JP2011527637A - レーザ機械加工のための方法および装置 - Google Patents

レーザ機械加工のための方法および装置 Download PDF

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Publication number
JP2011527637A
JP2011527637A JP2011517574A JP2011517574A JP2011527637A JP 2011527637 A JP2011527637 A JP 2011527637A JP 2011517574 A JP2011517574 A JP 2011517574A JP 2011517574 A JP2011517574 A JP 2011517574A JP 2011527637 A JP2011527637 A JP 2011527637A
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Prior art keywords
sample
emission
determining
laser beam
laser
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JP2011517574A
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Japanese (ja)
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JP2011527637A5 (enExample
Inventor
マーカス・ストロー
ミロス・トス
マーク・ウトロート
デイヴィッド・エイチ・ナラム
ガイド・クニペルス
ゲラルドゥス・ニコラス・アン・ファン・フェーン
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エフ・イ−・アイ・カンパニー
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Publication of JP2011527637A publication Critical patent/JP2011527637A/ja
Publication of JP2011527637A5 publication Critical patent/JP2011527637A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1423—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the flow carrying an electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
    • B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP2011517574A 2008-07-09 2009-07-08 レーザ機械加工のための方法および装置 Pending JP2011527637A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7930408P 2008-07-09 2008-07-09
US61/079,304 2008-07-09
PCT/US2009/049961 WO2010006067A2 (en) 2008-07-09 2009-07-08 Method and apparatus for laser machining

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014094307A Division JP6109115B2 (ja) 2008-07-09 2014-04-30 レーザ機械加工のための方法および装置

Publications (2)

Publication Number Publication Date
JP2011527637A true JP2011527637A (ja) 2011-11-04
JP2011527637A5 JP2011527637A5 (enExample) 2012-08-16

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JP2011517574A Pending JP2011527637A (ja) 2008-07-09 2009-07-08 レーザ機械加工のための方法および装置
JP2011517626A Active JP5744727B2 (ja) 2008-07-09 2009-07-09 レーザ機械加工のための方法および装置
JP2014094307A Active JP6109115B2 (ja) 2008-07-09 2014-04-30 レーザ機械加工のための方法および装置

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JP2011517626A Active JP5744727B2 (ja) 2008-07-09 2009-07-09 レーザ機械加工のための方法および装置
JP2014094307A Active JP6109115B2 (ja) 2008-07-09 2014-04-30 レーザ機械加工のための方法および装置

Country Status (5)

Country Link
US (2) US10493559B2 (enExample)
EP (2) EP2313230A4 (enExample)
JP (3) JP2011527637A (enExample)
CN (2) CN102149509B (enExample)
WO (2) WO2010006067A2 (enExample)

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