JP2007093168A - Heat treatment furnace - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace capable of reducing a manufacturing cost by sharing a hot air supply device 6. <P>SOLUTION: This heat treatment furnace has an outer casing 1, an inner casing 2 provided in an inside of the outer casing 1 to form an upper space 1A, provided with an upper opening 2a in an upper face, and having an inside divided into the first area X2 and the second area X1, a work conveyer 3 provided to penetrate the insides of the outer casing 1 and the inner casing 2 and for conveying a work 30 to pass it through the inside of the inner casing 2, a plurality of heater units 5 arranged in parallel to form a space 52 therebetween each other along a work conveying direction X between the upper opening 2a and the work conveyer 3, and for heating the work, the single hot air supply device 6 for supplying hot air 6a for heating the work while passing the upper space 1A, the upper opening 2a and the space 52 between the heater units 52, and a hot air supply amount regulating mechanism for conducting regulation to make a supply amount of hot air 6a higher in the second area X1 than that in the first area X2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a heat treatment furnace, and more particularly to a heat treatment furnace that volatilizes a solvent attached to a workpiece.

Conventionally, as a heat treatment furnace for volatilizing a solvent adhering to a work, one having a structure as shown in FIG. 10 is used.
The conventional heat treatment furnace is physically partitioned by, for example, a temperature rising region 100a for raising the temperature of the solvent adhering to the workpiece 130 made mainly of resin from room temperature to the volatilization temperature, the temperature rising region 100a and the partition plate 104, The temperature rising region 100a is maintained to maintain the temperature, and the heat equalizing region 100b for completely volatilizing the solvent adhering to the work 130 is constituted.

The workpiece 130 is placed on a pallet 121 made of a metal such as carbon steel, and is conveyed by the workpiece conveyance device 120 to the temperature rising region 100a and the soaking region 100b. Generally, when heating a resin, it is known that a heater using electromagnetic waves (for example, infrared rays or far infrared rays) is suitable. In order to heat the resin and the metal simultaneously, the resin is mainly heated. Two heat sources are required, a heater and hot air to heat the metal mainly. Therefore, a hot air supply device 101a that supplies hot air 102a that mainly raises the temperature of the pallet 121 and an infrared heater 103a that mainly raises the temperature of the workpiece 130 placed on the pallet 121 are provided in the temperature raising region 100a. It has been. Further, in the soaking area 100b, the temperature of the hot air supply device 101b that supplies hot air 102b that mainly maintains the temperature of the pallet 121 raised in the temperature raising area 100a and the temperature of the workpiece 130 that is mainly raised in the temperature raising area 100a. An infrared heater 103b that supplies hot air to be maintained is provided.
Japanese Patent Laid-Open No. 2000-165030

  In the conventional heat treatment furnace, the hot air 102a formed by the hot air supply device 101a in the temperature rising region 100a is mainly for increasing the temperature of the pallet 121. The temperature needs to be higher than the hot air 102b formed by the hot air supply device 101b. For this reason, in the conventional heat treatment furnace, the hot air supply devices 103a and 103b are provided in the temperature raising region 100a and the soaking region 100b, respectively, but there is a problem that the manufacturing cost is high.

  This invention is made | formed in view of the said subject, and it aims at providing the heat processing furnace which reduced the manufacturing cost by making it possible to share a hot-air supply apparatus.

  In order to achieve the above object, the present invention is configured as follows.

According to a first aspect of the present invention, an outer housing;
Provided at least on the inside of the outer casing so as to form a space above, and provided with an upper opening on the upper surface, the inside of which is a first region downstream of the workpiece transfer direction and the workpiece transfer direction An inner housing that is separated without being physically partitioned into a second region having a different upstream temperature; and
A workpiece transfer device that is provided so as to penetrate the inside of the outer casing and the inner casing, and that transfers a workpiece so that the workpiece passes through the inner casing;
The workpiece transfer direction such that a plurality of gaps are formed between the upper opening of the inner housing and the workpiece transfer device and between the first region and the second region. The first region is heated in parallel with the heater device for heating the workpiece, and passes through the upper space, the upper opening, and the gaps between the plurality of heater devices to heat the workpiece. And a single hot-air supply device for supplying to the second region at the same time;
A hot air supply amount adjustment mechanism that adjusts the hot air so that the supply amount in the second region is larger than that in the first region and supplies the hot air to the workpiece;
There is provided a heat treatment furnace characterized by comprising:

  According to the second aspect of the present invention, the hot air volume adjusting mechanism is provided with a large number of openings, and is arranged between the upper opening of the inner housing and the heater device and in the first region. A heat treatment furnace according to the first aspect is provided, comprising a supply-side plate-like body.

According to the third aspect of the present invention, the hot air amount adjusting mechanism has a hot air supply side plate-like body disposed between the upper opening of the inner casing and the heater device,
The hot air supply side plate-like body is provided with a plurality of openings so that an opening ratio in the first region is smaller than an opening ratio in the second region. The heat treatment furnace described in 1. is provided.

  According to the 4th aspect of this invention, the said hot air supply side plate-shaped body is the length of the 1st plate-shaped body in which many opening was provided, and the said 1st plate-shaped body is the conveyance direction of the said workpiece | work. The first plate has a second plate-like body that is formed to be different from each other and provided with a large number of openings, and is movably in close contact with the first plate-like body and superimposed. The heat treatment furnace according to the third aspect, wherein the aperture ratio in the first region can be adjusted by adjusting the relative position between the sheet-like body and the second plate-like body. I will provide a.

  According to a fifth aspect of the present invention, the aperture ratio in the second region of the hot air supply side plate is 2 to 4 times the aperture ratio in the first region. A heat treatment furnace according to the third aspect or the fourth aspect is provided.

  According to the sixth aspect of the present invention, the hot air supply mechanism is provided with a plurality of openings so that an opening ratio in the first region is smaller than an opening ratio in the second region. The heat treatment furnace according to the first aspect is provided by the upper opening of the inner casing.

  According to the seventh aspect of the present invention, the hot air supply mechanism is configured such that a gap between the plurality of heater devices in the first region is greater than a gap between the plurality of heater devices in the second region. The heat treatment furnace according to any one of the first to sixth aspects is provided, which is adjusted to be smaller.

  According to an eighth aspect of the present invention, the heater device includes a heater that heats the workpiece, and a roof that covers an upper portion of the heater so that the hot air formed by the hot air supply device does not directly hit the heater. A heat treatment furnace according to any one of the first to seventh aspects is provided.

According to the ninth aspect of the present invention, the inner casing is provided inside the outer casing so as to have a space connected to the upper space on one side,
On the side surface of the inner casing between the heater device and the workpiece transfer device and parallel to the workpiece transfer direction, hot air that is formed by the hot air supply device and flows into the one side space is supplied to the inner casing. The heat treatment furnace according to any one of 1 to 8 is provided, wherein a side opening is provided for taking in the inside of the body.

According to the tenth aspect of the present invention, the hot air exhaust side plate-like body provided with a large number of openings is provided below the work conveying means inside the inner casing,
The aperture ratio in the second region of the hot air exhaust side plate is equal to or larger than the aperture ratio in the second region of the hot air supply side plate,
Any one of the first to ninth aspects is characterized in that an opening ratio in the first region of the hot air exhaust side plate is equal to or larger than an opening ratio in the first region of the hot air supply side plate. A heat treatment furnace according to claim 1 is provided.

  According to an eleventh aspect of the present invention, an exhaust duct for exhausting the hot air is provided inside the inner casing and below the hot air exhaust side plate-like body and in the first region. A heat treatment furnace according to any one of the first to tenth aspects is provided.

  According to a twelfth aspect of the present invention, the upper side of the outer casing and the penetrating portion of the inner casing through which the workpiece transfer device passes is bent toward the inside of the inner casing. The heat treatment furnace as described in 1st-11th aspects is provided.

  According to the present invention, the supply amount of hot air that heats the workpiece through the upper opening of the inner housing and the gaps between the plurality of heater devices is set to be higher in the second region than in the first region. By adjusting so as to increase and supplying the workpiece, it is possible to distinguish between the first region and the second region without physically partitioning with a partition plate or the like using the same hot air supply device. Therefore, it is possible to provide a heat treatment furnace with reduced manufacturing costs.

<< First Embodiment >>
Embodiments according to the present invention will be described below with reference to the drawings.

  FIG. 1A is a schematic cross-sectional view in the workpiece conveyance direction of the heat treatment furnace according to the first embodiment of the present invention, and FIG. 1B is a schematic diagram in the transverse direction orthogonal to the workpiece conveyance direction of the heat treatment furnace according to the first embodiment of the present invention. A cross-sectional view is shown. FIG. 2 is a perspective view showing a specific configuration example of the heat treatment furnace according to the first embodiment of the present invention.

  1A and 1B, the heat treatment furnace of the first embodiment is provided inside the outer casing 1 so as to form an outer casing 1 and an upper space 1A and a side space 1B on the upper side and one side. The inner housing 2 having the upper opening 2a on the upper surface, the pair of opposing surfaces 1a and 1b of the outer housing 1, and the central portion of the inner housing 2 are provided so as to penetrate the inner housing 2 And a workpiece transfer device 3 that transfers the workpiece 30 so that the workpiece 30 passes through the inside. A plurality (for example, eight) of the inner casing 2 is arranged in parallel so that a gap 52 is formed between the upper opening 2a of the inner casing 2 and the workpiece transfer device 3, and the workpiece 30 is heated. The heater device 5 is provided, and below the workpiece transfer device 3, hot air that heats the workpiece 30 through the side space 1B, the upper space 1A, the upper opening 2a, and the gaps 52 between the plurality of heater devices 5 is provided. A hot air supply device 6 for supplying 6a is provided.

  The outer casing 1 is formed in a substantially rectangular parallelepiped shape, and through holes 1c and 1d are provided at the center portions of the pair of surfaces 1a and 1b facing the workpiece conveyance direction X so that the workpiece conveyance device 3 can penetrate therethrough. ing. The upper portions 1e and 1f in the vicinity of the through holes 1c and 1d of the pair of opposed surfaces 1a and 1b of the outer casing 1 are heated by the heat of the heater device 5 and the hot air 6a from the hot air supply device 6 to the outside of the outer casing 1. In order to prevent the temperature in the heat treatment furnace from decreasing, it is bent inward.

  The inner housing 2 is formed in a substantially rectangular parallelepiped shape, and at least a pair of surfaces facing the work transport direction X of the inner housing 2 are provided so as to share a pair of facing surfaces 1 a and 1 b of the outer housing 1. It has been. Note that the pair of surfaces facing the workpiece conveyance direction X of the inner housing 2 may be provided so as to be in contact with the inner surfaces of the pair of facing surfaces 1 a and 1 b of the outer housing 1.

  On the inner peripheral surface of the inner casing 2 between the upper opening 2a of the inner casing 2 and the heater device 5, a hot air supply side plate-like body 4 which is an example of a hot air supply mechanism is attached. The hot air supply side plate-like body 4 is a rectangular and plate-like member having a large number of uniformly distributed openings, and is made of, for example, a punching metal or a slit plate. As the shape and arrangement of the openings of the hot air supply side plate-like body 4, a large number of round holes as shown in FIG. 3A are arranged in parallel, a large number of long holes as shown in FIG. 3B are arranged in a staggered manner, etc. Various things can be adopted. The aperture ratio in the soaking area (first area) X2 on the downstream side in the workpiece conveyance direction of the hot air supply side plate-like body 4 is based on the aperture ratio in the temperature rising area (second area) X1 on the upstream side in the workpiece conveyance direction. Is set to be smaller. More preferably, the opening ratio is set to 2: 1 to 4: 1. For example, the aperture ratio in the soaking area X2 of the hot air supply side plate-like body 4 is set to 30%, and the aperture ratio in the temperature raising area X1 is set to 15%.

  The soaking area X2 and the temperature raising area X1 are virtually separated without being physically partitioned within the inner housing 2, that is, without being partitioned by a partition plate or the like. In addition, the boundary between the soaking area X2 and the temperature raising area X1 is preferably in the middle (a dotted line portion in FIG. 1A) between a pair of opposed surfaces 1a and 1b. Further, the hot air supply side plate-like body 4 is not limited to one made of a single plate-like body. For example, as shown in FIGS. 4 and 5, two sheets having the same opening size but different lengths are used. Even if the plate-like bodies 4a and 4b are closely adhered and overlapped and relatively moved, the aperture ratio in the soaking area X2 is smaller than the aperture ratio in the temperature raising area X1. Good.

  A ladder-like mounting frame 7 is attached to the lower surface of the hot air supply side plate-like body 4. Eight heater devices 5 are attached to the lower surface of the attachment frame 7. As shown in FIG. 6, the heater device 5 includes a rectangular panel heater 5a that is an example of a heater that uses electromagnetic waves (for example, an infrared heater or a far-infrared heater), and a trapezoidal roof material 5b that covers the upper portion of the panel heater 5a. And a plurality of rod-shaped holding members 5c that connect the panel heater 5a and the roofing material 5b.

  The hot air supply side plate-like body 4 and each roof material 5b are provided so as to form a space 51 for relaxing and reducing the wind speed of the hot air 6a that has passed through the hot air supply side plate-like body 4. The shape of the roofing material 5b may be, for example, a semicircular cross section or a U-shaped cross section, in addition to the trapezoidal cross section as shown in FIG.

  The panel heater 5a is divided into four groups with two sheets as one group, and the temperature is set. For example, when the length of the inner casing 2 in the workpiece conveyance direction X is 800 mm, the workpiece conveyance speed is 160 mm / min, and the target temperature of the workpiece 30 is 80 ° C., 125 ° C., or 150 ° C., the hot air supply device 6 The temperature of the hot air 6a and the set temperature of each set of the panel heater 5a are as shown in Table 1 below.

  That is, the two sets of the temperature raising region X1 are set to temperatures considerably higher than the target temperature of the workpiece 30 for the purpose of raising the temperature of the workpiece 30, and the two sets of the soaking region X2 are In order to maintain the temperature, the temperature is set to a slightly higher temperature than the target temperature of the workpiece 30. The specific set temperature is not limited to the above, and may be set as appropriate according to the length of the inner casing 2 in the workpiece transfer direction X, the workpiece transfer speed, the volume of the inner casing 2, and the like.

  The workpiece transfer device 3 includes, for example, a plurality of pulleys 3a and 3a protruding along a pair of opposing surfaces 2b and 2c of the inner casing 2 parallel to the workpiece transfer direction X, and a plurality of pulleys 3a and 3a. Are slidably mounted on the chains 3b and 3b, and are placed on the chains 3b and 3b. For example, the chains 3b and 3b are driven by a drive motor (not shown) to transfer in the workpiece conveyance direction X. The pallet 3c is provided. The pallet 3c is formed, for example with metals, such as carbon steel. For example, the workpiece 30 mainly made of resin is held on the pallet 3c and transferred in the workpiece conveyance direction X.

  A hot air exhaust side plate-like body 8 and a partition plate 9 are sequentially attached to the inner peripheral surface of the inner housing 2 between the work transfer device 3 and the hot air supply device 6. The hot air exhaust side plate-like body 8 has the same configuration as the hot air supply side plate-like body 4. That is, the hot air exhaust side plate-like body 8 is provided with a large number of uniformly dispersed openings, and the hot air exhaust side plate-like body 8 has an opening ratio in the soaking area X2 smaller than the opening ratio of the temperature raising area X1. It is set to be. Moreover, the opening rate in the temperature rising region X1 of the hot air exhaust side plate-like body 8 is the same as or larger than the opening ratio of the temperature rising region X1 of the hot air supply side plate-like body 4, and in the soaking region X2 of the hot air exhaust side plate-like body 8. Is set to be the same as or larger than the opening ratio in the soaking area of the hot air supply side plate-like body 4.

  The partition plate 9 is attached below the hot air exhaust side plate 8 in parallel with the hot air exhaust side plate 8 so that the hot air 6 a that has passed through the hot air exhaust side plate 8 does not hit the hot air supply device 6. The partition plate 9 is provided with an exhaust through hole 9a, and a cylindrical exhaust duct 10 for exhausting the hot air 6a that has passed through the hot air exhaust side plate-like body 8 is connected to the exhaust through hole 9a. Since the through hole for exhaust 9a and the exhaust duct 10 set the opening ratio of the hot air exhaust side plate-like body 8 as described above, the temperature rising region X1 passes through the hot air exhaust side plate-like body 8 rather than the soaking region X2. Since there is much quantity of the hot air 6a, it has provided in the workpiece conveyance direction upstream (temperature raising area | region X1) of the partition plate 9. FIG.

In the exhaust duct 10, an exhaust blower 15 provided below the partition plate 9 on the surface 1 a of the outer casing 1 in order to discharge the hot air 6 a flowing into the exhaust duct 10 to the outside of the outer casing 1. Is connected.
On the lower surface 1 g of the outer casing 1, a hot air supply device 6 and a circulation blower 11 are arranged. The hot air supply device 6 is surrounded by a pair of partition walls 17, 17 that are erected from the lower surface 1 g of the outer housing 1 and connected to the partition plate 9, and the lower surface 1 g of the outer housing 1 and the partition plate 9. It is arranged in the space 18. The circulation blower 11 is disposed inside the outer casing 1 and outside the space 18, and is connected to the hot air supply device 6 by a connecting duct 12 that penetrates the partition wall 17.

  Connected to the circulation blower 11 is a cylindrical air supply duct 16 having one end passing through the partition wall 17 and connected to a space 18 near the hot air supply device 6. The circulation blower 11 takes in the air in the space 18 heated by the hot air supply device 6 that generates heat by driving through the air supply duct 16 and supplies the air to the hot air supply device 6 through the connection duct 12. The hot air supply device 6 heats the air supplied via the connecting duct 12 by the circulation blower 11 so that the temperature of the hot air 6a supplied to the upper space 1A becomes the temperature shown in Table 1 above. Generate. Note that the hot air supply device 6 is configured to have a hot air blowing capability so that the air in the heat treatment furnace can be replaced in a very short time (for example, 1 second).

  The hot air supply device 6 is connected to a wide-diameter portion 19 formed so as to have a cross-sectional area in the horizontal direction larger than the cross-sectional area in the horizontal direction of the connecting duct 13 via the cylindrical connecting duct 13. Yes. The wide-diameter portion 19 is connected to the side space 1B via a supply through hole 2e provided below the surface 2d adjacent to the side space 1B of the inner housing 2. The cross-sectional area in the horizontal direction of the wide-diameter portion 19 is formed to be narrower than the cross-sectional area in the horizontal direction of the side space 1B.

  The connecting duct 13 and the side space 1B are formed by shifting the opening positions in the vertical direction. That is, the hot air 6 a generated by the hot air supply device 6 passes through the connecting duct 13, collides with the inner wall (partition plate 9 in FIG. 2) of the wide diameter portion 19, is diffused, and then supplied to the side space 1 </ b> B side. It has come to be. Note that the hot air 6a supplied to the side space 1B in this way has a larger cross-sectional area in the lateral direction of the side space 1B than the lateral cross-sectional area of the wide-diameter portion 19, so that the flow is further increased. It is easily disturbed and diffused, and as a result, it is supplied uniformly over the entire upper space 1A.

The exhaust duct 10 is configured as described above from the viewpoint of cleaning in the heat treatment furnace. However, the exhaust duct 10 may be configured to be directly connected to the circulation blower 11 with emphasis on the thermal efficiency of the hot air supply device 6. .
The heat treatment furnace of the first embodiment is configured as described above.

  According to the heat treatment furnace of the first embodiment, the opening ratio of the hot air supply side plate-like body 4 is set to be smaller in the soaking area X2 than in the temperature raising area X1, so that the upper opening of the inner casing 2 is opened. 2a and the supply amount of the hot air 6a that passes through the gaps 52 between the plurality of heater devices 5 and heats the workpiece 30 are adjusted so that the soaking area X2 is smaller than the heating area X1. Due to the hot air 6a adjusted in this way and the panel heater 5a whose temperature is set as described above, the temperature of the work 30 changes as shown in an ideal temperature curve shown by a solid line A in FIG. That is, the temperature rises to the target temperature in the temperature raising region X1, and the temperature changes so as to maintain the target temperature in the soaking region X2. Therefore, it is not necessary to provide the hot air supply devices 6 for supplying hot air to the temperature raising region X1 and the soaking region X2, respectively, that is, the hot air supply device 6 can be shared, and the manufacturing cost of the heat treatment furnace is reduced. be able to.

  In addition, when heating a workpiece mainly made of resin on a pallet made of metal, an electromagnetic wave (for example, an infrared heater or a far-infrared heater) is used to heat the workpiece and mainly the pallet. Although two heat sources of hot air to be heated are used in combination, the temperature of the work is lowered as shown by the dotted line B in FIG. .

  Therefore, in the heat treatment furnace of the first embodiment, the hot air supply side plate 4 and each roofing material 5b form a space 51 for relaxing and reducing the wind speed of the hot air 6a that has passed through the hot air supply side plate 4. Therefore, the hot air 6a does not directly hit the work 30 and can be brought close to the ideal temperature curve shown by the solid line A in FIG.

  Further, in the heat treatment furnace of the first embodiment, the hot air exhaust side plate-like body 8 is configured in the same manner as the hot air supply side plate-like body 4 and the exhaust duct 10 is provided in the temperature rising region X1. The hot air 6 a supplied to the air 30 can be smoothly exhausted, and the hot air 6 a does not stay near the work 30. Therefore, it can be brought closer to the ideal temperature curve shown by the solid line A in FIG. The above is more effective as the target temperature of the work 30 is higher.

  Further, in the heat treatment furnace of the first embodiment, the amount of hot air 6a supplied to the workpiece 30 can be adjusted by the hot air exhaust side plate-like body 8, so that it is vertically between the temperature raising region X1 and the soaking region X2. It is not necessary to provide a partition plate to separate areas. Therefore, it is possible to reduce the size of the heat treatment furnace.

  Further, in the heat treatment furnace of the first embodiment, the hot air 6 a generated by the hot air supply device 6 is supplied to the wide diameter portion 19 through the connecting duct 13 and diffused by the wide diameter portion 19. Since it is supplied to the side space 1B and the upper space 1A, it is supplied uniformly over the entire upper space 1A.

  In the first embodiment, eight panel heaters 5a are installed and two are divided into four groups, but the present invention is not limited to this. For example, four panel heaters 5a may be installed, and one sheet may be divided into four groups. However, if the number of panel heaters 5a and / or the number of sets is an odd number, the boundary between the temperature raising region X1 and the soaking region X2 is not clear, as in the ideal temperature curve shown by the solid line A in FIG. There is a risk of not becoming. Accordingly, the number and the number of the panel heaters 5a are preferably an even number, and more preferably a multiple of 4.

<< Second Embodiment >>
FIG. 8 shows a schematic cross-sectional view in the lateral direction of the heat treatment furnace according to the second embodiment of the present invention. The heat treatment furnace of the second embodiment is different from the heat treatment furnace of the first embodiment in that the side opening 2f and the filter 14 are provided. The other points with the same reference numerals are the same, and redundant description is omitted.

  In FIG. 8, the side opening 2 f is a length in the workpiece conveyance direction X of the inner casing 2 on a surface 2 d adjacent to the side space 1 B of the inner casing 2 between the workpiece conveying device 3 and the heater device 5. It is provided over. The side opening 2f is formed to have an opening area smaller than the cross-sectional area in the lateral direction of the side space 1B so that the hot air 6a moving through the side space 1B is also supplied to the upper space 1A side.

  The filter 14 is provided in the side space 1B between the side opening 2f of the side space 1B and the through hole 2e. The filter 14 is a high-performance filter such as a HEPA filter, and increases the air cleanliness of the hot air 6a supplied to the workpiece 30 (for example, 1.6 pieces or less / 10 liters).

According to the heat treatment furnace of the second embodiment, by providing the side openings 2f as described above, it does not depend only on the hot air 6a supplied to the work 30 through the gaps 52 between the panel heaters 5a. In addition, the temperature of the work 30 can be increased. This shortens the time during which the temperature of the workpiece 30 is raised, suppresses the temperature drop of the workpiece 30 due to the wind speed of the hot air 6a (dotted line B in FIG. 7), and shows the ideal temperature curve of the workpiece 30 indicated by a solid line A in FIG. Close to a typical temperature curve.
In the heat treatment furnace of the present embodiment, the side opening 2f is a single opening, but a number of uniformly distributed openings such as the openings provided in the hot air supply side plate 4 and the hot air exhaust side plate 8 are provided. It may be formed from an opening. Further, the side openings 2f may be formed so that the opening ratio in the soaking area X2 is smaller than the opening ratio in the temperature rising area X1.

  Further, according to the heat treatment furnace of the second embodiment, even if dust or dirt is contained in the hot air 6a generated by the hot air forming device 6, it is removed by the filter 14, so that the work 30 has high air cleanliness. Hot air 6a can be supplied.

  In addition, this invention is not limited to the said embodiment, It can implement with another various aspect. For example, in the above-described embodiment, the hot air supply side plate-like body 4 is provided below the upper opening 2a of the inner housing 2, but is attached to the upper portion of the inner housing 2 so as to close the upper opening 2a of the inner housing 2. May be. Further, the upper opening 2a itself of the inner housing 2 is formed of a large number of openings in the same manner as the hot air supply side plate-like body 4, and the opening ratio in the soaking area X2 is higher than the opening ratio in the temperature raising area X1. You may form so that it may become small.

  Moreover, in the said embodiment, although the hot-air supply side plate-shaped body 4 was provided in the temperature rising area | region X1 and the soaking | uniform-heating area | region X2, as shown in FIG. It is possible to play.

  Moreover, in the said embodiment, the hot air supply side plate-like body 4 is a hot air supply side plate-like body 4 in which the supply amount of the hot air 6a supplied to the workpiece | work 30 is larger in the temperature rising area | region X1 than the soaking | uniform-heating area | region X2. This is realized by adjusting the aperture ratio in the temperature raising region and the soaking region X1, X2, but it can also be realized by adjusting the size of the gap 52 between the panel heaters 5a.

  Moreover, in the said embodiment, although the hot air supply apparatus 6 was arrange | positioned in the lower part of the inner side housing | casing 2, you may arrange | position at the side of the inner side housing | casing 2, or the upper direction.

  It is to be noted that, by appropriately combining arbitrary embodiments of the various embodiments described above, the effects possessed by them can be produced.

  The heat treatment furnace according to the present invention has an effect of reducing the manufacturing cost by making it possible to share the hot air supply device, and is particularly useful as a heat treatment furnace for volatilizing the solvent adhering to the workpiece. .

Schematic cross-sectional view in the workpiece transfer direction of the heat treatment furnace according to the first embodiment of the present invention Schematic sectional view in the lateral direction of the heat treatment furnace according to the first embodiment of the present invention. 1 is a perspective view of a heat treatment furnace according to a first embodiment of the present invention. The figure which shows an example of a hot air supply side plate-shaped object The figure which shows the other example of a hot air supply side plate-shaped object The perspective view which shows the modification of a hot air supply side plate-shaped object Sectional drawing which shows the modification of a hot air supply side plate-shaped object Partially enlarged perspective view of the heater device Graph showing temperature change of workpiece Schematic sectional view in the lateral direction of the heat treatment furnace according to the second embodiment of the present invention The partially expanded sectional view of the heat processing furnace which concerns on other embodiment of this invention. Schematic cross-sectional view in the workpiece transfer direction of a conventional heat treatment furnace

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Outer housing | casing 1a, 1b surface 1c, 1d Through-hole 1e, 1f Bending part 1g Lower surface 2 Inner housing | casing 2a Upper opening 2b, 2c, 2d surface 2e Through-hole 2f Side opening 3 Work conveyance apparatus 3a Pulley 3b Chain 3c Pallet 4 Hot Air Supply Side Plate 4a, 4b Slit Plate 5 Heater Device 5a Panel Heater 5b Roof Material 5c Holding Member 6 Hot Air Supply Device 7 Mounting Frame 8 Hot Air Exhaust Side Plate 9 Partition Plate 10 Exhaust Duct 11 Circulating Blower 12, 13 Connection Duct 14 Filter 15 Exhaust blower 16 Supply duct 17 Partition wall 18 Space 19 Wide diameter portion

Claims (12)

An outer housing;
Provided at least on the inside of the outer casing so as to form a space above, and provided with an upper opening on the upper surface, the inside of which is a first region downstream of the workpiece transfer direction and the workpiece transfer direction An inner housing that is separated without being physically partitioned into a second region having a different upstream temperature; and
A workpiece transfer device that is provided so as to penetrate the inside of the outer casing and the inner casing, and that transfers a workpiece so that the workpiece passes through the inner casing;
The workpiece transfer direction such that a plurality of gaps are formed between the upper opening of the inner housing and the workpiece transfer device and between the first region and the second region. A heater device that heats the workpiece, and hot air that heats the workpiece through the upper space, the upper opening, and the gaps between the plurality of heater devices, and the first region. A single hot air supply device for supplying to the second region at the same time;
A hot air supply amount adjustment mechanism that adjusts the hot air so that the supply amount in the second region is larger than that in the first region and supplies the hot air to the workpiece;
A heat treatment furnace characterized by comprising:   The hot air amount adjusting mechanism includes a hot air supply side plate-like body provided with a plurality of openings and disposed between the upper opening of the inner housing and the heater device and in the first region. The heat treatment furnace according to claim 1. The hot air amount adjusting mechanism has a hot air supply side plate-like body disposed between the upper opening of the inner casing and the heater device,
2. The hot air supply side plate-like body is provided with a number of openings so that an aperture ratio in the first region is smaller than an aperture ratio in the second region. The heat treatment furnace described in 1.   The hot air supply side plate-like body is formed such that the first plate-like body provided with many openings and the first plate-like body have different lengths in the conveyance direction of the workpiece and many An opening is provided, the second plate has a second plate that is movably in close contact with the first plate and overlapped, and the first plate and the second plate The heat treatment furnace according to claim 3, wherein an opening ratio in the first region can be adjusted by adjusting a relative position between the first heat treatment furnace and the heat treatment furnace.   The aperture ratio in the second region of the hot air supply side plate-like body is 2 to 4 times the aperture ratio in the first region. Heat treatment furnace.   The hot air supply mechanism is configured by the upper opening of the inner casing provided with a large number of openings so that an opening ratio in the first region is smaller than an opening ratio in the second region. The heat treatment furnace according to claim 1, wherein the heat treatment furnace is provided.   The hot air supply mechanism adjusts a gap between the plurality of heater devices in the first region to be smaller than a gap between the plurality of heater devices in the second region. The heat treatment furnace according to claim 1, wherein the heat treatment furnace is provided.   The heater device includes: a heater that heats the workpiece; and a roof material that covers an upper portion of the heater so that the hot air formed by the hot air supply device does not directly hit the heater. The heat treatment furnace according to any one of claims 1 to 7. The inner housing is provided inside the outer housing so as to have a space connected to the upper space on one side,
On the side surface of the inner casing between the heater device and the workpiece transfer device and parallel to the workpiece transfer direction, hot air that is formed by the hot air supply device and flows into the one side space is supplied to the inner casing. The heat treatment furnace according to any one of claims 1 to 8, wherein a side opening is provided for taking in the inside of the body. A hot air exhaust side plate-like body provided with a large number of openings below the work conveying means inside the inner casing,
The aperture ratio in the second region of the hot air exhaust side plate is equal to or larger than the aperture ratio in the second region of the hot air supply side plate,
The aperture ratio in the first region of the hot air exhaust side plate is equal to or larger than the aperture ratio in the first region of the hot air supply side plate. The heat treatment furnace as described in any one.   11. The exhaust duct for exhausting the hot air is provided inside the inner housing and below the hot air exhaust side plate-like body and in the first region. The heat treatment furnace as described in any one.   The heat treatment furnace according to claim 1, wherein upper sides of the outer casing and the penetrating portion of the inner casing through which the workpiece transfer device passes are bent toward the inside of the inner casing.

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