JP4589943B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for heat treating an object to be treated.

  2. Description of the Related Art Conventionally, as a heat treatment apparatus, a heat treatment apparatus that heats an object to be processed by heating the object in the heat treatment part while circulating the air in the heat treatment part is known.

  For example, this heat treatment apparatus is used for manufacturing a flat panel display (FPD) such as a liquid crystal display or a plasma display. A specific solution is applied to a substrate (processing object) such as a glass plate in advance and dried by heating. This is a device for storing the heat in the heat treatment part and subjecting it to a hot air of a predetermined temperature circulating in the heat treatment part to perform heat treatment (firing).

  In the heat treatment apparatus, when the object to be treated is subjected to heat treatment by being exposed to hot air of a predetermined temperature, a specific solution or the like applied on the object to be treated is vaporized (sublimated) and volatilized. Sublimates such as volatile organic compounds (VOC) are generated.

  This sublimated material is recrystallized due to the temperature drop caused by taking in and out of the object to be processed stored in the heat treatment section, the influence of outside air introduced for ventilation, etc., and the recrystallized sublimated material is put inside the heat treatment apparatus. It has caused problems such as adhesion and deterioration of the quality of the object to be processed.

  In order to solve this problem, there is provided a heat treatment apparatus in which a thermal catalyst for oxidatively decomposing the sublimate is arranged on the downstream side of an object to be treated in a circulation path of hot air (heated air) circulating in the heat treatment section. It was developed (see Patent Document 1).

By arranging the thermal catalyst as in this heat treatment apparatus, most of the sublimates generated by the heat treatment of the object to be treated and contained in the hot air immediately come into contact with the thermal catalyst and undergo oxidative decomposition. Is done. As a result, the hot air that has passed through the thermal catalyst contains almost no sublimated material generated by the heat treatment.
JP 2006-17357 A

  By the way, the thermal catalyst is for accelerating the oxidative decomposition reaction of the sublimate generated from the object to be treated. Generally, the active metal is a noble metal such as platinum (Pt) or palladium (Pd), or these noble metals. It is made of an alloy or the like. These thermal catalysts show catalytic activity from a temperature atmosphere of about 150 to 200 ° C., and usually show sufficient catalytic activity at about 230 to 250 ° C. And by making it still higher temperature, the reactivity becomes higher. That is, the catalytic activity of the thermal catalyst depends on the temperature of the atmosphere.

  Therefore, when the temperature of the hot air cannot be increased to a temperature sufficient for the catalytic activity (predetermined temperature) depending on the type of the object to be processed and the solvent to be applied, that is, when the object to be processed is heat-treated at a relatively low temperature. Even in the heat treatment apparatus provided with the thermal catalyst, the sublimate contained in the hot air circulating through the heat treatment part may not be sufficiently oxidized and decomposed. For this reason, there is a concern that the sublimate that has not been oxidatively decomposed may adhere to the apparatus and cause problems such as deterioration of the quality of the object to be processed.

  Therefore, in view of the above problems, the present invention provides a heat treatment apparatus capable of decomposing sublimates generated when heat treating an object to be treated without depending on the temperature of air circulating in the heat treatment part. Is an issue.

Therefore, in order to solve the above problems, a heat treatment apparatus according to the present invention includes a heat insulation furnace including a heat treatment part for heat treating an object to be treated and an air adjustment part for heating and circulating air, the a degradable photocatalyst means a sublimate generated during the heat treatment of the treatment object, a lighting means for lighting the light from the outside into the air adjusting portion, the lighting means are disposed in the heat insulating furnace Reflecting means for reflecting the light collected by the light toward a predetermined position in the air adjusting unit, and the photocatalyst means is irradiated with at least the light reflected by the reflecting means and contacts the circulating air. It is arranged at a position.

  According to such a configuration, the sublimate contained in the circulating air is decomposed only by the photocatalyst means being irradiated with the collected light in the heat insulating furnace. That is, the photocatalyst means shows catalytic activity instantaneously by being irradiated with the light collected by the daylighting means without depending on the temperature of the atmosphere. In this state, the photocatalyst means is in contact with the circulating air. Decompose sublimates contained in the air.

  Moreover, even if the processing capability of decomposing the sublimate in the photocatalyst means is small, the sublimate contained in the air passes through the photocatalyst means many times while circulating with the air, so that a desired amount is decomposed.

  As a result, even if the heat treatment is performed at a temperature lower than that of the conventional thermal catalyst, the sublimate contained in the circulating air is sufficiently decomposed.

Further, by providing the reflection means in the heat insulation furnace, the photocatalyst means may not be arranged at a position where light is directly irradiated from the daylighting means or the light irradiation means of the heat insulation furnace. Therefore, the degree of freedom in arrangement, that is, the degree of freedom in designing the heat treatment apparatus is improved.

Further, the lighting means may be provided on the air adjusting portion side of the front Symbol adiabatic reactor.

  According to such a configuration, since light from the outside is collected into the air adjustment unit, the heat treatment unit can heat treat the anaerobic object to be processed without incidence of the collected light.

Furthermore, the light irradiation morphism means for irradiating light further provided outside of the adiabatic reactor, the light irradiation unit may be disposed so as to be irradiated with light on at least said reflecting means through said lighting means.

  According to such a configuration, the photocatalyst means is irradiated with a certain amount of light by the light irradiation means. Therefore, the photocatalyst means can perform sufficient catalytic activity without depending on the amount of light around the apparatus, and can exhibit a desired desired decomposition performance with respect to the sublimate.

  Further, the daylighting means may be made of heat-resistant glass fitted into an opening formed so as to communicate the inside of the heat insulation furnace and the outside.

  According to this configuration, light is collected from the outside into the heat insulating furnace with a simple configuration.

  The heat-resistant glass may be formed on a lens that widens a range in which the collected light is irradiated.

  According to this configuration, the collected light is irradiated to a wider range in the heat insulation furnace. Therefore, the range of light irradiation to the photocatalyst means is expanded, and accordingly, the range in which the sublimate can be oxidatively decomposed, that is, the range showing the catalytic activity in the photocatalyst means is expanded, and the amount of the sublimate decomposed increases.

  Further, the daylighting means may be constituted by a heat-resistant light guide tube having one end disposed in the heat insulation furnace and the other end being the outside.

  Also with such a configuration, light is extracted from the outside into the heat insulating furnace with a simple configuration. In this case, the light guide tube is preferably composed of an optical fiber. This is because the optical fiber is easily available and has a high degree of freedom in arrangement.

  In addition, a lens may be provided at one end of the light guide tube, and the lens may be configured to widen a range irradiated with light collected at the other end of the light guide tube.

  According to such a configuration, as described above, the collected light is irradiated to a wider range in the heat insulating furnace, the irradiation range of the light to the photocatalyst means is expanded, and the amount of sublimation decomposed is increased accordingly. .

Moreover, in order to solve the above-mentioned problem, a heat treatment apparatus according to the present invention includes a heat insulation furnace including a heat treatment part for heat treating an object to be treated and an air adjusting part for heating and circulating air, A photocatalyst means capable of decomposing a sublimate generated when the object to be heat-treated and a light irradiation means for irradiating light, and the air adjusting section introduces air from outside the heat insulation furnace And the light irradiating means is disposed in the introduction pipe so as to irradiate light into the air adjusting section, and the photocatalytic means is irradiated with light by the light irradiating means and contacts the circulating air. It is good also as arrange | positioning in a position.

  According to such a configuration, the photocatalytic means is irradiated with light by the light irradiating means, and as in the case described above, the catalytic activity is instantaneously displayed, and the sublimate contained in the circulating air is independent of the temperature of the atmosphere. Decompose. Further, even if the processing capability of decomposing the sublimate in the photocatalyst means is small, the sublimate contained in the air passes through the photocatalyst means many times while circulating with the air, so that a desired amount is decomposed.

  Therefore, even if the heat treatment is performed at a low temperature, the sublimate contained in the circulating air can be sufficiently decomposed than the conventional thermal catalyst.

Moreover, since light is directly irradiated into the air adjusting unit without using glass or the like, the photocatalyst means can be efficiently reached. This is because when the light passes through the glass or the like, the amount of light decreases with the transmittance of the glass or the like. Therefore, the photocatalytic means exhibits a catalytic activity sufficiently more than that irradiated with light through glass or the like, and can decompose more sublimates.

Moreover, since the light irradiating means is provided in the introduction tube, the light irradiating means can be cooled by the unheated air flowing inside.

  Moreover, the structure which further provided the reflection means in the said heat insulation furnace which reflects the irradiated light toward the photocatalyst means arrange | positioned in a predetermined position may be sufficient.

  According to such a configuration, the photocatalyst unit may not be disposed at a position where the light is directly irradiated from the daylighting unit or the light irradiation unit included in the heat insulating furnace. Therefore, the degree of freedom in arrangement, that is, the degree of freedom in designing the heat treatment apparatus is improved.

  Further, the reflecting means may have a photocatalytic function.

  According to this configuration, since the photocatalyst means and the reflection means having a photocatalytic function can receive light and decompose the sublimate, the amount of the sublimate to be decomposed further increases.

  Further, the photocatalytic means may have a photocatalytic function on the surface of the plate-like body.

  According to such a configuration, the surface having a photocatalytic function can be easily disposed in the heat insulation furnace in a desired direction.

  The photocatalyst means may have a configuration in which a photocatalyst is supported on the surface of a cotton-like body or a mesh-like body, and the circulating air may be arranged to pass through the inside thereof.

  According to such a configuration, the surface area showing the photocatalytic reaction increases, and accordingly, the contact area with the circulating air increases. Further, when the circulating air passes through the inside of the photocatalyst means, a turbulent flow is generated in the interior, and the time and number of times that the circulating air and the surface are in contact with each other increase. Therefore, the amount of sublimates to be decomposed increases.

  Further, a plurality of the light irradiation means may be arranged, and the plurality of light irradiation means may be arranged to irradiate the photocatalyst means with light from different directions.

  According to such a configuration, even if the surface shape of the photocatalyst means becomes an intricate shape, the portion that is not irradiated with light, that is, the portion that becomes a shadow is reduced or eliminated, so that the area showing the catalytic reaction is widened and the sublimate efficiently. Is disassembled.

  As described above, according to the present invention, it is possible to provide a heat treatment apparatus capable of decomposing sublimates generated when heat treating an object to be treated without depending on the temperature of air circulating in the heat treatment part. become.

First, a reference example will be described with reference to the attached drawings.

  A heat treatment apparatus 10 as shown in FIG. 1 is used in an FPD manufacturing process and is called a so-called clean oven installed in a clean room.

This heat treatment apparatus 10 includes a heat insulating furnace 11 whose space is surrounded by a heat insulating wall (furnace wall) and a light irradiation means (ultraviolet irradiation means) L for irradiating light (ultraviolet light in this reference example ). A main body 12 is provided. The internal space of the heat insulation furnace 11 is partitioned by the partition wall 13 so that the heat treatment unit 20 (the portion on the left side of the partition wall 13 in FIG. 1) and the air adjustment unit 30 (the right side of the partition wall 13 in FIG. 1). Part) and are formed.

  The partition wall 13 is provided with communication portions 14 and 15 that allow the heat treatment portion 20 and the air adjustment portion 30 to communicate with each other. The communication unit 14 is an intake communication unit 14 for introducing the air of the heat treatment unit 20 into the air adjustment unit 30, and the communication unit 15 blows the air of the air adjustment unit 30 to the heat treatment unit 20 by a blower 34 described later. This is a communication part 15 for blowing out. Further, the intake communication portion 14 and the blowout communication portion 15 are such that the air in the air adjusting unit 30 is blown from the blowout communication portion 15 toward the heat treatment portion 20, and accordingly, the intake communication portion 14 to the heat treatment portion 20. The air is introduced into the air adjustment unit 30, so that the air circulation flow is formed in the heat insulating furnace 11.

  The heat treatment section 20 is provided with a work holding section 21 that can hold a plurality of objects to be processed (hereinafter simply referred to as “workpieces”) W such as a glass substrate in a state where they are lined up and down. When the workpiece W is held by the workpiece holding unit 21, the workpiece W is stored and held in the heat treatment unit 20.

The air adjusting unit 30 is provided with a photocatalyst unit 31 capable of decomposing the sublimate and a daylighting unit 32 for collecting light from the outside in the heat insulating furnace 11, more specifically, in the air adjusting unit 30. In the present reference example , a heater 33 for heating the air in the heat insulation furnace 11 and a blower 34 for forming a circulating flow of the air are further provided. And these are arrange | positioned in order of the photocatalyst means 31, the lighting means 32, the heater 33, and the air blower 34 in the air adjustment part 30 toward the downstream from the upstream of the circulating air. The arrangement of the photocatalyst means 31, the daylighting means 32, the heater 33, and the blower 34 need not be limited in this order.

The photocatalyst means 31 is for decomposing sublimates such as a volatile organic compound (VOC) generated from the workpiece W when the workpiece W is heat-treated. In this reference example, it is composed of a plate-like body formed of titanium oxide (TiO ₂ ), but it is not necessary to be limited to this, and the sublimate is decomposed when irradiated with light. Any material and shape may be used. That is, the photocatalytic means 31 may be made of a photoconductive material that causes charge separation upon receiving light energy such as zinc oxide (ZnO) or tungsten oxide (WO ₃ ). The photocatalytic means 31 according to this reference example exhibits catalytic activity when irradiated with light, particularly ultraviolet rays. This catalytic activity occurs immediately upon irradiation with ultraviolet rays, and hardly depends on the temperature of the atmosphere. Such a photocatalyst means 31 is disposed in the air adjusting unit 30 at a position where the air circulating in the heat insulating furnace 11 comes into contact with the light collected by the daylighting means 32. More specifically, the photocatalyst means 31 has a surface facing the daylighting means 32 at a position facing the daylighting means 32 provided on the furnace wall of the heat insulating furnace 11 in the air adjusting unit 30, that is, the wall surface of the partition wall 13. It arrange | positions so that it may oppose.

  The daylighting means 32 is for taking light from the outside into the heat insulating furnace 11, specifically into the air adjusting unit 30. The daylighting means 32 is configured by fitting heat-resistant glass 32 a into an opening formed in the furnace wall of the heat insulating furnace 11. More specifically, the daylighting means 32 is a furnace wall facing the partition wall 13 among the furnace walls of the heat insulating furnace 11, and is provided at a position facing the surface of the photocatalytic means 31 disposed on the partition wall 13. . The daylighting means 32 has a plate-like shape in which an opening having a shape corresponding to the photocatalyst means 31 is formed in the furnace wall of the heat insulation furnace 11 so as to communicate the inside and the outside, and is fitted to close the opening. The heat-resistant glass 32a is used.

In this reference example , the partition wall 13 causes the heat treatment unit 20 to treat the light (ultraviolet rays) collected in the air adjusting unit 30 by the daylighting means 32 so that the heat treatment of the workpiece W sensitive to ultraviolet rays can be performed. The inside is shaded.

The heat-resistant glass 32a constituting the daylighting means 32 is made of heat-resistant glass having high ultraviolet transmittance such as quartz glass (particularly fused silica glass), calcium fluoride (CaF ₂ ), and magnesium fluoride (MgF ₂ ). Is preferred. Further, heat resistant glass 32a such as Vycor (registered trademark) or Pyrex (registered trademark) may be used.

In this reference example , the light irradiation means L is constituted by an ultraviolet lamp L that irradiates ultraviolet rays. However, it is not necessary to be limited to this, and it is sufficient that the photocatalyst means to be used includes light having a wavelength that causes catalytic activity. Furthermore, the light source may include a wide range of light in other wavelength bands. The ultraviolet lamp L is arranged so that its irradiation direction C faces the heat-resistant glass 32a constituting the daylighting means 32, more specifically, orthogonal to the center of the surface of the heat-resistant glass 32a. Further, as described above, since the heat-resistant glass 32a and the photocatalyst means 31 are opposed to each other, the ultraviolet lamp L is disposed so that the irradiation direction C and the surface of the photocatalyst means 31 are opposed to each other. That is, the ultraviolet lamp L is arranged on a straight line connecting the photocatalyst means 31 and the heat-resistant glass 32a so that the irradiated ultraviolet rays pass through the heat-resistant glass 32a and illuminate the photocatalyst means 31.

  The heater 33 is for heating the air in the heat insulation furnace 11, specifically, the air adjusting unit 30. The blower 34 is for sending the air of the air adjusting unit 30 to the heat treatment unit 20 side through the blowing communication unit 15. Further, an intake duct (introduction pipe) 35 for supplying air from the outside of the heat insulation furnace 11 into the air adjustment unit 30 is connected to the air adjustment unit 30, and the heat treatment unit 20 flows out of the heat treatment unit 20. An exhaust duct 22 for exhausting the air directly to the outside of the heat insulation furnace 11 is connected.

The heat treatment apparatus 10 according to the present reference example has the above-described configuration. Next, the operation of the heat treatment apparatus 10 will be described.

  When the air of the air conditioning unit 30 is sent to the heat treatment unit 20 side by the blower 34, the air of the heat treatment unit 20 is returned to the air conditioning unit 30 through the intake communication unit 14. The air returned to the air adjusting unit 30 is heated and heated by the heater 33 and blown out to the heat treatment unit 20 through the blowing communication unit 15. This air circulation is repeated, and the work W accommodated in the heat treatment unit 20 is exposed to air (hot air) heated to a predetermined temperature, whereby heat treatment (firing) is performed.

  Thus, when the heat processing with respect to the workpiece W is performed, if the photocatalyst means 31 is irradiated with ultraviolet rays from the ultraviolet lamp L through the heat-resistant glass 32a, it circulates in the heat insulating furnace 11 (flows in the air adjusting unit 30). The decomposition of the sublimate contained in the hot air is started.

  That is, when the workpiece W is exposed to hot air heated to a predetermined temperature, the solution applied to the surface of the workpiece W is vaporized (sublimated), and a sublimate such as a volatile organic compound (VOC) is generated. The generated sublimate circulates in the heat insulating furnace 11 together with hot air. The hot air containing the sublimate is introduced from the heat treatment unit 20 into the air adjustment unit 30 through the intake communication unit 14. The hot air flows in the air adjusting unit 30 toward the blowing communication unit 15. At this time, since the photocatalyst means 31 is disposed between the intake communication part 14 and the blowout communication part 15 in the air adjustment part 30, the hot air flows while contacting the photocatalyst means 31. At that time, the photocatalytic means 31 exhibits sufficient catalytic activity when irradiated with ultraviolet rays by the ultraviolet lamp L. Therefore, the sublimate contained in the hot air flowing while contacting the photocatalytic means 31 is decomposed.

  The outside air sucked from the intake duct 35 is sent into the heat treatment unit 20 via the air adjusting unit 30 and a part of the air in the heat treatment unit 20 flows out into the exhaust duct 22, whereby the heat insulating furnace 11. A part of the air circulating inside is ventilated. That is, while the hot air (air) circulates in the heat insulation furnace 11 to heat-treat the workpiece W, a part of the ventilation is performed at the same time. In some cases, the oxidative decomposition of the sublimate by the photocatalyst means 31 may not remove all the sublimate contained in the circulating air (oxidative decomposition), and the sublimate remaining in that case is ventilated by ventilation. It is for discharging | emitting from the inside of 11 and preventing the quality deterioration of the workpiece | work W by the said sublimate.

Next, the operation and effect of the heat treatment apparatus 10 according to this reference example will be described.

  The heat insulation furnace 11 (air adjusting unit 30) includes a photocatalyst unit 31 and a daylighting unit 32, and the photocatalyst unit 31 is arranged at a position where the light collected by the daylighting unit 32 is irradiated and in contact with the circulating air. Has been. Therefore, the sublimate contained in the air circulating in the heat insulation furnace 11 is decomposed only by the photocatalyst means 31 being irradiated with the collected light. That is, the photocatalyst means 31 instantly exhibits catalytic activity when irradiated with the light collected by the daylighting means 32. In this state, the photocatalyst means 31 comes into contact with the circulating air, and the sublimate contained in the circulating air. Disassemble.

As described above, the photocatalytic means 31 exhibits catalytic activity instantaneously only by being irradiated with light (ultraviolet rays in this reference example ) without depending on the temperature of the atmosphere. Therefore, even when the heat treatment must be performed at a temperature lower than the temperature at which the thermal catalyst exhibits sufficient catalytic activity, the sublimate contained in the air circulating in the heat insulating furnace 11 can be decomposed.

  Further, even if the processing capacity for decomposing the sublimate in the photocatalyst means 31 is small, the sublimate contained in the air passes through the photocatalyst means 31 many times while circulating in the heat insulation furnace 11 with the air. Is disassembled.

Further, in the present reference example , the daylighting means 32 is provided on the air adjustment unit 30 side of the heat insulating furnace 11 so as to collect light from the outside in the air adjustment unit 30. Further, the inside of the heat treatment unit 20 is shielded by the partition wall 13 against the light (ultraviolet rays) collected in the air adjusting unit 30 by the daylighting means 32. Therefore, the light collected from the outside is irradiated only into the air adjusting unit 30 by the lighting unit 32, and the collected light is not incident on the heat treatment unit 20. As a result, in the heat treatment part 20, an anaerobic work (in this reference example , a work weak against ultraviolet rays) W can be heat treated.

  Further, the apparatus main body 12 further includes a light beam irradiation means L for irradiating light outside the heat insulation furnace, and this light irradiation means L is arranged so that light can be irradiated to the photocatalyst means 31 via the daylighting means 32. ing. Therefore, the photocatalytic means 31 is irradiated with a certain amount of light. As a result, the photocatalytic means 31 can perform sufficient catalytic activity without depending on the amount of light around the heat treatment apparatus 10 and can exhibit a desired desired decomposition performance with respect to the sublimate.

  Furthermore, since the ultraviolet lamp L only needs to be disposed outside the heat insulation furnace 11, it is not necessary to be an expensive heat-resistant equipment capable of withstanding the high temperature in the heat insulation furnace 11, and may be general-purpose equipment. Therefore, the manufacturing cost of the heat treatment apparatus 10 can be reduced.

Further, in particular, when the photocatalytic means 31 that exhibits catalytic activity for light in a specific wavelength band such as ultraviolet rays is used as in this reference example , light of a specific wavelength body such as the ultraviolet lamp L is emitted. By using the irradiation means L for irradiation, the sublimate can be efficiently decomposed. That is, by using such a light source L, the photocatalyst means 31 that responds to ultraviolet rays is sufficiently irradiated with only ultraviolet rays necessary for catalytic activity, and therefore is more than irradiated with light including various wavelength bands. It exhibits sufficient catalytic activity and can efficiently decompose sublimates.

  Moreover, since the photocatalyst means 31 is a structure which has a photocatalyst function on the surface of a plate-shaped object, the surface provided with the photocatalyst function can be easily arrange | positioned in the heat insulation furnace 11 in a desired direction.

Hereinafter, other reference examples, and the first embodiment and the second embodiment will be described in order, but the same reference numerals are used for the same configurations as the above-described reference examples, and detailed descriptions are omitted, and only different configurations are detailed. Explained. Similarly, only operations and effects different from the above-described reference example will be described in detail.

As shown in FIG. 2, the heat treatment apparatus 10A according to another reference example, as a lighting means 32, by using a heat-resistant glass 32a in the above reference example, the convex lens 32b, or concave, such as widening the irradiation range of the transmitted light What is formed in 32c is provided. That is, the daylighting means 32 is constituted by the convex lens 32b or the concave lens 32c made of heat-resistant glass fitted so as to close an opening formed (perforated) in the furnace wall of the heat insulating furnace 11.

  As shown in FIG. 2 (a), the convex lens 32b is formed from the surface of the photocatalyst means 31a whose optical axis c is orthogonal to the surface of the photocatalyst means 31a disposed at the opposite position and whose focal distance is opposite. Is a convex lens in the foreground. More specifically, the optical axis c is the same as the irradiation direction C of the ultraviolet lamp L, and the focal point is positioned closer to the convex lens 32b than the intermediate position between the surface of the convex lens 32b on the air adjusting unit 30 side and the surface of the photocatalytic means 31a. It is a lens that does.

Since the daylighting means 32 is constituted by such a convex lens 32b, the ultraviolet light (light) irradiated by the ultraviolet lamp L is refracted in the direction of convergence when passing through the convex lens 32b, and after passing through the convex lens 32b, at the focal point. The light diverges after being completely converged on the optical axis c. The ultraviolet rays illuminate a range wider than the projected area on the surface of the photocatalyst means 31a of the convex lens 32b on the surface of the photocatalyst means 31a. Therefore, by arranging the photocatalyst means 31a larger than the photocatalyst means 31 in the above-described reference example in the air adjusting unit 30, the range illuminated by light in the photocatalyst means is expanded. As a result, the range in which the sublimate can be decomposed, that is, the range showing the catalytic activity of the photocatalytic means is wider than in the above-described reference example , and the amount of the sublimate that can be decomposed also increases.

As shown in FIG. 2B, the concave lens 32c is a lens in which the optical axis c ′ is orthogonal to the surface of the photocatalytic means 31a. Since the daylighting means 32 is constituted by the concave lens 32c, the ultraviolet light irradiated by the ultraviolet lamp L is refracted in the direction of divergence when passing through the concave lens 32c, and on the surface of the photocatalytic means 31a, the photocatalytic means 31a of the concave lens 32c. It illuminates a wider area than the projected area on the surface. Therefore, the same, by arranging a large photocatalytic unit 31a than the photocatalyst 31 in the above Reference Example to the air adjustment section 30, the range capable of degrading sublimate, i.e., reference range described above showing the catalytic activity of a photocatalyst means Compared to the example , the amount of the sublimate that can be spread and decomposed increases.

As shown in FIG. 3A, the heat treatment apparatus 10B according to the first embodiment is configured to reflect the irradiated light (ultraviolet light) to a position (predetermined position) different from the daylighting means 32. 31b is arranged, and the photocatalyst means 31c is arranged at a position that is illuminated by the reflected light and is in contact with the air circulating in the heat insulating furnace 11.

  Specifically, the reflecting means 31b is configured by a mirror. In the present embodiment, the mirror 31b is formed to have a substantially conical shape. The mirror 31b is disposed at a position facing the daylighting means 32, that is, on the partition wall 13 provided in the heat insulating furnace 11, so that the central axis of the cone is the same as the irradiation direction C of the ultraviolet lamp L. . Further, the photocatalyst means 31c is a position illuminated by the ultraviolet rays reflected by the mirror 31b, in this embodiment, an opening formed in the furnace wall of the heat insulating furnace 11 where the daylighting means 32 (heat-resistant glass 32a) is formed. Is arranged in the air adjusting unit 30 so as to surround the air.

  With this configuration, the photocatalyst unit 31 c may not be disposed at a position where light is directly irradiated from the ultraviolet lamp L via the daylighting unit 32. Therefore, the degree of freedom of arrangement, that is, the degree of freedom of design of the heat treatment apparatus 10 is improved.

  In this case, if the reflecting means 31b has a photocatalytic function, specifically, if the photocatalyst-equipped mirror 31b is employed, the photocatalyst means 31c and the photocatalyst-equipped mirror 31b receive ultraviolet rays and can decompose sublimates. The amount of sublimate that is played increases.

That is, the first photocatalyst means 31b that is irradiated with the ultraviolet rays that have passed through the daylighting means 32, and the first photocatalyst means (first photocatalyst means) 31b and the photocatalyst means (second photocatalyst means) 31c are disposed. Since there is the second photocatalyst means 31c illuminated by the light reflected by the photocatalyst means 31b, the area of the photocatalyst means illuminated by the light becomes larger, so the amount of sublimate decomposed compared to the above reference example Increases more.

  In the present embodiment, the mirror (or first photocatalyst means) 31b is formed to have a substantially conical shape, but is not limited to this, and may have a polygonal pyramid shape or the like. Further, as shown in FIG. 3B, the surface of the flat mirror 31b ′ is not perpendicular to the irradiation direction C of the ultraviolet lamp L (in this embodiment, the surface of the mirror 31b ′). And the irradiation direction C of the ultraviolet lamp L may be arranged to be 45 °), and the photocatalytic means 31c ′ may be arranged at a position illuminated by the ultraviolet rays reflected by the mirror 31b ′. At this time, the photocatalyst means 31c 'is formed in a shape corresponding to the reflected light of the flat mirror 31b'. This also improves the degree of freedom of arrangement of the photocatalytic means 31c '.

Further, by using the mirror 31b ′ as a mirror with a photocatalyst, the area of the photocatalyst means illuminated with ultraviolet rays is further increased as compared with the above-described reference example , so that the amount of sublimates to be decomposed is also increased.

As shown in FIG. 4, the heat treatment apparatus 10 </ b> C according to another reference example is provided with heat resistance as the daylighting means 32 so that one end is in the air adjusting unit 30 and the other end is outside the heat insulating furnace 11. A light guide tube (in this reference example , an optical fiber) 32d. More specifically, one end of the optical fiber 32d is opposed to the photocatalyst unit 31 disposed in the air adjusting unit 30, and is arranged so that the irradiation direction C ′ of the collected light (ultraviolet light) is orthogonal to the surface of the photocatalyst unit 31. On the other hand, the other end is located outside the heat insulating furnace 11 and is disposed so as to face the ultraviolet lamp L in this reference example . That is, the optical fiber 32d is disposed so as to penetrate the furnace wall of the heat insulating furnace 11. Even with such a simple configuration, it is possible to extract light (ultraviolet rays) from the outside (ultraviolet lamp L arranged outside in the present reference example ) into the air adjusting unit 30.

  Furthermore, since the optical fiber 32d can guide light from the other end to the one end even if the other end and one end are separated, the ultraviolet lamp L can be disposed at a position away from the heat insulating furnace 11, The degree of freedom in designing the heat treatment apparatus 10C can be improved. The optical fiber 32d can be easily obtained.

In this reference example , the light guide tube 32d is formed of an optical fiber. However, if the light can be guided from the incident end to the output end, for example, a cylindrical guide having a mirror on the inner peripheral surface is provided. A light tube or the like may be used.

In this reference example , a concave lens 32c ′ (or a convex lens 32b ′) is further provided at one end of the optical fiber 32d (see FIG. 4A (or FIG. 4B)). The concave lens 32c ′ (or convex lens 32b ′) widens the irradiation range of the optical fiber 32d. That is, the optical fiber 32 radiates the ultraviolet rays from the ultraviolet lamp L from the other end (incident end) and irradiates the collected ultraviolet rays so as to illuminate the photocatalyst means 31 from one end (exit end). However, since the optical fiber 32 itself is made of a thin linear heat-resistant glass, the range in which the photocatalyst means 31 is irradiated with ultraviolet rays from the other end is narrow. Therefore, similarly to the other reference examples , a concave lens 32c ′ (or a convex lens 32b ′) is provided at one end to widen the irradiation range.

Accordingly, as in the above-described reference example , the concave lens 32c ′ is refracted in the direction in which the ultraviolet rays that have passed through the concave lens 32c ′ diverge, and is positioned so as to illuminate a wider range than the projected area of the concave lens 32c ′ on the surface of the photocatalyst means 31. is doing. Further, the convex lens 32b ′ diverges after the ultraviolet rays pass through the convex lens 32b ′, after being completely converged at the focal point, and then diverges on the surface of the photocatalyst means 31 and wider than the projected area of the convex lens 32b ′ on the surface of the photocatalyst means 31. Located to illuminate.

As shown in FIG. 5, the heat treatment apparatus 10 </ b> D according to the second embodiment includes an ultraviolet lamp L so that the air conditioning unit 30 can be irradiated with ultraviolet rays in the intake duct 35 a. An outside air blower 50 for supplying outside air into the air adjusting unit 30 is disposed at one end (the right end in FIG. 5) of the intake duct 35a.

  More specifically, the intake duct 35a communicates with the inside of the duct and the inside of the air adjusting unit 30, and the inner diameter is set to a size that allows the ultraviolet lamp L to be disposed. Further, the intake duct 35 a is connected to the furnace wall of the heat insulating furnace 11 facing the partition wall 13 so that the opening at the other end faces the photocatalyst means 31. Thus, by connecting the intake duct 35a to the heat insulation furnace 11 (the air adjusting unit 30), the ultraviolet lamp L arranged inside can directly irradiate the photocatalyst means 31 with ultraviolet rays.

  Therefore, since the photocatalyst means 31 is directly irradiated without passing through the heat-resistant glass 32a or the like, it efficiently reaches. This is because when the ultraviolet light passes through the heat-resistant glass 32a or the like, the amount of light decreases with the transmittance of the heat-resistant glass 32a or the like. Therefore, the photocatalytic means 31 exhibits a catalytic activity sufficiently higher than that irradiated with ultraviolet rays through the heat-resistant glass 32a and the like, and decomposes more sublimated substances. Further, since the ultraviolet lamp L is arranged in the intake duct 35a, the ultraviolet lamp L can be cooled by the outside air (air before being heated) flowing through the inside. In the present embodiment, the ultraviolet lamp L is used as the means for irradiating light, but it is not necessary to be limited to this, and various light sources may be used.

The heat treatment apparatus according to the present invention is not limited to the above-described reference example and the first and second embodiments, and various modifications can be made without departing from the scope of the present invention. .

For example, in the above reference examples and embodiments, the ultraviolet light (light) is irradiated to the daylighting means 32 by the ultraviolet lamp (light irradiation means) L, so that the photocatalyst means 31 is transmitted through (via) the daylighting means 32. However, the present invention is not limited to this. That is, as shown in FIG. 6, the ultraviolet (light) around the heat treatment apparatus 10 such as sunlight or a fluorescent lamp may be collected without the ultraviolet (light) irradiation means L. Even in this case, the photocatalytic means 31 is illuminated with ultraviolet rays (light), exhibits catalytic activity, and decomposes the sublimate.

In the reference examples and embodiments described above, the photocatalyst means 31 is formed of a plate-like body, but is not necessarily limited to this. That is, as shown in FIG. 7, the photocatalyst means may be constituted by a cotton-like photocatalyst means (cotton-like body) 50, or may be constituted by a mesh-like photocatalyst means (mesh-like body) 50 ′. Specifically, the cotton-like photocatalyst means 50 is formed so that the photocatalyst is supported on the surface of the cotton-like body. The mesh photocatalyst means 50 'is formed so that the photocatalyst is supported on the surface of the mesh body. By using the photocatalyst means 50 and 50 ′ having such a shape, the surface area showing the photocatalytic reaction increases, and the contact area with the circulating air increases accordingly. Further, when the circulating air passes through the photocatalyst means 50, 50 ', turbulent flow is generated in the interior, and the time and number of times that the circulating air and the surface come into contact with each other increase. Therefore, the amount of sublimates to be decomposed increases.

  The mesh photocatalyst means 50 ′ is preferably arranged in a plurality of layers at a predetermined interval (see FIG. 7B). By doing so, the turbulent flow of the circulating air passing through the inside of the mesh-like photocatalyst means 50 ′ is more likely to occur.

  Further, as shown in FIG. 8, by providing heat resistant glasses 32a, 32a,... (Lighting means 32, 32,...) Corresponding to a plurality of ultraviolet lamps L, L,. 50 (or mesh photocatalyst means 50 ') may be configured to irradiate light. By comprising in this way, since the part which is not irradiated with light with respect to the surface which shows the photocatalytic reaction which is in an intricate shape, that is, the part which becomes a shadow decreases or disappears, the area which shows a photocatalytic reaction becomes wide, Sublimates are efficiently decomposed.

  Further, by using a mirror with a photocatalyst (first photocatalyst means) 31b or a mirror, the photocatalyst means can be irradiated with light from a plurality of directions as described above, and the same effect as described above can be obtained. Good (see FIG. 8B).

  In addition, the type and shape of the photocatalyst means can be changed by changing the direction of the optical axis of the ultraviolet lamp L, the diffusivity of the irradiated light, and the light reflection direction in the light reflection means such as a mirror with a photocatalyst. In this case, the reaction surface showing the photocatalytic reaction may be adjusted so that the size of the reaction surface becomes the largest or the state showing the most catalytic activity.

Furthermore, in the above reference examples and embodiments, the ultraviolet lamp (light irradiation means) L is arranged outside the heat insulation furnace 11, but it is not necessary to be limited to this. That is, it may be disposed in the heat insulating furnace 11 as long as it can irradiate the photocatalytic means 31 with light. In this case, since the photocatalyst means 31 is irradiated with light by the light irradiation means L disposed in the heat insulation furnace 11, the daylighting means 32 may not be provided.

The schematic block diagram of the heat processing apparatus which concerns on a reference example is shown. It is a heat processing apparatus which concerns on a reference example , Comprising: (a) shows the schematic block diagram of the heat processing apparatus with which the lighting means is comprised with the convex lens, (b) is the heat treatment apparatus with which the lighting means is comprised with the concave lens. The schematic block diagram is shown. FIG. 1 is a heat treatment apparatus according to the first embodiment, wherein (a) shows a schematic configuration diagram of a heat treatment apparatus in which the first photocatalyst means is formed in a substantially conical shape, and (b) shows the first photocatalyst means being a flat plate. The schematic block diagram of the heat processing apparatus formed in the shape and inclined is shown. It is the heat processing apparatus which concerns on a reference example , (a) shows the schematic block diagram of the heat processing apparatus with which the concave lens was provided in the front-end | tip of an optical fiber, (b) is the heat processing with which the convex lens was provided in the front-end | tip of an optical fiber The schematic block diagram of an apparatus is shown. The schematic block diagram of the heat processing apparatus which concerns on 2nd embodiment is shown. The schematic block diagram of the heat processing apparatus which concerns on a reference example is shown. It is the heat processing apparatus which concerns on a reference example , Comprising: (a) shows the partial schematic block diagram of the heat processing apparatus with which the photocatalyst means is comprised with the cotton-like body, (b) is a mesh-like body with a photocatalyst means in multiple layers The partial schematic block diagram of the heat processing apparatus comprised by is shown. It is the heat processing apparatus which concerns on other embodiment, Comprising: (a) is a partial schematic structure of the heat processing apparatus provided with several light irradiation means and the corresponding daylighting means so that light can be irradiated with respect to a photocatalyst means from several directions FIG. 2B is a partial schematic configuration diagram of a heat treatment apparatus configured to be able to irradiate light to the photocatalyst means from a plurality of directions using the light reflection means.

DESCRIPTION OF SYMBOLS 10 Heat processing apparatus 11 Heat insulation furnace 20 Heat processing part 31 Photocatalyst means 30 Air adjustment part 32 Daylighting means 35 Introducing pipe (intake duct)
W Workpiece (work)

Claims (14)

A heat insulating furnace comprising a heat treatment part for heat-treating the workpiece and an air adjustment part for heating and circulating the air;
The adiabatic reactor, the a degradable photocatalyst means a sublimate generated during the heat treatment of the treatment object is disposed and lighting means for lighting the light from the outside into the air adjusting unit, the adiabatic furnace And reflecting means for reflecting the light collected by the daylighting unit toward a predetermined position in the air adjusting unit ,
The heat treatment apparatus, wherein the photocatalyst means is disposed at a position where at least the light reflected by the reflection means is irradiated and in contact with the circulating air. The lighting means, a heat treatment apparatus according to claim 1, characterized in that provided in the air adjusting portion side of the front Symbol adiabatic reactor. The light irradiation morphism means for irradiating light further provided outside of the adiabatic reactor, the light irradiation unit, according to claim, characterized in that it is arranged so that it can irradiate the light to at least said reflecting means through said lighting means The heat treatment apparatus according to 1 or 2.   The heat treatment apparatus according to any one of claims 1 to 3, wherein the daylighting means is made of heat-resistant glass fitted in an opening formed so as to communicate the inside of the heat insulation furnace with the outside.   5. The heat treatment apparatus according to claim 4, wherein the heat-resistant glass is formed in a lens that widens a range in which the collected light is irradiated.   The said daylighting means is comprised by the light guide tube which has a heat resistance arrange | positioned so that one end may be in the said heat insulation furnace and the other end may become the exterior. Heat treatment equipment.   The lens according to claim 6, wherein a lens is provided at one end of the light guide tube, and the lens is configured to widen a range irradiated with light collected at the other end of the light guide tube. Heat treatment equipment.   The heat treatment apparatus according to claim 6 or 7, wherein the light guide tube is formed of an optical fiber. A heat insulating furnace comprising a heat treatment part for heat-treating the workpiece and an air adjustment part for heating and circulating the air;
This heat insulation furnace has a photocatalyst means capable of decomposing a sublimate generated when the object to be heat-treated and a light irradiation means for irradiating light,
An introduction pipe for introducing air from outside the heat insulation furnace is connected to the air adjustment section, the light irradiation means is arranged in the introduction pipe so as to irradiate light into the air adjustment section, and the photocatalytic means is A heat treatment apparatus, wherein light is irradiated by the light irradiation means and disposed at a position in contact with the circulating air. The heat treatment apparatus according to claim 9 , further comprising a reflection unit that reflects the irradiated light toward the photocatalyst unit disposed at a predetermined position in the heat insulating furnace. It said reflecting means, the heat treatment apparatus according to any one of claims 1 to 8 and 10, characterized in that it has also photocatalytic function. The heat treatment apparatus according to any one of claims 1 to 11 , wherein the photocatalytic means has a photocatalytic function on a surface of a plate-like body. The photocatalyst means has a configuration in which a photocatalyst on the surface of the cotton-like body or a mesh-like body is carried, the air circulation, characterized in that it is arranged to pass through the inside according to claim 3 or 9 The heat processing apparatus as described in. The heat treatment apparatus according to claim 13 , wherein a plurality of the light irradiation means are arranged, and the plurality of light irradiation means are arranged so as to irradiate the photocatalyst means with light from different directions.

Images