JP2011527643A5 - - Google Patents
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- Publication number
- JP2011527643A5 JP2011527643A5 JP2011517411A JP2011517411A JP2011527643A5 JP 2011527643 A5 JP2011527643 A5 JP 2011527643A5 JP 2011517411 A JP2011517411 A JP 2011517411A JP 2011517411 A JP2011517411 A JP 2011517411A JP 2011527643 A5 JP2011527643 A5 JP 2011527643A5
- Authority
- JP
- Japan
- Prior art keywords
- acid
- substrate
- polishing composition
- nickel
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 18
- 238000005498 polishing Methods 0.000 claims 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 6
- 239000002253 acid Substances 0.000 claims 5
- CIEZZGWIJBXOTE-UHFFFAOYSA-N 2-[bis(carboxymethyl)amino]propanoic acid Chemical compound OC(=O)C(C)N(CC(O)=O)CC(O)=O CIEZZGWIJBXOTE-UHFFFAOYSA-N 0.000 claims 4
- 239000000377 silicon dioxide Substances 0.000 claims 4
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims 2
- UWRBFYBQPCJRRL-UHFFFAOYSA-N 3-[bis(carboxymethyl)amino]propanoic acid Chemical compound OC(=O)CCN(CC(O)=O)CC(O)=O UWRBFYBQPCJRRL-UHFFFAOYSA-N 0.000 claims 1
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 229960003330 pentetic acid Drugs 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/170,954 | 2008-07-10 | ||
| US12/170,954 US8247326B2 (en) | 2008-07-10 | 2008-07-10 | Method of polishing nickel-phosphorous |
| PCT/US2009/003955 WO2010005543A2 (en) | 2008-07-10 | 2009-07-06 | Method of polishing nickel-phosphorous |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011527643A JP2011527643A (ja) | 2011-11-04 |
| JP2011527643A5 true JP2011527643A5 (enExample) | 2011-12-15 |
| JP5508413B2 JP5508413B2 (ja) | 2014-05-28 |
Family
ID=41505533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011517411A Expired - Fee Related JP5508413B2 (ja) | 2008-07-10 | 2009-07-06 | ニッケル−リンの研磨方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8247326B2 (enExample) |
| EP (1) | EP2311074B1 (enExample) |
| JP (1) | JP5508413B2 (enExample) |
| KR (1) | KR101259703B1 (enExample) |
| CN (1) | CN102089865B (enExample) |
| MY (1) | MY149715A (enExample) |
| TW (1) | TWI397578B (enExample) |
| WO (1) | WO2010005543A2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9039914B2 (en) | 2012-05-23 | 2015-05-26 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous-coated memory disks |
| WO2014061417A1 (ja) * | 2012-10-16 | 2014-04-24 | 日立化成株式会社 | Ｃｍｐ用研磨液、貯蔵液及び研磨方法 |
| WO2015057433A1 (en) | 2013-10-18 | 2015-04-23 | Cabot Microelectronics Corporation | Polishing composition and method for nickel-phosphorous coated memory disks |
| US10358579B2 (en) * | 2013-12-03 | 2019-07-23 | Cabot Microelectronics Corporation | CMP compositions and methods for polishing nickel phosphorous surfaces |
| US9909032B2 (en) * | 2014-01-15 | 2018-03-06 | Cabot Microelectronics Corporation | Composition and method for polishing memory hard disks |
| JP6511039B2 (ja) | 2014-03-28 | 2019-05-08 | 山口精研工業株式会社 | 研磨剤組成物、および磁気ディスク基板の研磨方法 |
| MY186419A (en) * | 2014-03-28 | 2021-07-22 | Yamaguchi Seiken Kogyo Co Ltd | Polishing composition and method for polishing magnetic disk substrate |
| TWI563073B (en) * | 2014-06-03 | 2016-12-21 | Cabot Microelectronics Corp | Cmp compositions and methods for polishing rigid disk surfaces |
| JP6775511B2 (ja) | 2015-09-25 | 2020-10-28 | 山口精研工業株式会社 | 研磨剤組成物、および磁気ディスク基板の研磨方法 |
| JP6775453B2 (ja) | 2017-03-23 | 2020-10-28 | 山口精研工業株式会社 | 磁気ディスク基板用研磨剤組成物 |
| JP2019016417A (ja) | 2017-07-04 | 2019-01-31 | 山口精研工業株式会社 | 磁気ディスク基板用研磨剤組成物 |
| JP7034667B2 (ja) | 2017-10-24 | 2022-03-14 | 山口精研工業株式会社 | 磁気ディスク基板用研磨剤組成物 |
| US20190153262A1 (en) * | 2017-11-20 | 2019-05-23 | Cabot Microelectronics Corporation | Composition and method for polishing memory hard disks exhibiting reduced surface scratching |
| US10698846B2 (en) * | 2018-11-07 | 2020-06-30 | Realtek Semiconductor Corporation | DDR SDRAM physical layer interface circuit and DDR SDRAM control device |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4090589B2 (ja) | 1998-09-01 | 2008-05-28 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| WO2000024842A1 (en) | 1998-10-23 | 2000-05-04 | Arch Specialty Chemicals, Inc. | A chemical mechanical polishing slurry system having an activator solution |
| JP4021133B2 (ja) * | 1999-07-22 | 2007-12-12 | 花王株式会社 | 研磨液組成物 |
| US6258140B1 (en) * | 1999-09-27 | 2001-07-10 | Fujimi America Inc. | Polishing composition |
| US6332831B1 (en) | 2000-04-06 | 2001-12-25 | Fujimi America Inc. | Polishing composition and method for producing a memory hard disk |
| US6468913B1 (en) | 2000-07-08 | 2002-10-22 | Arch Specialty Chemicals, Inc. | Ready-to-use stable chemical-mechanical polishing slurries |
| JP4231632B2 (ja) | 2001-04-27 | 2009-03-04 | 花王株式会社 | 研磨液組成物 |
| US20030104770A1 (en) | 2001-04-30 | 2003-06-05 | Arch Specialty Chemicals, Inc. | Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers |
| US20040159050A1 (en) | 2001-04-30 | 2004-08-19 | Arch Specialty Chemicals, Inc. | Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers |
| JP3875156B2 (ja) * | 2002-08-07 | 2007-01-31 | 花王株式会社 | ロールオフ低減剤 |
| US7300601B2 (en) | 2002-12-10 | 2007-11-27 | Advanced Technology Materials, Inc. | Passivative chemical mechanical polishing composition for copper film planarization |
| US7147682B2 (en) | 2002-12-26 | 2006-12-12 | Kao Corporation | Polishing composition |
| JP3997153B2 (ja) | 2002-12-26 | 2007-10-24 | 花王株式会社 | 研磨液組成物 |
| TWI254741B (en) | 2003-02-05 | 2006-05-11 | Kao Corp | Polishing composition |
| JP4202157B2 (ja) * | 2003-02-28 | 2008-12-24 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| US20040232379A1 (en) * | 2003-05-20 | 2004-11-25 | Ameen Joseph G. | Multi-oxidizer-based slurry for nickel hard disk planarization |
| GB2402941B (en) | 2003-06-09 | 2007-06-27 | Kao Corp | Method for manufacturing substrate |
| JP4206313B2 (ja) | 2003-08-08 | 2009-01-07 | 花王株式会社 | 磁気ディスク用研磨液組成物 |
| JP4707311B2 (ja) * | 2003-08-08 | 2011-06-22 | 花王株式会社 | 磁気ディスク用基板 |
| GB2435263B (en) * | 2003-08-08 | 2007-11-28 | Corporation Kao | Substrate for magnetic disk and polishing method therefor |
| US20050079803A1 (en) | 2003-10-10 | 2005-04-14 | Siddiqui Junaid Ahmed | Chemical-mechanical planarization composition having PVNO and associated method for use |
| US7153335B2 (en) | 2003-10-10 | 2006-12-26 | Dupont Air Products Nanomaterials Llc | Tunable composition and method for chemical-mechanical planarization with aspartic acid/tolyltriazole |
| US7514363B2 (en) | 2003-10-23 | 2009-04-07 | Dupont Air Products Nanomaterials Llc | Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use |
| JP2005286048A (ja) | 2004-03-29 | 2005-10-13 | Nitta Haas Inc | 半導体研磨用組成物 |
| KR100672940B1 (ko) * | 2004-08-03 | 2007-01-24 | 삼성전자주식회사 | 금속막을 위한 화학적기계적 연마 슬러리 및 이를 이용한금속막의 화학적기계적 연마 방법 |
| US7563383B2 (en) * | 2004-10-12 | 2009-07-21 | Cabot Mircroelectronics Corporation | CMP composition with a polymer additive for polishing noble metals |
| US7524347B2 (en) * | 2004-10-28 | 2009-04-28 | Cabot Microelectronics Corporation | CMP composition comprising surfactant |
| KR100662546B1 (ko) | 2005-03-07 | 2006-12-28 | 제일모직주식회사 | 실리콘 웨이퍼의 표면 품질을 개선하는 연마용 슬러리 조성물 및 이를 이용한 연마방법 |
| US20060213868A1 (en) | 2005-03-23 | 2006-09-28 | Siddiqui Junaid A | Low-dishing composition and method for chemical-mechanical planarization with branched-alkylphenol-substituted benzotriazole |
| US20070209288A1 (en) | 2005-03-28 | 2007-09-13 | Yoshiharu Ohta | Semiconductor Polishing Composition |
| US20090127501A1 (en) * | 2005-05-27 | 2009-05-21 | Nissan Chemical Industries, Ltd. | Polishing Composition for Silicon Wafer |
| JP2007088379A (ja) * | 2005-09-26 | 2007-04-05 | Fujifilm Corp | 水系研磨液、及び、化学機械的研磨方法 |
| TWI506621B (zh) * | 2005-12-22 | 2015-11-01 | Kao Corp | 硬碟基板用研磨液組合物 |
| JP2007179612A (ja) * | 2005-12-27 | 2007-07-12 | Kao Corp | 磁気ディスク基板用研磨液組成物 |
| DE102006008689B4 (de) * | 2006-02-24 | 2012-01-26 | Lanxess Deutschland Gmbh | Poliermittel und dessen Verwendung |
| US20070249167A1 (en) * | 2006-04-21 | 2007-10-25 | Cabot Microelectronics Corporation | CMP method for copper-containing substrates |
-
2008
- 2008-07-10 US US12/170,954 patent/US8247326B2/en active Active
-
2009
- 2009-07-06 WO PCT/US2009/003955 patent/WO2010005543A2/en not_active Ceased
- 2009-07-06 KR KR1020117003011A patent/KR101259703B1/ko not_active Expired - Fee Related
- 2009-07-06 EP EP09794806.1A patent/EP2311074B1/en not_active Not-in-force
- 2009-07-06 MY MYPI2011000031A patent/MY149715A/en unknown
- 2009-07-06 CN CN200980126743.0A patent/CN102089865B/zh not_active Expired - Fee Related
- 2009-07-06 JP JP2011517411A patent/JP5508413B2/ja not_active Expired - Fee Related
- 2009-07-09 TW TW098123246A patent/TWI397578B/zh active