiece; It was supplied to the furnace in parallel from one end of the mouth portion of the heat treatment chamber side toward the other end side. In Patent Document 1 of Japanese Patent Laid-Open 2000 -1〇4 Publication 24. 9, line have disclosed the amount of wind set by the blow-out panel is formed and blown into the plate adjusting device, while the blowing plate and the blowing plate the suction hole is formed to have a different size diameter Zhi. [Problems to be Solved by the Invention] In this type of heat treatment device, since the automatic opening and closing gate side of the furnace mouth part emits a lot of heat, the part near the opening and closing gate has a processing space with a temperature higher than that of the workpiece in the furnace. other parts of the problem is low. In order to solve such problems, it is necessary to increase the whole furnace or add auxiliary heaters near the mouth of the furnace, and the disadvantages include the increase in the size of the heat treatment device and the increase in the cost of the heating equipment. Even in the 2000 Patent Document 1 of Japanese Patent Laid-Open --1 492 square Publication 4, which air volume adjusting means configured nor consider the characteristics of the vicinity of the furnace opening, having the same problems. In addition, this heat treatment device is used in the process of firing glass substrates for liquid crystals in 200417709. In this case, it is used to prevent contamination caused by the sublimation flow generated in the furnace to the outside of the furnace. Department formed as a major issue. The object of the present invention is to provide a heat treatment device 'which does not accompany the disadvantages of increasing the size of the heat treatment device or increasing the cost of the heating equipment, and can solve the problem of lowering the temperature in the vicinity of the furnace mouth. [Summary of the Invention] The heat treatment device 'reached by the present invention is provided with: a furnace, which is provided with a heat treatment chamber inside; an opening / closing shutter, which is provided at the mouth of a furnace for carrying in and out of a workpiece; is supplied to the furnace opening portion in a parallel manner from one end toward the other end side of the thermal treatment chamber; characterized in that: there is further provided air volume adjusting means, to adjust the amount of hot air was based in the vicinity of the mouth of the furnace was more like. This heat treatment device is a device which is preferably suitable for use in a clean oven, and generally the furnace is adjusted to a negative pressure. The opening / closing gate system is, for example, an automatic type in which a plurality of vertical plate-like constituent members which can move up and down are formed side by side in an up and down manner. In this case, a fixed type processing object supporting platform is provided in the heat treatment room. It has a plurality of plate-like objects to be placed in a horizontal state with a space between the upper and lower sides. The opening / closing brake system can also be a manual type which is installed on the furnace wall by a hinge. The hot air supply device is formed by a heater, a circulating fan, and the like. The hot air flowing in the horizontal direction is supplied to the heat treatment chamber, and the hot air passing through the heat treatment chamber is circulated through the heater and the circulation fan. If the heat treatment device of the present invention is adopted, the amount of hot air is adjusted near the mouth of the furnace, so even if there is a lot of heat release on the opening and closing gate side, the effect of the temperature reduction near the mouth of the furnace 200417709 can be reduced, and Ensure effective heating volume in larger furnaces. In addition, the same effect as an air curtain can be obtained by producing hot air flow near one side of the opening and closing gates. As a result, the opening and closing of the opening and closing gates can reduce the involvement of outside air, and It can reduce the influence of temperature decrease near the furnace mouth. In addition, it is also possible to prevent the ambient gas in the furnace accompanying the opening and closing of the shutter from flowing to the outside, and it is also possible to prevent the sublimate produced in the furnace from flowing out of the furnace. The air volume adjustment means provided at one end with a system comprising a heat treatment chamber side of the blow-out panel, and a suction plate provided on the other end side thereof, preferably, an aperture ratio portion near the oven opening of the blow-out panel 00 based 0~1 8 %, in addition to the opening ratio of the portion near the oven opening portion 2 is based 0~6 0%, the vicinity of the suction opening of the nozzle plate of the furnace system is 80 ~ 100% and the opening ratio of the line portion in the vicinity of the mouth of the furnace in addition to It is 6 to 18%. In the blow-out plate and the suction plate, most hot-air passing through holes are provided, and the opening ratio of the blow-out plate is set to (the total area of the through-holes provided in the blow-out plate) / (the surface area of the blow-out plate) and X 100 is obtained, the aperture ratio of the suction plate is provided to the system in order to (a through hole is provided in the area of the suction plate of the aggregate) / (surface area of the suction plates of) X 1 0 0 be determined. When the opening ratio near the mouth portion of the blow-out plate is less than 80%, the above-mentioned effects cannot be obtained sufficiently. When the blow-out portion of the furnace in addition to the opening ratio of the vicinity of the mouth portion of the plate is less than 20% and the hot air is formed is not sufficiently supplied to the thermal treatment chamber. In addition, when the opening ratio of the portion other than the vicinity of the furnace mouth portion of the blow-out plate is more than 60%, it will be formed that the above-mentioned effects cannot be sufficiently obtained. In addition, when the opening ratio near the furnace mouth portion of the suction plate is less than 80%, the above-mentioned effects cannot be obtained sufficiently. When the opening ratio of the portion near the furnace mouth of the suction plate except 200417709 is less than 6, the hot air flow in the heat treatment chamber will be deteriorated. When the furnace in addition to the suction nozzle plate portion in the vicinity of the aperture ratio of greater than 18% is not sufficiently formed to obtain each of the above-described effect. The blow-out plate and the suction plate are provided with through holes with a predetermined size and a predetermined pitch. The pitch and the size of each through hole can be fixed or non-constant. The vicinity of the furnace mouth part means, for example, about 1/8 of the distance (depth) from the inner surface of the furnace wall of one of the furnace mouth parts to the innermost part of the heat treatment chamber. It is limited to this, and may be appropriately changed by about 1/10 to 1/6 of the depth. The so-called aperture ratio of the portion near the oven opening of thousand and 1%, based not mean there is a suction plate and the blow-out panels in this position. A more specific structure of the air volume adjustment device is, for example, by setting a predetermined gap between the blow-out plate and the inner surface of the furnace wall on the side of the furnace mouth, and setting the opening ratio near the mouth portion of the blow-out plate to 1 00% and by making a predetermined gap is provided between the plate and the suction port side of the furnace inner surface of the furnace wall, the opening ratio of the suction-portion near the oven opening of the plate is set to 100%. In the heat treatment apparatus of the present invention, a wind tunnel for moving hot air along the inside surface of the furnace that opens and closes the gate is provided on the inside of the furnace that opens and closes the gate. The wind tunnel is obtained, for example, by joining a hollow material with a square cross-section to the inner surface of the furnace which opens and closes the gate. In this way, the air curtain effect is increased, and each of the above effects can be further enhanced. DESCRIPTION OF EMBODIMENTS Hereinafter, with reference to the drawings' for the embodiment of the present invention is applied to a color filter baking -10-200417709 the procedure used to clean the furnace will be described. In the following description, the left and right sides of FIG. 1 are referred to as left and right, the lower part of FIG. 1 and the left side of FIG. 2 are referred to as front, and the upper part of FIG. 1 and the right side of FIG. 2 are referred to as rear. , And the top and bottom of Figure 2 are called the top and bottom. The heat treatment device is provided with a furnace (1) 'which is arranged on the base (B) and has a heat treatment chamber (R) inside; a hot air supply device (2) which is arranged on the right side of the furnace (1), The hot air is supplied into the furnace (1); the support to be processed (3) is placed in the heat treatment room (R), and most of the plate-shaped processing objects (P) are spaced from each other at the top and bottom, and have in most of the horizontal mounting of the object to be processed placed position; automatic opening and closing the shutter (5), lines were formed in the furnace (1) before the wall (1 A), to be formed as a heat chamber (R) and the furnace ( 1) The outside is in a connected shape; the air volume adjusting device (19) adjusts the amount of hot air in a large shape near the furnace mouth (4). The hot air supply device (2) has: a heater (1 5), which is provided at the rear of the right wall (lb) and heats the circulating air; and a guide wall (16), which sets the circulating air from the right The middle between the wall (lb) and the heat treatment chamber (R) is guided backward and forward; the circulation fan (17) is set in front of the right wall (lb) and sends the circulating air from the front to the left The filter (18) removes solid foreign matter from the circulating air flowing between the heat treatment chamber (R) provided between the heat treatment chamber (R) and the guide wall (16). The heat treatment chamber (R) is such that the upper part is surrounded by a horizontal plate (20), the right is surrounded by a vertical blow-out plate (2 1), and the left is surrounded by a vertical suction plate (22). The surrounding and the rear are surrounded by a vertical rear closing plate (23). In the blow-out panel (21) and a vertical suction plate-shaped (22), as to form a predetermined opening ratio and has a majority of the hot air 200,417,709 passage through holes (2 1 a) (2 2 a). In the heat treatment chamber (R), a rightward-based hot air flows toward the left, such as a hot air system, between the furnace (1) of the left wall (LC) and the suction plate (22), and a rear closing plate ( after the wall 23) of the furnace (1) (D between 1) the flow, and return to the furnace (rightward) within 1, i.e. to return hot air supply means (2) is set at. Whereby 'by a horizontal plate (20) within the heat treatment chamber (R) is formed below the temperature of the piece goods:' so that the furnace (1) to be processed (P) is heated. The width in the left-right direction of the furnace mouth portion (4) is formed to be wider than the width of the object to be processed (P), and the upper edge of the furnace mouth portion (4) is located on the support table (3). The uppermost object (P) is further above, and the lower edge of the furnace mouth part (4) is positioned lower than the lowermost object (P) placed on the support table (3). . The opening / closing gate (5) is formed by arranging a plurality of vertical plate-like constituent members (5a) which can move up and down freely. In addition, when each constituent member (5a) has taken the lowest position, and each constituent member (5a) is positioned at the basic position, the furnace mouth portion (4) is fully closed. The constituent members (5a) are arranged so as not to directly contact the furnace (1). A short-angle cylindrical seal (I4) made of, for example, polytetrafluoroethylene is disposed between the end edge of the furnace mouth portion (4) and the constituent member (5a). In addition, a gap is provided between the seal (14) and the constituent member (5a). In addition, the constituent member (5a) is provided so that it can move up and down as described below. So that it extends in the vertical cross section of a square guide member (6) fixed to the furnace (1) prior to the wall on the left side (A 1) the furnace opening portion (4) of the outside in. On the other hand, that the cross section of the rear portion slightly concave furnace port member (7) fixed to the corresponding constituting member (5 a) in the rear position 200417709 of the guide member, and such that the concave member ( 7) The guide member (6) is fitted so as to be able to slide up and down freely. In addition, on the right side of the furnace mouth portion (4) in the outer surface of the front wall (〗 a) of the furnace (1), the mounting member (9) with an L-shaped cross section is fixed to extend upward and downward and to the left The open section groove-shaped member (10). On the other hand, a roller (8) that rotates about a horizontal axis extending in the left-right direction is mounted on the right edge of the constituent member (5a), and the roller (8) is inserted into the groove in a freely rotatable manner. In the ditch of the component (1 0). On each constituent member (5a) of the upper left front, projection system are fixed to form the front mounting member is a cylinder-shaped φ of levels (13). Further, on the base (B), a cylinder mounting member (11) having a horizontal plate-like portion protruding upward from the upper surface is fixed. In addition, the air cylinder (12) is fixed so that its shaft extends upward, and is fixed to the upper surface of each mounting member (13) except the uppermost constituent member (5 a), and fixed to the base (B). Above the horizontal portion of the mounting member (11), the upper end of the shaft is fixed below the mounting member (13) located above each cylinder (1 2). In addition, by raising the shaft of one cylinder (12), the shaft of the cylinder (I2) will have a component (5a) that is firmly fixed via a mounting member (13) and a component (5a) located more than the component ( 5 a) The upper component (5a) and the air cylinder (12) located above the air cylinder (12) that has been raised upwardly move integrally. The air volume adjustment means (19) system is provided with surrounding the heat treatment chamber (R) of the air supply plate (21) and the suction plate (22), in this embodiment, the blow-out panel (21) and a suction plate ( 22) A predetermined gap (S) is provided between the front end and the inner surface of the front wall (la.) Of the furnace (1). Accordingly, the opening ratio of the blow-out panel (21) and the suction plate (22) of the furnace opening portion is attached near the lines -13-200417709 set to 1 billion billion%. Relates to blow-out panel (21) and the suction plate (22) of the opening ratio of furnace □ portion other than the vicinity, blow plate (21) is formed of about 40% based, the suction plate (22) formed in lines of about 12%. The above-mentioned predetermined gap (S), that is, the distance between the front end of the blowing plate (21) and the suction plate (22) and the inner surface of the front wall (la) of the furnace (1) is formed as the rear closing plate (23) and The distance between the inner surfaces of the front wall (la) of the furnace (1) (the depth of the heat treatment chamber (R)) is about 8/8. Moreover, in each of the above illustrated number Zhi, based for adjusting the amount of hot air in the furnace was attached to the mouth portion is formed more nearly like 'system may be achieved as long as the spring planting seed may be changed within the scope of the object. On the inner side of each constituent member (5a) of the opening and closing gate (5), a cross-section vertical rectangular hollow material (5b) having a height equal to the height of the constituent member (5a) is joined, and the inside of the hollow material (5b) The system is formed as a hot air path, that is, a wind tunnel (24). With this wind tunnel (24), the hot wind system is formed to move horizontally along the inner surface of the opening and closing gate (5). After passing through the heat treatment device, the hot air circulated by the hot air supply device (2) is supplied to the heat treatment chamber (R) through a filter (18). The hot air has been purified based on the short-tailed heat treatment chamber (R) within, by the blow-out panel (21) toward the suction plate (22), i.e., the forward to the thin arrows (s 1) of the direction shown. At this time, the vicinity of the opening ratio of blow-out panel (21) and the suction plate (22) of the furnace opening portion formed to 1〇〇% based 'so' on the outlet plate (21) and the suction plate (22) and the front end of the opening and closing Between the gates (5), the hot air flows from the right to the left, and a large amount of hot air is formed near the furnace mouth (4) so that the hot air flows as shown by the thick arrow (S2). Hot air is based, in the wind tunnel (24), drawn up the thin arrows (S 3) formed along the opening and closing of the shutter (5) of the in-plane direction shown 200417709 -14- flow. In this way, the amount of hot air is adjusted to be more near the furnace mouth (4). Even if there is a lot of heat release on the opening and closing gate (5) side, the temperature drop near the furnace mouth (4) can still be reduced. impact, while ensuring the large furnace (1) * effective heating volume within. Further, by a large amount of hot air (S 2) and wind tunnel (24), the same as the system obtained with the air curtain in a hot air (S3) results, even if in order to prevent outside air accompanying the opening and closing gate (5) of the opening and closing of the involvement of , Can also reduce the impact of the temperature drop near the furnace mouth (4). And, also prevented from flowing toward the outside along with the opening and closing gate (5) of the opening and closing of the furnace atmosphere, and therefore, can prevent the generation of foreign matter toward the sublimation furnace effluent in the furnace φ. Indeed, the present invention will be obtained from the heat treatment apparatus for a glass substrate of the conventional state temperature distribution in the resultant was In comparison, in the conventional apparatus, the shutter to open and close to reduce the temperature caused a maximum of about 3. 5 t The unevenness of the glass substrate at the temperature settled under "brake-closed" is about 6.8 ° C. In contrast, in the heat treatment device of the present invention, the maximum temperature drop caused by the opening and closing of the gate is about 2.4 ° C, and the unevenness of the glass substrate at the temperature settled under "gate-closed" is about 3 ° C. Therefore, it can be confirmed that the system can be simply structured to achieve great results. In addition, in the above-mentioned embodiment, the opening / closing gate (5) presents an automatic type, which is formed by arranging a plurality of vertical plate-like constituent members (5 a) which can move up and down in parallel, and each constituent member (5 a) by the cylinder (12) for moving up and down 'but' is not configured to open and close orchid limited only thereto, the present invention is based, at a temperature of more heat due to the furnace to prevent □ portion of the resulting reduced When it comes to questions, it doesn't matter whether it is automatic or manual, it can be applied to heat treatment devices with various types of gates. [Brief description of the drawings] Fig. 1 is a horizontal sectional view of a heat treatment device achieved by the present invention. Fig. 2 is a vertical sectional view of the heat treatment apparatus achieved by the present invention. The main representative of part of the Description of Symbols] 1: furnace 2: hot air supply means 4: the furnace opening portion 5: opening and closing the shutter 5b: tunnel 19: air volume adjusting means 21: blowing plate 22: suction plate 24: tunnel P: Processed object R: Heat treatment chamber S: Clearance
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