JP2010534612A - エピタキシャル方法およびこの方法によって成長させられたテンプレート - Google Patents
エピタキシャル方法およびこの方法によって成長させられたテンプレート Download PDFInfo
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Abstract
【選択図】 図3
Description
エネルギー的に有利な定められた範囲にあるInGaN組成が存在する。格子ひずみおよび格子欠陥をInGaN系内にもたらすことは、相分離する傾向のあるエネルギー的に有利でない組成において成長させられたより厚いInGaN層を発生させることがあり、すなわち、In原子およびGa原子は、層全体に均質に分布しない。非均質性は、材料のバンドギャップエネルギーの分散した摂動を発生させることがあり、すなわち、相分離した領域は、光吸収中心または光散乱源として不均一に動作することがあり、これは、窒化物デバイスの内部量子効率(IQE)の低下をもたらすことがある。IQE、すなわち、デバイス内へ注入された電子の数によって分割された活性層内において生成されるフォトンの数は、InGaN活性層におけるインジウム成分を増加させると急速に減少することが観測されており、そして、この現象は、材料の相分離に関連づけられている。IQEの減少は、例えば、III族窒化物材料から製造される長い波長の発光素子のような多くのインジウム成分を必要とする用途にきわめて密接に関係する。
R=(A−AS)/(A1−AS)×100%
を考えることによって定量化されてもよく、ここで、aは、ひずみのある層の測定された面内格子パラメータであり、a1は、ひずみのある層に対するひずみのない面内格子パラメータであり、asは、基板に対する面内格子パラメータである。完全に緩和した材料、すなわち、材料の格子パラメータがそれらの材料のひずみのない値(a=a1)にまで緩和した材料の場合、Rは、1(または、100%)となる。ひずみ緩和をまったく経験していない材料、すなわち、欠陥形成に対する臨界膜厚に到達する前の材料のような、材料の格子パラメータが基板の格子パラメータに等しい(a=as)ままの状態にある材料の場合、R=0(または、0%)である。
Claims (18)
- 半導体材料(層材料)を備える層を製造するための方法であって、
複数のアイランドを備えたテンプレート構造を設けるステップであり、前記アイランドが、実質的に不規則な空間的配置を有し、1つまたはそれ以上の選択された結晶特性を備えた上部を有し、かつ、前記層材料がその上に優先的に核形成および成長する材料(アイランド材料)を備える、前記テンプレート構造を設けるステップと、
前記アイランド上における核形成を優先し、その後に、前記アイランドから横方向へのエピタキシャルラテラル成長(ELO)を優先し、その後に、前記アイランドの前記選択された結晶特性の1つまたはそれ以上を継承する実質的に連続的な最終半導体層を形成するための融合を優先するように選択された条件下において、前記層材料を前記テンプレート構造上において成長させるステップと、
を備える、方法。 - 前記アイランドが、前記最終層が実質的に単結晶であるような空間的密度を有する、請求項1に記載の方法。
- 前記層材料が、元素半導体材料、または、合金半導体材料、または、II−VI族化合物半導体材料、または、III−V族化合物半導体材料、または、それらを組み合わせたものからなる、請求項1に記載の方法。
- 前記選択された結晶特性が、小さい密度の結晶欠陥、選択された結晶極性、小さい結晶ひずみのうちの1つまたはそれ以上を備える、請求項1に記載の方法。
- 前記最終半導体層内に脆弱帯を形成するステップと、
前記最終半導体層の一部分を前記脆弱帯において切り離すためにエネルギーを加えるステップと、
によって、前記最終半導体層の一部分を切り離すステップをさらに備える、請求項1に記載の方法。 - 前記切り離された層が、実質的に単一の結晶極性を有する、請求項5に記載の方法。
- 前記層材料が、III族窒化物材料からなり、前記アイランド材料が、同じまたは異なるIII族窒化物材料を備え、
前記アイランド材料の核形成を促進する表面を有するベース基板を設けるステップと、
分離したアイランドを実質的に不規則な空間的配置で形成し、かつ、上部が1つまたはそれ以上の選択された結晶特性を有するように選択された条件下において、前記ベース基板上において前記アイランド材料を成長させるステップと、
をさらに備える、請求項1に記載の方法。 - 前記アイランドが、前記ベース基板において発生する複数の転位が横方向に曲がりかつ前記アイランドの横方向ファセットにおいて終端するように選択されたさらなる条件下において成長させられる、請求項7に記載の方法。
- 前記層材料が、GaNからなり、前記選択された結晶特性が、約108/cm2またはそれよりも小さい欠陥または転位の表面密度、少なくとも5%である格子ひずみ緩和の百分率、および、+c(Ga面)方位または−c(N面)方位の中の1つとなるように選択された結晶極性の中の1つまたはそれ以上を備える、請求項7に記載の方法。
- 前記アイランドが、前記層材料の核形成および成長を相対的に妨げる結晶面を提供する横方向ファセットを有するように、かつ前記層材料の核形成および成長を相対的に助長する結晶面を提供する上面を有するように選択されたさらなる条件下において成長させられる、請求項7に記載の方法。
- 前記層材料が、最初に、前記アイランドの上部から前記層材料のより垂直方向の成長を優先し、次に、より垂直方向に成長する前記層材料から前記層材料のより横方向の成長を優先するようにさらに選択された条件下において成長させられる、請求項7に記載の方法。
- 前記層材料が、他の融合するアイランド間に存在する複数のボイド領域の形成を優先するようにさらに選択された条件下において成長させられ、前記ボイド領域が、エネルギーを加えることによって前記最終層の一部分を前記ボイド領域において切り離すことができるような間隔を置いて配置されかつ寸法付けられる、請求項7に記載の方法。
- 前記層材料を成長させるステップの前に、大部分の前記アイランドの上部がマスク材料から暴露されるように前記マスク材料を前記テンプレート構造上に堆積するステップをさらに備え、前記マスク材料が、前記マスク材料上と比較して前記アイランド上において前記層材料が優先的に核形成および成長するように選択される、請求項1に記載の方法。
- 前記マスク材料が、窒化ケイ素、または、酸化ケイ素、または、それらの混合物からなる、請求項13に記載の方法。
- 前記マスク材料が、前記アイランドの側面ファセットの大部分および前記アイランドによって被覆されない基板部分の大部分は前記マスク材料によって実質的に被覆されるが、前記アイランドの前記上部の大部分は実質的に前記マスク材料がないままであるように堆積される、請求項13に記載の方法。
- 前記マスク材料が、前記アイランドの大部分および前記アイランドによって被覆されない基板部分の大部分は前記マスク材料によって実質的に被覆されるように堆積され、前記アイランドの少なくとも大部分の前記上部が再び暴露されるようにマスク材料を十分に除去するステップをさらに備える、請求項13に記載の方法。
- 前記残ったマスク材料を除去するステップが、化学的機械ポリシングするステップをさらに備える、請求項16に記載の方法。
- 請求項1から請求項17までのいずれかに記載の方法に基づいて製造された半導体材料を備える、層。
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KR101374090B1 (ko) | 2014-03-17 |
WO2009015350A1 (en) | 2009-01-29 |
US8574968B2 (en) | 2013-11-05 |
CN101743618A (zh) | 2010-06-16 |
JP5903714B2 (ja) | 2016-04-13 |
EP2171748A1 (en) | 2010-04-07 |
US20090098343A1 (en) | 2009-04-16 |
KR20100045443A (ko) | 2010-05-03 |
CN101743618B (zh) | 2012-11-21 |
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