ATE408891T1 - Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer - Google Patents

Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer

Info

Publication number
ATE408891T1
ATE408891T1 AT04740521T AT04740521T ATE408891T1 AT E408891 T1 ATE408891 T1 AT E408891T1 AT 04740521 T AT04740521 T AT 04740521T AT 04740521 T AT04740521 T AT 04740521T AT E408891 T1 ATE408891 T1 AT E408891T1
Authority
AT
Austria
Prior art keywords
ion
bismuth
mass spectrometer
liquid metal
mass
Prior art date
Application number
AT04740521T
Other languages
English (en)
Inventor
Felix Kollmer
Peter Hoerster
Original Assignee
Ion Tof Technologies Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34305558&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE408891(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ion Tof Technologies Gmbh filed Critical Ion Tof Technologies Gmbh
Application granted granted Critical
Publication of ATE408891T1 publication Critical patent/ATE408891T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT04740521T 2003-08-25 2004-07-01 Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer ATE408891T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10339346A DE10339346B8 (de) 2003-08-25 2003-08-25 Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer

Publications (1)

Publication Number Publication Date
ATE408891T1 true ATE408891T1 (de) 2008-10-15

Family

ID=34305558

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04740521T ATE408891T1 (de) 2003-08-25 2004-07-01 Massenspektrometer und flüssigmetall-ionenquelle für ein solches massenspektrometer

Country Status (6)

Country Link
US (4) US20060202130A1 (de)
EP (1) EP1658632B1 (de)
JP (3) JP5128814B2 (de)
AT (1) ATE408891T1 (de)
DE (1) DE10339346B8 (de)
WO (1) WO2005029532A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027937B3 (de) * 2005-06-16 2006-12-07 Ion-Tof Gmbh Verfahren zur Analyse einer Festkörperprobe
JP2009507212A (ja) * 2005-09-02 2009-02-19 オーストラリアン ヌークリア サイエンス アンド テクノロジー オーガニゼイション 同位体比質量分析計および同位体比の決定方法
WO2008031058A2 (en) * 2006-09-07 2008-03-13 Michigan Technological University Self-regenerating nanotips for low-power electric propulsion (ep) cathodes
US20080128608A1 (en) * 2006-11-06 2008-06-05 The Scripps Research Institute Nanostructure-initiator mass spectrometry
JP2008185547A (ja) * 2007-01-31 2008-08-14 Canon Inc 情報取得方法及び情報取得装置
JP4854590B2 (ja) * 2007-05-11 2012-01-18 キヤノン株式会社 飛行時間型２次イオン質量分析装置
US7723697B2 (en) * 2007-09-21 2010-05-25 Varian Semiconductor Equipment Associates, Inc. Techniques for optical ion beam metrology
EP2056333B1 (de) * 2007-10-29 2016-08-24 ION-TOF Technologies GmbH Flüssigmetallionenquelle, Sekundärionenmassenspektrometer, sekundärionenmassenspektrometisches Analyseverfahren sowie deren Verwendungen
WO2009061313A1 (en) * 2007-11-06 2009-05-14 The Scripps Research Institute Nanostructure-initiator mass spectrometry
EP2313230A4 (de) 2008-07-09 2017-03-08 FEI Company Verfahren und vorrichtung für laserbearbeitung
CN102226981B (zh) * 2011-05-10 2013-03-06 中国科学院地质与地球物理研究所 二次离子质谱仪的样品保护装置和保护方法
US9551079B2 (en) * 2013-09-13 2017-01-24 Purdue Research Foundation Systems and methods for producing metal clusters; functionalized surfaces; and droplets including solvated metal ions
CN104616962B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 用于液相色谱‑质谱仪的离子源组件
EP3290913B1 (de) * 2016-09-02 2022-07-27 ION-TOF Technologies GmbH Sekundärionenmassenspektrokopisches verfahren, system und verwendungen hiervon
CN106920735B (zh) * 2017-03-20 2018-10-16 北京大学深圳研究生院 可检测活性中间体的方法、电喷雾离子源装置及质谱仪
GB2585327B (en) * 2018-12-12 2023-02-15 Thermo Fisher Scient Bremen Gmbh Cooling plate for ICP-MS
US20220102131A1 (en) * 2019-01-11 2022-03-31 Helmholtz-Zentrum Potsdam - Deutsches Geoforschungszentrum GFZ Stiftung des Offentlichen Rechts des Ion source including structured sample for ionization

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US3508045A (en) * 1968-07-12 1970-04-21 Applied Res Lab Analysis by bombardment with chemically reactive ions
GB1483966A (en) * 1974-10-23 1977-08-24 Sharp Kk Vapourized-metal cluster ion source and ionized-cluster beam deposition
NL7415318A (nl) * 1974-11-25 1976-05-28 Philips Nv Wienfilter.
US4426582A (en) * 1980-01-21 1984-01-17 Oregon Graduate Center Charged particle beam apparatus and method utilizing liquid metal field ionization source and asymmetric three element lens system
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source
JPS59138044A (ja) * 1983-01-27 1984-08-08 Agency Of Ind Science & Technol 集束イオンビ−ム装置
JPS59157943A (ja) * 1983-02-25 1984-09-07 Hitachi Ltd 分子二次イオン質量分析計
US4686414A (en) * 1984-11-20 1987-08-11 Hughes Aircraft Company Enhanced wetting of liquid metal alloy ion sources
JPS61248335A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 液体金属イオン源
JPH0756469B2 (ja) * 1989-08-29 1995-06-14 株式会社日立製作所 Ｓｉｍｓにおける質量数較正用混合標準試料
JPH03155025A (ja) * 1989-11-10 1991-07-03 Sanyo Electric Co Ltd インジウムビスマスイオン源
DE4416413C2 (de) * 1994-05-10 1996-03-28 Ion Tof Gmbh Verfahren zum Betreiben eines Flugzeit-Sekundärionen-Massenspektrometers
GB9513586D0 (en) * 1995-07-04 1995-09-06 Ionoptika Limited Sample analyzer
JPH11274255A (ja) 1998-03-19 1999-10-08 Seiko Instruments Inc 断面加工観察方法
US6291820B1 (en) * 1999-01-08 2001-09-18 The Regents Of The University Of California Highly charged ion secondary ion mass spectroscopy
US6791078B2 (en) * 2002-06-27 2004-09-14 Micromass Uk Limited Mass spectrometer
EP1648595B1 (de) * 2003-06-06 2016-05-04 Ionwerks Goldimplantation/-ablagerung auf biologischen proben zur laserdesorption zur dreidimensionalen tiefenprofilierung von geweben
US7701138B2 (en) * 2003-07-02 2010-04-20 Canon Kabushiki Kaisha Information acquisition method, information acquisition apparatus and disease diagnosis method

Also Published As

Publication number Publication date
US9378937B2 (en) 2016-06-28
JP5128814B2 (ja) 2013-01-23
DE10339346B4 (de) 2005-12-08
EP1658632B1 (de) 2008-09-17
WO2005029532A2 (de) 2005-03-31
US20120104249A1 (en) 2012-05-03
JP2011243591A (ja) 2011-12-01
DE10339346A1 (de) 2005-04-14
JP2014006265A (ja) 2014-01-16
US20160254134A1 (en) 2016-09-01
DE10339346B8 (de) 2006-04-13
EP1658632A2 (de) 2006-05-24
US20060202130A1 (en) 2006-09-14
JP2007503685A (ja) 2007-02-22
JP5416178B2 (ja) 2014-02-12
WO2005029532A3 (de) 2006-04-20

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