JP2010212337A - 光電変換素子、及び太陽電池 - Google Patents
光電変換素子、及び太陽電池 Download PDFInfo
- Publication number
- JP2010212337A JP2010212337A JP2009054745A JP2009054745A JP2010212337A JP 2010212337 A JP2010212337 A JP 2010212337A JP 2009054745 A JP2009054745 A JP 2009054745A JP 2009054745 A JP2009054745 A JP 2009054745A JP 2010212337 A JP2010212337 A JP 2010212337A
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- Prior art keywords
- photoelectric conversion
- layer
- metal
- earth
- alkali
- Prior art date
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- Granted
Links
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- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052717 sulfur Inorganic materials 0.000 claims description 6
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical group [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 claims description 4
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 claims description 4
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- 238000005240 physical vapour deposition Methods 0.000 description 3
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- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
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- 229910017604 nitric acid Inorganic materials 0.000 description 2
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- AVFBYUADVDVJQL-UHFFFAOYSA-N phosphoric acid;trioxotungsten;hydrate Chemical compound O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.OP(O)(O)=O AVFBYUADVDVJQL-UHFFFAOYSA-N 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
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- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
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- 235000015393 sodium molybdate Nutrition 0.000 description 2
- TVXXNOYZHKPKGW-UHFFFAOYSA-N sodium molybdate (anhydrous) Chemical compound [Na+].[Na+].[O-][Mo]([O-])(=O)=O TVXXNOYZHKPKGW-UHFFFAOYSA-N 0.000 description 2
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- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
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- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
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- 230000002378 acidificating effect Effects 0.000 description 1
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- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical class [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
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- 159000000007 calcium salts Chemical class 0.000 description 1
- JGIATAMCQXIDNZ-UHFFFAOYSA-N calcium sulfide Chemical class [Ca]=S JGIATAMCQXIDNZ-UHFFFAOYSA-N 0.000 description 1
- QDVBBRPDXBHZFM-UHFFFAOYSA-N calcium;selenium(2-) Chemical class [Ca+2].[Se-2] QDVBBRPDXBHZFM-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
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- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
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- VZZSRKCQPCSMRS-UHFFFAOYSA-N dipotassium;selenium(2-) Chemical compound [K+].[K+].[Se-2] VZZSRKCQPCSMRS-UHFFFAOYSA-N 0.000 description 1
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- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
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- QENHCSSJTJWZAL-UHFFFAOYSA-N magnesium sulfide Chemical class [Mg+2].[S-2] QENHCSSJTJWZAL-UHFFFAOYSA-N 0.000 description 1
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- 150000002736 metal compounds Chemical class 0.000 description 1
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- 239000011733 molybdenum Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
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- 230000001443 photoexcitation Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000011698 potassium fluoride Substances 0.000 description 1
- 235000003270 potassium fluoride Nutrition 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- DPLVEEXVKBWGHE-UHFFFAOYSA-N potassium sulfide Chemical compound [S-2].[K+].[K+] DPLVEEXVKBWGHE-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
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- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 1
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- 229940065287 selenium compound Drugs 0.000 description 1
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- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000011775 sodium fluoride Substances 0.000 description 1
- 235000013024 sodium fluoride Nutrition 0.000 description 1
- VPQBLCVGUWPDHV-UHFFFAOYSA-N sodium selenide Chemical compound [Na+].[Na+].[Se-2] VPQBLCVGUWPDHV-UHFFFAOYSA-N 0.000 description 1
- 229910052979 sodium sulfide Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical compound NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910021654 trace metal Inorganic materials 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- WQEVDHBJGNOKKO-UHFFFAOYSA-K vanadic acid Chemical compound O[V](O)(O)=O WQEVDHBJGNOKKO-UHFFFAOYSA-K 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02614—Transformation of metal, e.g. oxidation, nitridation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
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Abstract
【解決手段】光電変換素子1は、Alを主成分とする金属基材の少なくとも一方の面側に陽極酸化膜を有する基板10上に、Moを主成分とする下部電極20と光電変換半導体層30と上部電極50との積層構造を有する素子であり、下部電極20に接して、若しくは下部電極20の内部に、アルカリ(土類)金属を含み、光電変換半導体層30の成膜時に該層にアルカリ(土類)金属を供給する少なくとも1層のアルカリ(土類)金属供給層60を備え、かつ、アルカリ(土類)金属供給層60よりも基板10側に、下部電極20及び/又はアルカリ(土類)金属供給層60に接して、若しくは下部電極20の内部に、アルカリ(土類)金属供給層60に含まれるアルカリ(土類)金属の基板10側への拡散を抑制する少なくとも1層の導電性の拡散防止層70を備えたものである。
【選択図】図1A
Description
従来、太陽電池においては、バルクの単結晶Si又は多結晶Si、あるいは薄膜のアモルファスSiを用いたSi系太陽電池が主流であったが、Siに依存しない化合物半導体系太陽電池の研究開発がなされている。化合物半導体系太陽電池としては、GaAs系等のバルク系と、Ib族元素とIIIb族元素とVIb族元素とからなるCIS(Cu−In−Se)系あるいはCIGS(Cu−In−Ga−Se)系等の薄膜系とが知られている。CIS系あるいはCIGS系は、光吸収率が高く、高エネルギー変換効率が報告されている。
好ましい拡散防止層としては、TiN,Al2O3,SiO2,Si3N4,ZrO2,又はTiO2から選択される絶縁性の拡散防止層(請求項8)、及びTiN,Pt,又はPdから選択される導電性の拡散防止層(請求項9)が挙げられている。
特許文献1に記載の陽極酸化基板を用いる光電変換素子においては、アルカリ(土類)金属の拡散を抑制する拡散防止層を設けること自体、過去に報告されていない。
本発明はまた、上記光電変換素子において、素子の歪が緩和され、マイクロクラック・膜剥離等が抑制された光電変換素子を提供することを目的とするものである。
Alを主成分とする金属基材の少なくとも一方の面側に陽極酸化膜を有する陽極酸化基板上に、Moを主成分とする下部電極と光吸収により電流を発生する光電変換半導体層と上部電極との積層構造を有する光電変換素子において、
前記下部電極に接して、若しくは前記下部電極の内部に、1種又は2種以上のアルカリ金属及び/又はアルカリ土類金属を含み、前記光電変換半導体層の成膜時に該層にアルカリ金属及び/又はアルカリ土類金属を供給する少なくとも1層のアルカリ(土類)金属供給層を備え、かつ、
前記アルカリ(土類)金属供給層よりも前記陽極酸化基板側に、前記下部電極及び/又は前記アルカリ(土類)金属供給層に接して、若しくは前記下部電極の内部に、前記アルカリ(土類)金属供給層に含まれる前記アルカリ金属及び/又はアルカリ土類金属の前記陽極酸化基板側への拡散を抑制する少なくとも1層の導電性の拡散防止層を備えたことを特徴とするものである。
前記光電変換半導体層の主成分は、Ib族元素とIIIb族元素とVIb族元素とからなる少なくとも1種の化合物半導体であることが好ましい。
Cu及びAgからなる群より選択された少なくとも1種のIb族元素と、
Al,Ga及びInからなる群より選択された少なくとも1種のIIIb族元素と、
S,Se,及びTeからなる群から選択された少なくとも1種のVIb族元素とからなる少なくとも1種の化合物半導体であることが好ましい。
前記アルカリ(土類)金属供給層はポリ酸(ここで言うポリ酸にはヘテロポリ酸も含まれる)のアルカリ金属塩及び/又はアルカリ土類金属塩を含むことが好ましい。
前記ポリ酸としては、モリブデン酸及び/又はタングステン酸が挙げられる。
前記拡散防止層の主成分はCr及び/又はTiであることが好ましい。
本発明によれば、上記光電変換素子において、素子の歪が緩和され、マイクロクラック・膜剥離等が抑制された光電変換素子を提供することができる。
図面を参照して、本発明に係る一実施形態の光電変換素子の構造について説明する。図1Aは光電変換素子の短手方向の模式断面図、図1Bは光電変換素子の長手方向の模式断面図、図2は陽極酸化基板の構成を示す模式断面図、図3は陽極酸化基板の製造方法を示す斜視図である。視認しやすくするため、図中、各構成要素の縮尺等は実際のものとは適宜異ならせてある。
本実施形態において、陽極酸化基板10はAlを主成分とする金属基材11の少なくとも一方の面側を陽極酸化して得られた基板である。陽極酸化基板10は、図2の左図に示すように、金属基材11の両面側に陽極酸化膜12が形成されたものでもよいし、図2の右図に示すように、金属基材11の片面側に陽極酸化膜12が形成されたものでもよい。陽極酸化膜12はAl2O3を主成分とする膜である。
光電変換層30は光吸収により電流を発生する層である。その主成分は特に制限されず、少なくとも1種のカルコパイライト構造の化合物半導体であることが好ましい。光電変換層30の主成分は、Ib族元素とIIIb族元素とVIb族元素とからなる少なくとも1種の化合物半導体であることが好ましい。
光電変換層30の主成分は、
Cu及びAgからなる群より選択された少なくとも1種のIb族元素と、
Al,Ga及びInからなる群より選択された少なくとも1種のIIIb族元素と、
S,Se,及びTeからなる群から選択された少なくとも1種のVIb族元素とからなる少なくとも1種の化合物半導体であることが好ましい。
CuAlS2,CuGaS2,CuInS2,
CuAlSe2,CuGaSe2,CuInSe2(CIS),
AgAlS2,AgGaS2,AgInS2,
AgAlSe2,AgGaSe2,AgInSe2,
AgAlTe2,AgGaTe2,AgInTe2,
Cu(In1−xGax)Se2(CIGS),Cu(In1−xAlx)Se2,Cu(In1−xGax)(S,Se)2,
Ag(In1−xGax)Se2,及びAg(In1−xGax)(S,Se)2等が挙げられる。
3段階法(J.R.Tuttle et.al,Mat.Res.Soc.Symp.Proc.,Vol.426(1996)p.143.等)と、
ECグループの同時蒸着法(L.Stolt et al.:Proc.13th ECPVSEC(1995,Nice)1451.等)とが知られている。
前者の3段階法は、高真空中で最初にIn、Ga、及びSeを基板温度300℃で同時蒸着し、次に500〜560℃に昇温してCu及びSeを同時蒸着後、In、Ga、及びSeをさらに同時蒸着する方法である。後者のECグループの同時蒸着法は、蒸着初期にCu過剰CIGS、後半でIn過剰CIGSを蒸着する方法である。
a)イオン化したGaを使用する方法(H.Miyazaki, et.al, phys.stat.sol.(a),Vol.203(2006)p.2603.等)、
b)クラッキングしたSeを使用する方法(第68回応用物理学会学術講演会 講演予稿集(2007秋 北海道工業大学)7P−L−6等)、
c)ラジカル化したSeを用いる方法(第54回応用物理学会学術講演会 講演予稿集(2007春 青山学院大学)29P−ZW−10等)、
d)光励起プロセスを利用した方法(第54回応用物理学会学術講演会 講演予稿集(2007春 青山学院大学)29P−ZW−14等)等が知られている。
CuInSe2多結晶をターゲットとした方法、
Cu2SeとIn2Se3をターゲットとし、スパッタガスにH2Se/Ar混合ガスを用いる2源スパッタ法(J.H.Ermer,et.al, Proc.18th IEEE Photovoltaic Specialists Conf.(1985)1655-1658.等)、
Cuターゲットと、Inターゲットと、SeまたはCuSeターゲットとをArガス中でスパッタする3源スパッタ法(T.Nakada,et.al, Jpn.J.Appl.Phys.32(1993)L1169-L1172.等)が知られている。
下部電極20及び上部電極50はいずれも導電性材料からなる。光入射側の上部電極50は透光性を有する必要がある。
本実施形態において、下部電極20はMoを主成分とする電極である。下部電極20の厚みは特に制限されず、0.3〜1.0μmが好ましい。
上部電極50の主成分としては特に制限されず、ZnO,ITO(インジウム錫酸化物),SnO2,及びこれらの組合わせが好ましい。上部電極50の厚みは特に制限されず、0.6〜1.0μmが好ましい。
下部電極20及び/又は上部電極50は、単層構造でもよいし、2層構造等の積層構造もよい。
下部電極20及び上部電極50の成膜方法は特に制限されず、電子ビーム蒸着法やスパッタリング法等の気相成膜法が挙げられる。
好ましい組成の組合わせとしては例えば、Mo下部電極/CdSバッファ層/CIGS光電変換層/ZnO上部電極が挙げられる。
アルカリ(土類)金属供給層60は、1種又は2種以上のアルカリ金属及び/又はアルカリ土類金属を含み、光電変換層30の成膜時に該層にアルカリ金属及び/又はアルカリ土類金属を供給するために設けられた層である。本実施形態において、アルカリ(土類)金属供給層60は導電性を有する材料からなり、下部電極20の直上に下部電極20に接して設けられている。アルカリ(土類)金属供給層60は絶縁性を有する材料により構成されてもよい。アルカリ(土類)金属供給層60は単層構造でもよいし、組成の異なる積層構造でもよい。
アルカリ金属化合物としては、フッ化ナトリウム、フッ化カリウム、硫化ナトリウム、硫化カリウム、セレン化ナトリウム、セレン化カリウム、塩化ナトリウム、及び塩化カリウム等の無機塩;ポリ酸等の有機酸のナトリウム又はカリウム塩等の有機塩が挙げられる。
アルカリ土類金属化合物としては、フッ化カルシウム、フッ化マグネシウム、硫化カルシウム、硫化マグネシウム、及びセレン化カルシウムの無機塩;ポリ酸等の有機酸のマグネシウム又はカルシウム塩等の有機塩が挙げられる。
本明細書において、「ポリ酸」にはヘテロポリ酸が含まれるものとする。
ポリオキソ酸としては、タングストリン酸、タングストケイ酸、モリブドリン酸、モリブドケイ酸、バナジン酸、タングステン酸、低原子価ニオブ酸、低原子価タンタル酸、トンネル構造を有するチタン酸、及びモリブデン酸等が挙げられる。
アルカリ(土類)金属供給層60の厚みは特に制限されず、光電変換層30に充分な量のアルカリ(土類)金属を供給できるレベルであればよい。アルカリ(土類)金属供給層60の厚みは100〜200nmが好ましい。
拡散防止層70は、アルカリ(土類)金属供給層60に含まれるアルカリ(土類)金属の陽極酸化基板10側への拡散を抑制するために設けられた層である。本実施形態において、拡散防止層70は導電性を有する材料からなり、下部電極20の直下に下部電極20に接して設けられている。
酸化アルミニウムの線膨張係数は7.5×10−6/Kであるので、酸化アルミニウムと略同等の線膨張係数を有する材料とは、その±2.5×10−6/Kの範囲、すなわち5.0×10−6/K〜10.0×10−6/Kの線膨張係数を有する材料であると定義する。
拡散防止層70の主成分は、Cr(線膨張係数:8.8×10−6/K)及び/又はTi(線膨張係数:9.9×10−6/K)であることが好ましい。拡散防止層70はTi層とCr層との積層構造でもよい。
上記の線膨張係数は、「物理データ事典」(朝倉書店、編集:社団法人日本物理学会)に記載のデータである
拡散防止層70の厚みは特に制限されず、陽極酸化基板10側へのアルカリ(土類)金属の拡散を良好に防止できるレベルであればよい。拡散防止層70の厚みは20〜200nm程度が好ましい。
光電変換素子1は必要に応じて、上記で説明した以外の任意の層を備えることができる。例えば、陽極酸化基板10と下部電極20との間、及び/又は下部電極20と光電変換層30との間に、必要に応じて、層同士の密着性を高めるための密着層(緩衝層)を設けることができる。
本実施形態の光電変換素子1は陽極酸化基板10を用いた素子であるので、軽量かつフレキシブルであり、低コストで製造可能な素子である。
第1実施形態においては、単層のアルカリ(土類)金属供給層60を下部電極20の直上に設け、単層の拡散防止層70を下部電極20の直下に設ける構成としたが、アルカリ(土類)金属供給層60及び拡散防止層70の数と位置はかかる構成に限定されない。
基材としてAl合金1050材(Al純度99.5%、0.30mm厚に陽極酸化処理をして、基材の両面に陽極酸化膜を形成し、水洗処理及び乾燥処理を実施して、陽極酸化基板を得た。陽極酸化膜の厚みが9.0μm(そのうちバリア層の厚みが0.38μm)、微細孔の孔径が100nm前後の陽極酸化膜を形成した。
電解液:16℃の0.5Mシュウ酸水溶液中、直流電源、電圧40V。
次に、アルカリ(土類)金属供給層として、100nm厚のモリブデン酸ナトリウム層を形成した。水酸化ナトリウム水溶液にMoO3を溶解させた溶液をエチレングリコールと体積比1:1で混合し、これをスピンコート法により下部電極上に塗布し、70℃のホットプレート上でゆっくりと乾燥させた後、200℃で1時間熱処理することで、Na2Mo2O7,Na6Mo7O24,及びNa2Mo10O31を含む層を形成した。
その後、上記基板にAlグリッド電極を蒸着し、10mm×5mm四方の複数の素子に切断加工して、計20個の光電変換素子を作製した。
作製した光電変換素子について、Air Mass(AM)=1.5、100mW/cm2の擬似太陽光を用いて光電変換効率を評価した。20個のサンプルについて光電変換効率を測定し、その中での最高値に対して80%以上の光電変換効率のサンプルを合格品とし、それ以外のものを不合格品とした。合格品の光電変換効率は14〜16%であり、後記比較例1よりも高い光電変換効率が得られた。
拡散防止層をCr層とした以外は実施例1と同様にして、光電変換素子を得た。実施例1と同様に光電変換効率を測定したところ、14〜16%であった。
拡散防止層を設けなかった以外は実施例1と同様にして、比較用の光電変換素子を得た。実施例1と同様に光電変換効率を測定したところ、10〜12%であった。
10 陽極酸化基板
11 金属基材
12 陽極酸化膜
20 下部電極
21 Mo層
30 光電変換層
40 バッファ層
50 上部電極
60 アルカリ(土類)金属供給層
70 拡散防止層
Claims (9)
- Alを主成分とする金属基材の少なくとも一方の面側に陽極酸化膜を有する陽極酸化基板上に、Moを主成分とする下部電極と光吸収により電流を発生する光電変換半導体層と上部電極との積層構造を有する光電変換素子において、
前記下部電極に接して、若しくは前記下部電極の内部に、1種又は2種以上のアルカリ金属及び/又はアルカリ土類金属を含み、前記光電変換半導体層の成膜時に該層にアルカリ金属及び/又はアルカリ土類金属を供給する少なくとも1層のアルカリ(土類)金属供給層を備え、かつ、
前記アルカリ(土類)金属供給層よりも前記陽極酸化基板側に、前記下部電極及び/又は前記アルカリ(土類)金属供給層に接して、若しくは前記下部電極の内部に、前記アルカリ(土類)金属供給層に含まれる前記アルカリ金属及び/又はアルカリ土類金属の前記陽極酸化基板側への拡散を抑制する少なくとも1層の導電性の拡散防止層を備えたことを特徴とする光電変換素子。 - 前記光電変換半導体層の主成分は、少なくとも1種のカルコパイライト構造の化合物半導体であることを特徴とする請求項1に記載の光電変換素子。
- 前記光電変換半導体層の主成分は、Ib族元素とIIIb族元素とVIb族元素とからなる少なくとも1種の化合物半導体であることを特徴とする請求項2に記載の光電変換素子。
- 前記光電変換半導体層の主成分は、
Cu及びAgからなる群より選択された少なくとも1種のIb族元素と、
Al,Ga及びInからなる群より選択された少なくとも1種のIIIb族元素と、
S,Se,及びTeからなる群から選択された少なくとも1種のVIb族元素とからなる少なくとも1種の化合物半導体であることを特徴とする請求項3に記載の光電変換素子。 - 前記アルカリ(土類)金属供給層はNaを含むことを特徴とする請求項1〜4のいずれかに記載の光電変換素子。
- 前記アルカリ(土類)金属供給層はポリ酸(ここで言うポリ酸にはヘテロポリ酸も含まれる)のアルカリ金属塩及び/又はアルカリ土類金属塩を含むことを特徴とする請求項1〜5のいずれかに記載の光電変換素子。
- 前記ポリ酸はモリブデン酸及び/又はタングステン酸であることを特徴とする請求項6に記載の光電変換素子。
- 前記拡散防止層の主成分はCr及び/又はTiであることを特徴とする請求項1〜7のいずれかに記載の光電変換素子。
- 請求項1〜8のいずれかに記載の光電変換素子を備えたことを特徴とする太陽電池。
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JP2010239129A (ja) * | 2009-03-10 | 2010-10-21 | Fujifilm Corp | 光電変換素子及び太陽電池、光電変換素子の製造方法 |
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Families Citing this family (21)
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DE102014223485A1 (de) * | 2014-11-18 | 2016-05-19 | Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg | Schichtaufbau für eine Dünnschichtsolarzelle und Herstellungsverfahren |
EP3414780B1 (en) | 2016-02-11 | 2020-12-02 | Flisom AG | Fabricating thin-film optoelectronic devices with added rubidium and/or cesium |
EP3414779B1 (en) | 2016-02-11 | 2021-01-13 | Flisom AG | Self-assembly patterning for fabricating thin-film devices |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003007386A1 (en) * | 2001-07-13 | 2003-01-23 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
JP2003529938A (ja) * | 2000-03-30 | 2003-10-07 | ハーン−マイトネル−インスチツート ベルリン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 統合されて直列接続された薄膜ソーラーセルを有するソーラーモジュールの製造方法および該方法により、特にコンセントレータ−モジュールを使用して製造されるソーラーモジュール |
JP2006210424A (ja) * | 2005-01-25 | 2006-08-10 | Honda Motor Co Ltd | カルコパイライト型薄膜太陽電池の製造方法 |
JP2007266626A (ja) * | 1994-12-01 | 2007-10-11 | Shell Solar Gmbh | 基板上に太陽電池を製造する方法及びカルコパイライト吸収層を有する太陽電池 |
JP2009505430A (ja) * | 2005-08-16 | 2009-02-05 | ナノソーラー インコーポレイテッド | 伝導性障壁層と箔担体を有する光電池装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4734168A (en) * | 1983-08-08 | 1988-03-29 | Texas A & M University | Method of making n-silicon electrodes |
US4798660A (en) * | 1985-07-16 | 1989-01-17 | Atlantic Richfield Company | Method for forming Cu In Se2 films |
SE508676C2 (sv) * | 1994-10-21 | 1998-10-26 | Nordic Solar Energy Ab | Förfarande för framställning av tunnfilmssolceller |
JPH0974065A (ja) | 1995-09-06 | 1997-03-18 | Matsushita Electric Ind Co Ltd | 化合物半導体薄膜の形成法 |
JP3519543B2 (ja) | 1995-06-08 | 2004-04-19 | 松下電器産業株式会社 | 半導体薄膜形成用前駆体及び半導体薄膜の製造方法 |
JPH0974213A (ja) | 1995-09-06 | 1997-03-18 | Matsushita Electric Ind Co Ltd | 化合物半導体薄膜の形成法 |
JP2922466B2 (ja) | 1996-08-29 | 1999-07-26 | 時夫 中田 | 薄膜太陽電池 |
JP2922465B2 (ja) | 1996-08-29 | 1999-07-26 | 時夫 中田 | 薄膜太陽電池の製造方法 |
JPH10125941A (ja) | 1996-10-23 | 1998-05-15 | Asahi Chem Ind Co Ltd | カルコパイライト型太陽電池 |
JP2000349320A (ja) | 1999-06-08 | 2000-12-15 | Kobe Steel Ltd | 耐電圧特性に優れたAl合金製絶縁材料およびその製造方法 |
US7053294B2 (en) * | 2001-07-13 | 2006-05-30 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
WO2003069684A1 (fr) * | 2002-02-14 | 2003-08-21 | Honda Giken Kogyo Kabushiki Kaisha | Procédé de formation de couche absorbant la lumière |
JP4110515B2 (ja) | 2002-04-18 | 2008-07-02 | 本田技研工業株式会社 | 薄膜太陽電池およびその製造方法 |
JP2004079858A (ja) | 2002-08-20 | 2004-03-11 | Matsushita Electric Ind Co Ltd | 太陽電池およびその製造方法 |
JP2004158556A (ja) | 2002-11-05 | 2004-06-03 | Matsushita Electric Ind Co Ltd | 太陽電池 |
WO2004090995A1 (ja) * | 2003-04-09 | 2004-10-21 | Matsushita Electric Industrial Co., Ltd. | 太陽電池 |
JP2005086167A (ja) | 2003-09-11 | 2005-03-31 | Matsushita Electric Ind Co Ltd | 太陽電池およびその製造方法 |
US20050056863A1 (en) * | 2003-09-17 | 2005-03-17 | Matsushita Electric Industrial Co., Ltd. | Semiconductor film, method for manufacturing the semiconductor film, solar cell using the semiconductor film and method for manufacturing the solar cell |
-
2009
- 2009-03-09 JP JP2009054745A patent/JP5229901B2/ja not_active Expired - Fee Related
-
2010
- 2010-03-05 US US12/718,611 patent/US8415557B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007266626A (ja) * | 1994-12-01 | 2007-10-11 | Shell Solar Gmbh | 基板上に太陽電池を製造する方法及びカルコパイライト吸収層を有する太陽電池 |
JP2003529938A (ja) * | 2000-03-30 | 2003-10-07 | ハーン−マイトネル−インスチツート ベルリン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 統合されて直列接続された薄膜ソーラーセルを有するソーラーモジュールの製造方法および該方法により、特にコンセントレータ−モジュールを使用して製造されるソーラーモジュール |
WO2003007386A1 (en) * | 2001-07-13 | 2003-01-23 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
JP2006210424A (ja) * | 2005-01-25 | 2006-08-10 | Honda Motor Co Ltd | カルコパイライト型薄膜太陽電池の製造方法 |
JP2009505430A (ja) * | 2005-08-16 | 2009-02-05 | ナノソーラー インコーポレイテッド | 伝導性障壁層と箔担体を有する光電池装置 |
Non-Patent Citations (1)
Title |
---|
JPN6012029926; Leena K. Sahoo, et al.: 'Implications of modified simplified hybrid process on CIGS devices and minimodules' Photovoltaic Specialists Conference, 2008. PVSC '08. 33rd IEEE , 200805, p.1-4 * |
Cited By (11)
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JP4629151B2 (ja) * | 2009-03-10 | 2011-02-09 | 富士フイルム株式会社 | 光電変換素子及び太陽電池、光電変換素子の製造方法 |
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KR101309933B1 (ko) * | 2011-12-06 | 2013-09-17 | 주식회사 포스코 | Ci(g)s 태양전지용 철-니켈 합금기판 제조방법 |
KR101309883B1 (ko) * | 2011-12-06 | 2013-09-17 | 주식회사 포스코 | CI(G)S 태양전지용 Fe-Cr 합금기판 제조방법 |
JP2015509288A (ja) * | 2012-01-19 | 2015-03-26 | ヌボサン,インコーポレイテッド | 光電池用保護コーティング |
US9024400B2 (en) | 2012-09-20 | 2015-05-05 | Seiko Epson Corporation | Photoelectric conversion element, method of manufacturing photoelectric conversion element, and electronic device |
US9379278B2 (en) | 2012-09-20 | 2016-06-28 | Seiko Epson Corporation | Photoelectric conversion element, method of manufacturing photoelectric conversion element, and electronic device |
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