ITVA20030037A1 - Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico. - Google Patents

Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico.

Info

Publication number
ITVA20030037A1
ITVA20030037A1 IT000037A ITVA20030037A ITVA20030037A1 IT VA20030037 A1 ITVA20030037 A1 IT VA20030037A1 IT 000037 A IT000037 A IT 000037A IT VA20030037 A ITVA20030037 A IT VA20030037A IT VA20030037 A1 ITVA20030037 A1 IT VA20030037A1
Authority
IT
Italy
Prior art keywords
electronic
electron emission
monochromatic
spectroscope
emission induced
Prior art date
Application number
IT000037A
Other languages
English (en)
Inventor
Stefano Giovanni Alberici
Original Assignee
Stmicroelettronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stmicroelettronics Srl filed Critical Stmicroelettronics Srl
Priority to IT000037A priority Critical patent/ITVA20030037A1/it
Priority to DE112004001895T priority patent/DE112004001895T5/de
Priority to US10/574,868 priority patent/US20070210249A1/en
Priority to PCT/IT2004/000555 priority patent/WO2005033683A1/en
Publication of ITVA20030037A1 publication Critical patent/ITVA20030037A1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2511—Auger spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2555—Microprobes, i.e. particle-induced X-ray spectrometry
    • H01J2237/2561—Microprobes, i.e. particle-induced X-ray spectrometry electron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
IT000037A 2003-10-07 2003-10-07 Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico. ITVA20030037A1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT000037A ITVA20030037A1 (it) 2003-10-07 2003-10-07 Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico.
DE112004001895T DE112004001895T5 (de) 2003-10-07 2004-10-06 Elektonenspektroskop mit Emission, die durch einen monochromatischen Elektronenstrahl induziert wird
US10/574,868 US20070210249A1 (en) 2003-10-07 2004-10-06 Electron Spectroscope With Emission Induced By A Monochromatic Electron Beam
PCT/IT2004/000555 WO2005033683A1 (en) 2003-10-07 2004-10-06 Electron spectroscope with emission induced by a monochromatic electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000037A ITVA20030037A1 (it) 2003-10-07 2003-10-07 Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico.

Publications (1)

Publication Number Publication Date
ITVA20030037A1 true ITVA20030037A1 (it) 2005-04-08

Family

ID=34401338

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000037A ITVA20030037A1 (it) 2003-10-07 2003-10-07 Spettroscopio elettronico con emissione di elettroni indotta da fascio elettronico monocromatico.

Country Status (4)

Country Link
US (1) US20070210249A1 (it)
DE (1) DE112004001895T5 (it)
IT (1) ITVA20030037A1 (it)
WO (1) WO2005033683A1 (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070090288A1 (en) * 2005-10-20 2007-04-26 Dror Shemesh Method and system for enhancing resolution of a scanning electron microscope
WO2010006067A2 (en) * 2008-07-09 2010-01-14 Fei Company Method and apparatus for laser machining
CN103123325B (zh) * 2011-11-18 2015-06-03 中国科学院物理研究所 能量、动量二维解析的高分辨电子能量损失谱仪
CN105466962B (zh) * 2014-09-10 2018-04-06 冠研（上海）专利技术有限公司 具有无氧铜材料的样品调整控制器
CN105468027B (zh) * 2014-09-10 2018-03-23 冠研（上海）专利技术有限公司 具有超高真空度的样品调整控制器
CN105403541B (zh) * 2014-09-10 2018-06-29 冠研（上海）专利技术有限公司 样品调整控制器
CN105466739B (zh) * 2014-09-10 2018-05-04 冠研（上海）专利技术有限公司 具有样品调整控制器的光电子能谱设备
CN105468026B (zh) * 2014-09-10 2018-04-03 冠研（上海）专利技术有限公司 具有三个自由度的样品调整控制器
CN105466963B (zh) * 2014-09-10 2018-02-13 冠研（上海）专利技术有限公司 具有样品调整控制器的电子显微镜
CN114594121B (zh) * 2022-03-04 2022-11-29 南开大学 一种高通量xps设备、检测方法及应用

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4810880A (en) * 1987-06-05 1989-03-07 The Perkin-Elmer Corporation Direct imaging monochromatic electron microscope
KR960014922A (ko) * 1994-10-14 1996-05-22 가나이 쯔또무 표면해석방법 및 장치
GB9718012D0 (en) * 1997-08-26 1997-10-29 Vg Systems Ltd A spectrometer and method of spectroscopy
US6583413B1 (en) * 1999-09-01 2003-06-24 Hitachi, Ltd. Method of inspecting a circuit pattern and inspecting instrument
US6495826B2 (en) * 2000-04-10 2002-12-17 Jeol, Ltd. Monochrometer for electron beam

Also Published As

Publication number Publication date
US20070210249A1 (en) 2007-09-13
DE112004001895T5 (de) 2006-08-17
WO2005033683A1 (en) 2005-04-14

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