JP5782768B2 - 光電変換装置およびその製造方法 - Google Patents
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- 238000006243 chemical reaction Methods 0.000 title claims description 66
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- 239000011241 protective layer Substances 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 35
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- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 13
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052951 chalcopyrite Inorganic materials 0.000 claims description 11
- 238000009832 plasma treatment Methods 0.000 claims description 7
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
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- 238000005229 chemical vapour deposition Methods 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
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- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
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- 238000002161 passivation Methods 0.000 description 1
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- 230000000149 penetrating effect Effects 0.000 description 1
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- 230000002265 prevention Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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Description
<光電変換装置100の構成>
図1は、本発明の第1実施形態に係る光電変換装置100の模式図である。光電変換装置100は、例えば認証処理のために生体の静脈像を撮像する撮像装置(静脈センサー)であり、図1に示すように基板10と複数の単位素子Uとを具備する。基板10は、ガラス基板等の板状部材である。複数の単位素子Uは、基板10の面上に行列状に配列される。
図3は、以上に説明した光電変換装置100の製造工程図である。最初の工程P1では、トランジスター12を含む回路層20が基板10の面上に形成される。回路層20の形成には公知の技術が任意に採用される。
本発明の第2実施形態を以下に説明する。第2実施形態では、第1実施形態の工程P4Aに代えて図5の工程P4Bが実行される。図5に示すように、工程P4Bでは、不活性のキャリアガス(例えば水素,ヘリウム,アルゴン)とIa族元素との混合ガスを基板10に噴射しながらプラズマを発生させるプラズマ処理により、工程P3で形成された基礎層36に対してIa族元素が拡散される。混合ガスにおけるIa族元素の濃度は、供給層34に対するIa族元素の拡散濃度が、第1実施形態と同様に1×1010〜1×1016cm-2程度(更に好適には1×1012cm-2)となるように選定される。
以上に例示した各形態は多様に変形され得る。具体的な変形の態様を以下に例示する。以下の例示から任意に選択された2以上の態様を適宜に併合することも可能である。
保護層32の材料は窒化珪素(SiNx)に限定されない。すなわち、Ia族元素の拡散を防止し得る性質の任意の材料を保護層32の形成に採用することが可能である。同様に、供給層34の材料は酸化珪素(SiOx)に限定されない。例えば、特許文献2に開示されたNa3AlF6等のアルカリ化合物で供給層34を形成することも可能である。ただし、製造工程での取扱いの容易性という前述の観点からすると、供給層34の材料には酸化珪素が好適である。また、保護層32を窒化珪素で形成した場合には、保護層32との密着性という前述の観点からも、供給層34の材料には酸化珪素が格別に好適である。
光電変換装置100の各層(回路層20,保護層32,供給層34,受光層40)の層間には適宜に他層が介挿される。例えば、保護層32と供給層34との間に他層を介在させることも可能である。ただし、保護層32を窒化珪素で形成するとともに供給層34を酸化珪素で形成する構成では、保護層32と供給層34との密着性という前述の観点から、各形態での例示の通り、保護層32と供給層34とを連続的に形成して相互に接触させた構成が好適である。
前述の各形態では、トランジスター12のゲート電極53に光電変換素子14(第1電極41)を接続したが、光電変換素子14の接続先は適宜に変更される。例えば、トランジスター12の第1電極54や第2電極55に光電変換素子14を接続した構成も採用され得る。もっとも、回路層20に形成される半導体素子はトランジスター12に限定されない。例えばダイオード等の半導体素子を回路層20に形成した構成にも本発明は適用される。また、前述の各形態では、基板10の表面に形成されたトランジスター12(薄膜トランジスター)を例示したが、半導体基板を基板10として利用した構成では、トランジスター12を基板10に直接に形成することが可能である。
Claims (4)
- 半導体素子を含む回路層と、
カルコパイライト型半導体で形成された光電変換層と、
前記回路層と前記光電変換層との間に酸化珪素で200nm〜2000nmの膜厚に形成され、1×10 10 cm -2 〜1×10 16 cm -2 の拡散濃度でIa族元素を含む供給層と、
前記供給層と前記回路層との間に前記供給層と接触するように窒化珪素で30nm〜1000nmの膜厚に形成されて前記回路層に対する前記Ia族元素の拡散を防止する保護層と
を具備する光電変換装置。 - 半導体素子を含む回路層を基板上に形成する工程と、
前記回路層に対するIa族元素の拡散を防止する保護層を前記回路層上に窒化珪素で30nm〜1000nmの膜厚に形成する工程と、
1×10 10 cm -2 〜1×10 16 cm -2 の拡散濃度でIa族元素を含む供給層を前記保護層上に酸化珪素で200nm〜2000nmの膜厚に形成する工程と、
カルコパイライト型半導体の光電変換層を前記供給層上に形成する工程と
を含む光電変換装置の製造方法。 - 前記供給層を形成する工程は、
前記保護層上に基礎層を形成する工程と、
前記Ia族元素が付加されたシャワープレートを介して供給される不活性ガスを利用したプラズマ処理で前記基礎層に前記Ia族元素を拡散させる工程とを含む
請求項2の光電変換装置の製造方法。 - 前記供給層を形成する工程は、
前記保護層上に基礎層を形成する工程と、
前記Ia族元素と不活性ガスとを含む混合ガスを利用したプラズマ処理で前記基礎層に前記Ia族元素を拡散させる工程とを含む
請求項2の光電変換装置の製造方法。
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JP2011063894A JP5782768B2 (ja) | 2011-03-23 | 2011-03-23 | 光電変換装置およびその製造方法 |
US13/422,406 US8883537B2 (en) | 2011-03-23 | 2012-03-16 | Photoelectric conversion device and method for manufacturing the same |
US14/492,619 US9006017B2 (en) | 2011-03-23 | 2014-09-22 | Photoelectric conversion device and method for manufacturing the same |
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JP2017005423A (ja) | 2015-06-08 | 2017-01-05 | セイコーエプソン株式会社 | 撮像装置および電子機器 |
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JP2005268479A (ja) * | 2004-03-18 | 2005-09-29 | Fuji Film Microdevices Co Ltd | 光電変換膜積層型固体撮像装置 |
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JP2009259872A (ja) | 2008-04-11 | 2009-11-05 | Rohm Co Ltd | 光電変換装置およびその製造方法、および固体撮像装置 |
JP5470633B2 (ja) * | 2008-12-11 | 2014-04-16 | 国立大学法人東北大学 | 光電変換素子及び太陽電池 |
JP5229901B2 (ja) * | 2009-03-09 | 2013-07-03 | 富士フイルム株式会社 | 光電変換素子、及び太陽電池 |
JP4629151B2 (ja) * | 2009-03-10 | 2011-02-09 | 富士フイルム株式会社 | 光電変換素子及び太陽電池、光電変換素子の製造方法 |
JP5419139B2 (ja) * | 2009-03-29 | 2014-02-19 | 国立大学法人豊橋技術科学大学 | 半導体集積装置およびその作製方法 |
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US20150011041A1 (en) | 2015-01-08 |
US9006017B2 (en) | 2015-04-14 |
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