JP2011009659A - 半導体パッケージ及び半導体パッケージの製造方法 - Google Patents
半導体パッケージ及び半導体パッケージの製造方法 Download PDFInfo
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- JP2011009659A JP2011009659A JP2009154168A JP2009154168A JP2011009659A JP 2011009659 A JP2011009659 A JP 2011009659A JP 2009154168 A JP2009154168 A JP 2009154168A JP 2009154168 A JP2009154168 A JP 2009154168A JP 2011009659 A JP2011009659 A JP 2011009659A
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Abstract
【解決手段】半導体チップ4とインターポーザ2とは、導電性のダイボンド材で接続されており、半導体チップ4とインターポーザ2との間には、前記ダイボンド材が存在する塗布領域9と、封止樹脂6が存在する領域10とが形成されている。これにより、前記半導体チップと前記インターポーザとの接着力との接着力を従来の半導体パッケージよりも高く出来るので、接着界面の剥離が生じない。従って、電気的特性及び長期信頼性を従来の半導体パッケージよりも向上することが可能となる。また、前記半導体チップの反りを防止することも可能となる。
【選択図】図1
Description
2 インターポーザ
3 インターポーザ接続端子
4 半導体チップ
4’ 裏面
5 Agペースト(銀ペースト、導電性ダイボンド材)
6 封止樹脂
7 ソルダーレジスト
9 塗布領域(第1の領域)
10 領域(第2の領域)
11 太陽電池モジュール
12 太陽電池セル
13 モジュール基板
14 実装電極
15 焼結材
16 接続部
17 p−層
18 アルミニウム
19 n+層
20 p+層
21 携帯電話
22 操作面
23 画面
24 支点
25 カメラ
26 バッテリー蓋
27 チップ搭載領域
28 直列接続用引き出し線
29 ワイヤボンディング用パッド
30 陰極用ビア
31 陽極用ビア
I 電流源
L 負荷
R1 電流等価抵抗
R2 直列抵抗
32 半導体パッケージ
33 インターポーザ
34 基板配線部
35 半導体チップ
36 裏面電極(電極)
36a 裏面電極部(第1の領域)
36b 裏面電極部(第2の領域)
36c オーバーラップ部
37 ダイボンド材
38 クリアランス
38a,38b 領域
39 封止樹脂
Claims (29)
- 半導体チップと、前記半導体チップを搭載するインターポーザと、前記インターポーザ上にあって前記半導体チップを覆う封止樹脂を備える半導体パッケージにおいて、
前記半導体チップと前記インターポーザとは、導電性のダイボンド材で接続されており、
前記半導体チップと前記インターポーザとの間には、前記ダイボンド材が存在する第1の領域と、前記封止樹脂が存在する第2の領域とが形成されていることを特徴とする半導体パッケージ。 - 前記半導体チップの、前記インターポーザに対向する面と反対側の面に、前記半導体チップと前記インターポーザとを電気的に接続するための接続部を備え、
前記インターポーザと前記接続部とはワイヤボンディングにより接続されており、
前記半導体チップにおける前記接続部が形成された部分の下部に、前記ダイボンド材が形成されていることを特徴とする請求項1に記載の半導体パッケージ。 - 前記封止樹脂は、光を透過するものであることを特徴とする請求項1または2に記載の半導体パッケージ。
- 前記封止樹脂は、エポキシ系の樹脂またはアクリル系の樹脂であることを特徴とする請求項3に記載の半導体パッケージ。
- 前記半導体チップは、太陽電池セルであることを特徴とする請求項1〜4のいずれか1項に記載の半導体パッケージ。
- 前記ダイボンド材は、銀ペーストであることを特徴とする請求項1〜5のいずれか1項に記載の半導体パッケージ。
- 前記太陽電池セルの厚みは、0.25ミリメートル以下であることを特徴とする請求項5に記載の半導体パッケージ。
- 前記太陽電池セル上の前記封止樹脂の厚みを前記太陽電池セルの厚みで除して求められる比は、1以上2以下であることを特徴とする請求項7に記載の半導体パッケージ。
- 前記第1の領域の面積を前記第2の領域の面積で除して求められる面積比は、1/4以上3/2以下であることを特徴とする請求項1〜8のいずれか1項に記載の半導体パッケージ。
- 半導体チップと、前記半導体チップを搭載するインターポーザと、前記インターポーザ上にあって前記半導体チップを覆う封止樹脂を備える半導体パッケージの製造方法において、
前記インターポーザの、前記半導体チップを搭載する領域の、第1の領域に、導電性のダイボンド材を供給する工程と、
前記ダイボンド材が供給された上に、前記半導体チップを搭載する工程と、
前記ダイボンド材を硬化し、前記インターポーザと前記半導体チップとを接続する工程と、
前記インターポーザ上に、トランスファーモールド法あるいはポッティング法あるいは印刷法により、前記封止樹脂を供給すると共に、前記半導体チップを搭載する領域の、前記ダイボンド材を供給しない第2の領域にも前記封止樹脂を供給する工程とを含むことを特徴とする、半導体パッケージの製造方法。 - 前記半導体チップの、前記インターポーザに対向する面と反対側の面に、前記半導体チップと前記インターポーザとを電気的に接続するための接続部を備え、
前記インターポーザと前記接続部とはワイヤボンディングにより接続されており、
前記半導体チップにおける前記接続部が形成された部分の下部付近で、前記ダイボンド材が前記半導体チップの短辺方向に広がって形成されていることを特徴とする請求項10に記載の半導体パッケージの製造方法。 - 前記封止樹脂は、光を透過するものであることを特徴とする請求項10または11に記載の半導体パッケージの製造方法。
- 前記封止樹脂は、エポキシ系の樹脂またはアクリル系の樹脂であることを特徴とする請求項12に記載の半導体パッケージの製造方法。
- 前記半導体チップは、太陽電池セルであることを特徴とする請求項11〜13のいずれか1項に記載の半導体パッケージの製造方法。
- 前記ダイボンド材は、銀ペーストであることを特徴とする請求項11〜14のいずれか1項に記載の半導体パッケージの製造方法。
- 前記太陽電池セルの厚みは、0.25ミリメートル以下であることを特徴とする請求項14に記載の半導体パッケージの製造方法。
- 前記太陽電池セル上の前記封止樹脂の厚みを前記太陽電池セルの厚みで除して求められる比は、1以上2以下であることを特徴とする請求項16に記載の半導体パッケージの製造方法。
- 前記第1の領域の面積を前記第2の領域の面積で除して求められる面積比は、1/4以上3/2以下であることを特徴とする請求項11〜17のいずれか1項に記載の半導体パッケージの製造方法。
- 半導体チップと、前記半導体チップを搭載するインターポーザと、前記インターポーザ上にあって、前記半導体チップを覆う封止樹脂を備える半導体パッケージにおいて、
前記半導体チップの、前記インターポーザに対向する面に形成された電極は、第1の金属を含む第1の領域と、第2の金属を含む第2の領域とからなり、
前記インターポーザと前記電極とは、前記第1の金属を含む導電性のダイボンド材で電気的に接続されていることを特徴とする半導体パッケージ。 - 前記第1の金属は銀であり、前記第2の金属はアルミニウムであることを特徴とする請求項19に記載の半導体パッケージ。
- 前記第1の金属は銀であり、前記第2の金属は焼成アルミであることを特徴とする請求項19に記載の半導体パッケージ。
- 前記第1の金属を含む導電性のダイボンド材は銀ペーストであることを特徴とする請求項20または21に記載の半導体パッケージ。
- 前記第1の領域は、前記第2の領域よりも小さいことを特徴とする請求項19〜22のいずれか1項に記載の半導体パッケージ。
- 前記第1の領域の一部と、前記第2の領域の一部とは、重なっていることを特徴とする請求項19〜23のいずれか1項に記載の半導体パッケージ。
- 前記第1の領域は、前記半導体チップの中央部に分布し、前記第2の領域は、前記半導体チップの周辺部に分布していることを特徴とする請求項19〜24のいずれか1項に記載の半導体パッケージ。
- 前記第1の領域は、前記半導体チップに点在し、前記第2の領域は、前記半導体チップの周辺部に分布していることを特徴とする請求項19〜24のいずれか1項に記載の半導体パッケージ。
- 前記ダイボンド材の80%以上が、前記第1の領域に存在することを特徴とする請求項19〜26のいずれか1項に記載の半導体パッケージ。
- 前記半導体チップと前記インターポーザとの間には、前記ダイボンド材が存在する領域と、前記封止樹脂が存在する領域とが形成されていることを特徴とする請求項19〜27のいずれか1項に記載の半導体パッケージ。
- 前記半導体チップは、太陽電池セルであることを特徴とする請求項19〜28のいずれか1項に記載の半導体パッケージ。
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US12/783,283 US20100294358A1 (en) | 2009-05-22 | 2010-05-19 | Semiconductor package |
CN2010101817327A CN101894825B (zh) | 2009-05-22 | 2010-05-20 | 半导体封装 |
KR1020100047442A KR101172587B1 (ko) | 2009-05-22 | 2010-05-20 | 반도체 패키지 |
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KR20110122805A (ko) | 2011-11-11 |
CN101894825B (zh) | 2013-05-08 |
KR101172587B1 (ko) | 2012-08-08 |
CN101894825A (zh) | 2010-11-24 |
US20100294358A1 (en) | 2010-11-25 |
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JP5154516B2 (ja) | 2013-02-27 |
KR101115930B1 (ko) | 2012-02-13 |
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