JP2011124226A - トロイダル低電場反応性気体および誘電真空槽を有するプラズマ源 - Google Patents
トロイダル低電場反応性気体および誘電真空槽を有するプラズマ源 Download PDFInfo
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- H01J37/32431—Constructional details of the reactor
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Abstract
【解決手段】誘電体材料で形成され、気体を閉じ込めるチャンネルを定める槽1210と、槽1210に隣接するヒートシンク1220と、槽1210とヒートシンク
1220との間にありこれらと機械的に連通して配置される熱インターフェイス1230と、槽1210と熱インターフェイス1230との間に配置された紫外線遮光層1234と、を含んでおり、熱インターフェイス1230は、熱的に誘起される寸法変化に応答して熱インターフェイス1230とヒートシンク1220と槽1210との中の少なくとも一つの動きを調節する空間をヒートシンク1220と槽1210との間に定める。
【選択図】図12
Description
本発明は、全体として、プラズマ発生および加工装置に関する。詳しくは、本発明は、プラズマ点火およびプラズマ槽の冷却のための方法および装置に関する。
プラズマ放電を用いて気体を解離させ、イオン、フリーラジカル、原子および分子を含む活性化気体を製造できる。活性化気体は、半導体ウエハ、粉末および他の気体などの材料を加工することを含む多数の産業および科学の用途に用いられる。プラズマのパラメータおよび加工される材料に対するプラズマの曝露の条件は、用途によって広く変化する。
本発明は、部分として、槽内のプラズマの信頼できる点火を提供し、有効で信頼できる槽の冷却を提供できる装置および方法を特徴とする。このために、本発明は、従来のプラズマシステムより大面積のおよび/または長い点火電極、プラズマ槽への入り口気体の点火時のバイパス、プラズマ槽の気体入り口ポート近傍での点火、およびヒートシンクと槽との間に配置されるギャップ付きまたはギャップなし除熱構造を特徴とする。本発明のこれらの特徴によって、従来のプラズマシステムでは利用できない範囲の用途が可能になる。
(定義)
「プラズマシステム」は、プラズマ発生構成部品を含み、材料加工構成部品を含むことがある装置である。プラズマシステムは、一つ以上の槽、電源構成部品、計測構成部品、制御構成部品およびその他の構成部品を含むことがある。加工は、一つ以上の槽、および/または一つ以上の槽と連通する一つ以上の加工チャンバで起こってよい。プラズマシステムは、プラズマ、またはプラズマ中で発生する反応性気体化学種の供給源、あるいは加工ツール全体であってよい。
例を示すように、点火電極890を、槽810の表面または上流部分880の表面に配置することができる。上流部分880は、例えば気体吐出パイプラインと適合するフランジであってよい。上流部分880および槽810を、材料の単一片、例えば融解石英の単一片から作製することができる。
Claims (25)
- プラズマ装置であって、
誘電体材料で形成され、気体を閉じ込めるチャンネルを定める槽と、
前記槽に隣接するヒートシンクと、
前記槽と前記ヒートシンクとの間にありこれらと機械的に連通して配置される熱インターフェイスと、
前記槽と前記熱インターフェイスとの間に配置された紫外線遮光層と、
を含んでおり、前記熱インターフェイスは、熱的に誘起される寸法変化に応答して前記熱インターフェイスと前記ヒートシンクと前記槽との中の少なくとも一つの動きを調節する空間を前記ヒートシンクと前記槽との間に定めることを特徴とする装置。 - 請求項1記載の装置において、前記チャンネルはトロイダル形状を有することを特徴とする装置。
- 請求項1記載の装置において、前記ヒートシンクは前記槽を実質的に囲み少なくとも一つのバネ式機構によって相互に結合された少なくとも二つのセグメントを含むことを特徴とする装置。
- 請求項3記載の装置において、前記槽はトロイダル形状を有し、前記ヒートシンクは少なくとも二つのバネ式機構によって結合される少なくとも4つのセグメントを含み前記少なくとも4つのセグメントを前記槽に対して圧迫し前記槽と前記ヒートシンクとの間の熱的なミスマッチを調節することを特徴とする装置。
- 請求項3記載の装置において、前記ヒートシンクと前記少なくとも一つのバネ式機構とは自立冷却シェルを定めることを特徴とする装置。
- 請求項1記載の装置において、前記熱インターフェイスは、コンポジット材料と繊維材料と積層材料との中の少なくとも一つを含むことを特徴とする装置。
- 請求項1記載の装置において、前記熱インターフェイスは複数のカンチレバー型フィンガーを含むことを特徴とする装置。
- 請求項7記載の装置において、前記複数のカンチレバー型フィンガーは銅とベリリウムとの少なくとも一方を含むことを特徴とする装置。
- 請求項1記載の装置において、前記槽は前記誘電体材料からなることを特徴とする装置。
- 請求項1記載の装置において、前記熱インターフェイスは複数のコイルを含むことを特徴とする装置。
- 請求項1記載の装置において、前記熱インターフェイスは共形材料を含むことを特徴とする装置。
- 請求項11記載の装置において、前記共形材料は前記槽の外側表面積の25%から100%を覆うことを特徴とする装置。
- 請求項1記載の装置において、前記空間は前記槽から前記ヒートシンクへの伝熱のための気体で満たされ、前記空間の厚さは100マイクロメートル未満であることを特徴とする装置。
- 請求項1記載の装置において、前記空間の前記厚みは25マイクロメートル未満であることを特徴とする装置。
- 請求項1記載の装置において、前記空間の前記厚さは12マイクロメートル未満であることを特徴とする装置。
- 請求項1記載の装置において、前記熱インターフェイスは共形層とバネ層とを含み、前記共形層は、前記ヒートシンクと前記槽との一方と接触する第一の側と前記バネ層と接触する第二の側とを有することを特徴とする装置。
- 請求項1記載の装置において、前記槽の入口に隣接して配置され入口気体の流れの大部分を前記槽の内側表面に沿って導く開口部を定める気体入口シャワーヘッドを更に含むことを特徴とする装置。
- 請求項1記載の装置において、前記紫外線遮光層は、薄膜状の1枚の材料であることを特徴とする装置。
- 請求項1記載の装置において、前記紫外線遮光層は、前記槽に施される被覆であることを特徴とする装置。
- 請求項1記載の装置において、前記紫外線遮光層は、金属で形成されることを特徴とする装置。
- 請求項1記載の装置において、前記紫外線遮光層は、前記槽中のプラズマにおいて生成される紫外線放射が前記ヒートシンクと前記槽との間の空間に入り込むのを阻止することを特徴とする装置。
- 請求項1記載の装置において、前記紫外線遮光層は、前記槽の冷却を助けることを特徴とする装置。
- プラズマ装置であって、
導電性部分を含み気体を含むチャンネルを定める誘電体槽と、
前記槽に隣接するヒートシンクと、
前記槽と前記ヒートシンクとの間に配置され前記槽及び前記ヒートシンクと機械的に連通する熱インターフェースと、
前記槽と前記熱インターフェイスとの間に配置された紫外線遮光層と、
を含んでおり、前記熱インターフェイスは、熱的に誘起される寸法変化に応答して前記熱インターフェイスと前記ヒートシンクと前記槽との中の少なくとも1つの動きを調節する空間を前記ヒートシンクと前記槽との間に定めることを特徴とするプラズマ装置。 - プラズマ装置であって、
誘電体部分から構成され気体を含むチャンネルを定める誘電体槽と、
前記槽に隣接するヒートシンクと、
前記槽と前記ヒートシンクとの間に配置され前記槽及び前記ヒートシンクと機械的に連通する熱インターフェースと、
前記槽と前記熱インターフェイスとの間に配置された紫外線遮光層と、
を含んでおり、前記熱インターフェイスは、熱的に誘起される寸法変化に応答して前記熱インターフェイスと前記ヒートシンクと前記槽との中の少なくとも1つの動きを調節する空間を前記ヒートシンクと前記槽との間に定めることを特徴とするプラズマ装置。 - プラズマ装置であって、
誘電体部分から構成され気体を含むチャンネルを定める誘電体槽と、
前記槽に隣接するヒートシンクと、
前記槽と前記ヒートシンクとの間に配置され前記槽及び前記ヒートシンクと機械的に連通する熱インターフェースと、
前記槽と前記熱インターフェイスとの間に配置された光遮光層と、
を含んでおり、前記熱インターフェイスは、熱的に誘起される寸法変化に応答して前記熱インターフェイスと前記ヒートシンクと前記槽との中の少なくとも1つの動きを調節する空間を前記ヒートシンクと前記槽との間に定めることを特徴とするプラズマ装置。
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