DE10339346B8 - Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer - Google Patents

Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer Download PDF

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Publication number
DE10339346B8
DE10339346B8 DE10339346A DE10339346A DE10339346B8 DE 10339346 B8 DE10339346 B8 DE 10339346B8 DE 10339346 A DE10339346 A DE 10339346A DE 10339346 A DE10339346 A DE 10339346A DE 10339346 B8 DE10339346 B8 DE 10339346B8
Authority
DE
Germany
Prior art keywords
ion
bismuth
mass spectrometer
liquid metal
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
DE10339346A
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English (en)
Other versions
DE10339346B4 (de
DE10339346A1 (de
Inventor
Felix Dr. Kollmer
Peter Hoerster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ION-TOF TECHNOLOGIES GMBH, 48149 MUENSTER, DE
Original Assignee
ION-TOF GmbH
ION TOF GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34305558&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE10339346(B8) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ION-TOF GmbH, ION TOF GmbH filed Critical ION-TOF GmbH
Priority to DE10339346A priority Critical patent/DE10339346B8/de
Priority to EP04740521A priority patent/EP1658632B1/de
Priority to JP2006524234A priority patent/JP5128814B2/ja
Priority to US10/568,832 priority patent/US20060202130A1/en
Priority to PCT/EP2004/007154 priority patent/WO2005029532A2/de
Priority to US10/568,832 priority patent/US9378937B2/en
Priority to AT04740521T priority patent/ATE408891T1/de
Publication of DE10339346A1 publication Critical patent/DE10339346A1/de
Publication of DE10339346B4 publication Critical patent/DE10339346B4/de
Application granted granted Critical
Publication of DE10339346B8 publication Critical patent/DE10339346B8/de
Priority to JP2011193692A priority patent/JP5416178B2/ja
Priority to US13/347,792 priority patent/US20120104249A1/en
Priority to JP2013208935A priority patent/JP2014006265A/ja
Priority to US15/152,757 priority patent/US20160254134A1/en
Anticipated expiration legal-status Critical
Withdrawn - After Issue legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE10339346A 2003-08-25 2003-08-25 Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer Withdrawn - After Issue DE10339346B8 (de)

Priority Applications (11)

Application Number Priority Date Filing Date Title
DE10339346A DE10339346B8 (de) 2003-08-25 2003-08-25 Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer
AT04740521T ATE408891T1 (de) 2003-08-25 2004-07-01 Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer
JP2006524234A JP5128814B2 (ja) 2003-08-25 2004-07-01 質量分析器およびこの質量分析器のための液体金属イオン源
US10/568,832 US20060202130A1 (en) 2003-08-25 2004-07-01 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type
PCT/EP2004/007154 WO2005029532A2 (de) 2003-08-25 2004-07-01 Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer
US10/568,832 US9378937B2 (en) 2003-08-25 2004-07-01 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type
EP04740521A EP1658632B1 (de) 2003-08-25 2004-07-01 Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer
JP2011193692A JP5416178B2 (ja) 2003-08-25 2011-09-06 質量分析器およびこの質量分析器のための液体金属イオン源
US13/347,792 US20120104249A1 (en) 2003-08-25 2012-01-11 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type
JP2013208935A JP2014006265A (ja) 2003-08-25 2013-10-04 質量分析器およびこの質量分析器のための液体金属イオン源
US15/152,757 US20160254134A1 (en) 2003-08-25 2016-05-12 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10339346A DE10339346B8 (de) 2003-08-25 2003-08-25 Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer

Publications (3)

Publication Number Publication Date
DE10339346A1 DE10339346A1 (de) 2005-04-14
DE10339346B4 DE10339346B4 (de) 2005-12-08
DE10339346B8 true DE10339346B8 (de) 2006-04-13

Family

ID=34305558

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10339346A Withdrawn - After Issue DE10339346B8 (de) 2003-08-25 2003-08-25 Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer

Country Status (6)

Country Link
US (4) US20060202130A1 (de)
EP (1) EP1658632B1 (de)
JP (3) JP5128814B2 (de)
AT (1) ATE408891T1 (de)
DE (1) DE10339346B8 (de)
WO (1) WO2005029532A2 (de)

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DE102005027937B3 (de) * 2005-06-16 2006-12-07 Ion-Tof Gmbh Verfahren zur Analyse einer Festkörperprobe
WO2007025348A1 (en) * 2005-09-02 2007-03-08 Australian Nuclear Science & Technology Organisation An isotope ratio mass spectrometer and methods for determining isotope ratios
US8080930B2 (en) * 2006-09-07 2011-12-20 Michigan Technological University Self-regenerating nanotips for low-power electric propulsion (EP) cathodes
US20080128608A1 (en) * 2006-11-06 2008-06-05 The Scripps Research Institute Nanostructure-initiator mass spectrometry
JP2008185547A (ja) * 2007-01-31 2008-08-14 Canon Inc 情報取得方法及び情報取得装置
JP4854590B2 (ja) * 2007-05-11 2012-01-18 キヤノン株式会社 飛行時間型２次イオン質量分析装置
US7723697B2 (en) * 2007-09-21 2010-05-25 Varian Semiconductor Equipment Associates, Inc. Techniques for optical ion beam metrology
EP2056333B1 (de) * 2007-10-29 2016-08-24 ION-TOF Technologies GmbH Flüssigmetallionenquelle, Sekundärionenmassenspektrometer, sekundärionenmassenspektrometisches Analyseverfahren sowie deren Verwendungen
WO2009061313A1 (en) * 2007-11-06 2009-05-14 The Scripps Research Institute Nanostructure-initiator mass spectrometry
WO2010006067A2 (en) 2008-07-09 2010-01-14 Fei Company Method and apparatus for laser machining
CN102226981B (zh) * 2011-05-10 2013-03-06 中国科学院地质与地球物理研究所 二次离子质谱仪的样品保护装置和保护方法
US9551079B2 (en) 2013-09-13 2017-01-24 Purdue Research Foundation Systems and methods for producing metal clusters; functionalized surfaces; and droplets including solvated metal ions
CN104616962B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 用于液相色谱‑质谱仪的离子源组件
EP3290913B1 (de) * 2016-09-02 2022-07-27 ION-TOF Technologies GmbH Sekundärionenmassenspektrokopisches verfahren, system und verwendungen hiervon
CN106920735B (zh) * 2017-03-20 2018-10-16 北京大学深圳研究生院 可检测活性中间体的方法、电喷雾离子源装置及质谱仪
GB2585327B (en) * 2018-12-12 2023-02-15 Thermo Fisher Scient Bremen Gmbh Cooling plate for ICP-MS
EP3909067A1 (de) * 2019-01-11 2021-11-17 Helmholtz-Zentrum Potsdam - Deutsches GeoForschungsZentrum GFZ Stiftung des Öffentlichen Rechts des Lands Brandenburg Ionenquelle mit einer strukturierten probe zur verbesserten ionisierung

Citations (3)

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JPH0384435A (ja) * 1989-08-29 1991-04-10 Hitachi Ltd Ｓｉｍｓにおける質量数較正用混合標準試料
DE4416413A1 (de) * 1994-05-10 1995-11-23 Ion Tof Gmbh Verfahren zum Betreiben eines Flugzeit-Sekundärionen-Massenspektrometers
US6002128A (en) * 1995-07-04 1999-12-14 Ionoptika, Ltd. Sample analyzer

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GB1483966A (en) * 1974-10-23 1977-08-24 Sharp Kk Vapourized-metal cluster ion source and ionized-cluster beam deposition
NL7415318A (nl) * 1974-11-25 1976-05-28 Philips Nv Wienfilter.
US4426582A (en) * 1980-01-21 1984-01-17 Oregon Graduate Center Charged particle beam apparatus and method utilizing liquid metal field ionization source and asymmetric three element lens system
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source
JPS59138044A (ja) * 1983-01-27 1984-08-08 Agency Of Ind Science & Technol 集束イオンビ−ム装置
JPS59157943A (ja) * 1983-02-25 1984-09-07 Hitachi Ltd 分子二次イオン質量分析計
US4686414A (en) 1984-11-20 1987-08-11 Hughes Aircraft Company Enhanced wetting of liquid metal alloy ion sources
JPS61248335A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 液体金属イオン源
JPH03155025A (ja) 1989-11-10 1991-07-03 Sanyo Electric Co Ltd インジウムビスマスイオン源
JPH11274255A (ja) 1998-03-19 1999-10-08 Seiko Instruments Inc 断面加工観察方法
US6291820B1 (en) * 1999-01-08 2001-09-18 The Regents Of The University Of California Highly charged ion secondary ion mass spectroscopy
US6791078B2 (en) * 2002-06-27 2004-09-14 Micromass Uk Limited Mass spectrometer
WO2005001869A2 (en) * 2003-06-06 2005-01-06 Ionwerks Gold implantation/deposition of biological samples for laser desorption three dimensional depth profiling of tissues
US7701138B2 (en) * 2003-07-02 2010-04-20 Canon Kabushiki Kaisha Information acquisition method, information acquisition apparatus and disease diagnosis method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0384435A (ja) * 1989-08-29 1991-04-10 Hitachi Ltd Ｓｉｍｓにおける質量数較正用混合標準試料
DE4416413A1 (de) * 1994-05-10 1995-11-23 Ion Tof Gmbh Verfahren zum Betreiben eines Flugzeit-Sekundärionen-Massenspektrometers
US6002128A (en) * 1995-07-04 1999-12-14 Ionoptika, Ltd. Sample analyzer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Liquid Metal Gold Cluster Ion Gun for Improved Molecular Spectroscopy and Imaging" Prospekt der Fa. Ion-Tof, Münster (2002) *

Also Published As

Publication number Publication date
US9378937B2 (en) 2016-06-28
EP1658632B1 (de) 2008-09-17
DE10339346B4 (de) 2005-12-08
EP1658632A2 (de) 2006-05-24
US20060202130A1 (en) 2006-09-14
JP5416178B2 (ja) 2014-02-12
JP5128814B2 (ja) 2013-01-23
US20120104249A1 (en) 2012-05-03
JP2007503685A (ja) 2007-02-22
JP2014006265A (ja) 2014-01-16
US20160254134A1 (en) 2016-09-01
WO2005029532A2 (de) 2005-03-31
DE10339346A1 (de) 2005-04-14
JP2011243591A (ja) 2011-12-01
ATE408891T1 (de) 2008-10-15
WO2005029532A3 (de) 2006-04-20

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8381 Inventor (new situation)

Inventor name: HOERSTER, PETER, 48149 MUENSTER, DE

Inventor name: KOLLMER, FELIX, DR., 48341 ALTENBERGE, DE

8396 Reprint of erroneous front page
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ION-TOF TECHNOLOGIES GMBH, 48149 MUENSTER, DE

R120 Application withdrawn or ip right abandoned
R082 Change of representative

Representative=s name: BISCHOF & PARTNER RECHTSANWAELTE PARTNERSCHAFT, DE